25 results about "Scanning probe microscopy" patented technology

The present invention relates to a method for processing three-dimensional measurement data from a scanning probe microscopy system to provide three-dimensional topographic image data, as well as a method for performing scanning probe microscopy, a scanning probe microscopy system, a computer-implemented method, and a computer program product. The method comprises receiving 3D measurement data acquired by the SPM system into a processing device, the 3D measurement data typically mapping the topography of a structure provided by the substrate. The method further comprises digitally constructing model image data using shape contour data of the shape, and a regression operation to fit the model image data to the 3D measurement data. This results in a composite model image of the 3D measurement data that can be used as a topographic image.

A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

This invention provides a scanning probe microscope, including a laser, a probe, a position-sensitive detector, a camera, and a liquid lens. The liquid lens is disposed in the optical path between the camera and the probe. When the liquid lens is in a first state, the camera images the probe arm at least through the liquid lens; when the liquid lens is in a second state, the camera images the object under test at least through the liquid lens. This invention integrates the observation optical paths of the probe and the object under test into a single optical element, greatly reducing the size of the device. It enables switching between imaging of the probe arm and the surface under test without moving the optical element, reducing interference with the imaging effect caused by the movement of the optical element. It can quickly switch the imaging object, improving efficiency. The focal length of the liquid lens can be continuously varied, facilitating matching different surfaces under test and probe arm positions, thereby increasing the applicability of the scanning probe microscope.

This application relates to the field of scanning probe microscopy technology and discloses an optical tracking system, including: a scanner with a target position; and an optical path structure including a first reflecting mirror disposed at a preset position on the scanner. A first distance from the target position to a fixed end of the scanner and a second distance from the target position to the spot position of the first reflecting mirror satisfy a preset relationship, ensuring that the reflected light from the first reflecting mirror passes through the target position. When the scanner moves, the first reflecting mirror and the target position can move synchronously with the scanner. The change in the angle of the reflected light path, based on the preset relationship, precisely compensates for the displacement of the target position, thereby ensuring that the detection light emitted by the light source, after being reflected by the first reflecting mirror, always accurately passes through the moving target position. This eliminates the need for additional dynamic adjustment elements or closed-loop control systems, improving the reliability of the scanning probe microscopy optical tracking system. This application also discloses a scanning probe microscope.

A method of imaging a sample with a scanning probe microscope, the scanning probe microscope comprising: a platform; a sample on the platform; a probe comprising a probe mount, a cantilever extending from the probe mount, and a probe tip extending from the cantilever; a coarse lateral alignment system; a fine lateral actuation system; a coarse Z-actuator comprising a static part and a moving part; and a fine Z-actuator. The method comprises: in a set-up phase, operating the coarse Z-actuator so that the moving part of the coarse Z-actuator moves from a first position to a second position, relative to the static part, and brings the probe towards the sample on the platform; after the set-up phase, obtaining a sequence of two or more images of the sample, each image being obtained in a respective imaging phase by: generating a lateral scanning motion between the probe and the platform with the fine lateral actuation system so that the probe tip interacts with the sample across a respective imaging region, expanding and contracting the fine Z-actuator so that the probe mount moves towards and away from the platform to react to topographic changes of the sample across the imaging region, and monitoring the probe to obtain an image of the imaging region; and in a transit phase between each pair of imaging phases which are adjacent in the sequence, generating a relative transit motion between the probe and the platform, the relative transit motion following a trajectory in which the probe is retracted from the sample by contraction of the fine Z-actuator, laterally aligned with a new imaging region by the coarse lateral alignment system, and returned to the sample at the new imaging region by expansion of the fine Z-actuator. The moving part of the coarse Z-actuator remains fixed in its second position relative to the static part of the coarse Z-actuator for a full duration of each imaging phase and for a full duration of each transit phase.

A method of imaging a sample with a scanning probe microscope, the scanning probe microscope comprising: a probe comprising a cantilever and a probe tip extending from the cantilever; a lateral scanning system; and a support structure comprising a sample support which supports a sample and a probe support which supports the probe. the method comprises: generating a lateral scanning motion between the probe and the sample with the lateral scanning system so that the probe tip interacts with the sample across a region of the sample; monitoring the probe to obtain sample data from the region of the sample; during the lateral scanning motion, measuring a lateral position of the sample support or the probe support to obtain a lateral error signal, wherein the lateral error signal is obtained by: reflecting a beam from a measurement point to generate a reflection of the beam, and performing an interferometric measurement based on the reflection of the beam, wherein the measurement point is not moved by the lateral scanning system so the lateral error signal does not include the lateral scanning motion; and performing a correction based on the lateral error signal.

The present document relates to a method of mapping one or more features on or below a substrate surface of a substrate using a scanning probe microscopy device. The scanning probe microscopy device comprises a scan head comprising a cantilever and a probe tip for being brought into contact with the substrate surface. The scan head cooperates with a substrate carrier for moving the probe tip relative to the substrate surface for obtaining measurement data, the substrate carrier being configured for supporting the substrate. The method comprises mapping the one or more features by moving the probe tip relative to the substrate surface and bringing the probe in contact with the substrate surface continuously or intermittently for taking measurements at the substrate surface. Prior to the step of mapping, the method further comprises obtaining, for each pixel of a plurality of pixels wherein the measurements are to be taken, a pixel size associated with a predetermined measurement resolution. The pixel size defines a measurement area for the probe tip for taking said measurements at each pixel at the substrate surface. The method then involves applying, for performing the step of mapping, a probe comprising a probe tip having an apex including a rounded shape, the rounded shape having a radius of curvature such as to yield, in contact with the substrate surface, a contact area of a size substantially similar to said measurement area.

The present application belongs to the technical field of probe microscope repair and scanning, and proposes a scanning probe microscope repair and scanning method and system based on artificial intelligence. A two-stage continuous scanning mode is proposed. Based on the different modes of the large-scale scanning stage and the small-scale scanning stage, in the case of unqualified needle tip state, the trained reinforcement learning model is used to obtain the needle tip discrete repair action and the corresponding optimal continuous parameters. According to the needle tip discrete repair action and the corresponding optimal continuous parameters, the probe executes the scanning action. The corresponding reinforcement learning model is trained for each scanning stage, which makes the repair action more consistent with the actual physical requirements of the stage, realizes accurate and efficient probe repair, and significantly improves the imaging efficiency and success rate.

A method of analysing a sample using a scanning probe microscope. The scanning probe microscope comprises a lateral scanning system; and a probe head comprising: a transparent window; and a probe comprising a cantilever and a probe tip extending from the cantilever, wherein the probe is immersed in liquid. The method comprises: constraining an upper surface of the liquid with the transparent window; constraining a lower surface of the liquid with the sample; wherein the liquid has unconstrained sides which form a meniscus which meets the sample; and obtaining sample data by: generating a lateral scanning motion between the probe and the sample, by operation of the lateral scanning system, so that the probe tip interacts with the sample across a region of the sample, and monitoring the probe to obtain sample data from the region of the sample. The probe remains immersed in the liquid as the sample data is obtained; and the probe is monitored by: illuminating the cantilever with a detection beam via the transparent window and the liquid, and monitoring a reflection of the detection beam from the cantilever, wherein the reflection is received via the liquid and the transparent window.

The present specification relates to a method for determining dimensions of features of a subsurface topography of a sample, the features having spatial periodicity. The subsurface topography is acquired using scanning probe microscopy. The method includes obtaining measurements of an acoustic output signal at at least N locations to generate a position-dependent subsurface topography signal. The method includes providing an auto-correction matrix by performing a correlation of the subsurface topography signal for each additional location to result in an auto-correction matrix having size N*N. The method then includes performing an eigenvalue decomposition to obtain eigenvalues ​​of the matrix and selecting a subset of the eigenvalues ​​with the largest values. A frequency estimation function is constructed therefrom, and at least one output value indicative of the spatial periodicity is obtained from the frequency estimation function. The present specification also describes a scanning probe microscopy system and a computer program product.

The invention relates to a method and apparatus for prolonging the time period until a measurement tip of a scanning probe microscope is changed. In particular, the invention relates to a method of hardening a measurement tip (120, 127, 130) in a scanning probe microscope (100), the method comprising the step of treating the measurement tip (120, 127, 130) with a beam (160) of an energy beam source (152), the energy beam source (152) being part of the scanning electron microscope (100).

A technique for improving the accuracy of a sample elastic modulus calculation is provided. A control section of a scanning probe microscope having a displacement detector for detecting probe displacement generates a first force curve that is a measurement result of the probe displacement accompanying a change in the distance between the probe and the sample, using the detection output of the displacement detector with respect to the sample. Furthermore, the control section generates a second force curve by excluding a region shorter than the distance of an inflection point in the first force curve from the first force curve. Then, the control section calculates the elastic modulus of the sample based on the second force curve and a theoretical formula.

Method of measuring a dimension of a nanometer sized high aspect ratio structure of a sample using a scanning probe microscope, the nanometer sized high aspect ratio structure comprising a recess having a height dimension in a direction transverse to the surface and a lateral dimension in a direction parallel to the surface, wherein the height dimension is greater than the lateral dimension; wherein the method comprises the steps of: - scanning the surface of the sample in a scanning direction parallel to the surface by a probe including a probe tip attached to the scanning probe microscope, and lowering, during the step of scanning, the probe tip into the recess such as to determine the dimension of the nanometer sized high aspect ratio structure; - wherein the recess comprises a recess width between at least two opposing sidewalls in a direction parallel to the scanning direction; - wherein the probe tip, which is lowered into the recess, comprises a base, an apex at an end of the base arranged to interface with the surface of the sample, and a distancer, wherein said base extends parallel to a longitudinal axis of the probe tip and wherein the distancer extends from the base such as to extend radially outward for defining a width of the probe tip including the distancer; and - wherein the width of the probe tip is smaller than the recess width.

This invention discloses a dual-piezoelectric tube driven inertial motor and its control method, along with a scanning probe microscope, relating to the field of piezoelectric tube technology. The invention includes a base, a first piezoelectric tube, a second piezoelectric tube, and a U-shaped sliding body. The first and second piezoelectric tubes are parallel to each other along their axes, with one end fixed to the base and the other end free. The two parallel arms of the U-shaped sliding body, referred to as the left and right sliding rods, are elastically connected via a junction at the bottom of the U-shaped sliding body. The left and right sliding rods are coaxially inserted into the inner walls of the first and second piezoelectric tubes, respectively. This invention not only ensures that the two sliding rods consistently and stably abut against the inner cavities of their respective piezoelectric tubes, guaranteeing effective transmission of driving force, but also improves the overall mechanism's motion accuracy, load-bearing capacity, and anti-interference capability through the coordinated and alternating operation of the dual-drive piezoelectric tubes, laying a structural foundation for achieving high-precision and high-stability stepping motion.

A scanning probe microscope for determining a measurement location when a numerical aperture of an objective lens is relatively large. The scanning probe microscope includes a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; a detector which detects fluorescence generated at the probe; a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.

The application provides a scanning nonlinear dielectric microscope regulation method and system. It belongs to the technical field of nanometer scale dielectric characterization, scanning probe microscopy technology and precise temperature control system. The method comprises the following steps: deploying an integrated temperature control module on a sample table of a scanning nonlinear dielectric microscope; based on the deployment, constructing an SNDM basic platform with heat and machine cooperation ability, generating SNDM hardware architecture data integrated with temperature control; according to the SNDM hardware architecture data integrated with temperature control, implementing a partition wiring strategy of a high-frequency signal link and a temperature control power supply; after wiring, performing electromagnetic compatibility testing to generate high-frequency compatibility verification data; through the deep integration of the integrated temperature adjustment module and the scanning nonlinear dielectric microscope (SNDM), the dielectric imaging precision of ferroelectric materials in a wide temperature range is significantly improved, the temperature fluctuation is controlled within ±0.1℃, and the accurate capture of dielectric response under high spatial resolution is ensured.

A scanning probe microscope configured to measure a topography of a sample. The scanning probe microscope comprises: a probe holder; a cantilever carried by the probe holder, the cantilever extending from a proximal end located at the probe holder to a distal end distal to the probe holder; a probe tip located at the distal end of the cantilever; a scanning system configured to generate a relative scanning motion between the probe holder and the sample; an interferometer configured to measure a height of the distal end of the cantilever to generate a height measurement signal; a signal processor configured to monitor the height measurement signal to obtain a plurality of topography measurement values characterizing the topography of the sample; a height actuation system configured to adjust the height of the proximal end of the cantilever by moving the probe holder under control of a height control signal; a photothermal actuation system configured to bend the cantilever by irradiating the cantilever with an actuation beam under control of a photothermal deflection signal and an oscillation signal; an oscillation signal generator configured to generate the oscillation signal; and a control system configured to adjust the photothermal deflection signal and the height control signal based on the height measurement signal.

This application relates to the field of scanning probe microscopy, and discloses a sample support structure based on a Hellbeck array, comprising: a base, at least partially composed of a structure providing magnetic field confinement; and a sample holder, at least partially composed of a Hellbeck array. The sample holder and base are arranged in a first configuration, generating an attractive force between them. The magnetic field confinement structure restricts the spatial divergence of magnetic field lines, concentrating them at the interface region between the sample holder and the base, transforming them into a strong attractive force between them, thus achieving reliable fixation. Furthermore, the magnetically weakened side of the Hellbeck array shields the sample placement area, and combined with the concentrated confinement of magnetic field lines at the interface region, effectively suppresses magnetic field leakage into the sample area. This improves fixation efficiency, reduces magnetic field penetration interference with the sample and measurement, and enhances measurement accuracy. This application also discloses a scanning probe microscope.

Title: Method of mapping one or more features on or below a substrate surface using a scanning probe microscopy device. Abstract The present document relates to a method of mapping one or more features on or below a substrate surface of a substrate using a scanning probe microscopy device. The scanning probe microscopy device comprises a scan head comprising a cantilever and a probe tip for being brought into contact With the substrate surface. The scan head cooperates With a substrate carrier for moving the probe tip relative to the substrate surface for obtaining measurement data, the substrate carrier being configured for supporting the substrate. The method comprises mapping the one or more features by moving the probe tip relative to the substrate surface and bringing the probe in contact With the substrate surface continuously or intermittently for taking measurements at the substrate surface. Prior to the step of mapping, the method further comprises obtaining, for each pixel of a plurality of pixels wherein the measurements are to be taken, a pixel size associated With a predetermined measurement resolution. The pixel size defines a measurement area for the probe tip for taking said measurements at each pixel at the substrate surface. The method then involves applying, for performing the step of mapping, a probe comprising a probe tip having an apex including a rounded shape, the rounded shape having a radius of curvature such as to yield, in contact With the substrate surface, a contact area of a size substantially similar to said measurement area.

The application discloses a scanning NV probe microscope and a correction method thereof, a storage medium and a controller. The scanning NV probe microscope comprises a probe head part, an optical path component, an adjustable insertion rod module and an imaging module. The probe head part comprises an objective lens and a diamond sensor. The optical path component is used for generating laser and collecting light reflected by the diamond sensor after the laser is focused to the diamond sensor by the objective lens. The adjustable insertion rod module comprises a plurality of insertion rods, and each insertion rod is connected with the probe head part and the optical path component. The imaging module is located at an image plane position of light reflected by the lower surface of the diamond sensor. The correction method comprises the following steps: controlling the optical path component to generate laser, and acquiring a laser spot image generated by the imaging module; when microscope optical path mismatch is determined according to the laser spot image, determining a target insertion rod and a corresponding adjustment strategy according to the laser spot image, adjusting the target insertion rod according to the target adjustment strategy, and adjusting the position of the probe head part relative to the optical path component until the microscope optical path is matched.

The application provides a scanning nonlinear dielectric microscope regulation method and system. It belongs to the technical field of nanometer scale dielectric characterization, scanning probe microscopy technology and precise temperature control system. The method comprises the following steps: deploying an integrated temperature control module on a sample table of a scanning nonlinear dielectric microscope; based on the deployment, constructing an SNDM basic platform with heat and machine cooperation ability, generating SNDM hardware architecture data integrated with temperature control; according to the SNDM hardware architecture data integrated with temperature control, implementing a partition wiring strategy of a high-frequency signal link and a temperature control power supply; after wiring, performing electromagnetic compatibility testing to generate high-frequency compatibility verification data; through the deep integration of the integrated temperature adjustment module and the scanning nonlinear dielectric microscope (SNDM), the dielectric imaging precision of ferroelectric materials in a wide temperature range is significantly improved, the temperature fluctuation is controlled within ±0.1℃, and the accurate capture of dielectric response under high spatial resolution is ensured.

The embodiment of the application discloses a kind of NV color center scanning probe, microscope, the NV color center scanning probe includes diamond carrier, NV color center and microwave radiation mechanism;NV color center is located inside diamond carrier, diamond carrier includes the detection surface towards sample;Microwave radiation mechanism includes metal film belt;Metal film belt is circumferentially arranged around detection surface;Metal film belt is opened with gap in circumference, and the both ends of gap are respectively connected with external circuit, for generating microwave magnetic field when energized.The NV color center scanning probe provided by the embodiment of the application, by setting annular metal film belt on the probe, solve the problem of high power consumption and high thermal load of traditional microwave structure, also ingeniously optimize the performance of NV color center through micro-thermal effect, ensure the consistency of microwave effect in scanning process, provide technical support for high-resolution, high-uniformity NV color center quantum sensing and scanning imaging in extremely low temperature environment.

To provide a technique for improving the accuracy of calculating the elastic modulus of a sample. [Solution] The control unit of a scanning probe microscope, which has a displacement detector for detecting the displacement of the probe, generates a first force curve, which is the measurement result of the probe's displacement due to a change in the distance between the probe and the sample, using the detection output of the displacement detector for the sample. The control unit also generates a second force curve by excluding the region in the first force curve where the distance from the inflection point is shorter than the region in the first force curve. The control unit then calculates the elastic modulus of the sample based on the second force curve and a theoretical formula.

This invention discloses a fixing device for a tip holder in a scanning probe microscope. The tip holder includes a tip support and a tip seat connected to each other. The tip support includes a connecting section with a through hole on its surface. The fixing device includes a base, which includes a main body and a mounting seat disposed in the main body. The mounting seat has blind holes, and one end of a second electrode can elastically extend out of the blind holes. A gap is provided between the side of the mounting seat where the second electrode extends and the corresponding side of the main body for inserting the connecting section. A notch for accommodating the tip seat is also provided on the side of the main body facing the blind holes. There are at least three blind holes, and the number of through holes is less than or equal to the number of blind holes. The through holes and the corresponding blind holes are aligned along the length direction parallel to the probe. The diameter of the through hole is smaller than the diameter of the opening end of the corresponding blind hole, and the three blind holes are arranged in a triangle. This invention provides a fixing device for a tip holder in a scanning probe microscope with a simple structure, stable clamping, and small overall size.