161 results about "Scanning probe microscopy" patented technology

The invention provides a scanning tube transverse driving piezoelectric motor and a control method thereof.The scanning tube transverse driving piezoelectric motor comprises a base, an elastic piece and a sliding rod, and is characterized by further comprising an XZ two-dimensional deformation piezoelectric tube, one end of the XZ two-dimensional deformation piezoelectric tube is fixed to the base and becomes a fixed end, the other end of the XZ two-dimensional deformation piezoelectric tube is a free end, the elastic piece is fixed to the free end, the sliding rod is arranged between the base and the elastic piece, and the XZ two-dimensional deformation piezoelectric tube is connected with the sliding rod. And the elastic sheet elastically presses the sliding rod on the surface of the base to form a structure that transverse deformation, namely X-direction deformation, of the XZ two-dimensional deformation piezoelectric tube drives the sliding rod to move on the base in the X direction. Compared with the prior art, the piezoelectric motor has the following excellent performance: 1) since the piezoelectric tube is transversally deformed and is stepped by the sliding rod, the piezoelectric tube does not need to be very long, so that the length size of the motor does not need to be very large, and the problem that the piezoelectric motor is difficult to rotate in a rolling manner in a narrow aperture of a strong magnet due to large length in the prior art is solved; and 2) the piezoelectric motor is small in size and does not bring large thermal load, so that the piezoelectric motor is very suitable for extremely low temperature conditions.

The invention relates to a device for preparing a tuning fork type scanning probe microscope probe, the device is composed of a base, a tuning fork fixing frame, a needle tip clamping frame, a dispensing support, a microscopic observation instrument and a laser cutter, and the tuning fork fixing frame, the needle tip clamping frame, the dispensing support, the microscopic observation instrument and the laser cutter are all fixedly installed on the base. The laser cutter comprises a laser device base and a laser device, and the laser device is installed on a lifting support of the laser device base, located over the quartz tuning fork fixing frame and used for cutting the bonded needle tip in a non-contact mode. The device provided by the invention solves the problems that the tip is easy to damage during the bonding of the tuning fork probe and the performance of the quartz tuning fork probe is reduced because the tip is too long, thereby improving the reliability of the manufactured tuning fork type scanning probe microscope probe.

The embodiment of the invention discloses a scanning NV probe microscope which comprises an atomic force microscopy system used for detecting surface topography information of a sample and an optical detection magnetic resonance system used for detecting surface magnetic field distribution information of the sample, and the atomic force microscopy system comprises a vibration arm and a diamond probe. The optical detection magnetic resonance system comprises an NV color center, a transition excitation light path and a fluorescence detection light path; a sample to be scanned and the transition excitation light path are respectively positioned on two opposite sides of the diamond probe, and the transition excitation light path and the fluorescence detection light path are positioned on the same side of the diamond probe; a first metal coating film is arranged on one side, close to the sample, of the diamond probe and is used for blocking surface fluorescence of the sample. According to the scanning NV probe microscope provided by the embodiment of the invention, the metal coating is arranged at the bottom of the diamond probe to block stray fluorescence from the surface of the sample, so that the problems of low magnetic field imaging signal-to-noise ratio and limited measurement precision of the existing scanning NV probe microscope are solved.

A method and apparatus for scanning probe-based surface characterization is disclosed which allows high scanning velocities and data throughput and is suitable for large samples. A combination of rotational and linear translation is used for scanning the probe by concentric circle or spiral trajectories in overlapping ring patterns. A method and apparatus for rapid control of tilt-related probe-sample separation distance and suitable for such scanning pattern is described.

The invention relates to the technical field of scanning tunneling microscopes, and discloses a scanning probe measuring device and a control method for pinpoint-to-pinpoint imaging, two pinpoints are oppositely arranged, and the pinpoints are accurately controlled and movably positioned based on a basic working mode of a scanning probe microscope. A needle tip-tunnel junction-needle tip working structure is established, after bias voltage is applied externally, electron tunneling between needle tips only relates to a small number of atoms or single atoms at the tail ends of the needle tips, the tunneling effect that the small number of atoms contribute to electrons is achieved, and therefore small number or single atom imaging is achieved. The device can be rapidly transplanted to application scenes of low temperature, strong magnetic field, optical measurement and the like, the double-needle-point structure is regulated and controlled through piezoelectric displacement or an electric field, tunnel junction width and barrier height can be optimized in real time, and research on dynamic construction and dynamic electrical characteristics of nanoscale tunnel junctions is greatly facilitated.

The present document relates to a scanning probe microscopy system comprising a sample support structure, a sensor head including a probe, a deflection sensor unit, and actuators including a Z-motion actuator and a scanning actuator. The system further comprises a control unit, able to receive the deflection sensor signal and control the actuators. The control unit comprises multiple signal processing units, each enabling to: receive the deflection signal, provide a processed signal, and cooperating with a triggering unit which compares the processed signal against a predefined triggering condition, and generates a trigger when the condition is met.

The invention discloses a method for evaluating photoelectric characteristics of a functional area in a semiconductor material or device. The method comprises the following steps: A, pre-processing a semiconductor material or a device to form a cross section which passes through a functional area to be evaluated and has nanoscale flatness, and preparing a common electrode which is in ohmic contact with the semiconductor material; b, measuring the electrical distribution of the functional area in the to-be-tested sample by using an electrical measurement mode of a scanning probe microscope under the condition of no illumination; c, selecting a light source with a proper wavelength to irradiate the semiconductor material or device, and measuring the electrical distribution of the internal functional area of the to-be-tested sample under the illumination condition; and D, comparing, processing and analyzing the measured electrical distribution under the conditions of no illumination and illumination. The method has nanoscale spatial resolution and high sensitivity, can directly obtain the photoelectric characteristics of semiconductor materials and core functional areas in devices, is used for accurately positioning parts influencing the performance of the semiconductor materials and the devices, and quantifies the local photoelectric characteristics, thereby guiding the analysis, prediction and optimization of the performance of the semiconductor materials and the devices.

A scanning probe microscope and method of operating a scanning probe microscope includes selecting a preferred focal position of a focused optical beam on a probe of the scanning probe microscope by adjusting a focal position of a focused optical beam on the probe relative to a tip of the probe and then measuring at least one of a response of the probe and optical radiation scattered from the probe as a function of the position of the focused optical beam. The preferred focal position of the focused optical beam on the probe is based on the measurement of at least one of the response of the probe and optical radiation scattered from the probe.

The utility model provides a sample fixing mould for a scanning probe microscope, which comprises a supporting surface for bearing a sample, the supporting surface is provided with a plurality of clamping pieces which can be opened and closed on the supporting surface and are used for pressing the sample on the supporting surface, and the mould is used for fixing the sample when the sample is tested by using the scanning probe microscope. And the sample is simple and easy to mount, fix, dismount and replace. Preferably, the mold is provided with a reflective mirror, a light guide groove and a groove capable of containing a heating piece and / or a magnetic field applying piece, multi-mode sample microscopic testing of the sample under illumination, heat and magnetization adjustment can be achieved, application scenes of the scanning probe microscope under different testing conditions are expanded, and the mold has good application prospects.

The displacement reduction type precise piezoelectric displacement table comprises an integrated guide base, a displacement reduction mechanism is arranged in the integrated guide base in a matched mode, a piezoelectric ceramic driver is arranged in the displacement reduction mechanism, and the piezoelectric ceramic driver serves as a power source to drive the displacement reduction mechanism to deform. The reduced displacement is generated and is conducted to the integrated guide base, so that nanoscale linear displacement is generated; according to the invention, through the integrated displacement reduction mechanism, the high resolution of the piezoelectric ceramic driver is further improved. Any tiny stroke of the driving source can be accurately reduced to sub-nanometer level output displacement. The design of controlling precision with precision provides a more stable and more controllable technical path for applications requiring extreme precision, such as scanning probe microscopes and quantum dot positioning.

The invention provides a glass nanopore probe based on an aptamer and application of the glass nanopore probe in dopamine detection, and belongs to the technical field of electrochemical sensing and scanning probe microscopy. The sensor comprises: a glass nanopore probe, the inner wall of which is modified with a gold layer; a cDNA (complementary deoxyribonucleic acid) single chain is fixed on the gold layer through a gold-sulfur bond; a part of the sequence of the dopamine aptamer is hybridized and combined with the cDNA single chain; wherein the combination of the dopamine and the dopamine aptamer causes the change of an ion current rectification signal of the glass nanopore probe, so that the detection of the dopamine is realized based on the change of the ion current rectification signal of the glass nanopore probe. The invention provides a valuable scheme for developing an aptamer nanopore scanning electrochemical sensor for single cell analysis and researching neurotransmitter-related diseases.

The present document relates to a method of performing acoustic scanning probe microscopy for imaging structures underneath a substrate surface, comprising: applying an acoustic input signal to the substrate having a frequency above 1 gigahertz, detecting a return signal, and analyzing the return signal for obtaining information on the embedded structures. The step of applying the acoustic input signal comprises applying a plurality of acoustic signal components which each include a selected frequency. The step of detecting includes detecting a response signal for each of the plurality of acoustic signal components. The frequencies are selected such that the components provide a composite signal being a pulse signal of limited time duration. The invention is further directed at a scanning probe microscopy system and a computer program product.

The present invention relates to a method for processing three-dimensional measurement data from a scanning probe microscopy system to provide three-dimensional topographic image data, as well as a method for performing scanning probe microscopy, a scanning probe microscopy system, a computer-implemented method, and a computer program product. The method comprises receiving 3D measurement data acquired by the SPM system into a processing device, the 3D measurement data typically mapping the topography of a structure provided by the substrate. The method further comprises digitally constructing model image data using shape contour data of the shape, and a regression operation to fit the model image data to the 3D measurement data. This results in a composite model image of the 3D measurement data that can be used as a topographic image.

The utility model relates to the technical field of scanning probe microscopes, and particularly discloses a scanning probe microscope independent scanner low in cost and easy to process, which comprises a probe and a needle cylinder, the probe is coaxially arranged in the needle cylinder, one end of the needle cylinder is fixedly bonded with an insulating bottom cover, one end of the insulating bottom cover, which is deviated from the needle cylinder, is fixedly bonded with a piezoelectric scanning tube, and the piezoelectric scanning tube is connected with the needle cylinder. An insulating top cover is fixedly adhered to one end, deviating from the insulating bottom cover, of the piezoelectric scanning tube; and an internal sleeve is sleeved outside the insulating top cover and the external piezoelectric scanning tube. The utility model has the advantages of simple structure and low cost, is suitable for batch production, and the imaging effect is not easily influenced.

A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

A scanning probe microscope and microscope operating method utilizes at least one material having a dielectric constant (ε) and a resonant sensor material between a metal probe tip and a sample surface. When electromagnetic radiation from a light source is transmitted to the junction between the metal probe tip and the sample, absorption of the electromagnetic radiation by the resonant sensor material, which depends on the dielectric constant of the at least one material of the sample, is detected.

The application discloses a dielectric high-space-resolution trap imaging method and system based on a scanning probe microscope, and the method comprises the following steps: recording a sample surface topography image sequence and a surface potential image sequence after removing a voltage; correcting image offset according to the surface topography image sequence, and extracting surface potential decay data of each pixel point from the corrected surface potential image sequence; determining trap distribution information of each pixel point by fitting and calculation according to the surface potential decay data of each pixel point; and forming deep and shallow trap energy level peak value images and / or deep and shallow trap density peak value images corresponding to the film surface topography according to the trap distribution information of all pixel points and the original positions of the pixel points. The method directly images the trap characteristics of a sample at a nanometer scale, and has the advantages of high spatial resolution and intuitive comparison.

The application discloses a rotary combined scanning probe microscope and a measuring method, which comprises a mirror body frame, a first scanning unit, a rotary probe switching unit and a second scanning unit; the upper end of the first scanning unit is fixed to the upper end of the mirror body frame, and the lower end of the first scanning unit is a free end, so that three-dimensional scanning can be realized; the rotary probe switching unit is arranged at the lower end of the mirror body frame and comprises a rotary round table, an inverted mounting sleeve and a first probe vibration frame; the inverted mounting sleeve is fixed to the rotary round table and coaxial with the rotary round table, and the first probe vibration frame is located at the upper end of the inverted mounting sleeve; and the second scanning unit is fixed to the rotary round table. The application can realize flexible switching of probes during testing, complete multi-mode measurement in one sample loading, is particularly suitable for extreme environments with long test preparation period and high cost, such as low temperature and strong magnetic field, and is helpful to improve measuring efficiency and significantly reduce test cost.

This invention relates to a measuring device, a scanning probe microscope, and a method for testing a sample. The measuring device for a scanning probe microscope includes: a sample receiving portion configured to receive a sample to be tested; a measuring probe disposed on a probe holder and having a probe tip, the sample being measured using the probe tip; a displacement device configured to move the measuring probe and the sample receiving portion relative to each other for measuring the sample, such that the measuring probe performs a scanning motion relative to the sample in at least one spatial direction for measuring the sample; a control device connected to the displacement device and controlling the relative motion between the measuring probe and the sample receiving portion; and a sensor device configured to detect a motion measurement signal of the actual motion of the measuring probe and / or the sample receiving portion and transmit the motion measurement signal to the control device.

An apparatus, including a scanning probe microscope base that includes a configured to be secured to an end of an insert in a cryostat; a top configured to be connected to a base of a scanning probe microscope head that is configured to be disposed inside the insert; and a damping system disposed between the frame and the top and comprising a bellows that seals the end of the insert. This sealing separates an ultra-high vacuum (UHV) environment in the insert from a high vacuum (HV) environment surrounding the end of the insert and also positions an upper surface of the top in the UHV environment.

The invention relates to the technical field of scanning probe microscopes, in particular to a two-dimensional piezoelectric motor based on the principle of reducing friction force through opposite movement and a use method of the two-dimensional piezoelectric motor. Through the unique structural design of the base, the upper-layer piezoelectric cross and the lower-layer piezoelectric cross, four-point horizontal sliding contact is formed between the upper-layer piezoelectric cross and the lower-layer piezoelectric cross, relative sliding displacement can be generated, and the ingenious structure can effectively reduce interference in the movement process; therefore, the displacement precision is remarkably improved, the strict requirement of the scanning probe microscope for high-precision displacement is met, and a reliable hardware basis is provided for more accurate sample detection and analysis. And meanwhile, the structure is simple and compact, the pre-tightening elastic force is self-adjusted, the output thrust is large, the electromagnetic interference is immune, the moving range is large, and the integration degree is high.

The invention relates to a scanning probe microscope and mass spectrometer combined measuring device, a scanning probe microscope comprises a probe, a sample table, a scanning driving mechanism and a signal feedback loop system, the combined measuring device comprises a sampling tube connected with the probe and coaxially arranged with the probe, and the sampling tube is connected with the mass spectrometer; and the data acquisition and analysis system is used for acquiring the surface topography information of the sample where the probe is located and the corresponding gas component information, and carrying out real space data coupling on the two information. A sampling tube and a probe are integrated and connected to a mass spectrometer, and the scanning probe microscope and the mass spectrometer are combined for use. The sampling tube and the probe can move synchronously, dynamic information between the surface of a sample and gas is obtained while high-resolution imaging is performed, and deep research on a reaction mechanism of a gas-solid interface is facilitated. By combining the scanning probe microscope with the mass spectrometer, the method can be widely applied to multiple fields of material science, catalytic science, chemistry, biology and the like, and a powerful tool is provided for researching surface phenomena under a complex system.

To provide a package for microwave cooking configured so that vapor can be properly extracted from a vapor extraction part, and a laminate constituting the package.SOLUTION: A package for microwave cooking is composed of a laminate in which a polyethylene terephthalate film and a sealant layer are provided. The sealant layer has a sea-island structure therein. A standard deviation, which is obtained by performing approximation and normalization by Gaussian function to strength distribution obtained by subjecting, to Fourier transformation, an image of a cross section parallel to a machine direction of the sealant layer, observed with a scanning-type probe microscope, which is an image which is 1024px transversely and 512px vertically in resolution in which a length 10 μm is expressed by 512px, is 600 or less.SELECTED DRAWING: Figure 1

The present application relates to a scanning probe microscope system, which includes a plurality of probe holders, a main body probe head, a main body base, and a measurement and control device. Each probe holder is configured to mount a sensing probe. The main body probe head includes a front-end circuit and a positioning guide groove. The positioning guide groove is configured to detachably mount a plurality of probe holders. The probe holder is electrically connected to the front-end circuit. The main body base is configured to support the main body probe head and is signal-connected to the sensing probe. The measurement and control device is signal-connected to the main body base. During use, one of the probe holders is selected and mounted in the positioning guide groove of the main body probe head, and the measurement and control device realizes signal interaction with the corresponding sensing probe through the main body base, so that the scanning probe microscope system can realize the function of arbitrary measurement and imaging, that is, it can be used immediately, and the compatible use of a variety of sensing probes is realized.

This invention provides a scanning probe microscope, including a laser, a probe, a position-sensitive detector, a camera, and a liquid lens. The liquid lens is disposed in the optical path between the camera and the probe. When the liquid lens is in a first state, the camera images the probe arm at least through the liquid lens; when the liquid lens is in a second state, the camera images the object under test at least through the liquid lens. This invention integrates the observation optical paths of the probe and the object under test into a single optical element, greatly reducing the size of the device. It enables switching between imaging of the probe arm and the surface under test without moving the optical element, reducing interference with the imaging effect caused by the movement of the optical element. It can quickly switch the imaging object, improving efficiency. The focal length of the liquid lens can be continuously varied, facilitating matching different surfaces under test and probe arm positions, thereby increasing the applicability of the scanning probe microscope.

The invention is directed at a method of analyzing a probe tip deflection signal of a scanning probe microscopy system. The system comprises a probe head comprising a probe including a probe tip arranged on a cantilever, the probe head being configured for scanning the probe tip along one or more directions parallel to a substrate surface. The probe head includes an actuator for applying a periodic motion to the probe, and a tip position detector provides a probe tip deflection signal indicative of a deviation of the probe tip from a reference position. The method comprises obtaining at a scan position a plurality of samples of the probe tip deflection signal over time for providing a signal profile, and identifying the signal profile to be associated with a grazing impact of the probe tip on the sidewall. A location coordinate of a sidewall structure is provided by an obtained z-position.

To provide an apparatus for identifying the type of chemical bond of a detection object with atomic level spatial resolution.SOLUTION: A scanning probe microscope apparatus comprises at least one probe placed in contact or non-contact with a detection object, a detection object support part, and a control unit for controlling the probe. The detection object support part has a function of converting electromagnetic waves into electrical signals, and the detection object support part has a function of converting the electromagnetic waves into electrical signals, and by capturing electromagnetic waves in the vicinity of the object and converting them into electrical signals, it is possible to identify chemical bonds in the object with high accuracy.SELECTED DRAWING: Figure 1

This application relates to the field of scanning probe microscopy technology and discloses an optical tracking system, including: a scanner with a target position; and an optical path structure including a first reflecting mirror disposed at a preset position on the scanner. A first distance from the target position to a fixed end of the scanner and a second distance from the target position to the spot position of the first reflecting mirror satisfy a preset relationship, ensuring that the reflected light from the first reflecting mirror passes through the target position. When the scanner moves, the first reflecting mirror and the target position can move synchronously with the scanner. The change in the angle of the reflected light path, based on the preset relationship, precisely compensates for the displacement of the target position, thereby ensuring that the detection light emitted by the light source, after being reflected by the first reflecting mirror, always accurately passes through the moving target position. This eliminates the need for additional dynamic adjustment elements or closed-loop control systems, improving the reliability of the scanning probe microscopy optical tracking system. This application also discloses a scanning probe microscope.

The invention discloses a rotary combined scanning probe microscope and a measuring method. The rotary combined scanning probe microscope comprises a microscope body outer frame, a first scanning unit, a rotary probe switching unit and a second scanning unit, the upper end of the first scanning unit is fixed at the upper end of the mirror body outer frame, and the lower end of the first scanning unit is a free end, so that three-dimensional scanning can be realized; the rotary probe switching unit is arranged at the lower end of the mirror body outer frame and comprises a rotary circular truncated cone, an inverted mounting sleeve and a first probe oscillation starting frame, the inverted mounting sleeve is fixed on the rotary circular truncated cone and is coaxial with the rotary circular truncated cone, and the first probe oscillation starting frame is located at the upper end of the inverted mounting sleeve; the second scanning unit is fixed on the rotary circular table. According to the invention, the probe can be flexibly switched in the test process, multi-mode measurement is completed in one-time sample loading, the method is especially suitable for extreme environments with long test preparation period and high cost, such as low temperature, strong magnetic field and the like, the measurement efficiency can be improved, and the test cost can be obviously reduced.