91 results about "Scanning probe microscopy" patented technology

The invention provides a scanning tube transverse driving piezoelectric motor and a control method thereof.The scanning tube transverse driving piezoelectric motor comprises a base, an elastic piece and a sliding rod, and is characterized by further comprising an XZ two-dimensional deformation piezoelectric tube, one end of the XZ two-dimensional deformation piezoelectric tube is fixed to the base and becomes a fixed end, the other end of the XZ two-dimensional deformation piezoelectric tube is a free end, the elastic piece is fixed to the free end, the sliding rod is arranged between the base and the elastic piece, and the XZ two-dimensional deformation piezoelectric tube is connected with the sliding rod. And the elastic sheet elastically presses the sliding rod on the surface of the base to form a structure that transverse deformation, namely X-direction deformation, of the XZ two-dimensional deformation piezoelectric tube drives the sliding rod to move on the base in the X direction. Compared with the prior art, the piezoelectric motor has the following excellent performance: 1) since the piezoelectric tube is transversally deformed and is stepped by the sliding rod, the piezoelectric tube does not need to be very long, so that the length size of the motor does not need to be very large, and the problem that the piezoelectric motor is difficult to rotate in a rolling manner in a narrow aperture of a strong magnet due to large length in the prior art is solved; and 2) the piezoelectric motor is small in size and does not bring large thermal load, so that the piezoelectric motor is very suitable for extremely low temperature conditions.

The embodiment of the invention discloses a scanning NV probe microscope which comprises an atomic force microscopy system used for detecting surface topography information of a sample and an optical detection magnetic resonance system used for detecting surface magnetic field distribution information of the sample, and the atomic force microscopy system comprises a vibration arm and a diamond probe. The optical detection magnetic resonance system comprises an NV color center, a transition excitation light path and a fluorescence detection light path; a sample to be scanned and the transition excitation light path are respectively positioned on two opposite sides of the diamond probe, and the transition excitation light path and the fluorescence detection light path are positioned on the same side of the diamond probe; a first metal coating film is arranged on one side, close to the sample, of the diamond probe and is used for blocking surface fluorescence of the sample. According to the scanning NV probe microscope provided by the embodiment of the invention, the metal coating is arranged at the bottom of the diamond probe to block stray fluorescence from the surface of the sample, so that the problems of low magnetic field imaging signal-to-noise ratio and limited measurement precision of the existing scanning NV probe microscope are solved.

The displacement reduction type precise piezoelectric displacement table comprises an integrated guide base, a displacement reduction mechanism is arranged in the integrated guide base in a matched mode, a piezoelectric ceramic driver is arranged in the displacement reduction mechanism, and the piezoelectric ceramic driver serves as a power source to drive the displacement reduction mechanism to deform. The reduced displacement is generated and is conducted to the integrated guide base, so that nanoscale linear displacement is generated; according to the invention, through the integrated displacement reduction mechanism, the high resolution of the piezoelectric ceramic driver is further improved. Any tiny stroke of the driving source can be accurately reduced to sub-nanometer level output displacement. The design of controlling precision with precision provides a more stable and more controllable technical path for applications requiring extreme precision, such as scanning probe microscopes and quantum dot positioning.

The invention provides a glass nanopore probe based on an aptamer and application of the glass nanopore probe in dopamine detection, and belongs to the technical field of electrochemical sensing and scanning probe microscopy. The sensor comprises: a glass nanopore probe, the inner wall of which is modified with a gold layer; a cDNA (complementary deoxyribonucleic acid) single chain is fixed on the gold layer through a gold-sulfur bond; a part of the sequence of the dopamine aptamer is hybridized and combined with the cDNA single chain; wherein the combination of the dopamine and the dopamine aptamer causes the change of an ion current rectification signal of the glass nanopore probe, so that the detection of the dopamine is realized based on the change of the ion current rectification signal of the glass nanopore probe. The invention provides a valuable scheme for developing an aptamer nanopore scanning electrochemical sensor for single cell analysis and researching neurotransmitter-related diseases.

The present invention relates to a method for processing three-dimensional measurement data from a scanning probe microscopy system to provide three-dimensional topographic image data, as well as a method for performing scanning probe microscopy, a scanning probe microscopy system, a computer-implemented method, and a computer program product. The method comprises receiving 3D measurement data acquired by the SPM system into a processing device, the 3D measurement data typically mapping the topography of a structure provided by the substrate. The method further comprises digitally constructing model image data using shape contour data of the shape, and a regression operation to fit the model image data to the 3D measurement data. This results in a composite model image of the 3D measurement data that can be used as a topographic image.

The utility model relates to the technical field of scanning probe microscopes, and particularly discloses a scanning probe microscope independent scanner low in cost and easy to process, which comprises a probe and a needle cylinder, the probe is coaxially arranged in the needle cylinder, one end of the needle cylinder is fixedly bonded with an insulating bottom cover, one end of the insulating bottom cover, which is deviated from the needle cylinder, is fixedly bonded with a piezoelectric scanning tube, and the piezoelectric scanning tube is connected with the needle cylinder. An insulating top cover is fixedly adhered to one end, deviating from the insulating bottom cover, of the piezoelectric scanning tube; and an internal sleeve is sleeved outside the insulating top cover and the external piezoelectric scanning tube. The utility model has the advantages of simple structure and low cost, is suitable for batch production, and the imaging effect is not easily influenced.

A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

The application discloses a dielectric high-space-resolution trap imaging method and system based on a scanning probe microscope, and the method comprises the following steps: recording a sample surface topography image sequence and a surface potential image sequence after removing a voltage; correcting image offset according to the surface topography image sequence, and extracting surface potential decay data of each pixel point from the corrected surface potential image sequence; determining trap distribution information of each pixel point by fitting and calculation according to the surface potential decay data of each pixel point; and forming deep and shallow trap energy level peak value images and / or deep and shallow trap density peak value images corresponding to the film surface topography according to the trap distribution information of all pixel points and the original positions of the pixel points. The method directly images the trap characteristics of a sample at a nanometer scale, and has the advantages of high spatial resolution and intuitive comparison.

The application discloses a rotary combined scanning probe microscope and a measuring method, which comprises a mirror body frame, a first scanning unit, a rotary probe switching unit and a second scanning unit; the upper end of the first scanning unit is fixed to the upper end of the mirror body frame, and the lower end of the first scanning unit is a free end, so that three-dimensional scanning can be realized; the rotary probe switching unit is arranged at the lower end of the mirror body frame and comprises a rotary round table, an inverted mounting sleeve and a first probe vibration frame; the inverted mounting sleeve is fixed to the rotary round table and coaxial with the rotary round table, and the first probe vibration frame is located at the upper end of the inverted mounting sleeve; and the second scanning unit is fixed to the rotary round table. The application can realize flexible switching of probes during testing, complete multi-mode measurement in one sample loading, is particularly suitable for extreme environments with long test preparation period and high cost, such as low temperature and strong magnetic field, and is helpful to improve measuring efficiency and significantly reduce test cost.

This invention relates to a measuring device, a scanning probe microscope, and a method for testing a sample. The measuring device for a scanning probe microscope includes: a sample receiving portion configured to receive a sample to be tested; a measuring probe disposed on a probe holder and having a probe tip, the sample being measured using the probe tip; a displacement device configured to move the measuring probe and the sample receiving portion relative to each other for measuring the sample, such that the measuring probe performs a scanning motion relative to the sample in at least one spatial direction for measuring the sample; a control device connected to the displacement device and controlling the relative motion between the measuring probe and the sample receiving portion; and a sensor device configured to detect a motion measurement signal of the actual motion of the measuring probe and / or the sample receiving portion and transmit the motion measurement signal to the control device.

To provide a package for microwave cooking configured so that vapor can be properly extracted from a vapor extraction part, and a laminate constituting the package.SOLUTION: A package for microwave cooking is composed of a laminate in which a polyethylene terephthalate film and a sealant layer are provided. The sealant layer has a sea-island structure therein. A standard deviation, which is obtained by performing approximation and normalization by Gaussian function to strength distribution obtained by subjecting, to Fourier transformation, an image of a cross section parallel to a machine direction of the sealant layer, observed with a scanning-type probe microscope, which is an image which is 1024px transversely and 512px vertically in resolution in which a length 10 μm is expressed by 512px, is 600 or less.SELECTED DRAWING: Figure 1

This invention provides a scanning probe microscope, including a laser, a probe, a position-sensitive detector, a camera, and a liquid lens. The liquid lens is disposed in the optical path between the camera and the probe. When the liquid lens is in a first state, the camera images the probe arm at least through the liquid lens; when the liquid lens is in a second state, the camera images the object under test at least through the liquid lens. This invention integrates the observation optical paths of the probe and the object under test into a single optical element, greatly reducing the size of the device. It enables switching between imaging of the probe arm and the surface under test without moving the optical element, reducing interference with the imaging effect caused by the movement of the optical element. It can quickly switch the imaging object, improving efficiency. The focal length of the liquid lens can be continuously varied, facilitating matching different surfaces under test and probe arm positions, thereby increasing the applicability of the scanning probe microscope.

The invention is directed at a method of analyzing a probe tip deflection signal of a scanning probe microscopy system. The system comprises a probe head comprising a probe including a probe tip arranged on a cantilever, the probe head being configured for scanning the probe tip along one or more directions parallel to a substrate surface. The probe head includes an actuator for applying a periodic motion to the probe, and a tip position detector provides a probe tip deflection signal indicative of a deviation of the probe tip from a reference position. The method comprises obtaining at a scan position a plurality of samples of the probe tip deflection signal over time for providing a signal profile, and identifying the signal profile to be associated with a grazing impact of the probe tip on the sidewall. A location coordinate of a sidewall structure is provided by an obtained z-position.

This application relates to the field of scanning probe microscopy technology and discloses an optical tracking system, including: a scanner with a target position; and an optical path structure including a first reflecting mirror disposed at a preset position on the scanner. A first distance from the target position to a fixed end of the scanner and a second distance from the target position to the spot position of the first reflecting mirror satisfy a preset relationship, ensuring that the reflected light from the first reflecting mirror passes through the target position. When the scanner moves, the first reflecting mirror and the target position can move synchronously with the scanner. The change in the angle of the reflected light path, based on the preset relationship, precisely compensates for the displacement of the target position, thereby ensuring that the detection light emitted by the light source, after being reflected by the first reflecting mirror, always accurately passes through the moving target position. This eliminates the need for additional dynamic adjustment elements or closed-loop control systems, improving the reliability of the scanning probe microscopy optical tracking system. This application also discloses a scanning probe microscope.

A method of imaging a sample with a scanning probe microscope, the scanning probe microscope comprising: a platform; a sample on the platform; a probe comprising a probe mount, a cantilever extending from the probe mount, and a probe tip extending from the cantilever; a coarse lateral alignment system; a fine lateral actuation system; a coarse Z-actuator comprising a static part and a moving part; and a fine Z-actuator. The method comprises: in a set-up phase, operating the coarse Z-actuator so that the moving part of the coarse Z-actuator moves from a first position to a second position, relative to the static part, and brings the probe towards the sample on the platform; after the set-up phase, obtaining a sequence of two or more images of the sample, each image being obtained in a respective imaging phase by: generating a lateral scanning motion between the probe and the platform with the fine lateral actuation system so that the probe tip interacts with the sample across a respective imaging region, expanding and contracting the fine Z-actuator so that the probe mount moves towards and away from the platform to react to topographic changes of the sample across the imaging region, and monitoring the probe to obtain an image of the imaging region; and in a transit phase between each pair of imaging phases which are adjacent in the sequence, generating a relative transit motion between the probe and the platform, the relative transit motion following a trajectory in which the probe is retracted from the sample by contraction of the fine Z-actuator, laterally aligned with a new imaging region by the coarse lateral alignment system, and returned to the sample at the new imaging region by expansion of the fine Z-actuator. The moving part of the coarse Z-actuator remains fixed in its second position relative to the static part of the coarse Z-actuator for a full duration of each imaging phase and for a full duration of each transit phase.

This invention provides a probe and sample mounting assembly and method for an ultra-high vacuum scanning probe microscope. The mounting assembly includes a tip holder, a sample holder, and a gripper. The tip holder includes a first support column and a first locking portion disposed on the circumferential surface of the first support column. One end of the first support column has a probe mounting portion, and the first locking portion is disposed close to the probe mounting portion. The first support column also has a first scanning head mounting portion. The sample holder includes a second support column, a second locking portion, a sample mounting portion, and a second scanning head mounting portion. The sample mounting portion is disposed at one end of the second support column, and both the second locking portion and the second scanning head mounting portion are disposed on the circumferential surface of the second support column, with the second locking portion disposed away from the sample mounting portion. The gripper includes a sleeve, one end of which has a limiting structure that can cooperate with either the first or second locking portion. This invention improves sample delivery accuracy, simplifies the operation process, and integrates multiple scanning functions.

A method of imaging a sample with a scanning probe microscope, the scanning probe microscope comprising: a probe comprising a cantilever and a probe tip extending from the cantilever; a lateral scanning system; and a support structure comprising a sample support which supports a sample and a probe support which supports the probe. the method comprises: generating a lateral scanning motion between the probe and the sample with the lateral scanning system so that the probe tip interacts with the sample across a region of the sample; monitoring the probe to obtain sample data from the region of the sample; during the lateral scanning motion, measuring a lateral position of the sample support or the probe support to obtain a lateral error signal, wherein the lateral error signal is obtained by: reflecting a beam from a measurement point to generate a reflection of the beam, and performing an interferometric measurement based on the reflection of the beam, wherein the measurement point is not moved by the lateral scanning system so the lateral error signal does not include the lateral scanning motion; and performing a correction based on the lateral error signal.

The present document relates to a method of mapping one or more features on or below a substrate surface of a substrate using a scanning probe microscopy device. The scanning probe microscopy device comprises a scan head comprising a cantilever and a probe tip for being brought into contact with the substrate surface. The scan head cooperates with a substrate carrier for moving the probe tip relative to the substrate surface for obtaining measurement data, the substrate carrier being configured for supporting the substrate. The method comprises mapping the one or more features by moving the probe tip relative to the substrate surface and bringing the probe in contact with the substrate surface continuously or intermittently for taking measurements at the substrate surface. Prior to the step of mapping, the method further comprises obtaining, for each pixel of a plurality of pixels wherein the measurements are to be taken, a pixel size associated with a predetermined measurement resolution. The pixel size defines a measurement area for the probe tip for taking said measurements at each pixel at the substrate surface. The method then involves applying, for performing the step of mapping, a probe comprising a probe tip having an apex including a rounded shape, the rounded shape having a radius of curvature such as to yield, in contact with the substrate surface, a contact area of a size substantially similar to said measurement area.

A method of analysing a sample using a scanning probe microscope. The scanning probe microscope comprises a lateral scanning system; and a probe head comprising: a transparent window; and a probe comprising a cantilever and a probe tip extending from the cantilever, wherein the probe is immersed in liquid. The method comprises: constraining an upper surface of the liquid with the transparent window; constraining a lower surface of the liquid with the sample; wherein the liquid has unconstrained sides which form a meniscus which meets the sample; and obtaining sample data by: generating a lateral scanning motion between the probe and the sample, by operation of the lateral scanning system, so that the probe tip interacts with the sample across a region of the sample, and monitoring the probe to obtain sample data from the region of the sample. The probe remains immersed in the liquid as the sample data is obtained; and the probe is monitored by: illuminating the cantilever with a detection beam via the transparent window and the liquid, and monitoring a reflection of the detection beam from the cantilever, wherein the reflection is received via the liquid and the transparent window.

The invention provides a sample replacing device for a scanning probe microscope, the microscope and a sample replacing method. According to the sample replacement device, the microscope and the method, a novel scanning probe sample replacement design is provided, the scanning probe can realize automatic sample replacement without intervening in an external mechanical structure under the extremely low temperature condition, and the sample replacement device can adapt to extreme environments such as an extremely low temperature strong magnetic field; the defect that the property of the sample is changed due to the fact that the sample is heated when the sample is changed is overcome, the time for re-cooling when a new sample is put in is shortened, the convenience of the experiment is improved, and the cost is saved; the invention further provides a novel low-temperature sample storage and replacement scheme which is suitable for most sample storage conditions.

A scanning probe microscope (10) is described, comprising a probe (1) with a cantilever (11) carrying a tip (12), the scanning probe microscope configured to generate a first actuating motion changing a distance of the tip (12) with respect to a sample surface, a detector (4) configured to detect a tip position and to output a tip position signal, a control circuit (5) configured to generate a first control signal using the tip position signal, the scanning probe microscope being configured to generate a second actuating motion adapting a distance between the probe (1) and the sample surface using the first control signal, wherein the control circuit (5) is configured to generate a second control signal, the scanning probe microscope being configured to generate, using the second control signal, a third actuating motion at least partially opposing detachment-induced oscillations of the cantilever (11) induced by detaching of the tip (12) from the sample surface while retracting the probe (1).

The present specification relates to a method for determining dimensions of features of a subsurface topography of a sample, the features having spatial periodicity. The subsurface topography is acquired using scanning probe microscopy. The method includes obtaining measurements of an acoustic output signal at at least N locations to generate a position-dependent subsurface topography signal. The method includes providing an auto-correction matrix by performing a correlation of the subsurface topography signal for each additional location to result in an auto-correction matrix having size N*N. The method then includes performing an eigenvalue decomposition to obtain eigenvalues ​​of the matrix and selecting a subset of the eigenvalues ​​with the largest values. A frequency estimation function is constructed therefrom, and at least one output value indicative of the spatial periodicity is obtained from the frequency estimation function. The present specification also describes a scanning probe microscopy system and a computer program product.

The utility model provides a scanning probe microscope optical tracking structure and a scanning probe microscope, and the structure comprises a tracking assembly which comprises a detection light source, a probe, a detector, a reflector, a first Z-direction displacement assembly, a second Z-direction displacement assembly, and an XY-direction displacement assembly. The position of a light beam irradiated on the detector can be kept unchanged in the process that the probe moves in the Z direction, and the position change of the light beam on the detector caused by the movement of the probe can be eliminated when the probe is close to or far away from a detected object, so that the detection of the detected object cannot be interfered when the probe is close to or far away from the detected object; besides, the first Z-direction displacement assembly can be utilized to realize rapid movement of the probe along the Z direction, and the second Z-direction displacement assembly is matched, so that rapid and accurate Z-direction position adjustment of the probe can be realized.

A scanning probe microscope includes an observation device configured to output an observation signal acquired by observing a sample containing particles, and an information processing device. The information processing device is configured to acquire the observation signal, generate an observation signal based on the observation signal each time the observation signal corresponding to one observation region of the observation device is acquired, count the number of particle images included in the observation image each time the observation image is generated, terminate an acquisition of the observation signal when a counted total number of particle images becomes greater than a predetermined threshold, and execute a particle analysis on a generated observation image.

The invention discloses a self-adaptive scanning method of a scanning probe microscope, and belongs to the technical field of atomic force microscopes. The invention aims to solve the problem that the scanning operation mode cannot be adjusted according to real-time requirements in the existing probe scanning method. Comprising the following steps: in a scanning process, triggering monitoring after completing signal acquisition of each pixel point so as to obtain a current concerned signal; setting a trigger condition of the current concerned signal, and executing a preset trigger operation under the condition that the trigger condition is met; and then signal acquisition of a next pixel point is carried out. According to the invention, the self-adaptability and efficiency of AFM scanning can be improved.

This gas barrier laminate is provided with: a barrier layer having a substrate provided with a barrier coating layer; a sealing layer overlapping the first main surface of the barrier layer; a support layer overlapping the second main surface of the barrier layer; the first bonding layer is used for bonding the barrier layer and the sealing layer; and a second adhesive layer that bonds the barrier layer and the support layer, the first adhesive layer contains a two-component curable urethane adhesive, the base material contains a polyolefin, and the elastic modulus of the first adhesive layer measured by a scanning probe microscope after the gas barrier laminate has been subjected to a retort treatment is 5 MPa or more and less than 53 MPa.

The invention relates to a method and apparatus for prolonging the time period until a measurement tip of a scanning probe microscope is changed. In particular, the invention relates to a method of hardening a measurement tip (120, 127, 130) in a scanning probe microscope (100), the method comprising the step of treating the measurement tip (120, 127, 130) with a beam (160) of an energy beam source (152), the energy beam source (152) being part of the scanning electron microscope (100).

A method for inspecting and reviewing defects in a substrate using a scanning probe microscope comprising a plurality of scanning heads and a substrate carrier, wherein each of the plurality of scanning heads comprises a probe including a probe tip positioned for scanning the substrate surface, the method comprising: - providing a substrate on a substrate carrier, wherein the substrate carrier is positioned to position the substrate for at least one of the plurality of scanning heads; - scanning the substrate surface in a first scanning mode using at least one first scanning head of the plurality of scanning heads; - scanning the substrate surface in a second scanning mode using at least one second scanning head of the plurality of scanning heads, wherein at least one first scanning head and at least one second scanning head are different scanning heads of the plurality of scanning heads, the method for inspecting and reviewing defects, wherein the first scanning mode has a lower scanning resolution than the second scanning mode.

A technique for improving the accuracy of a sample elastic modulus calculation is provided. A control section of a scanning probe microscope having a displacement detector for detecting probe displacement generates a first force curve that is a measurement result of the probe displacement accompanying a change in the distance between the probe and the sample, using the detection output of the displacement detector with respect to the sample. Furthermore, the control section generates a second force curve by excluding a region shorter than the distance of an inflection point in the first force curve from the first force curve. Then, the control section calculates the elastic modulus of the sample based on the second force curve and a theoretical formula.