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208results about "Magnetic field measurement using permanent magnets" patented technology

MEMs Amplitude Modulator and MEMs Magnetic Field Sensor Including Same

ActiveUS20160211803A1Amount of variation in variableImproving sensing functionMagnetic field measurement using galvano-magnetic devicesAmplitude modulation with mechanical/acoustic driven partsCapacitanceMEMS magnetic field sensor
The present invention provides an amplitude modulator, which is disposed in an area through which a magnetic field flows so as to modulate amplitudes, comprising: a substrate; a first driving electrode which receives a first frequency signal and a second frequency signal supplied from the substrate and carries out resonant motion by the magnetic field; and a second driving electrode for receiving the second frequency signal and carries out resonant motion by the first driving electrode and the magnetic field, wherein a modulated signal is generated by modulating the amplitudes of the first and second frequency signals through the resonant motions of the first and second driving electrodes. Therefore, since the signal generated by modulating a carrier signal through mechanical resonance according to the magnetic field is outputted, amplitude modulation can be carried out without a complicated circuit configuration. In addition, since an MEMS device is a single structure that does not include an insulating layer, a single signal is applied to one structure, thereby simplifying driving, and all the driving electrodes of both ends thereof are driven so as to double a change in variable capacitance, thereby improving sensing ability.
Owner:LG INNOTEK CO LTD

Magnetic-resistance inertial sensor chip

The invention discloses a magnetic-resistance inertial sensor chip. The magnetic-resistance inertial sensor chip comprises a substrate, a vibrating diaphragm, a sensing magnetic resistor and at leastone permanent magnetic film, wherein the vibrating diaphragm covers one side surface of the substrate; the sensing magnetic resistor and the permanent magnetic films are arranged on the surface, awayfrom the substrate, of the vibrating diaphragm; a contact electrode is also arranged on the surface, away from the substrate, of the vibrating diaphragm; the sensing magnetic resistor is connected with the contact electrode through a connecting wire; the substrate comprises a hollow cavity which is formed through etching; and one of the sensing magnetic resistor and the permanent magnetic films orthe whole of the sensing magnetic resistor and the permanent magnetic films can be arranged in a vertical protection area of the hollow cavity in the vibrating diaphragm. A magnetic field produced bythe permanent magnetic films of the magnetic-resistance inertial sensor chip disclosed by the invention has changed vectors in the direction of the sensitivity of the sensing magnetic resistor, so that a resistance value of the sensing magnetic resistor is changed, so that change of output electric signals is caused. According to the magnetic-resistance inertial sensor chip disclosed by the invention, the high sensitivity and the high-frequency response property of the magnetic resistor are utilized, so that the intensity of the output signal and the frequency response are improved, and detection of faint pressure, vibration or acceleration and high-frequency vibration are facilitated.
Owner:MULTIDIMENSION TECH CO LTD
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