45 results about "Scanning microscopy" patented technology

The invention discloses a turntable-based dual confocal image scanning microscope and an imaging method, and relates to the technical field of optical elements, systems, instruments and imaging. The imaging light source assembly, the optical fiber transmission assembly, the light source collimation assembly, the structured light generation assembly, the turntable assembly, the microscopic amplification assembly and the camera detection assembly are arranged along a light path; the structured light generation module realizes structured light illumination on a sample surface by loading a specific mask sequence, super-resolution imaging is realized, pinholes in the turntable assembly are equidistantly arranged according to an Archimedes spiral, and the turntable assembly rotates at a high speed to realize multi-point parallel scanning and de-scanning; the detection module performs detection by using an area array detector, so that the resolution improvement of double diffraction limit is realized; according to the dynamic pinhole array-pixel redistribution method, super-resolution reconstruction is carried out based on an image scanning microscopic system principle, and Stokes shift, optical aberration and other non-ideal conditions can be effectively corrected.

According to the laser confocal scanning microscope, the scanning image distortion correction method and the acquisition card provided by the invention, the transflective mirror is fixedly arranged between the resonance galvanometer and the galvanometer galvanometer, and the monitoring light path and the second detector are arranged in the transmission direction of the transflective mirror. The acquisition card is respectively connected with the first detector and the second detector; the confocal signal and the grating signal which are synchronously acquired by the acquisition card in an isochronous manner are twin images in time and space, and the grating image formed by the grating signal depicts the movement of the resonance galvanometer in the scanning process, so that distortion correction can be performed on the twin object plane image of the grating image through distortion analysis on the grating image, and the distortion correction accuracy is improved. Therefore, the correction accuracy is effectively improved, and the method is not easily influenced by factors such as environment, service life and optical path deviation. Moreover, in the distortion correction process, correction is carried out through the odd-numbered line sub-graphs and the even-numbered line sub-graphs, so that the distortion correction accuracy is further improved.

The invention relates to the technical field of ultrasonic scanning microscopes, in particular to a system and a method for measuring surface unevenness and warping of an ultrasonic scanning microscope. The system comprises a water tank, a light emitting device, a light receiving device and a signal processing module, the light emitting device generates line laser through a semiconductor laser and an optical shaping module, and scanning is achieved through a high-precision galvanometer. The light receiving device is provided with a narrow-band filter, a telecentric lens and a CMOS sensor and is used for capturing a light spot image; the signal processing module integrates sub-pixel positioning, galvanometer nonlinear correction, self-adaptive filtering and temperature compensation algorithms, light spot center sub-pixel-level positioning is achieved through Gaussian curved surface fitting, galvanometer correction and temperature drift compensation are combined, the measurement precision and stability are improved, and finally high-precision height information is fed back to an ultrasonic scanning system. According to the invention, the accuracy and reliability of surface unevenness and warping measurement are improved.

The invention provides an MLCC short-circuit product defect position analysis method, and belongs to the technical field of multilayer ceramic capacitor failure analysis. The method comprises the following steps: carrying out rapid leakage current detection on MLCC products for 0.5-2 seconds, and screening out short-circuit products of which the leakage current is greater than a first preset threshold value; products with crack defects are eliminated through an acoustic scanning microscope; gradually applying increased direct-current voltage to the screened crack-free short-circuit product, monitoring leakage current in real time, and terminating the test when the sudden change amplitude of the current exceeds a second preset threshold value; then acoustic scanning is carried out on the protective cover surface and the cutting surface, and two-dimensional coordinates of defect points on the two surfaces are extracted; and calculating the three-dimensional coordinates of the defect in the MLCC through image registration and a spatial inversion algorithm. According to the method, the internal hidden short circuit defect can be identified and positioned in a non-destructive manner, the positioning precision and the analysis efficiency are improved, and the method is suitable for batch failure analysis and manufacturing process optimization.

The present application relates to the technical fields of optical elements, systems, instruments and imaging, and discloses a multi-point confocal image scanning microscope and an imaging method. According to the present application, an imaging light source assembly, a light source collimation assembly, a multi-focus generation assembly, a multi-focus moving assembly, a multi-focus projection assembly, and a camera detection assembly are arranged along a light path, so as to achieve complete image recording. A unique multi-focus illumination mode provided by the present application is used in combination with an optical locked-phase detection technology, so that a defocus-induced stray signal during thick sample imaging can be effectively removed, and depth imaging is performed; the multi-focus generation assembly is switched, so that switching between a wide-field mode, a confocal mode and a super-resolution mode is easily achieved. Moreover, the present application uses a pixel redistribution algorithm to perform super-resolution reconstruction, and uses a multi-image deconvolution reconstruction algorithm and redundant information in a raw data set to perform frame reduction reconstruction, thereby increasing the imaging speed. Compared with the existing methods, the present application can increase the imaging speed, improve the imaging depth, reduce phototoxicity, and widen the diversity of imaging modes.

The invention provides a microscope with rapid quasi-confocal detection. The simultaneous acquisition of multiple images in a microscope should be possible with greater flexibility. In addition, simultaneous acquisition should be made possible with less effort. In a microscope (1) having a main beam splitter (22) and an adjustable beam deflection unit (21) for moving illumination light through a sample space (P), the beam deflection unit (21) is optically arranged for this purpose between a light source (12) and the main beam splitter (22) such that sample light away from the beam deflection unit (21) passes to a sensor (28), both the illumination light and the sample light passing through the same intermediate image (ZB). The invention also provides a method for scanning image acquisition by means of a scanning microscope.

An image scanning microscope includes: an excitation unit that generates excitation light; an objective lens pointing to the sample space and guiding the excitation light into the sample space and receiving the detection light from the sample space; a scanning unit arranged along a beam path between the excitation unit and the objective lens and selectively directing the excitation light into different regions of the sample space via the objective lens; a detection arrangement comprising at least one spectral coding element that changes a spatial distribution of the intensity of the detection light based on the wavelength of the detection light and at least one array detector that detects the spatial distribution of the intensity of the detection light; a main beam splitter that directs the excitation light into the objective lens via the scanning unit and directs the detection light into the detection arrangement; and a control unit that controls the excitation unit to set the excitation modality and determines a spatial distribution of concentrations of at least two different fluorophore species in a sample arranged in the sample space based on a spatial distribution of the intensity of the detection light and based on the excitation modality and / or the photon arrival time.

The invention relates to a scanning microscope (1) comprising a first assembly (I) with a sample stage (2) for holding a sample carrier (4) and a sample (5) placed thereon in a sample chamber. Furthermore, a second assembly (II) is provided, comprising illumination optics (7, 8) for guiding and shaping illumination radiation and for illuminating the sample (5); and detection optics (9) for collecting and guiding detection radiation emanating from the sample (5) along a detection beam path. The scanning microscope (1) is characterized by the fact that the second assembly (II) has a first section (12.1) of the detection beam path; a third assembly (III) is present which includes a second section (12.2) of the detection beam path; and at least one drive (6) is present to move the second assembly (II) relative to the third assembly (III) in a controlled manner. The invention further relates to a use of the scanning microscope (1).

An image scanning microscope (100, 200) comprises a detection arrangement (112, 204) comprising a beam splitting element (122) configured to receive detection light (120), to split the detection light (120) into two parts, to direct a first part (124a) of the detection light (120) into a first beam path (126a), and to direct a second part (124b) of the detection light (120) into a second beam path (126b). The first beam path (126a) comprises a spatially resolved detector (128, 202) configured to detect a spatial distribution of the intensity of the first part (124a) of the detection light (120). The second beam path (126b) comprises a spectrally resolved detector (130) configured to detect a spectral information of the second part (124b) of the detection light (120). The image scanning microscope (100, 200) further comprises a controller (116) configured to determine a spatial distribution of at least one fluorophore species in a sample (104) based on the spatial distribution of the intensity of the first part (124a) of the detection light (120) and the spectral information of the second part (124b) of the detection light (120).

The invention discloses an assessment test and decision-making method for regression use of a domestic plastic package layered device based on layering characteristics, and relates to the field of reliability assessment and test of plastic package layered devices. The process comprises the following steps: obtaining a screened plastic package layered device, and determining an initial state and basic parameters of a to-be-tested device; extracting hierarchical feature data; classifying the devices based on the hierarchical features; designing a multi-stress assessment test, and carrying out the multi-stress assessment test on different layered devices to obtain reliability layered characteristic changes and test data of the devices; and judging the regression use qualification of the device. The hierarchical feature data is obtained through an acoustic scanning microscope and a computer vision algorithm based on OpenCV; the design method of the multi-stress assessment test is an iterative test framework comprising configurable environmental stress (such as high temperature and high humidity, temperature cycle) and synchronous electrical stress (such as dynamic / static signals); the regression use decision-making method is a comprehensive decision in combination with the category of the device, the electrical parameter state after examination, the layering proportion change trend and whether reliability improvement measures such as coating and the like are added or not; according to the method, the screened layered devices can be scientifically evaluated and recycled, and the accuracy and economical efficiency of screening decisions are remarkably improved.

The utility model belongs to the field of supports of microscopes, and particularly relates to a multifunctional support for a high-resolution confocal scanning microscope. The device comprises a horizontally arranged bottom plate and a microscope body, the bottom plate is horizontally provided with a placing groove, a driving assembly is arranged between the bottom plate and the placing groove, a stand column is vertically fixed on the bottom plate at the rear side of a placing plate, a connecting block is hinged to the front side wall of the top of the stand column, a fixing rod is arranged at the top of the connecting block, and a limiting assembly is arranged on the fixing rod. The front side wall of the fixing rod is provided with a first insertion block used for installing a microscope body, the side wall of the fixing rod is provided with a plurality of adjusting blocks which freely rotate left and right relative to the fixing rod, and the adjusting blocks are provided with second insertion blocks used for installing accessories. According to the design, the device can be conveniently driven to horizontally rotate in the observation process so that observation can be more comprehensive and specific, accessories with different functions can be conveniently additionally installed according to experiment requirements, the adaptability is higher, the flexibility is higher, and meanwhile the use cost is reduced.

To provide an image scanning microscope and a method capable of excellently determining the spatial distribution of the concentration of at least two different phosphor species in a sample.SOLUTION: The scanning unit 110 is arranged along the beam path between the excitation unit 108 and the objective 102 and directs the excitation light 118 via the objective onto different regions of the sample space 106. The image scanning microscope 100 also includes a detection device 112 that includes a spectral encoding element 128 that varies the spatial distribution of the intensity of the detected light based on the wavelength of the detected light 126, and an array detector that detects the spatial distribution. The image scanning microscope also comprises a control unit 116 for controlling the excitation unit to set an excitation mode and for determining a spatial distribution of a concentration of at least two different fluorophore species in a sample 104 arranged in the sample space on the basis of the spatial distribution and the excitation mode and / or photon arrival times detected by the time-resolved detector elements of the detection device.SELECTED DRAWING: Figure 1

The utility model provides an automatic focusing device of an ultrasonic scanning microscope, which comprises a motion platform module, a distance measuring module and an ultrasonic probe module, the motion platform module comprises a scanning shaft, a focusing shaft and a stepping shaft, the scanning shaft is arranged in the X-axis direction, the stepping shaft is arranged in the Y-axis direction, the focusing shaft is arranged in the Z-axis direction, and the motion platform module is used for focusing the ultrasonic module probe; the distance measuring module is mounted on the scanning shaft or the focusing shaft and is used for measuring the surface height of the measured workpiece; and the ultrasonic probe module is mounted on the focusing shaft and is used for transmitting and receiving ultrasonic waves to detect the detected workpiece. According to the utility model, the distance measuring module is adopted to obtain the height change of the surface of the measured workpiece, the heights of the focusing shaft and the ultrasonic probe module are automatically adjusted in real time, the probe and the measured workpiece are always kept on the optimal focal plane, automatic focusing is realized, and the ultrasonic scanning image quality is improved.

1. A method for scanning a microscope slide using at least two microscope slide scanners, comprising: The method comprises the following steps: a) loading a plurality of microscope slides (14) each belonging to one of a plurality of sample sets into a supply unit (6) for microscope slides (14); b) transporting one microscope slide (14) from the supply unit (6) to each microscope slide scanner (7, 8, 9, 10, 11, 12) that does not have a microscope slide loaded thereon; c) performing a scanning process on each loaded microscope slide scanner (7, 8, 9, 10, 11, 12); d) transporting each scanned microscope slide (14) from each microscope slide scanner (7, 8, 9, 10, 11, 12) to an intermediate storage location (16); e) providing a data record of each scanning process for evaluation; f) transferring all microscope slides (14) of the sample set from intermediate storage (16) to final storage (17); Includes.

The application provides a compact automatic slide scanning device, comprising an electronic scanning microscope, the electronic scanning microscope comprising a liftable lifting table, the lifting table being provided with a two-dimensional displacement table, the two-dimensional displacement table comprising a connecting base plate, the connecting base plate being used for being connected with the lifting table of the electronic scanning microscope, the upper end of the electronic scanning microscope being provided with a movable bearing table, the bearing table being provided with a movable slide clamp tray along the length direction, the slide clamp tray being used for placing a slide clamp main body, the moving direction of the slide clamp tray and the bearing table being perpendicular, one end of the bearing table being provided with a slide clamp storage rack which can move up and down, the slide clamp storage rack being a frame-shaped structure with both ends being through, the through end of the slide clamp storage rack facing the length direction of the bearing table, the slide clamp storage rack being provided with a plurality of slide clamp insertion slots for storing the slide clamp main body along the height direction, the upper side of one end of the bearing table close to the slide clamp storage rack being provided with a downward preview camera, and the problems of miniaturization and light weight of the slide scanner are solved.

The present invention discloses an end detection device for multilayer ceramic capacitors, which includes an introduction plate, cutting glue, and an ultrasonic scanning microscope; a plurality of introduction holes are formed in the introduction plate, and the introduction holes are used for implanting upright multilayer ceramic capacitors; the cutting glue is used for pasting each of the multilayer ceramic capacitors implanted into the introduction holes; the ultrasonic scanning microscope includes a water tank and a sensor probe arranged above the water tank, the water tank is used for carrying the introduction plate implanted with a plurality of multilayer ceramic capacitors, and the sensor probe is used for scanning the multilayer ceramic capacitors to obtain an entity scan image and a back scan image of the scanning area. The present invention can judge whether each multilayer ceramic capacitor is a defective product one by one through the entity scan image and the back scan image, thereby realizing batch detection of multilayer ceramic capacitors, with short detection time, high efficiency, and high precision measurement. The present invention discloses a method for detecting the ends of multilayer ceramic capacitors.

The invention relates to the technical field of scanning microscopes, in particular to a probe piece bearing device and a using method thereof. The invention provides a probe piece bearing device. The probe piece bearing device comprises a bearing plate, a locking piece and at least one locking piece, wherein the bearing plate is matched with a microscope carrying platform; the bearing plate is provided with a bearing part and a handheld part which are connected, the top surface of the bearing part is lower than the top surface of the handheld part, so that a vertical limiting surface is formed between the top surface of the bearing part and the top surface of the handheld part, the bearing part is used for bearing a probe piece, and the bearing part is provided with a through hole extending along the thickness direction of the bearing plate. The probe piece is locked on the top surface of the bearing plate by the locking piece, so that the probe piece is kept in an absolutely horizontal state and does not incline, and therefore, when the probe piece is observed by the scanning microscope, the focusing and the flat scanning of the microscope are not influenced by the inclination of the probe piece.

The invention provides a laser confocal scanning microscope, a distortion correction method and an acquisition card, and the laser confocal scanning microscope comprises a transflective mirror which is fixedly installed between a resonance galvanometer and a galvanometer galvanometer, and a monitoring light path and a second detector which are arranged in the transmission direction of the transflective mirror. The acquisition card is respectively connected with the first detector and the second detector; the confocal signal and the grating signal which are synchronously acquired by the acquisition card in an isochronous manner are twin images in time and space, and the grating image formed by the grating signal depicts the movement of the resonance galvanometer in the scanning process, so that distortion correction can be performed on the twin object plane image of the grating image through distortion analysis on the grating image, and the distortion correction accuracy is improved. Therefore, the correction accuracy is effectively improved, and the method is not easily influenced by factors such as environment, service life and optical path deviation.

The utility model provides a scanning microscope control device, which comprises a main control chip circuit, a microscope light path dimming circuit, a motor driver circuit and a scanning table control circuit, signals are sent to the microscope light path dimming circuit, the motor driver circuit and the scanning table control circuit, and signals returned by all the circuits are received; the microscope dimming circuit is used for controlling and dimming a dimming lamp after receiving the dimming signal sent by the main control chip circuit; the motor driver circuit is used for controlling a motor through a driver chip after receiving the control signal sent by the main control chip circuit; the scanning table control circuit is used for receiving a signal of the main control chip, controlling the scanning table, receiving a position signal sent back by the scanning table and sending the position signal back to the main control chip. According to the utility model, efficient and accurate control of the scanning microscope is realized.

The invention mainly relates to a wafer chuck (1) for handling a wafer, in particular in a wafer processing device, further preferred in an acoustic scanning microscope, having a holding device for the wafer, wherein the holding device has a free space (12) for receiving the wafer (50) and a carrier (10) having several wafer contact fingers (16, 18) for the wafer (50) which are movable relative to the carrier (10), wherein the wafer contact fingers (16, 18) are arranged in a ring around the free space (12) for the wafer (50), preferably in one plane, wherein the wafer contact fingers (16, 18) are movable towards or away from the free space (12) for the wafer (50), wherein preferably only one actuating device (20) for the wafer contact fingers (16, 18) is provided, which, when actuated, simultaneously moves or can simultaneously move the wafer contact fingers (16, 18).

The invention provides a defect excitation test and reliability evaluation method for a plastic package component. The method comprises the following steps: acquiring a to-be-tested sample of the plastic package component; performing appearance detection on the to-be-detected sample and recording first appearance detection data; performing electrical parameter testing on the to-be-tested sample to obtain first electrical parameter data; performing ultrasonic scanning microscope detection on the to-be-detected sample to obtain a first ultrasonic detection result; determining a mounting condition corresponding to the to-be-detected sample, and carrying out mounting treatment on the to-be-detected sample based on the mounting condition to obtain a mounted to-be-detected sample; performing a temperature cycle test on the assembled to-be-tested sample; performing appearance detection, ultrasonic scanning microscope detection and electrical parameter test on the assembled to-be-tested sample after the temperature cycle test to obtain second appearance detection data, a second ultrasonic detection result and second electrical parameter data; and comparing and analyzing the appearance detection data, the electrical parameter data and the ultrasonic detection result to obtain a first evaluation result of the to-be-detected sample.

The invention discloses a tip of a ferroelectric optical tunnel scanning microscope. The tip is prepared from a ferroelectric material. The needle tip is divided into a left part and a right part which are symmetrical, the polarization directions of the left part and the right part are opposite, and a tail-to-tail or head-to-head polarized positive domain and negative domain are prepared on the needle tip; the length of the needle tip is 100-10mm, the width of the needle tip is less than or equal to 100mu m, the thickness of the needle tip is less than or equal to 100mu m, and a grating is processed on the side wall of one domain of the needle tip. The invention also provides a preparation method of the advantage ferroelectric optical tunnel scanning microscope needle tip. The needle point is used for the optical scanning tunneling microscope, traditional optical surface information can be obtained, electromagnetic force action information can also be obtained according to ferroelectric characteristics, and therefore a domain wall structure can be better detected.

The invention relates to a system and method for realizing scanning microscopic imaging based on mass spectrum response of a single-channel hollow probe, and the system comprises an operation system, a data collection unit, a displacement control unit, a position adjustment unit, an atmosphere control unit, a vibration isolation platform, a Faraday shielding box, a high-sensitivity mass spectrometer, a probe, and a probe frame. The position of the probe frame and the position of the sample can be adjusted in space through the position adjusting unit, the position adjusting unit is adjusted and controlled by the displacement control unit, and the position adjusting unit specifically comprises a coarse adjustment displacement table and a piezoelectric ceramic displacement table. In the future, a scanning probe microscope is expected to be popularized to gas-solid catalysis research, detection of catalytic reaction products is achieved, and the method is used for synchronously representing reaction activity, selectivity and structure morphology and revealing the structure-activity relationship of catalytic reaction.

This invention relates to the field of destructive physical analysis or failure analysis technology for molded components, and particularly to a method for detecting and identifying the location of internal voids in molded components. It addresses the problems of existing molded component inspection methods, such as high time consumption, limited observation range of the molded component's interior, and inability to accurately pinpoint the exact location of internal defects. The method for detecting and identifying the location of internal voids in molded components includes the following steps: performing acoustic scanning microscopy on the molded component to check for the appearance of black shadows in the image; if black shadows are present, performing X-ray inspection on the shadowed area to observe whether the molding compound forms an image with light and dark differences; if an image with light and dark differences is formed, performing laser decapsulation; observing whether voids are present, and recording the void location. This invention can accurately pinpoint the location of internal voids, improving the efficiency and accuracy of internal void location determination.

A method and a system for removing particles during laser-based scanning microscopy are disclosed. The method comprises: scanning a sample (12) in a medium (19) with focused laser light along a plurality of scanning areas (21) and thereby determining a plurality of measurement values, each indicating scattered light from a corresponding one of the scanning areas (21); determining an occurrence of a particle (30) in an active scanning area (22) based on comparing values of a measurement values subset which corresponds to a scanning areas subset (32) of spatially connected scanning areas containing the active scanning area (22); in reaction to having determined the occurrence of the particle (30) in the active scanning area (22), removing the particle (30) from the active scanning area (22), comprising one of: providing a relative movement of the focused laser light from the active scanning area (22) to outside the scanning areas subset (32) and subsequently lowering a laser power of the focused laser light below an optical trapping threshold, and lowering the laser power of the focused laser light below the optical trapping threshold and providing a flow of the medium (19) in the active scanning area (22).

Deep-ultraviolet scanning microscopy uses a first imaging apparatus arranged on a first side of a sample and a second imaging apparatus arranged on a second side of the sample. The first imaging apparatus includes a first ultraviolet light source to illuminate the first side of the sample and a first camera to receive light emitted from the first side of the sample. The second imaging apparatus includes a second ultraviolet light source to illuminate the second side of the sample and a second camera to receive light emitted from the second side of the sample. The first and second sides can be imaged in parallel, and can be sparsely sampled to increase imaging speed. A machine learning model can be used to generate images from the acquired signals. Signals can be detected from intrinsic sources (e.g., tryptophan) and extrinsic sources (e.g., propidium iodide and / or eosin Y) at the same time.

Practical implementations of particle-induced X-ray emission (PIXE) on a focused ion beam device or a dual beam device that includes both focused ion beam and scanning microscopy capabilities are described. Accordingly, an analysis method includes: directing ions including a mixture of protons and non-hydrogen ions onto a sample, where the kinetic energy of the ions of the mixture is no more than 50 kiloelectron volts (keV); and detecting and measuring X-rays emitted from the sample in response to the protons and the non-hydrogen ions impacting onto the sample.

The invention relates to a scanning microscope (1) having a first assembly (I) comprising a sample stage (2) for holding a sample carrier (4) and a sample (5) placed thereon in a sample space. In addition, a second assembly (II) is present, which is provided with an illumination optical unit (7, 8) for guiding and shaping an illumination radiation and for illuminating the sample (5); and comprising a detection optical unit (9) for collecting and guiding a detection radiation coming from the sample (5) along a detection beam path. The scanning microscope (1) is characterised in that the second assembly (II) has a first section (12.1) of the detection beam path; a third assembly (III) is present, which comprises a second section (12.2) of the detection beam path; and at least one drive (6) is present in order to move the second assembly (II) relative to the third assembly (III) in a controlled manner. The invention further relates to a use of the scanning microscope (1).

The application discloses an automatic tool setting method for repairing micro-defects on the surface of an optical crystal based on cooperation of two microscopes, and relates to the technical field of precise optical processing. The application first determines a plane fitting equation of a crystal surface to be repaired through a three-point "trial cutting method", calculates distances from different defect points to be repaired to a tool setting surface according to plane position information of optical surface micro-defects obtained by a scanning microscope, and determines a tool setting feeding distance to improve the safety of tool setting efficiency. Then, the application calculates the distance from a tool tip to the crystal surface to be repaired during tool setting based on the "inverted image method" of a repairing microscope. Finally, the tool setting pit in the scanning microscope is used as a criterion for determining whether tool setting is completed. The tool setting method of the application solves the problem that the "inverted image method" is prone to misjudgment due to tool tip adhesion, and ensures the accuracy of tool setting.