47 results about "Phase mask" patented technology

Provided are an apparatus for manufacturing a cover window, a method for manufacturing a cover window, and an electronic device including a cover window. The apparatus for manufacturing a cover window includes a light source outputting an original laser beam, a beam splitter splitting the original laser beam into a main beam and at least one sub-beam, a first phase mask diffracting the main beam to convert the main beam into a straight beam, a second phase mask diffracting the sub-beam to convert the sub-beam into a dot-line beam including a plurality of dot beams, a beam combiner combining the main beam and the sub-beam to form a single combined beam, and an objective lens focusing the combined beam onto a focal plane, wherein the beam splitter sets extension directions of polarization axes of the main beam and the sub-beam to be different from each other.

The application relates to an optimization design method of a polygon-based multi-plane device, comprising the following steps: S1. determining parameters of a polygon-based MPLC device; S2. constructing a topological-mode coupling model to determine a phase compensation amount; S3. generating an initial phase mask according to the phase compensation amount calculated in step S2 and in combination with phase distribution characteristics of a target mode; S4. outputting optimized phase mask parameters based on a genetic optimization algorithm; and S5. simulation verification: building simulation models of different topological structures, inputting the optimized phase mask parameters, simulating a mode evolution process, and analyzing whether a performance threshold value meets a demand. The application solves the problems that a traditional algorithm ignores the influence of a topological structure and the generality of a phase mask is poor, realizes accurate design of different polygon devices, and thus effectively reduces loss and improves shaping effect.

The invention discloses a multi-wavelength channel diffraction neural network system based on threshold screening and a processing method, and belongs to the technical field of artificial intelligence and optical computing. Comprising an encoding module used for encoding task information corresponding to different to-be-processed tasks to multiple light beams with different working wavelengths output by a light source module to form multiple task channel light fields; the optical diffraction module comprises a plurality of modulation layers; the optical diffraction module is used for receiving the task channel light fields and realizing diffraction modulation and threshold screening of the task channel light fields by changing the metasurface structures on different modulation layers; each task channel light field shares the same set of diffraction modulation parameters, namely parameters such as phase, mask generation and threshold; threshold screening: comparing the mask generation parameter with a threshold parameter, performing binarization selection on the phase parameter according to a comparison result, and screening out a target phase parameter; the output detection module detects the output light intensity. Task channels are expanded, and the system integration degree is improved.

The optical wave selective switch device comprises a fiber array unit comprising a plurality of input / output ports for sending / receiving laser beam signals having different bandwidths, a switching element for steering laser beams in a switching direction, to specific output ports of the fiber array unit, a dispersing element which disperses laser beam signals which are incident thereon, depending on the wavelength of the laser beam signals. Furthermore, the optical wave selective switch device comprises a diffractive optical element with a two-dimensional phase mask is located adjacent to the switching element and outside of electrodes of the switching element so as to introduce individual phase correction for each wavelength corresponding to respective channels in the optical wave selective switch device.

The application discloses a phase mask plate preparation method for inhibiting a Fabry-Perot effect, and comprises the following steps: a dispersion fiber grating model is established, and reflection spectrum, transmission spectrum and group delay curve of the dispersion fiber grating are obtained through simulation; an ultra-Gaussian cut-off function model is established; according to the reflection spectrum and the transmission spectrum of the dispersion fiber grating and the ultra-Gaussian cut-off function, the reflection spectrum, the transmission spectrum and the group delay curve of the optimized dispersion fiber grating are obtained through simulation, and then a refractive index modulation depth distribution curve of a grating area of the phase mask plate is obtained; the refractive index modulation depth distribution curve of the grating area of the phase mask plate is optimized to obtain an optimized refractive index modulation depth distribution curve; a diffraction efficiency distribution curve and a groove depth of the phase mask plate are calculated; and the phase mask plate is obtained according to the groove depth of the phase mask plate. According to the application, the groove depth distribution of the phase mask plate used for writing is only adjusted, the Fabry-Perot effect can be effectively inhibited, and therefore the reflection spectrum flatness of the dispersion fiber grating is improved.

A design method of a Gibbs-Wulff optical vortex array mask plate, steps are as follows: obtaining an electric field expression of a Gibbs-Wulff optical vortex array, combining the amplitude, phase of the Gibbs-Wulff optical vortex array with a blazed grating, obtaining a complex transmittance function of the Gibbs-Wulff optical vortex array mask plate, and the mask plate described based on the complex transmittance function is the Gibbs-Wulff optical vortex array mask plate. The present application utilizes the principle of computer holography, and obtains the amplitude modulation phase mask plate of the Gibbs-Wulff optical vortex array through computer coding, so that the Gibbs-Wulff optical vortex array with controllable boundary and controllable structure and arrangement mode in the boundary can be generated. Thus, the present application has important application value in the fields of particle manipulation and optical micro-machining.

The invention relates to the technical field of extreme ultraviolet lithography masks, in particular to an extreme ultraviolet lithography mask multilayer film defect detection method based on a photoelectron image, which comprises the following steps: S1, simulating to generate m phase type mask multilayer film defect structures with different morphological characteristics; s2, using an interpolation approximation method to extract electric field intensity distribution near the surface layer of the mask multilayer film defect structure, and establishing a simulation photoelectron image data set; s3, constructing a neural network model for defect detection, training the network, and obtaining an optimal network weight parameter; and S4, detecting the type and morphology parameters of the defect structure of the multi-layer film of the mask. The method has the characteristics that the photoelectron image is easy to obtain, the neural network training data set is small, and the detection efficiency is high, and high-precision nondestructive detection of the extreme ultraviolet lithography mask multilayer film defects can be realized.

The invention relates to a method (200) for determining relative lateral data of features of a semiconductor substrate, the method (200) being implemented by a device comprising: - an imaging system (11, 13, 14, 16) having a depth of field, - a spatial phase mask (17) positioned in the aperture stop of the imaging system or in a conjugate plane of the aperture stop and configured to modulate the optical transfer function of the imaging system, and - an image sensor (12), wherein the modulated optical transfer function is adapted to extend the depth of field of the imaging system, the method (200) comprising the following steps: - acquiring (202) an image of a scene comprising at least a first feature of the semiconductor substrate in a first plane and a second feature of the semiconductor substrate in a second plane, the planes being perpendicular to an optical axis of the imaging system and separated by a distance greater than the depth of field of the imaging system; - detecting (204) the first feature of the semiconductor substrate and the second feature of the semiconductor substrate; - determining (206) relative lateral data of the first feature and the second feature. The invention also relates to a device implementing such a method.

An apparatus for checking a component with a periodic structure having substructures arranged on a lattice, the apparatus comprising a measurement radiation source for creating measurement radiation, an optics system, and a camera device. The apparatus further comprises a phase mask device for influencing a phase angle of the measurement radiation and / or an amplitude of the measurement radiation. The phase mask device comprises a dual lattice which is reciprocal to a target shape of the lattice.

This invention discloses a multi-image encryption method based on 3D face keys and multiplexed digital holography. The encryption steps include: using 3D face high-order data acquisition technology, chaotic face structured light phase mask generation technology, grating modulation technology, multiplexed digital holographic coding technology, and watermark embedding technology based on discrete wavelet domain singular value decomposition, multiple plaintext information images can be encrypted into an amplitude-type holographic ciphertext and embedded into a host image; the decryption steps include: the user must first calculate the face similarity using a 3D face multilayer perceptron neural network. If the similarity exceeds a preset threshold, authentication is successful. Then, the final decryption result is generated using watermark image extraction technology based on discrete wavelet transform, image decryption technology based on the Cramer-Kroni relation, and spectral filtering technology; otherwise, authentication fails. This method has advantages such as a large key space, high sensitivity, strong robustness of the 3D face key, and low decryption crosstalk.

This invention relates to the field of image encryption and discloses an optical image asymmetric encryption method based on nonnegative matrix factorization. The encryption method includes the following steps: S1, generating a preliminary encryption result through a first optical transformation based on the original image and a first random phase mask; S2, generating an encrypted result through a second optical transformation based on the preliminary encryption result and a second random phase mask; S3, performing nonnegative matrix factorization on the encrypted result to generate an image matrix and a coefficient matrix; S4, using the coefficient matrix as ciphertext and the image matrix as the private key to complete image encryption. This invention significantly improves the security of optical encryption. It combines nonnegative matrix factorization with double random phase coding to construct an asymmetric encryption mechanism that effectively resists known plaintext, chosen plaintext, and special attacks, while also being robust to cropping and noise interference. The framework is highly scalable and applicable to image and audio data encryption.

This invention provides a method and apparatus for compressing and encrypting snapshots of multiple 3D color objects based on spatial division multiplexing. The method includes: generating an object beam and a reference beam based on a three-primary-color laser source, and generating multiple composite three-color parallel beams based on the object beam; illuminating each 3D color object and a random phase mask connected to each 3D color object with the multiple composite three-color parallel beams, respectively, and calculating the light field distribution of each 3D color object on the corresponding random phase mask plane; encrypting the light field distribution using each random phase mask, and generating an object light field on a detector plane based on the encrypted light field distribution; and generating an encrypted color hologram of multiple 3D color objects by interfering with the reference beam on the detector plane through the object light field and the reference beam. This method can significantly reduce the crosstalk effect during decoding of different encrypted objects, greatly reduce the leakage of object information, and significantly improve security.

Disclosed are a holographic display system using a rotating phase mask and an optimization method thereof. The holographic display system comprises: a light source unit for outputting laser light; a spatial light modulator for phase-modulating incident light; and a rotating phase mask for rotating a mask having a pattern adding a phase of a predetermined size, wherein the rotating phase mask is either located between the light source unit and the spatial light modulator or at the output terminal of the spatial light modulator.

The invention discloses a calculation ghost imaging reconstruction method based on a Vision Transform and a U-Net network, and the method comprises the following steps: 1, enabling a Hadamard matrix of a cut cake sequence to serve as a phase mask, sequentially embedding the Hadamard matrix into a spatial light modulator, sequentially projecting the Hadamard matrix to a target image, and collecting a total light intensity sequence through a barrel detector; 2, partitioning the Hadamard matrix of the cake cutting sequence and the light intensity sequence, performing linear projection on each block to obtain a high-dimensional vector token, adding a position code to each high-dimensional vector token, inputting the high-dimensional vector token into a Transform encoder for processing, and converting the output into a two-dimensional matrix; and step 3, inputting the two-dimensional matrix obtained in the step 2 into the U-Net network to enhance transmission and fusion of feature information until a loss function of the ViT-U-Net network is kept stable, and obtaining a result of calculating ghost imaging. The image reconstructed by the method is high in quality and high in reconstruction efficiency.

A snapshot hyperspectral imaging camera assembly and processing methods are provided that has a higher achievable resolution than a traditional snapshot imager. The camera assembly is compact and can be attached to the output port of any traditional benchtop microscope. This camera assembly has a relay lens that relays the Fourier plane from the microscope onto a phase mask that encodes the spatial information of the target, and a spectral filter array that encodes the spectral information of the target. Measurements are processed with a compressed sensing algorithm and an optimization algorithm to reconstruct a 3D hypercube from 2D intensity measurements.

The optical wave selective switch device comprises a fiber array unit comprising a plurality of input / output ports for sending / receiving laser beam signals having different bandwidths, a switching element for steering laser beams in a switching direction, to specific output ports of the fiber array unit, a dispersing element which disperses laser beam signals which are incident thereon, depending on the wavelength of the laser beam signals. Furthermore, the optical wave selective switch device comprises a diffractive optical element with a two-dimensional phase mask is located adjacent to the switching element and outside of electrodes of the switching element so as to introduce individual phase correction for each wavelength corresponding to respective channels in the optical wave selective switch device.

The invention discloses a femtosecond laser direct writing fiber grating device and method based on spatial light modulator beam shaping. According to the device, programmable modulation is carried out on a femtosecond laser wavefront phase through the spatial light modulator, a periodic dot matrix or stripe array can be generated, and flexible and efficient fiber bragg grating direct writing is realized by combining a spherical aberration beam shaping technology without depending on a traditional phase mask. A high-performance fiber bragg grating (FBG), a weak reflection fiber bragg grating (WFBG) and a point / line / face type grating can be prepared, periodic refractive index modulation is induced in an optical fiber core in a single exposure or scanning exposure mode, the method has the advantages of being flexible in processing, high in efficiency, customizable and the like, and the method is suitable for large-scale popularization and application. The defects of flexibility, preparation efficiency and complex grating processing in the prior art can be effectively overcome, and the method has important application value in the fields of optical fiber communication, optical fiber sensing, optical fiber lasers and the like.

This invention discloses a spatiotemporally pure high even-order dispersion soliton fiber laser and its generation method, belonging to the field of communication technology. It comprises a pump source, a wavelength division multiplexer, a few-mode erbium-ytterbium co-doped fiber, a first photonic lantern, a spectral pulse shaper, a second photonic lantern, a few-mode fiber beam splitter, and a saturable absorber connected sequentially to form a ring optical path. The first photonic lantern decomposes the multimode beam into multiple single-mode beams. The spectral pulse shaper independently applies a phase mask to each single-mode beam, introducing pure high even-order dispersion and compensating for low-order dispersion. The second photonic lantern multiplexes the modulated single-mode beams back into a multimode beam. This invention achieves independent and precise dispersion control of different transverse modes by spatially decoupling the multimode optical field. For the first time, it generates stable soliton pulses dominated by pure high even-order dispersion in a spatiotemporally mode-locked fiber laser, significantly improving pulse energy carrying capacity and providing a new solution for the development of high-energy ultrafast light sources.

The invention discloses a three-order nonlinear coefficient measurement method based on Airy beams, relates to the field of three-order nonlinear coefficient measurement of thin-layer optical materials, and aims to solve the problem that in the prior art, single measurement, high precision and low damage cannot be met at the same time. A cubic phase mask and a sample behind the cubic phase mask are irradiated through parallel Gaussian light, an Airy beam image is collected after Fourier transform and image amplification, and the third-order nonlinear coefficient of the material can be calculated through displacement and light field parameters of the Airy beam. The method is applicable to thin-layer samples, high in measurement precision, capable of directly determining specific coefficient values and symbols through single measurement, applicable to light damage sensitive materials, simple in measurement device and low in data processing difficulty. The invention provides a more robust and less invasive alternative for characterizing the nonlinear response in a thin sample.

The invention discloses a color image encryption method based on deep learning and optical chaotic signals, and the method comprises the steps: firstly carrying out the feature extraction of a color image through a deep learning model, and obtaining feature maps of RGB channels; secondly, the side emitting laser emits light with a set wavelength, an optical chaos phenomenon is caused through a chaos system, and a chaos optical signal is output. Then, the three channel feature maps are respectively coded into holograms through a spatial light modulator, a chaotic light signal is used as an illumination light source for irradiation, an encrypted chaotic light signal is generated through phase modulation and wavelength division multiplexing, and the encrypted chaotic light signal is separated into three independent channel signals through a beam splitter according to RGB wavelengths. And finally, performing inverse modulation decryption on the channel signal, restoring the optical information, converting the optical information into an electric signal, performing image restoration on the electric signal based on a random phase mask, and decrypting the image. According to the method, the security problem of encrypted information in the image encryption process can be effectively solved, and the encryption is more targeted and robust.

Disclosed in the present invention are a phase encoding-based super-resolution imaging system and a super-resolution method, used for improving the imaging resolution and imaging signal-to-noise ratio of a visible light imaging system. The super-resolution imaging system consists of a main imaging lens, a first 4f relay lens, a phase mask, a second 4f relay lens, a camera, and an electric rotating stage. By optimizing a phase function of the phase mask, a transfer function of the super-resolution imaging system has anisotropy on a certain frequency component. The electric rotating stage controls the rotation regulation of the phase mask and the camera captures a series of encoded low-resolution images. By mean of joint spatial- and frequency-domain constraint iteration, the captured images are reconstructed until an algorithm converges, so as to obtain reconstructed images that break through Nyquist sampling. Compared with being based on intensity mask encoding, the method can implement the regulation and control of the anisotropy of a point spread function without losing luminous flux, thereby achieving an imaging resolution improvement of more than 2.5 times.

This invention relates to a method, system, and computer program product for performance evaluation of diffractive optical elements based on measured morphology and simulation analysis. It pertains to the field of diffractive optical element design, testing, and performance evaluation technology, addressing the problem of existing technologies lacking effective analysis methods and evaluation models for diffractive optical elements. The method includes the following steps: Step S1, for a reflective phase mask, constructing a corresponding etching depth distribution based on the designed phase distribution; Step S2, based on the designed phase distribution, constructing a corresponding etching depth distribution and establishing a statistical error model; Step S3, measuring the actually processed diffractive optical element to obtain its surface three-dimensional morphology data and obtaining the actual processing error distribution; Step S4, based on the statistical error model described in Step S2 and the actual processing error distribution described in Step S3, constructing a light field propagation model; Step S5, based on the light field propagation model, performing performance analysis on the diffractive optical element.

A spectral beam combiner (50) comprises at least one transmitting volume chirped Bragg grating, TVCBG, (24, 62) configured to diffract a first broadband beam (42, 66) propagating at one central wavelength, which satisfies the Bragg condition, and incident on the TVCBG (24, 62) at one of (+) (-) Bragg angles, transmit at least one second broadband beam (40, 68) propagating at a second central wavelength, which does not satisfy the Bragg condition, and incident on the TVCBG (24, 62) at the Bragg angle which is opposite to the one Bragg angle of the first broadband beam (42, 66), and combine the diffracted first (42, 66) and transmitted second (40, 68) broadband beams into a first single high-power collimated broadband output beam. The spectral beam combiner (50) further comprises a first thermal lens compensator, wherein a thermal lens is induced in the one TVCBG (24, 62) by one of or both first and second broadband beams (40, 42, 66, 68). The first thermal lens compensator includes a holographic achromatic broadband phase mask, HAPM, recorded in a designated PTR, photo-thermo-refractive, glass plate (35) which is located downstream from the one TVCBG (24, 62) or recorded in a PTR glass plate (35) with the one TVCBG (24, 62) and / or a pair of holographic phase masks, HPM, which are aligned at respective opposite Bragg angles upstream from the one TVCBG (24, 62), the HPMs diffracting the second broadband beam (40, 68) while converting a Gaussian intensity profile thereof to a donut-shaped intensity profile.

The application relates to a multi-image optical phase truncation asymmetric security compression method, relates to the field of image encryption technology, and solves the problems of insufficient nonlinear characteristics, low key security and poor transmission efficiency in the existing optical image encryption process. In the phase truncation asymmetric security compression method, the initial key is encrypted through an elliptic curve algorithm and a hash algorithm, the truncated private key is subjected to class type permutation and scrambling, and the private key is processed as an initial value for generating a composite secondary chaotic phase mask, so that the security of the encryption process is greatly improved; and the method of multi-image encryption solves the problem of low transmission efficiency, and greatly improves the transmission efficiency.

A microscopic imaging apparatus and method having a depth reconstruction effect, the method comprising: acquiring, via an image acquisition assembly, a first image and a second image of an object under test; acquiring an offset loss value for each pixel point at a corresponding object distance based on inverse filters for first and second image capture devices corresponding to a plurality of predetermined object distances and a transformation matrix between the first and second image capture devices at each object distance; and obtaining a depth value for that pixel point based on the offset loss values of the pixel point at all the object distances, thereby completing depth reconstruction and obtaining an extended depth-of-field image and a depth map. By incorporating a specially designed phase mask, an optical extended depth-of-field effect is achieved. Since the depth reconstruction process requires neither multiple image acquisitions nor a displacement platform, the extended depth-of-field image and the depth image can be obtained through a single capture with dual cameras, making the process simpler, more efficient, and more readily implementable.

An overlay metrology system is disclosed. The overlay metrology system may include a controller having one or more processors. The processor may be configured to execute program instructions to cause the processor to receive a pupil image of collected light from an overlay target and to receive a known phase distribution of an illumination beam to be introduced to the overlay target. The processor may model an intensity function related to the pupil image, the known phase distribution, and one or more eccentricity shift parameters of a structure of the overlay target. The processor may fit the pupil image to the intensity function that depends on the known phase distribution and the eccentricity shift parameter. The processor may generate overlay measurements based on the fit.

An optical sensor device can include an optical sensor including a set of sensor elements, an optical filter including one or more channels, a phase mask configured to distribute a plurality of light beams associated with an object in an encoded pattern on an input surface of the optical filter, and one or more processors. The one or more processors can be configured to obtain sensor data associated with the object from the optical sensor and can determine a distance of the object from the optical sensor device. The one or more processors can select a processing technique to process the sensor data based on the distance, where the processing technique is an imaging processing technique or a spectral processing technique. The one or more processors can process the sensor data using the selected processing technique to generate output data and can provide the output data.

The invention discloses a preparation method of a phase mask plate with nonlinear + / -1-order diffraction efficiency and period distribution. For dispersion fiber grating reflection spectrum flatness degradation caused by dual effects of cladding mode coupling and the Fabry-Perot effect, gate region refractive index modulation depth distribution curve optimization is carried out, and design parameters of phase mask plate nonlinear + / -1 level diffraction efficiency and groove depth distribution are obtained; according to the requirement for femtosecond laser system multi-order dispersion registration, improvement of phase mask plate groove width distribution design parameters is carried out according to the mapping relation between a multi-order dispersion value and a non-linear period, and finally the phase mask plate preparation method with + / -1-order diffraction efficiency and period distribution optimization is obtained. The method provides an effective means for preparation of the dispersion fiber grating which is highly flat in reflection spectrum and can be registered with multi-order dispersion of a femtosecond laser system, and compared with the prior art, the method provided by the invention has the advantages of low cost, high flexibility, high stability and the like.

An apparatus and method for inspecting a component, and a lithographic system. The invention relates to a device (1) for inspecting a component (2) having a periodic structure (3) with a substructure (5) arranged on a lattice (4), comprising at least a measurement radiation source (6) for generating measurement radiation (7), an optical system (8) and a camera device (9). A phase mask arrangement (10) is provided for influencing a phase angle of the measurement radiation (7), the phase mask arrangement having a dual lattice (11) inverted to a target shape of the lattice (4).

The application relates to a method and system for realizing dry holographic lithography by using a phase diffraction element, and the phase mask of the phase diffraction element is optimized based on the cost function of an output surface holographic image, and can be used for phase diffraction element processing; a lithography experiment light path system is built to realize holographic lithography. The application does not need an imaging lens, only the phase of the diffraction element is optimized, the light field distribution of the diffraction light field at a specific distance is used, a small-size holographic image can be generated, and the holographic image can be used for dry holographic lithography, the cost of the lithography process is reduced, and a brand-new lithography system is opened up.