The invention provides an integrated super-resolution read-write objective lens and a preparation method thereof, the integrated super-resolution read-write objective lens is a single diffractive optical element, the surface of the element is provided with a preset
microstructure, the
microstructure is a binary or multi-step stepped embossment structure, and the surface of the element is provided with a plurality of microstructures. The
microstructure is designed to simultaneously implement at least two optical transformations on an
incident beam. According to the invention, functions of focusing, spiral
phase modulation and the like simultaneously occur on the surface of the same element, light beams do not need to be transmitted among different elements, and
phase distortion caused by effects of
Fresnel diffraction and the like is eliminated; secondly, the excitation light and the suppression light pass through the same integrated element, and the relative position relation of the excitation light and the suppression light is accurately fixed by a microstructure on the surface of the element, so that the auto-collimation of a light path is realized, and the stability and robustness of the
system are improved; besides, the negative dispersion characteristic of the diffractive optical element is utilized, inherent dispersion of the material is efficiently compensated or eliminated on a
single element, a complex lens group is not needed, and an efficient and simple achromatic scheme is provided.