High-efficiency infrared micro Fresnel lens array manufacturing method based on MEMS technology

Abstract

The invention belongs to the field of a sensor, and particularly to a high-efficiency infrared micro Fresnel lens manufacturing method based on MEMS technology. The high-efficiency infrared micro Fresnel lens manufacturing method based on the MEMS technology comprises the following steps of forming a diffraction image by means of a Fresnel diffraction principle, manufacturing a diffraction screen,manufacturing a receiving screen, performing exposure for forming a photoresist pattern, etching a Si circular plate, and performing cleaning. According to the method of the invention, through controlling a diffraction imaging distance, a traditional lithography machine is used for directly performing diffraction exposure on a wafer surface which requires forming of the Fresnel lens array, thereby forming a Fresnel waveband plate pattern; then micro machining is performed on the developed wafer through an MEMS process facility, and finally a Fresnel lens with a preset focal length is formed on the wafer surface. The high-efficiency infrared micro Fresnel lens manufacturing method has advantages of realizing simple, high-efficiency and easy-controlling integral process, greatly reducing process cost and production time consumed in various polishing steps of a traditional silicon lens, and improving imaging efficiency.

Description

technical field [0001] The invention belongs to the field of sensors, in particular to a method for manufacturing an efficient infrared micro-Fresnel lens array based on MEMS technology. Background technique [0002] Since the British physicist William Herschel discovered infrared in 1800, he has opened up a broad road for human beings to apply infrared technology. Among many infrared technologies, infrared thermal imaging technology has quickly become the direction and focus of research and development in various countries around the world. Infrared thermal imaging technology is to detect the infrared rays radiated by each part of the scene itself, and use the difference in the radiation of each part of the scene itself to obtain the details of the image. Its essence is a wavelength conversion technology, that is, to convert the infrared radiation image into a visible image. At the same time, it is determined by the infrared transmission properties of the atmosphere and th...

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Problems solved by technology

[0005] The present invention aims at the disadvantages of the conventional process of processing silicon base or germanium base that cannot mass-produce lens arrays and the shortcomings of low infrared transmittance of resin lenses in the above-mentioned technologies, and proposes a method for manufacturing an efficient infrared micro-Fresnel lens array based on MEMS technology

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