Manufacturing method of submicron photonic crystal phase array light beam splitter

Abstract

The invention belongs to the technical field of novel electronic devices and light information and relates to a manufacturing method of a submicron photonic crystal phase array light beam splitter. The method comprises the steps that (1) a Fresnel diffraction equation of a two-dimension hexagonal photonic crystal phase array structure is solved, and the optimum designing parameters are determined; (2) a hexagonal photonic crystal microstructural array mask plate of a two-dimension submicron periodic structure is designed, and a microstructural array polarization inversion electrode is etched on a lithium niobate crystal; (3) the lithium niobate crystal is subjected to electric field polarization, and a hexagonal array distribution crystal of a submicron structure is prepared; and (4) aluminum electrodes on the + / -z faces of the lithium niobate crystal are washed off, indium tin oxid thin film flat plate electrodes are subjected to magnetron sputtering on the + / -z faces, the + / -z faces of the lithium niobate crystal are connected to a positive electrode and a negative electrode of a direct-current power supply, the magnitude of voltages is adjusted, and the phase array light beam splitting effect is achieved. The designed light beam splitter has the advantages of being good in beam splitting evenness, large in light spot dot matrix number, high in diffraction efficiency and the like, and information parallel transmission and processing can be achieved.

Description

technical field [0001] The invention belongs to the field of novel optoelectronic devices and the field of optical information, and in particular relates to a manufacturing method of a submicron photonic crystal phase array optical beam splitter. Background technique [0002] In many fields of modern technology such as optical interconnection, optical computing, optical disk storage, optoelectronic technology, image processing and precision measurement, there are more and more requirements to convert the input of information (image or data) into the output of multiple information Realize the parallel transmission and processing of information, thereby increasing the speed. Beam splitters are components that split a beam of light into two or more beams. Traditional planar beam splitters are usually made of metal or dielectric films to distribute optical power in multiple directions. When used, lenses are needed to converge the beams into an array of points, which is difficul...

AI Technical Summary

Problems solved by technology

This unique periodic photonic microstructure has a wide range of applications in many fields, especially in 1998 Berger proposed the concept of a two-dimensional periodically polarized photonic microstructure crystal, which proposed a one-dimensional periodically polarized photonic microstructure Expanded to the two-dimensional scale, and in recent years, the size of the periodic unit has also developed to the submicron level, which greatly complicates the crystal structure

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