The invention belongs to the technical field of tools for lithium chips and particularly relates to a production process of 6-inch lithium niobate or lithium tantalite chips. The production process includes the steps of A, cutting to obtain chips 0.6-1mm in thickness; B, charging the chips into a reduction furnace for reduction; C, after grinding, cleaning by ultrasonic; D, pasting the chips; E, grinding; F, polishing; G, cleaning, and boxing. Internal stress of the chips is removed by double corroding, electrostatic charge is removed from the chips by blackening, ultra-smooth planes are obtained by mechanical chemical polishing, TTV is smaller than 5 um, BOW is smaller than 40 um, warp is smaller than 40 um, PLTV is larger than 95%, and the production process is suitable for mass production.