The invention discloses a
normal displacement and angle sensing optical measuring head and a measuring method thereof, optical measuring head
laser light which is sent out by a
semiconductor laser sequentially passes through a spectro-
grating, a spectroscope and a reflecting mirror to be collimated into the
collimated light beam, and the
collimated light beam is reflected via a right-angle
prism to enter a microobjective; the
light beam which is reflected by an object to be measured returns back according to the same way to the spectroscope, and then is focused on a four-quadrant
detector through an astigmatic lens; and
laser light which is sent out by an
infrared laser light source sequentially passes through a
light guide optical fiber, a collimating lens and a focus lens to be focused on an
infrared reflecting mirror to form a focus point which is superposed with the front focus of the microobjective, the
infrared laser light is vertically reflected into the microobjective through the infrared reflecting mirror, the parallel
infrared laser beam which is exited from the microobjective is reflected to the microobjective through the object to be measured, and an infrared beamsplitter reflects the returned
infrared laser beam onto a two-dimensional phase-sensitive
detector (PSD). The measuring head and the measuring method thereof can be effectively used for geometrical error measurement and calibration of the three freedom degrees of a linear guide rail, surface topographic reconstruction of a free-form surface and the like.