Normal displacement and angle sensing optical measuring head and measuring method thereof

Abstract

The invention discloses a normal displacement and angle sensing optical measuring head and a measuring method thereof, optical measuring head laser light which is sent out by a semiconductor laser sequentially passes through a spectro-grating, a spectroscope and a reflecting mirror to be collimated into the collimated light beam, and the collimated light beam is reflected via a right-angle prism to enter a microobjective; the light beam which is reflected by an object to be measured returns back according to the same way to the spectroscope, and then is focused on a four-quadrant detector through an astigmatic lens; and laser light which is sent out by an infrared laser light source sequentially passes through a light guide optical fiber, a collimating lens and a focus lens to be focused on an infrared reflecting mirror to form a focus point which is superposed with the front focus of the microobjective, the infrared laser light is vertically reflected into the microobjective through the infrared reflecting mirror, the parallel infrared laser beam which is exited from the microobjective is reflected to the microobjective through the object to be measured, and an infrared beamsplitter reflects the returned infrared laser beam onto a two-dimensional phase-sensitive detector (PSD). The measuring head and the measuring method thereof can be effectively used for geometrical error measurement and calibration of the three freedom degrees of a linear guide rail, surface topographic reconstruction of a free-form surface and the like.

Description

technical field [0001] The invention relates to a normal displacement and angle sensing optical measuring head and a measurement method, which are especially applied in the measurement and calibration of the three-degree-of-freedom geometric error of a linear guide rail, and in the reconstruction of the surface topography of a free-form surface. Background technique [0002] Probe is one of the key components of precision measuring instruments. As a sensor, it provides geometric information of the workpiece to be measured. Its development level directly affects the measurement accuracy, working performance, efficiency and flexibility of precision measuring instruments. So far, compact probes are usually divided into two types: contact probes and non-contact probes. Non-contact probes have become a precision tool worldwide due to their advantages of non-contact, no damage, and no need to compensate the probe radius. It is the research focus of measuring instrument manufacture...

AI Technical Summary

Problems solved by technology

However, the above methods increase the complexity of the system in order to measure multiple geometric parameters at the same time, such as adding a DVD laser head; although the method of laser interferometer is flexible, it is very troublesome in terms of installation, combination and debugging, and the price is extremely expensive

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