The invention relates to a four-
mass horizontal axis MEMS (Micro Electro
Mechanical System)
gyroscope. Comprising four sensitive
mass blocks, four driving
mass frames, four sensitive mass
coupling beams with lengthened middle parts, four sensitive mass decoupling beams, two levers, two decoupling mass blocks, a central fixed
anchor point and a rectangular frame beam, the center fixing
anchor point is flexibly connected with the rectangular frame beam through the double U-shaped beams at the two ends of the rectangular frame beam in the
long axis direction, the four corners of the rectangular frame beam protrude in a rectangular shape, and the center fixing
anchor point is connected with the decoupling mass blocks on the two sides through the four double cable-stayed beams and the rectangular frame beam. Each sensitive mass block is connected with the corresponding driving mass frame through a middle lengthened sensitive mass
coupling beam; the ratio of the length of the part, extending into the sensitive mass block, of the sensitive mass
coupling beam to the length of the part, exposed out of the sensitive mass block, of the sensitive mass
coupling beam ranges from 1: 3 to 1: 2. According to the invention, the
frequency difference between the in-
phase sensitive mode and the anti-
phase sensitive mode is increased, and the comprehensive performance such as anti-interference performance, sensitivity and
linearity, robustness and reliability is improved.