The invention discloses an ultra-precision micro-displacement
sensing system based on a double-FBG suspended type probe structure. The
system is characterized in that a stainless steel needle tube is adopted in a probe to serve as a protective sleeve, two FBG
optical fiber measuring bars are arranged in the protective sleeve in the axial direction of the protective sleeve in a parallel mode, one ends of the two
optical fiber measuring bars are fixed with the protective sleeve, and the other ends of the two
optical fiber measuring bars are suspended in midair to be measured; one of optical fibers is a measuring optical
fiber, the end portion of the measuring bar of the measuring optical
fiber is provided with a measuring ball stretching out of the protective sleeve, the other of optical fibers is a compensated optical
fiber which coats the protective sleeve, and the end portion of the compensated optical fiber forms a closed end through fusion and
processing. The ultra-precision micro-displacement
sensing system has the advantages of being high in sensitivity, good in stability, large in length-
diameter ratio, and strong in anti-interference, and can be widely used for displacement parameter measurement of micro-nano magnitudes of
micro devices, microstructures and micro-dimensions.