A method for correcting an image defect of a projection
exposure system (1) is disclosed, comprising the following steps: a) providing a projection
exposure system (1) with a plurality of manipulable elements (8, 9, 13, 14, 16, 18, 19, 20) and with a beam path (14), wherein the manipulable elements (8, 9, 13, 14, 16, 18, 19, 20) are arranged along, in particular in, the beam path (14) of the projection
exposure system (1), and wherein a plurality of manipulators (21) are provided for manipulating the manipulable elements (8, 9, 13, 14, 16, 18, 19, 20); b) determining at least one manipulation step for correcting at least one image defect, wherein the image defect is describable by at least one image defect function, wherein for the manipulation step a manipulation command for an actuation of at least one of the manipulators (21) is determined, and c) carrying out the at least one determined manipulation step,characterized in that in step b) the actuation for moving at least one of the manipulable elements (8, 9, 13, 14, 16, 18, 19, 20) is provided with a travel distance, wherein the travel distance has a magnitude on the order of nanometers or less, or wherein the travel distance has a magnitude on the order of nanoradians or less. A projection exposure system (1) and a
computer program are further disclosed.