Device and method for synchronous in-situ measurement of linear displacement and straightness of guide rail

Abstract

The invention discloses a device and a method for synchronous in-situ measurement of linear displacement and straightness of a guide rail. For an integrated two-dimensional grating and guide rail, a two-dimensional grating is etched on the upper surface of a linear guide rail, and a reading head is embedded in a sliding block. The specific measurement method comprises the steps that when the sliding block moves on the guide rail, the reading head outputs two pairs of orthogonal sine and cosine signals at the same time, the sine and cosine signals are transmitted to an upper computer through anacquisition card after being subjected to filtering and analog-digital conversion, and displacement and straightness are solved on the upper computer through a method of counting edges through high-frequency pulses, wherein the linear displacement of the guide rail is solved through orthogonal signals generated by the grid lines perpendicular to the x axis, and the straightness of the guide railis solved through orthogonal signals generated by the grid lines perpendicular to the y axis. The method has the advantages of small guide rail pair mounting size, high positioning precision, multi-parameter synchronous in-place measurement and the like, and a new method is provided for displacement and straightness measurement of the guide rail.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a device and method for synchronously measuring the linear displacement and straightness of a guide rail in situ. Background technique [0002] The continuous improvement of positioning accuracy is one of the "stuck neck" technical problems in the development of high-end equipment. Linear guide rail components are the core basic components of high-end equipment, and their precise guidance and positioning accuracy play a decisive role in the accuracy of high-end equipment. [0003] refer to figure 1 and figure 2 , the structural form of the traditional guide rail assembly is the assembly combination of the guide rail 6, the one-dimensional grating 7 and multiple external sensors. The uncertainty becomes larger; secondly, the two materials are inconsistent, and it is easy to introduce nonlinear errors under the condition of heating, which cannot be eff...

AI Technical Summary

Problems solved by technology

The traditional method is to install multiple sensors to detect the linear displacement and straightness of the guide rail separately. At present, there are mainly off-line detection methods such as the pitch method, the light gap method, the metering method, and the three-coordinate method to detect the straightness of the guide rail. Disadvantages such as large volume and offline measurement affect production speed and quality

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