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30results about How to "Short vertical distance" patented technology

Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device

The invention discloses a morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a double-axis hollow laser interferoscope group and is arranged on the center position of two parallel standard measurement light beams in parallel; in a plane vertical to the two standard measurement light beams, the difference of the environment interference degree between the two standard measurement light beams and the calibrated laser interferometer measurement light beam is small in a line segment area formed by the two standard measurement light beams in the plane projection points; the air refractive index average value of the two standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.
Owner:HARBIN INST OF TECH

Linkage type horizontal planar motion mechanism

The invention provides a linkage type horizontal planar motion mechanism, which comprises bearer frames 2 and 19, a installation rack 9, a front back servo electric cylinder 8, a rear servo electric cylinder18, a rotating joint 17, a connecting rod 16, a beam 3, a pushing rod 11 and a force balance 7, wherein a tank test trailer 1 is connected with the support frames 2 and 19; the installation rack 9 is used for fixing the front and rear servo electric cylinders 8 and 18; the beam 3 is moveably connected with the pushing rod 11 and a connecting rod 16 through the rotating joint 17; an installation hole 12 on the beam 3 is fixed with front and rear connecting rods 4; and the force balance 7 is connected with a ship model 6 and an adjusting rod 5. The formed linkage type horizontal planar motion mechanism can realize the swaying or yawing oscillation of the ship model through the stretching of the pushing rods of two servo electric cylinders and a sample feedback and control system of a position sensor in each servo electric cylinder; and the control system is driven by the servo electric cylinder, an in-built encoder samples and feeds back, and a programmable logic controller (PLC) is used for controlling, thus the invention has convenient controlling, rapid speed, high measurement accuracy, simple structure, convenient maintaining and long service life.
Owner:SHANGHAI ZHUGUANG MACHINERY +1

Asymmetrical multichip system level integrated packaging device and packaging method for same

The invention discloses an asymmetrical multichip system level integrated packaging device, which comprises a top chip, a bottom chip, a substrate and connecting wires, wherein the substrate is placed below the bottom chip, the dimension of the top chip is smaller than that of the bottom chip, connecting pads or connecting soldering flux bumps are arranged on the bottom chip, a pad face of the top chip is arranged downwardly, a pad face of the bottom chip is arranged upwardly, the bottom chip is placed on the substrate, the pads of the top chip and the top chip are in face-to-face bonding, and the bottom chip is connected with the substrate through the connecting wires. The invention further discloses a packaging method for the asymmetrical multichip system level integrated packaging device. The asymmetrical multichip system level integrated packaging device is low in cost and has the advantages of high density, high frequency and low signal RC (resistance-capacitance) delay.
Owner:SHANGHAI XINCHU INTEGRATED CIRCUIT

Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device

The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.
Owner:HARBIN INST OF TECH

Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer

The invention relates to a method and a device for calibrating an optically biaxial compensation and gas bath type linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the average value of the air refractive indexes of the two standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of the linear displacement measurement value.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibration method and device based on three standard optical axes

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three standard optical axes, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; in a plane vertical to the three standard measuring light beams, in an equilateral triangle region formed by the three standard measuring light beams at plane projection points, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Owner:HARBIN INST OF TECH

Automatic retractor for vagina surgery

The invention relates to an automatic retractor for the vagina surgery, which is used for the vagina traction in the vaginal surgery. The automatic retractor for the vagina surgery comprises upper blades, lower blades and handles which connect the upper blades and the lower blades, wherein the upper blades and the lower blades are parallel to each other, and the lower blades can move in parallel relative to the upper blades. The automatic retractor for the vagina surgery is used in the vagina surgery, a chief doctor can freely adjust the traction range, thus the process of the vagina surgery is safely and effectively guaranteed, and the injuries caused to the organ of a patient by improper manual traction can be avoided.
Owner:ZHEJIANG UNIV

Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on a two-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the two standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the two standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath

The invention discloses a linear displacement laser interferometer calibrating method and device based on a four-standard light-axis gas bath, and belongs to the technical field of laser measurement. Measuring light beams of a calibrated laser interferometer pass through the middle through hole of a four-axle hollow laser interference mirror group; the measuring light beams of the calibrated laser interferometer are arranged in parallel in the centers of four parallel standard measuring light beams which are distributed in the forms of lateral edges of a regular quadrangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are very small; the difference between the environment interference degrees of four standard measuring light beams and the measuring beams of the calibrated laser interferometer is very small; the average value of the refractive indexes of the four standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a stable gas bath environment is formed by a gas bath device, so that the air temperature, moisture and air pressure are uniformly distributed approximately, and the average value of the air refractive indexes of the standard measuring light beams are even closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer.
Owner:HARBIN INST OF TECH

Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device

The invention provides a reset compensation type three-optical-axis linear displacement laser interferometer calibration method and a reset compensation type three-optical-axis linear displacement laser interferometer calibration device, and belongs to the laser measurement technology. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, three light beam position detectors respectively measure the derivative displacement of the three standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the three light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.
Owner:HARBIN INST OF TECH

Four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device

The invention discloses a four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a four-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of four parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the four standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the four standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.
Owner:哈尔滨超精密装备工程技术中心有限公司

Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer

A method and a device for calibrating a return compensation type four-optical-axis linear displacement laser interferometer belong to the technical field of laser measurement. The measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the measurement light beams of the calibrated laser interferometer are arranged in the central positions of four parallel standard measurement light beams which are distributed in the form of the lateral edges of a right square prism in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; any two-dimensional derived displacements of the four standard measurement light beams relative to a target reflector in a plane which is perpendicular to the standard measurement light beams can be respectively measured by four light beam position detectors; the average value of the derived displacements is measured by a micro-motion device according to the four light beam position detectors to carry out return compensation on the derived displacements in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath

The invention discloses a linear displacement laser interferometer calibrating method and device based on a four-standard light-axis gas bath, and belongs to the technical field of laser measurement. Measuring light beams of a calibrated laser interferometer pass through the middle through hole of a four-axle hollow laser interference mirror group; the measuring light beams of the calibrated laser interferometer are arranged in parallel in the centers of four parallel standard measuring light beams which are distributed in the forms of lateral edges of a regular quadrangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are very small; the difference between the environment interference degrees of four standard measuring light beams and the measuring beams of the calibrated laser interferometer is very small; the average value of the refractive indexes of the four standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a stable gas bath environment is formed by a gas bath device, so that the air temperature, moisture and air pressure are uniformly distributed approximately, and the average value of the air refractive indexes of the standard measuring light beams are even closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibration method and device based on three-standard-optical-axis air bath

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the three standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Owner:HARBIN INST OF TECH

Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device

The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.
Owner:HARBIN INST OF TECH

Method and device for calibrating optically biaxial return and gas bath type linear displacement laser interferometer

The invention relates to a method and a device for calibrating an optically biaxial return and gas bath type linear displacement laser interferometer and belongs to a laser measurement technology. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the air refractive indexes of the two standard measurement beams to be more approximate to that of the measurement beam of the calibrated laser interferometer; and microinching equipment is used for carrying out real-time return compensation on a derivative displacement of a target reflector according to an average value of the derivative displacements measured by two beam position detectors so as to ensure that the incidence position of the measurement beam on the reflecting surface of the target reflector is not changed.
Owner:HARBIN INST OF TECH

Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer

A method and a device for calibrating a return compensation type four-optical-axis linear displacement laser interferometer belong to the technical field of laser measurement. The measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the measurement light beams of the calibrated laser interferometer are arranged in the central positions of four parallel standard measurement light beams which are distributed in the form of the lateral edges of a right square prism in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; any two-dimensional derived displacements of the four standard measurement light beams relative to a target reflector in a plane which is perpendicular to the standard measurement light beams can be respectively measured by four light beam position detectors; the average value of the derived displacements is measured by a micro-motion device according to the four light beam position detectors to carry out return compensation on the derived displacements in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.
Owner:HARBIN INST OF TECH

Linkage type horizontal planar motion mechanism

The invention provides a linkage type horizontal planar motion mechanism, which comprises bearer frames (2) and (19), a installation rack (9), a front back servo electric cylinder (8), a rear servo electric cylinder(18), a rotating joint (17), a connecting rod (16), a beam (3), a pushing rod (11) and a force balance (7), wherein a tank test trailer 1 is connected with the support frames (2) and (19); the installation rack (9) is used for fixing the front and rear servo electric cylinders (8) and (18); the beam (3) is moveably connected with the pushing rod (11) and a connecting rod (16) through the rotating joint (17); an installation hole (12) on the beam (3) is fixed with front and rear connecting rods (4); and the force balance (7) is connected with a ship model (6) and an adjusting rod (5). The formed linkage type horizontal planar motion mechanism can realize the swaying or yawing oscillation of the ship model through the stretching of the pushing rods of two servo electric cylinders and a sample feedback and control system of a position sensor in each servo electric cylinder; and the control system is driven by the servo electric cylinder, an in-built encoder samples and feeds back, and a programmable logic controller (PLC) is used for controlling, thus the invention has convenient controlling, rapid speed, high measurement accuracy, simple structure, convenient maintaining and long service life.
Owner:SHANGHAI ZHUGUANG MACHINERY +1

Method and device for calibrating four-optical-axis return and gas bath type linear displacement laser interferometer

The invention relates to a method and a device for calibrating a four-optical-axis return and gas bath type linear displacement laser interferometer and belongs to a laser measurement technology. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a four-axis hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position among four parallel standard measurement beams which are distributed in a side edge form of a regular quadrangular prism; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the four standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the average value of the air refractive indexes of the four standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and microinching equipment is used for carrying out real-time return compensation on a target reflector according to an average value of derivative displacements measured by four beam position detectors so as to ensure that the incidence position of the measurement beam on the reflecting surface of the target reflector is not changed.
Owner:HARBIN INST OF TECH

Three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device

The invention discloses a three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a three-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a three-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of three parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the three standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the three standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on a two-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the two standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the two standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Owner:HARBIN INST OF TECH

Calibration method and device for three-optical-axis return and air bath linear displacement laser interferometer

The invention discloses a calibration method and device for a three-optical-axis return and air bath linear displacement laser interferometer, and belongs to a laser measuring technology. Measuring light beams of a calibrated laser interferometer pass through a middle through hole of a three-axis hollow laser interferoscope group, and is placed in parallel at the central position of three parallel standard measuring light beams distributed in the form of lateral edges a regular triangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are small; the average value of the air refractive indexes of the three parallel standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; in a stable air bath environment formed by an air bath device, the average value of the air refractive indexes of the three parallel standard measuring light beams is closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a micro-inching device is used for measuring a derivation displacement average value according to three light beam position detectors to perform real-time return complementation on a target reflecting mirror, so that the incidence positions of measuring light beams on the reflecting surface of the target reflecting mirror are kept constant.
Owner:HARBIN INST OF TECH

Calibration method and device for three-optical-axis return and air bath linear displacement laser interferometer

The invention discloses a calibration method and device for a three-optical-axis return and air bath linear displacement laser interferometer, and belongs to a laser measuring technology. Measuring light beams of a calibrated laser interferometer pass through a middle through hole of a three-axis hollow laser interferoscope group, and is placed in parallel at the central position of three parallel standard measuring light beams distributed in the form of lateral edges a regular triangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are small; the average value of the air refractive indexes of the three parallel standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; in a stable air bath environment formed by an air bath device, the average value of the air refractive indexes of the three parallel standard measuring light beams is closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a micro-inching device is used for measuring a derivation displacement average value according to three light beam position detectors to perform real-time return complementation on a target reflecting mirror, so that the incidence positions of measuring light beams on the reflecting surface of the target reflecting mirror are kept constant.
Owner:HARBIN INST OF TECH

Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer

The invention relates to a method and a device for calibrating an optically biaxial compensation and gas bath type linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the average value of the air refractive indexes of the two standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of the linear displacement measurement value.
Owner:HARBIN INST OF TECH

Linear displacement laser interferometer calibration method and device based on three-standard-optical-axis air bath

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the three standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Owner:HARBIN INST OF TECH

Four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device

The invention discloses a four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a four-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of four parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the four standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the four standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.
Owner:HARBIN INST OF TECH

Reset compensation type two-optical-axis linear displacement laser interferometer calibration method and device

The invention provides a reset compensation type two-optical-axis linear displacement laser interferometer calibration method and a reset compensation type two-optical-axis linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, two light beam position detectors respectively measure the derivative displacement of the two standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the two light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.
Owner:HARBIN INST OF TECH
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