30results about How to "Short vertical distance" patented technology

The invention provides a reset compensation type three-optical-axis linear displacement laser interferometer calibration method and a reset compensation type three-optical-axis linear displacement laser interferometer calibration device, and belongs to the laser measurement technology. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, three light beam position detectors respectively measure the derivative displacement of the three standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the three light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.

The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.

A method and a device for calibrating a return compensation type four-optical-axis linear displacement laser interferometer belong to the technical field of laser measurement. The measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the measurement light beams of the calibrated laser interferometer are arranged in the central positions of four parallel standard measurement light beams which are distributed in the form of the lateral edges of a right square prism in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; any two-dimensional derived displacements of the four standard measurement light beams relative to a target reflector in a plane which is perpendicular to the standard measurement light beams can be respectively measured by four light beam position detectors; the average value of the derived displacements is measured by a micro-motion device according to the four light beam position detectors to carry out return compensation on the derived displacements in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.

The invention relates to a method and a device for calibrating a four-optical-axis return and gas bath type linear displacement laser interferometer and belongs to a laser measurement technology. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a four-axis hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position among four parallel standard measurement beams which are distributed in a side edge form of a regular quadrangular prism; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the four standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the average value of the air refractive indexes of the four standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and microinching equipment is used for carrying out real-time return compensation on a target reflector according to an average value of derivative displacements measured by four beam position detectors so as to ensure that the incidence position of the measurement beam on the reflecting surface of the target reflector is not changed.

The invention discloses a three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a three-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a three-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of three parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the three standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the three standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on a two-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the two standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the two standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.

The invention discloses a calibration method and device for a three-optical-axis return and air bath linear displacement laser interferometer, and belongs to a laser measuring technology. Measuring light beams of a calibrated laser interferometer pass through a middle through hole of a three-axis hollow laser interferoscope group, and is placed in parallel at the central position of three parallel standard measuring light beams distributed in the form of lateral edges a regular triangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are small; the average value of the air refractive indexes of the three parallel standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; in a stable air bath environment formed by an air bath device, the average value of the air refractive indexes of the three parallel standard measuring light beams is closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a micro-inching device is used for measuring a derivation displacement average value according to three light beam position detectors to perform real-time return complementation on a target reflecting mirror, so that the incidence positions of measuring light beams on the reflecting surface of the target reflecting mirror are kept constant.

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three standard optical axes, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; in a plane vertical to the three standard measuring light beams, in an equilateral triangle region formed by the three standard measuring light beams at plane projection points, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.

The invention discloses a four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a four-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of four parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the four standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the four standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.

The invention provides a reset compensation type two-optical-axis linear displacement laser interferometer calibration method and a reset compensation type two-optical-axis linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, two light beam position detectors respectively measure the derivative displacement of the two standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the two light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.

The invention discloses a morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a double-axis hollow laser interferoscope group and is arranged on the center position of two parallel standard measurement light beams in parallel; in a plane vertical to the two standard measurement light beams, the difference of the environment interference degree between the two standard measurement light beams and the calibrated laser interferometer measurement light beam is small in a line segment area formed by the two standard measurement light beams in the plane projection points; the air refractive index average value of the two standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.