Linear displacement laser interferometer calibration method and device based on three standard optical axes
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error and inability to determine whether the interferometric mirror group and the measuring mirror belong to standard laser interferometer components or to be calibrated , inaccurate calibration measurement results, etc., to achieve the effect of small Abbe error
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[0025] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0026]A linear displacement laser interferometer calibration device based on three standard optical axes, including a standard laser interferometer laser 1 and three receivers arranged at positions that can respectively receive interference signals corresponding to three parallel standard measurement beams 3, 4, and 5 7, 8, 9, the wires connect the three receivers 7, 8, 9 to the standard laser interferometer signal processing system 10 respectively; on the output optical path of the standard laser interferometer laser 1, the middle through hole 14 is configured to allow calibration The laser interferometer measures the three-axis hollow standard laser interferometer group 2 through which the light beam 13 passes; the guide rail 19 is arranged on one side of the three-axis hollow standard laser interferometer group 2, and the moving ...
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