Linear displacement laser interferometer calibration method and device based on three standard optical axes

A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error and inability to determine whether the interferometric mirror group and the measuring mirror belong to standard laser interferometer components or to be calibrated , inaccurate calibration measurement results, etc., to achieve the effect of small Abbe error

CN103499279BActive Publication Date: 2015-02-11HARBIN INST OF TECH
2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2015-02-11

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three standard optical axes, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; in a plane vertical to the three standard measuring light beams, in an equilateral triangle region formed by the three standard measuring light beams at plane projection points, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

Examples

Embodiment Construction

[0025] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0026]A linear displacement laser interferometer calibration device based on three standard optical axes, including a standard laser interferometer laser 1 and three receivers arranged at positions that can respectively receive interference signals corresponding to three parallel standard measurement beams 3, 4, and 5 7, 8, 9, the wires connect the three receivers 7, 8, 9 to the standard laser interferometer signal processing system 10 respectively; on the output optical path of the standard laser interferometer laser 1, the middle through hole 14 is configured to allow calibration The laser interferometer measures the three-axis hollow standard laser interferometer group 2 through which the light beam 13 passes; the guide rail 19 is arranged on one side of the three-axis hollow standard laser interferometer group 2, and the moving ...