Linear displacement laser interferometer calibration method and device based on three-standard-optical-axis air bath
A laser interferometer and laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large Abbe error, unequal optical path, inaccurate calibration measurement results, etc., and achieve a small Abbe error. Effect
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028]A linear displacement laser interferometer calibration device based on a three-standard optical axis gas bath, including a standard laser interferometer laser 1 and three lasers arranged at positions that can respectively receive interference signals corresponding to three parallel standard measurement beams 3, 4, and 5 Receivers 7, 8, 9, three receivers 7, 8, 9 are connected with the standard laser interferometer signal processing system 10 respectively by wire; The middle through hole 14 is arranged on the output optical path of the standard laser interferometer laser 1 can let The three-axis hollow standard laser interferometer group 2 passed by the measuring beam 13 of the calibrated laser interferometer; the guide rail 19 is arranged on one side of the three-axis hollow standard laser interferometer group 2, and the movin...
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