Reset compensation type two-optical-axis linear displacement laser interferometer calibration method and device
A laser interferometer and laser interferometry technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe errors and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or are calibrated , impact inconsistency and other issues, to achieve the effect of small Abbe error
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[0027]The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] A return compensation type dual-optical axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and two receivers 6, 7 arranged at positions that can receive the interference signal of the standard laser interferometer, the wire connects the two receivers The devices 6 and 7 are respectively connected to the signal processing system 8 of the standard laser interferometer; the output optical path of the standard laser interferometer laser 1 is equipped with an intermediate through hole 12, which allows the calibrated laser interferometer measurement beam 11 to pass through the biaxial hollow standard Laser interference mirror group 2; one side of the two-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 18, and the moving table 17 is fitted ...
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