Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of inconsistent influence, large Abbe error, and inability to determine whether the interferometric mirror group and measuring mirror belong to standard laser interferometer components or It belongs to the problem of being calibrated, and achieves the effect of ensuring accuracy and small Abbe error.
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] A shape-compensated dual optical axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and two receivers 6, 7 arranged at positions that can receive the interference signal of the standard laser interferometer, the wire connects the two receivers The devices 6 and 7 are respectively connected to the signal processing system 8 of the standard laser interferometer; the output optical path of the standard laser interferometer laser 1 is equipped with an intermediate through hole 12, which allows the calibrated laser interferometer measurement beam 11 to pass through the biaxial hollow standard Laser interference mirror group 2; guide rail 17 is arranged on one side of biaxial hollow standard laser interference mirror group 2, and the moving table 16 is fitted on the guiding ...
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