64results about How to "Abbe's error is small" patented technology

The invention discloses a morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a double-axis hollow laser interferoscope group and is arranged on the center position of two parallel standard measurement light beams in parallel; in a plane vertical to the two standard measurement light beams, the difference of the environment interference degree between the two standard measurement light beams and the calibrated laser interferometer measurement light beam is small in a line segment area formed by the two standard measurement light beams in the plane projection points; the air refractive index average value of the two standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.

The invention belongs to the technical field of optical precision test and precision machining, and relates to a machining and detecting device and method for a large-aperture aspheric surface, which can be used for detecting and machining the surface shape of a large-sized high-precision aspheric element in a precise optical system. According to the invention, based on technologies such as a straight-line/rotating benchmark technology, the high-precision machining and detection of a large-sized aspheric element, which are based on a precise air-floatation rotation center and integrate machining and detecting functions, are realized by combining the functions of machining equipment and detecting equipment. According to the invention, a workpiece is polished repeatedly by a polishing joint arm according to set technological machining parameters, then contour parameters of a polished working surface are directly detected by a sensing measurement system on a measuring arm, and a computer measurement control system determines the machining path and polishing quantity of the polishing joint arm according to detected contour data, so that the machining efficiency and precision of the large-aperture aspheric element are improved.

The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.

The invention discloses a two-dimensional absolute coding three-freedom moving platform measuring system which comprises three parts, namely a two-dimensional absolute position coding board, a coding imaging camera and a LabVIEW-based coding image processing system. The coding imaging camera performs imaging on a two-dimensional coding pattern in an imaging area. The LabVIEW-based coding image processing system mainly realizes functions of setting camera parameters and acquiring images, identifying an image alignment error parameter, measuring a deflection angle, decoding a displacement and performing subdividing, performing error compensation correction, and obtaining a planar displacement and deflection angle measurement result. According to the two-dimensional absolute coding three-freedom moving platform measuring system, the two-dimensional absolute position coding board is fixed on a three-freedom moving platform; the displacement and the deflection of the three-freedom moving platform in the plane are in one-to-one correspondence to coding images of an industrial camera detecting area; and precise measurement for the two-dimensional absolute position and the three-freedom movement of the deflection angle is realized through demodulating the image information by the LabVIEW-based coding image processing system.

The invention overcomes the defect of overlarge tangential travel of a gear measurement center when the error of a gear tooth form of a large gear is measured by adopting base circle generating method, thereby providing a meshing line large-specification gear measurement center which has the advantages of optimized layout and high measurement precision and comprises a C shaft used for fixing a gear to be measured, wherein the C shaft is a rotating shaft. The meshing line large-specification gear measurement center also comprises a sensor probe used for acquiring data of the gear tooth form to be measured, wherein the sensor probe is controlled to move along the meshing line of the gear to be measured by a control system. According to the invention, the tangential guide rail size of a measurement apparatus is remarkably shortened, the abbe error of the gear measurement center is effectively reduced without a measurement head alignment error, the tangential travel when the error of the gear tooth form is measured is reduced, the tangential direction and the radial direction of the apparatus are in the vertical coordinate axis, thus the influence of the abbe error is furthest reduced, the optimized layout of the apparatus structure is effectively realized, the measurement precision is improved, and the advantages of simple structure and convenience for installation location and operation are realized.

The invention relates to a method and a device for calibrating an optically biaxial compensation and gas bath type linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the average value of the air refractive indexes of the two standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of the linear displacement measurement value.

The invention discloses a stay wire type displacement sensor calibration device and a calibration method. The stay wire type displacement sensor calibration device comprises a linear guide rail, and alaser interferometer sliding table, a main shaft sliding table and a stay wire type displacement sensor sliding table which are sequentially arranged on the linear guide rail in a sliding manner, wherein a laser interferometer is arranged on the laser interferometer sliding table; a main shaft is arranged on the main shaft sliding table; a calibrated stay wire type displacement sensor is arrangedon the stay wire type displacement sensor sliding table. The stay wire type displacement sensor calibration device further comprises a first induction line calibration fine adjustment sleeve, a second induction line calibration fine adjustment sleeve, an induction line calibration fine adjustment plate and an induction line fixing element used for fixing the starting end of an induction line of the stay wire type displacement sensor. The stay wire type displacement sensor calibration device aims at solving the technical problems that the clamping is inconvenient, the measuring range is small,large Abbe errors are prone to be caused and the safety is poor due to a calibration scheme of a linear displacement sensor in the prior art.

The invention provides an angular displacement laser interferometer calibration method and an angular displacement laser interferometer calibration device based on two standard optical axes, and belongs to the technical field of laser measurement. Two measuring light beams of a laser interferometer to be calibrated pass through a middle through hole of a two-axis hollow laser interference mirror group, and are parallelly arranged in the center position of two parallel standard measuring light beams; in a line segment region formed by the two standard measuring light beams at the plane projection points, the differences of environment interference degrees of the two standard measuring light beams and the two measuring light beams of the laser interferometer to be calibrated are very small, and the air refractive index average value of the standard measuring light beams is approximate to the air refractive index value of the measuring light beams of the laser interferometer to be calibrated.

The invention provides a large gear grinding machine grinding wheel rack rotation device and a rotation control method thereof. The device comprises a rotation cylinder, a rotation seat, a spindle, a dual-lead clearance elimination worm gear, a circular grating, a grinding wheel rack, a clamping mechanism and an unloading mechanism. the spindle and the rotation seat are fixed firmly through bolts, the rotation cylinder is supported on the spindle through a group of rolling bearings, the grinding wheel frame is directly connected with the rotation cylinder and is rotated by the driving of the dual-lead clearance elimination worm gear, the rotation position is controlled by the circular grating, and the grinding wheel rack can be locked on the rotation seat through the clamping mechanism. By means of the device and the method, the requirements for high rigid support, stable and flexible moving and accurate location of large gear grinding machine grinding wheel racks can be met.

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on three standard optical axes, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form; in a plane vertical to the three standard measuring light beams, in an equilateral triangle region formed by the three standard measuring light beams at plane projection points, the differences of environment interference degrees of the three standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.

The invention provides a linear displacement laser interferometer calibration method and a linear displacement laser interferometer calibration device based on a two-standard-optical-axis air bath, and belongs to the technical field of laser measurement. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a two-axis hollow laser interference mirror group, and is parallelly arranged in the center position of two parallel standard measuring light beams; the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the differences of environment interference degrees of the two standard measuring light beams and the measuring light beam of the laser interferometer to be calibrated are very small, and the air refractive index average value of the two standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated; through the stable air bath environment formed by an air bath device, the air temperature, the humidity and the air pressure are approximate to uniform distribution, so the air refractive index average value of the two standard measuring light beams is more approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated.

The invention discloses a linear displacement laser interferometer calibrating method and device based on a four-standard light-axis gas bath, and belongs to the technical field of laser measurement. Measuring light beams of a calibrated laser interferometer pass through the middle through hole of a four-axle hollow laser interference mirror group; the measuring light beams of the calibrated laser interferometer are arranged in parallel in the centers of four parallel standard measuring light beams which are distributed in the forms of lateral edges of a regular quadrangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are very small; the difference between the environment interference degrees of four standard measuring light beams and the measuring beams of the calibrated laser interferometer is very small; the average value of the refractive indexes of the four standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a stable gas bath environment is formed by a gas bath device, so that the air temperature, moisture and air pressure are uniformly distributed approximately, and the average value of the air refractive indexes of the standard measuring light beams are even closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer.

The invention provides a vernier caliper capable of effectively reducing the Abbe error and a measuring method. The vernier caliper comprises main rulers and a vernier scale, the upper end and the lower end of the front side face of the vernier scale are each provided with a flange to form a main ruler containing groove, the main rulers are arranged in the main ruler containing grooves, the vernier scale is in sliding connection with the main scale, pressure sensors are symmetrically arranged in the main ruler containing grooves in the upper end and the lower end in the front-back direction, the pressure sensing devices are used for collecting pressure signals generated by the main rulers on the vernier scale, the signal output ends of the pressure sensing devices are connected with the signal input end of a processing module, and the signal output end of the processing module is connected with a display device; and the processing module is used for receiving pressure signals input by the pressure sensing devices, processing the pressure signals and then calculating to obtain a differential pressure signal value for representing the parallelism of the main line of the vernier scale and the main lines of the main rulers. The vernier caliper can solve the problems that an existing vernier caliper is large in Abbe error and low in measurement precision in the using process.

The invention discloses a four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a four-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of four parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the four standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the four standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.