Freeform surface measurement method and device based on datum plane comparison measurement
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A technology for comparing measurement and datum planes. It is applied to measurement devices, optical devices, instruments, etc. It can solve the problems of surface roughness, undulation, and inclination of the measurement accuracy of the sample, so as to improve the measurement accuracy and reduce the Abbe error. Effect
Active Publication Date: 2020-12-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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[0007] To sum up, the measurement accuracy of the existing measurement methods is greatly affected by the differences in the characteristics of the sample surface such as roughness, undulation, and inclination angle, which is the main technical bottleneck for improving the measurement accuracy of the free-form surface profile.
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Embodiment 1
[0034] As shown in Figure 1(a), the free-form surface measurement device based on the reference plane comparison measurement disclosed in this embodiment includes an active air-floating vibration-isolation spring 1, an air-floating vibration-isolation base 2, an X-direction air-floating guide rail 3, and a gantry 4. High-precision height measurement sensor 5, free-form surface measurement sensor 6, Y-direction air bearing guide rail 7, Z-direction air bearing guide rail 8, free-form surface sample attitude adjustment device 9, reference flat crystal attitude adjustment device 10, truss 11;
[0035] The free-form surface measurement method based on the reference plane comparison measurement disclosed in this embodiment, the detection steps are as follows:
[0036] Step 1: Place the high-precision flat crystal on the reference flat crystal attitude adjustment device 10, use the high-precision height measurement sensor 5 to monitor the surface of the high-precision flat crystal, a...
Embodiment 2
[0042] As shown in Figure 1(b), the free-form surface measurement device based on the reference plane comparison measurement disclosed in this embodiment includes an active air-floating vibration-isolation spring 1, an air-floating vibration-isolation base 2, an X-direction air-floating guide rail 3, and a gantry 4. High-precision height measurement sensor 5, free-form surface measurement sensor 6, Y-direction air bearing guide rail 7, Z-direction air bearing guide rail 8, free-form surface sample attitude adjustment device 9, reference flat crystal attitude adjustment device 10, truss 11;
[0043] The measured free-form surface and high-precision flat crystal are installed on the Z-axis, and two coaxial spectral confocal distance measurement sensors are installed on the serpentine-driven X-direction air bearing guide rail 3 through the truss 11;
[0044] The free-form surface measurement method based on the reference plane comparison measurement disclosed in this embodiment, t...
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Abstract
The invention discloses a method and a device for measuring a free-form surface based on reference plane comparative measurement, and belongs to the technical field of optical precision detection. Themethod uses the high-precision plane flat crystal as a reference plane of an X-Y surface, utilizes the high-precision height measurement sensor and the free-form surface measurement sensor which arecoaxially installed to detect the high-precision plane flat crystal and the surface height information of the measured free-form surface respectively, utilizes the high-precision height measurement sensor to acquire the surface height information of the high-precision plane flat crystal to monitor and compensate the straightness error of an X-direction air-floatation guide rail and a Y-direction air-floatation guide rail, performs dimension reduction error separation on the surface appearance of the free-form surface, and realizes the nanometer precision detection of the appearance of the free-form surface. The method and the device for measuring the free-form surface based on reference plane comparative measurement can realize the detection of the free-form surface, provide high-precisionthree-dimensional linear positioning and scanning measurement, inhibit the influence of the straightness error of the movement of the X-direction guide rail and the Y-direction guide rail on the measurement of the free-form surface, reduce the influence of the Abbe error of the Z axis on the measurement, and realize the large-range and nanometer precision measurement of the free-form surface.
Description
technical field [0001] The invention belongs to the technical field of optical precision detection, and relates to a high-precision detection method and device for free-form surfaces, which can be used for nano-precision detection of free-form surfaces in precision optical systems. [0002] technical background [0003] The free-form surface element has the largest degree of freedom in surface morphology, and it is easy to eliminate aberrations in the imaging system. advantages such as sex. Using a free-form surface optical system to replace the previous optical system composed of a plane, a spherical mirror, and a coaxial quadratic mirror to improve imaging quality, reduce system volume and weight, and solve imaging accuracy, portability, and reliability issues has already been achieved. It has become an important trend in the development of optical systems. [0004] However, while the freeform surface increases the design freedom, it puts forward higher requirements for o...
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