Nanometer precision detection method and device of free curved surface morphology

A precision detection and free technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of insufficient measurement accuracy, limited free-form surface profile measurement accuracy, and inability to overcome the characteristics of sample surface roughness, undulation, inclination angle and other problems. , to achieve the effect of improving accuracy, improving detection accuracy and speed

Active Publication Date: 2018-08-03
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

[0006] To sum up, the existing measurement methods mainly have insufficient measurement accuracy, which cannot overcome the influence of sample surface roughness, undulation, inclination and other characteristic differences, which is the main bottleneck that currently limits the measurement accuracy of free-form surface contours.

Method used

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  • Nanometer precision detection method and device of free curved surface morphology
  • Nanometer precision detection method and device of free curved surface morphology
  • Nanometer precision detection method and device of free curved surface morphology

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Experimental program
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Effect test

Embodiment 1

[0034] Such as figure 1 with figure 2 As shown, the device of the present invention includes: an active air-floating vibration isolation spring, an air-floating vibration isolation base, an X-direction air-floating guide rail, a gantry, a laser differential confocal fixed-focus trigger measurement system, a laser interference displacement measurement mirror group, Y-direction air bearing guide rail, Z-direction air bearing guide rail, free-form surface sample attitude adjustment device, reference flat crystal attitude adjustment device, laser interferometer;

[0035] Free-form surface shape nanometer precision detection method, the detection steps are as follows:

[0036] Step 1: Place the high-precision flat crystal on the free-form surface sample attitude adjustment device 9 and the reference flat crystal attitude adjustment device 10 respectively, and measure the distance between the laser interferometer mirror group 6 and the high-precision flat crystal through the laser inter...

Embodiment 2

[0041] Such as figure 1 , figure 2 , image 3 with Figure 4 As shown, the nanometer precision detection method of free-form surface shape, the detection steps are as follows:

[0042] Step 1: Place the high-precision flat crystal on the free-form surface sample attitude adjustment device 9 and the reference flat crystal attitude adjustment device 10 respectively, and measure the distance between the laser interferometer mirror group 6 and the high-precision flat crystal through the laser interferometer 11 , Adjust the posture of the free-form surface sample attitude adjustment device 9 and the reference flat crystal attitude adjustment device 10 to ensure that it is perpendicular to the Z-direction air bearing guide 8;

[0043] Step 2: Place the tested free-form surface sample and high-precision flat crystal on the free-form surface sample attitude adjustment device 9 and the reference flat crystal attitude adjustment device 10 respectively, and use the Z-direction air bearing g...

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Abstract

The invention relates to a nanometer precision contour measuring device and method of a part with a free curved surface, and belongs to the technical field of optical precision detection; and the method and device can be used to detect the nanometer precision of the part with the free curved surface. The device comprises an active air-float vibration-isolated spring, an air-float vibration-isolated pedestal, a direction-X air-float guide rail, a portal frame, a laser differential confocal fixed-focus triggering measurement system, a laser interference displacement measuring lens group, a direction-Y air-float guide rail, a direction-Z air-float guide rail, an attitude adjusting device of a free curved-surface sample, a reference optical flat attitude adjusting device and a laser interferometer; The contour is measured via a three-coordinate measuring machine of the portal structure, a high-precision planar optical flat serves as a reference reflector, influence on the linearity of thedirection-X and direction-Y air-float guide rails on the high precision detection for the free curved-surface contour is reduced, and 21 error of the three-coordinate measuring machine is reduced. Thespherical air-float workbench with a three-point support structure is used to adjust the attitude of the measured free curved surface part, and the contour of the free curved surface part is detectedin high precision.

Description

Technical field [0001] The invention belongs to the technical field of optical precision detection, and relates to a high-precision detection method and device for the free-form surface shape, which can be used for the nano-precision detection of the free-form surface shape in a precision optical system. technical background [0002] The free-form surface element has the greatest degree of freedom in surface topography, and it is easy to eliminate aberrations in the imaging system. It can improve the imaging quality of the optical system, increase the resolution ability, increase the working distance, simplify the instrument structure, reduce the volume and weight of the instrument, and increase reliability It can greatly improve the imaging quality and resolution of the measuring optical system, and improve the performance of weapon equipment; use a free-form surface optical system to replace the past optical system composed of plane, spherical mirror, coaxial quadric mirror, etc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 赵维谦唐颖奇邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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