105 results about "Error separation" patented technology

The invention relates to a nonspherical absolute measuring system based on a multiwave front lens compensator, which comprises a phase shifting interferometer, a standard lens, a multiwave front lens compensator, an electric control adjusting device and a driver thereof, a measured nonspherical optical element, a six-dimensional adjusting frame, an electric control translation platform and a drive thereof as well as a computer control and date processing system, wherein the multiwave front lens compensator comprises a plurality of optical elements or element groups. The invention realizes error separation by a plurality of interferometry for improving the surface shape detecting precision of the nonspherical optical element and has certain flexible measuring range and larger application value.

The invention discloses a roll angle measuring method based on a grating and a device thereof, which belongs to the technical field of photoelectric detection. A laser lases and emerges directly, or emerges after collimation through a collimating lens; the light is directly incident on a one-dimensional plane transmission grating, or reversely incident on the grating through a retrodirective reflector; plus-minus first stage diffracted light from the grating is focused to form two diffracted light points through a lens; a photodetector is used to detect the variations in positions of the two focused light points, thus figuring out a roll angle. The optical structure of the device is compact and simple, and brings convenience to practice; in addition, the accuracy, the stability and the economical efficiency are also high. The grating is used as a sensitive device; error separation is achieved, and the interference-free feature is improved by using the differential measurement of double diffracted beams; few optical devices are used; and the power of the light source is low; the cost is low; mobile parts do not require to be provided with cables; the angle measurement distinguishability is as high as 0.5 and even higher; different requirements of measurement accuracy can be met just by replacing the grating with gratings having different numbers of lines.

An error separating method based on ground-base intensification system includes separately calculating code smooth s\pseudo-distance of ground station and code smooth pseudo-distance of client station, separately estimating ionized layer delay error of ground station and ionized layer delay error of client station, broadcasting data of ground station to client station and carrying out differential calibration on said data by client station. The ground-base intensification system applied in said method is also disclosed.

The present invention belongs to the field of precise instrument manufacture and measurement technology, and is especially self-separation method and device for spatial error of super-precise revolution reference. The method of Z-direction section-by-section separation of super-precise revolution reference spatial motion error can meet the requirement of high precision cylindricity instrument to reduce spatial revolution error. The self-separation device for spatial error of super-precise revolution reference is developed by means of integrating roundness error separating system and cylindricity instrument revolution main shaft system. The bench revolving single-transposition small-angle error separation method is adopted in realizing the section-by-section separation of spatial revolution motion error of cylindricity instrument revolution main shaft, so as to reach the aim of reducing the effect of the spatial revolution motion error on measurement result.

The invention discloses a detection method for the synchronization error between a translational motion shaft and a rotating shaft of a five-axis numerically-controlled machine tool. The detection method comprises the following steps that (1) a measurement range is determined, and a measurement trajectory NC program is calculated; (2) an evaluation index of the synchronization error between the rotating shaft and the translational motion shaft is determined; (3) a ball bar meter is installed, a tool tip rotating follow function of the five-axis machine tool is started, the measurement program is operated, and measurement data of the ball bar meter are obtained; (4) the current synchronization error between the rotating shaft and the translational motion shaft is worked out; and (5) the servo position proportional gain and speed feed-forward gain servo parameters of the measured rotating shaft and servo position proportional gain and speed feed-forward gain servo parameters of the measured translational motion shaft are adjusted according to the measured synchronization error situation, and then error measurement is conducted till the error reaches the precision requirement level of the machine tool. According to the detection method for the synchronization error between the translational motion shaft and the rotating shaft of the five-axis numerically-controlled machine tool, measurement of the synchronization error between the rotating shaft and the translational motion shaft can be achieved by simply measuring the movement path, operation is easy, error separation is clear, and efficient adjustment of the synchronization error is convenient.

The invention discloses a method and device for measuring main shaft rotary errors with the capacity of installation eccentricity separation. The device comprises a displacement sensor installation clamping device, a displacement sensor, a grating encoder, a signal cable, a data processor and a computer. According to the measurement process, measurement is conducted by the displacement sensor according to three selectable modes with three different positions of the external profile of a main shaft serving as sampling starting points, other components, except for first-order harmonic waves, of main shaft roundness errors are obtained on the basis of the three-point method principle, secondary separation is conducted according to the provided algorithm, installation eccentricity is separated from the rotary errors, and therefore a pure rotary movement error value of the main shaft is obtained. On one hand, the roundness errors of the profile of the main shaft and eccentric errors of installation of a standard ball and the sensor are separated from the rotary movement errors of the main shaft, so that the separation operand is small. On the other hand, only one displacement sensor is adopted and measurement errors caused by a sensor performance difference because of three sensors adopted in a common three-point method error separation technology are avoided.

The invention relates to an axial circular runout and total runout single displacement error separation device and method, and belongs to the technical field of micro-nanometer ultra-precise measurement. In the method, an axial circular runout and total runout measurement device and an error separation system are organically integrated into a whole, a proper displacement angle alpha is selected in an error separation process, so that a workpiece performs a single small-angle displacement of a corresponding angle relative to a rotary main shaft, total harmonic separation of z(n) and g(n) in a harmonic range of between 1 and 100upr by measuring comprehensive errors A(n) and B(n) including a workpiece axial circular runout error g(n) and a main shaft rotary error z(n) before and after displacement of the workpiece, and utilizing fast Fourier series transform, harmonic analysis and other mathematic processing methods. According to the device and the system, when an existing error separation method is used for circular runout error separation, the defects that an error introduced by a rotary shaft cannot be completely separated, error separation time is long, various larger drifts are easily introduced and the like can be overcome, and the error separation device and the error separation process can be greatly simplified.

A double offset parameter circle contour measurement model and an offset error separation method belong to the technical field of surface shape measurement. The model simultaneously includes two offset error components: offset error of the detected component (e, Alpha) and offset error d of the measuring head of a sensor. The measurement model is that Rho i is equal to ecos(Theta i-Alpha)+((ro+Delta ri)<2>-(d+esin(Theta i - Alpha))<2>)<1/2>. The method of parameter optimization is adopted to realize accurate estimation and direct solving of offset error parameters and other parameters in the model, thus separating the offset parameters one by one from the measuring data and acquiring the actual circle contour of the detected piece. The measurement model provided by the invention can completely and accurately reflect the influence of the offset error parameters to the measurement of the circle contour and overcome the problems of principle defect and low parameter estimation accuracy existed in the generally used measurement model at the present time.

The invention provides a method and a device for simultaneously measuring five degrees-of-freedom errors based on light beam drift compensation. The method and the device are used for solving the problems of low measurement precision, small measurement range and poor anti-interference capability of the existing high-precision simultaneous measurement method for guide rail five degrees-of-freedom. A collimating lens, a prism assembly, a polarization beam splitting prism and a quarter-wave plate are arranged between a laser device and a right-angle prism plated with a beam splitting film, so as to realize processing of incident light and reflected light, information of the reflected light and transmitted light after beam splitting is received and measured by means of a four-quadrant detector and a position sensitive detector, and the measurement of pitch angle, deflection angle and rolling angle errors, horizontal straightness errors, vertical straightness errors and light drift compensation are realized. The method and the device utilize double beam differential measurement to realize error separation, enhance the anti-interference capability, employ few optical devices and are low in light source power and cost; the optical structure is simple, the operation is convenient, the moving parts are not required to be provided with cables, and the field measurement is facilitated; and the angle measurement resolution is high.

The invention discloses an error-separation-mode-based regional pseudo-range differential enhanced positioning method of a global navigation satellite system (GNSS). The method comprises: for regional pseudo-range differential enhanced positioning of a GNSS, n reference stations and a terminal user are employed; a receiver of any reference station r receives observation data of a satellite s, and after processing, an error vector correction number of the satellite s on the reference station r is obtained; each reference station sends the obtained error vector correction number of the satellite s to the terminal user, distance weighted mean processing is carried out on a frequency relevant item error correction number of each reference station according to a base line distance between the reference station and the terminal user, and then the processed number adds to a frequency non-relevant item error correction number of one reference number to obtain a total error correction number; and then a pseudo-range measurement value adds to the total error correction number to obtain a corrected user pseudo range and then calculation is carried out according to a standard pseudo-range single-point positioning way so as to obtain a user position after error correction. With the method, the positioning performance of the single-frequency satellite navigation can be improved.

The invention discloses an online measurement system and a method for plane shape errors. The system comprises a sensor array, a data collection and analog-to-digital conversion module and a data processing and displaying module, wherein a modified least square successive two-point method plane shape error separation algorithm is used in processing software of the data processing and displaying module, and a data combining and fitting technique is introduced. The method is based on the modified least square successive two-point method plane shape error separation algorithm. The whole sampling data of a plane to be measured are subjected to partitioned processing, dimensionality reduction processing of the data array is achieved through an online partitioning algorithm, then the data processing speed is improved, the capacity of sampling points is increased, and the method mainly comprises processes such as data error separation and fitting. The data combining and fitting technique is used, so that the distribution density of sampling points is improved effectively, and the capability that a measurement system reflects the plane shape error of the plane to be measured is improved.

The invention provides a numerical control machine error identification and separation method based on processing workpiece curved surface morphology information. By the aid of the method, workpiece curved surface morphology reverse engineering, morphology separating and cutter location point reverse engineering calculating technologies are adopted in the error separation method of the numerical control machine, error separation of the numerical control machine is realized, and meanwhile, effective analyze manners and application models are provided for researchers of numerical control machine error compensation to perform intense research of error compensation model optimization and compensation effectiveness. Machine processing state monitoring, workpiece theory mathematical model and theoretical cutter path information are combined with the numerical control machine error identification and separation method, pre-processing of error collecting data can be performed, the type of a fitting model can be determined and identified according to the autocorrelation function, the partial correlation function and trimmed property thereof, order determination of the model can be performed accurately, the error separation of the numerical control machine can be completed efficiently and accurately, and meanwhile, change situation of the machine can be accurately inferred and predicted according to the obtained mathematical model formulas, so that error compensation work of the machine can be more reliable and effective.

The invention discloses a laser interference principle-based precise main shaft rotation precision detecting and analyzing method. A precise main shaft rotation precision detecting light path comprises a box body which is used for mounting required instruments, a laser transmitter which is mounted in the box body, four optical convex lenses, a half transparent and half reflecting mirror, a reference ball and a CCD camera; part laser beams emit out from a circular hole in a square box and are projected on a target ball; the target ball is mounted on a precise main shaft through an extending rod. A laser interference pattern which is acquired by the CCD camera is analyzed through an analysis principle to acquire the rotating speed and a three-directional displacement error of the precise main shaft. The laser interference principle-based precise main shaft rotation precision detecting and analyzing method is conveniently used for engineering detection; error separation is not required; the rotating speed, and the axial and radial displacement errors of the precise main shaft can be detected simultaneously; moreover, the detection precision reaches nano scale.

The invention discloses a rocket sled test exterior data fusion method. The rocket sled test exterior data fusion method has high measurement accuracy of a radar system, high positional accuracy of a shadow shield system, and positioning and speed measurement accuracy of a differential GPS system, solves the problem of water brake section data loss, realizes better integrity of exterior data, realizes whole-course data coverage of a rocket sled test, realizes data fusion, realizes time synchronization of the radar system, the shadow shield system and the differential GPS system, and can produce data having the highest accuracy in the section. Compared with the existing error separation or function judgment method adopting a single exterior measurement technology, the rocket sled test exterior data fusion method provides more data points, solves the problem of the existing error separation method adopting the single exterior measurement error separation technology, and realizes more accurate precision analysis. The rocket sled test exterior data fusion method provides basis for higher-order term separation of an inertial measuring unit error model.

The invention discloses an adaptive filtering-based spacecraft guidance instrument on-orbit calibration method. According to the method, carrier position and attitude output by a strapdown inertial navigation device and an attitude matrix output by a star sensor are used for construction and measurement, and a measurement equation is built. A self-adaptive filtering algorithm is designed and estimated values of gyroscope random constant drift and star sensor installation error are acquired through filtering calculation so that combined system on-orbit self-calibration is realized. The method solves the problem that the existing guidance tool error separation technology causes misalignment of the spacecraft in the sky and ground coordinates, realizes real-time on-orbit calibration of an error coefficient of the guidance tool, utilizes a simple algorithm and is easy to project.

The invention relates to a paper note processing device and a paper note processing method for teller machines. The paper note processing device comprises a note picking unit, a note conveying unit, a money detection unit and a note output unit, wherein the note picking unit is provided with a note picking wheel, one side of the note picking wheel is mounted with a note separating wheel and a damping wheel which are tangent to each other; one side of the tangent line of the note separating wheel and the damping wheel is provided with a first note pass slide plate and a first note conveying wheel group; the upper end of the note picking unit is provided with the note conveying unit provided with a second note pass slide plate and a second note conveying wheel group; two sides of the first note pass slide plate and the second note pass slide plate can be arranged with money detection sensors, the outlet of the first note pass slide plate is aligned and smoothly butted to the inlet of the second note pass slide plate, the outlet of the second note pass slide plate is connected with the inlet of the note conveying belt in the note conveying unit, the outlet of the note conveying belt is connected with a note conveying device in the note output unit. The invention changes the shape of note channel, to pick note continuously and reliably, accurately separate notes and avoid error separation, thereby confirming reliable money detection.

The present invention provides a four-point dynamic measurement and separation method of spindle rotation errors. A sensor support is positioned, and high-precision displacement sensors are subjectedto system calibration; each two of the four sensors are installed on the sensor support in an opposite mode, a tested part is operated, and a sampling frequency f, single-loop sampling points and sampling duration are calculated according to a rotating speed of the tested part; the displacement sensors are employed to obtain rotation position information of the tested part, and the obtained displacement sampling signals are calculated and analyzed through an error separation formula, and rotation errors and section circularity errors of a rotated shaft are obtained; and the circularity errorsand the rotation errors are subjected to quantification evaluation, and dynamic rotation errors of the tested part in the rotation operation and the shape errors of a tested section contour are obtained. The four-point dynamic measurement and separation method of the spindle rotation errors can reduce the change amount of the shaft section errors caused by thermal deformation, and employs a dynamic separation equation to separate the circularity errors and the rotation errors of the same magnitude so as to accurately obtain the rotation errors of the spindle.

The invention discloses an on-orbit error separation method of a spacecraft guidance tool. According to the difference between a real-time telemetering speed and an exterior measuring rate of a spacecraft, through combination of a least square method and latent root estimation, an error coefficient of a guidance tool is calibrated on orbit in real time and the guidance tool error is compensated. The method solves the problem that the existing guidance tool error separation method produces mismatching of the positions of the spacecraft in air and ground coordinates of the spacecraft, realizes on-orbit real-time calibration of an error coefficient of the guidance tool, utilizes a simple algorithm and is easy to industrialize. Through combination of the least square method and the latent root estimation, confidence of the error coefficient estimation is improved.

Various computer-implemented methods are provided. One method includes determining errors across a field of a lens of a lithography system based on wafer measurements. In addition, the method includes separating the errors into correctable and non-correctable errors across the field. The errors may include dose errors, focus errors, or dose and focus errors. In another embodiment, the method may include determining correction terms for parameter(s) of the lithography system, which if applied to the parameter(s), the correctable errors would be eliminated resulting in approximately optimal imaging performance of the lithography system. Another method includes controlling one or more parameters of features within substantially an entire printed area on a product wafer using a limited number of wafer measurements performed on a test wafer. The wafer measurements may be performed on a first feature type, and the features that are controlled may include a second, different feature type.

The invention discloses an online measurement reconstruction method for a large-scale cylinder profile based on a parallel error separation method, and the reconstruction method comprises the steps: extracting the relative change amount of the geometric meter of two adjacent measurement section circles through the parallel error separation of three axial sections; obtaining the geometric center of each measurement section circle through stacking, thereby achieving the reconstruction of a cylinder profile through taking the connection line of the geometric centers of all measurement section circles of a measured shaft as the reference axis. The method can achieve the high-precision measurement and evaluation of the circular degree, cylindricity, bus linearity and taper of the cylinder profile based on the above. The method can the full-harmonic separation of radial rotation error movement and guide rail linear error movement of a shaft system in a measurement process, guarantees the high-precision measurement reconstruction of the cylinder profile, and reduces the manufacture cost of online measurement equipment of the large-scale cylinder profile.