Axial circular runout and total runout single displacement error separation device and method
A technology of error separation and circular runout, applied in the direction of measuring devices, instruments, etc., can solve the problems that cannot be separated from the axis rotation error of the instrument, the parallelism error of the instrument guide rail to the rotary axis, and cannot meet the ultra-precision circular runout and full runout measurement.
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Embodiment 1
[0072] Taking the axial circular runout measuring instrument in which the spindle of the instrument rotates to drive the workpiece to rotate as an example, the method and specific steps of separating the spindle rotation error z(n) and the workpiece circular runout error g(n) are explained.
[0073] When actually measuring the circular jump or the full jump, a certain fixed position a on the rotary spindle 7 of the instrument is used as the starting point of the instrument measurement, the workpiece 2 to be measured is located on the rotary table 3, and the starting reference point of the workpiece is b. When the measurement sensor 12 is located on the workpiece 2 such as figure 2 When the first measurement circle 1 is shown, rotate the workpiece 2 to obtain the comprehensive error data A(θ) of the first measurement round, and turn the error separation turntable 4 so that the initial reference point b of the workpiece 2 is relative to the instrument The measurement starting p...
Embodiment 2
[0113] On the basis of Example 1, the index angle α is optimized.
[0114] For the displacement angle α, any k (k≥2) harmonic can be selected for discussion, and it can be obtained from formula (13):
[0115] C k (n)=a k cos(2nπk / N)+b k sin(2nπk / N) (16)
[0116] In the above formula
[0117] a k = 1 2 e k + sin kα 2 ( 1 - cos kα ) f ...
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