41 results about "Rotation error" patented technology

The invention discloses a hand-eye calibration method suitable for a five-axis series-parallel mechanical arm, which comprises the following steps of: analyzing coordinate conversion error distribution characteristics according to an initial hand-eye calibration matrix calculation result, and separating a total error into two components, namely a translation error and a rotation error through an error vector decomposition algorithm, obtaining distribution rules and variation trends of the errors in different spatial directions; establishing a calibration precision evaluation system according to the verification result, calculating the repeated positioning precision and the absolute positioning precision of the system by counting and analyzing the position deviation data of multiple tests, and obtaining the system performance index in the current calibration state; a self-adaptive updating mechanism is established for system performance indexes, local updating of calibration parameters is automatically triggered when environment temperature change or small deformation of a mechanical structure is detected, and a compensation model is adjusted in an incremental learning mode to avoid comprehensive recalibration.

The invention discloses a method and a device for measuring orthogonality of an orthogonal rotary shaft system, and belongs to the technical field of orthogonal rotary shaft system detection. The orthogonal rotary shaft system comprises a first rotary shaft system and a second rotary shaft system; the method comprises the following steps: carrying out axis inclination angle rotation error measurement and attitude fine adjustment by using a CCD (Charge Coupled Device) double-axis autocollimator, and a cubic reference prism and a double-sided optical flat which are respectively fixed with a first rotation shaft system and a second rotation shaft system; setting a reference cross line XY through the double-sided optical flat by using a second rotary shaft system; the cross curve of the reflected light beam of the cubic reference prism is overlapped with the reference cross curve XY by adjusting the mounting positions of the two rotary shaft systems; and rotating the first rotating shaft system, recording an angular deviation value and calculating an orthogonality value of the two rotating shaft systems. According to the invention, the reference drift error of mutual aiming of the two autocollimators is eliminated, the interference of the rotation error of the shaft system on orthogonality measurement is eliminated, and the precision and reliability of the orthogonality measurement of the shaft system are improved on the whole.

The invention discloses a spindle rotation error detection device and a detection calculation method, and belongs to the field of spindle error detection. The detection device comprises a base, an arc-shaped tool and an annular cover plate, wherein the arc-shaped tool comprises a buckle main shaft, and the annular cover plate is arranged on the inner periphery of the arc-shaped tool; the clamping part comprises an annular seat mounted at the top of the annular cover plate and a circular shell arranged on the inner periphery of the annular seat; the detection part is arranged in the circular shell and comprises a mounting seat mounted at the top end of the main shaft and a detection assembly arranged on the mounting seat; and the plurality of detectors respectively penetrate through the circular shell, are clamped and fixed on the circular shell, and are used for radially detecting distance data between the detectors and the detection assembly. According to the invention, the six degrees of freedom of the main shaft can be detected and the problems of overturning, end jumping, radial jitter and the like can be identified at the same time. The device has the advantages of high precision, high efficiency, dynamic continuity, complete error measurement and convenient installation.

The invention provides a spindle radial rotation error separation method based on a multi-point method. The spindle radial rotation error separation method comprises the steps that firstly, displacement data of a spindle are collected through a first directional displacement sensor and a second directional displacement sensor; step 2, inputting displacement data into an error separation model, and outputting a forward rotation error and a backward rotation error; wherein the establishment of the error separation model comprises the following steps: (1) based on kinematics analysis of a main shaft, establishing measurement data of a main shaft radial rotation error test model to obtain a direction displacement error measurement model and a direction displacement error measurement model; and (2) eliminating a sensor installation offset error and a test rod roundness error based on an improved multi-point error separation method to obtain a pure spindle radial rotation error. According to the invention, on the basis of eliminating the offset error of sensor installation and the roundness error of the test detection rod in the measurement data, the pure spindle radial rotation error is obtained, and the high-precision measurement of the spindle radial rotation error is realized.

The invention discloses a laser interferometer plane reflection mirror surface type error compensation method based on redundancy characteristics. The method comprises the following steps of: establishing a composite compensation model containing a rotating surface type error and a translation surface type error based on a redundant measurement characteristic of an X / Y-direction measurement light beam on an Rz degree of freedom; the rotating surface type error model is constructed through Rz degree-of-freedom redundant data of a measurement light beam, and the translation surface type error model is established based on a geometrical relationship between a rotating error gradient and a measurement light beam interval. And compensating the two types of surface type errors to an interferometer measurement model by adopting a parameterization compensation mechanism, and realizing dynamic error correction through an iterative optimization algorithm. The method can effectively solve the problem of measurement precision caused by deformation of the reflector surface, and provides a reliable measurement basis for an ultra-precise motion control system.

The invention discloses a six-degree-of-freedom object pose estimation system and method in an industrial scene and a medium, and the system comprises a multi-modal data preprocessing module, a shared encoder feature extraction module, a comparative learning and attention fusion module, a pose regression and rotation decoupling module, and a simulation driving-based data enhancement module. The multi-modal data preprocessing module is used for receiving and processing an original RGB image and a depth map, and outputting a pixel-level space aligned RGB-D data pair through filtering and denoising and coordinate projection transformation based on camera internal reference; and the shared encoder feature extraction module is used for extracting features from the aligned RGB-D data pairs and carrying out adaptive weighted fusion through a channel attention mechanism so as to output a shared feature fused with appearance and geometric information. According to the method, the estimation precision can be improved, the ADD index is improved by 12.8% and the rotation error is reduced by 21.4% in a 70% shielding or light reflection scene, and the method has strong robustness for depth noise, shielding and light reflection and has strong practicability.

The invention discloses an axial angle deviation correction system and correction method for a dual-optical-domain camera, relates to the field of intelligent image processing, and solves the problems that in an existing dual-optical-domain system, off-axis deviation exists, rotation errors exist in CMOS image sensor assembly, then axial angle deviation exists, and use requirements are further difficult to meet. According to the method, a test fixture is adopted, two cameras are used for shooting the same target screen to obtain two images, then a processor is used for recognizing marked graphs in the centers of the images and calculating the magnification ratio of the two cameras, meanwhile, the center coordinates of the marked graphs are automatically recognized, and correction parameters used for correcting the axial angle deviation of the two cameras are calculated; storing in a memory; in actual use, the processor calculates the images shot by the two cameras by using correction parameters, and finally realizes the superposition of the two images. According to the method, the speed and accuracy of intelligent recognition are improved, and double-object attacks initiated by hackers using two different sceneries on the two cameras are effectively prevented.

The present application belongs to the technical field of space geometry measurement, and particularly relates to a virtual multi-view six-degree-of-freedom pose measurement method, medium and system. The pose information of a cooperative target located in a combined field of view is obtained through coaxial cameras and a prism; a virtual camera is formed by rotating the prism; a coordinate system is established; target rotation representation is performed; a first rotation matrix is estimated; a virtual camera visual axis and a visual axis included angle are determined; a second rotation matrix is determined; a rotation error cost function is established; the rotation matrix and the rotation error cost function are represented by a quaternion; multi-rotation information fusion is performed; an exit point and an exit light vector of the prism are determined; feature point coordinates of the cooperative target are represented; determined object-side residuals are determined; an object-side residual cost function is constructed; and translation information fusion is performed. Compared with the prior art, the present application solves the problem that existing six-degree-of-freedom pose measurement devices are susceptible to noise, and the method proposed in the present scheme effectively improves measurement accuracy, adaptability and stability.

The invention discloses a three-dimensional registration method and device, a computer storage medium and a terminal. According to the embodiment of the invention, for a scene comprising a plurality of objects to be processed and images to be processed collected from more than two viewing angles of AR, residual errors still existing in the pose of a registered target object after rotation pose deviation correction are corrected, and the accuracy of the registration is improved. Performing contour projection on the rotation attitude correction pose on the to-be-processed image, searching to obtain candidate edge points, determining a residual error and a Jacobian matrix of the candidate edge points according to an energy function, expanding contour search to a cross-view angle and a constraint object, and feeding back an observation error on the constraint object to correct the rotation attitude correction pose. The amplification of the rotation error is inhibited; by introducing a normalization equation, solving of pose correction and consistency correction of pose residual errors of all objects to be processed are achieved; and performing pose correction on the registered target object according to the pose correction amount reaching the iteration termination condition, and realizing three-dimensional registration of the scene based on the registered target object without the pose residual error.

The invention discloses a method for estimating translation and rotation errors of a kinetic model constraint space reference, and the method comprises the steps: building an observation equation through employing inter-satellite distance measurement observed quantity obtained by satellite-borne inter-satellite link equipment, and building a satellite kinetic equation through employing the modeling of orbit perturbative force; performing space reference translation and rotation transformation on a satellite kinetic equation, and solving partial derivatives of related parameters to obtain a variational equation containing satellite position relative space reference translation and rotation parameters and satellite state parameter partial derivatives; solving the variational equation and the kinetic equation by adopting a numerical integration method to obtain a state transition matrix containing space reference translation and rotation parameters and satellite orbit state parameters, and a satellite reference orbit; a plurality of epoch inter-satellite distance measurement observation equations are linearized by using a satellite reference orbit to obtain a parameter estimation equation, and the equation is solved by using a parameter reduction method to obtain space reference translation and rotation parameter estimation values and estimation precision.

The application provides a high-resolution integrated imaging global correction method for accurately eliminating voxel diffusion, which comprises four processes of accurate characterization of voxel diffusion, pixel rearrangement preprocessing, global optimization of voxel diffusion and accurate three-dimensional reconstruction, the method takes a lens array with multiple rotation errors as a whole, calculates a general equation of a reconstructed light line, obtains an accurate size of voxel diffusion by splitting a voxel diffusion polygon, uses a pixel rearrangement preprocessing method to obtain a pre-corrected micro image array, uses the pre-corrected micro image array as an input of a discriminator in a pixel-to-pixel conditional generative adversarial network, compares the input with an output of a generator until the input and the output match to obtain a corrected micro image array, and finally performs three-dimensional reconstruction on the corrected micro image array by means of an integrated imaging 3D display system, so that the correction process of the voxel diffusion is effectively simplified, the overall resolution is improved, and the recovery of detail features is considered.

A lifting head rotation precision measuring system disclosed by the present invention comprises a power assembly, a rotation assembly, a measuring assembly and a judgment assembly, the power assembly is used for driving the rotation assembly to rotate, the measuring assembly comprises a detection device and a crystal transcoding disc, the crystal transcoding disc is fixedly installed on the rotation assembly, and the crystal transcoding disc rotates along with the rotation assembly. A plurality of code disc hollow parts are uniformly arranged on the periphery of the crystal transcoding disc, and the detection device is used for identifying the code disc hollow parts when the crystal transcoding disc rotates, outputting a first signal when the code disc hollow parts are identified, and outputting a second signal when the code disc hollow parts are not identified. The judgment assembly is used for calculating the rotation error of the rotation assembly according to the difference between the number of the received first signals and the second signals and the theoretical number, and the rotation precision of the rotation assembly is obtained. The code disc hollow part is arranged on the crystal transcoding code disc, the control precision of the upper driving crystal transcoding can be accurately measured according to the comparison between the identification result of the code disc hollow part and the theoretical condition, the cost is low, and the operation is convenient.

A circle profile error separation method based on discrete sampling point cumulative term and method, it relates to a kind of circle profile error separation method, to solve the problems such as harmonic suppression and long measurement time, complex calculation in prior art, the present application includes the following steps: first position signal is obtained by sensor acquisition, error separation platform is applied to the workpiece to be measured to carry out indexing, so that the workpiece to be measured and instrument rotation main shaft produce a fixed size indexing angle θ=2π / N, i.e. turn through unit sampling angle size, sensor collects second indexing signal at this time, finally, the first and second indexing signals collected are processed, the main shaft rotation error signal is separated from the circle profile error information, and the circle profile signal after removing error is obtained.The signal obtained by the discrete sampling point cumulative term and method for roundness error separation is consistent with the original given signal, which verifies the feasibility and effectiveness of the method for roundness error separation from principle.The present application belongs to the technical field of ultra-precision geometric measurement.

The application discloses a kind of main shaft rotation error measurement method and device based on optical principle.The main shaft rotation error measurement method is as follows: one, constructs coordinate system;Two, the axial error of main shaft is measured using light interference principle, and a beam is separated in the test light of axial error measurement and is shot to PSD, and radial error is obtained.The application sets up taper angle reflector at the end of main shaft, and the axial error of main shaft is measured using laser interference principle, the axial error measured by this mode is not influenced by radial error, the influence of inclination error can also be ignored, the complexity of axial error settlement is greatly reduced, and the detection precision is improved.In addition, while detecting axial and radial error, the application synchronously detects inclination error using annular reflector and laser autocollimator, and separates the measurement error caused by the inclination change of main shaft in radial error using the value of measured inclination error, and improves the detection accuracy of radial error.

The present application provides a position compensation control method and system for a machine tool rotary hopper, the method comprising: determining the standard rotation angle required for station rotation according to the number of stations of the machine tool rotary hopper, and determining the first position information of each station; obtaining image information after the machine tool rotary hopper completes rotation, and determining the second position information of each station through image processing; determining the actual rotation angle of the current ejection station according to the first position information and the second position information; judging whether the rotation angle error of the next ejection station exceeds the rotation error threshold according to the actual rotation angle, the standard rotation angle, and the number of rotations; if the rotation angle error exceeds the rotation error threshold, performing rotation angle compensation on the next rotation of the machine tool rotary hopper according to the rotation angle error, and resetting the number of rotations. Through precise error detection and compensation, the accuracy of the rotation angle is guaranteed, thereby improving the accuracy and efficiency of the entire production process.

The invention provides a machine tool spindle rotation error measurement method based on installation error correction, and the method comprises the steps: fixedly installing a high-precision plane mirror at the central position of the bottom of a spindle cutterhead through a bolt, and fixedly installing a laser interferometer below the high-precision plane mirror; before measurement, corresponding relation data of different installation error values and residual synchronization errors caused by the installation error values are quantitatively calculated; then, calculating an installation error control range required for enabling the residual synchronization error caused by the installation error to be within the required measurement precision; during detection, the installation error of the measuring device is obtained; adjusting the installation error by adjusting the installation position of the laser interferometer until the maximum amplitude (namely the installation error) of the basic synchronous rotation error extracted from the measurement data reaches the required installation error range; and after the installation error adjustment of the measuring device is completed, data acquisition is carried out to obtain the total axial rotation error data of the main shaft, and the axial synchronous and asynchronous rotation errors of the main shaft are calculated.

The present invention relates to an in-situ detection system and method for the rotation error of an ultra-precision machine tool spindle. The system comprises: a first standard spherical reflector and a second standard spherical reflector, respectively disposed at both ends of the machine tool spindle, with the axis of the machine tool spindle passing through the centers of the first and second standard spherical reflectors, respectively; a first optical autocollimator, a second optical autocollimator, a third optical autocollimator, and a fourth optical autocollimator, wherein the visual axes of all optical autocollimators are perpendicular to the axis of the machine tool spindle in a non-deflection state, and the autocollimators are divided into two groups and are perpendicular to each other. Compared with the prior art, the present invention has the advantages of high detection accuracy, fast response, strong data traceability, and comprehensive detection.

The application discloses a kind of for LDI exposure machine horizontal direction calibration error monitoring and compensation method, S1: before exposure to material plate, to platform, camera and exposure lens are calibrated horizontally;S2: each measuring point on the figure coordinate system where material plate is located is converted to platform coordinate system, and the theoretical position coordinates of each measuring point are obtained;After completing horizontal direction calibration, exposure is carried out, by the difference between the theoretical position and actual position of each measuring point is fitted, and the expansion, rotation error of platform in exposure position and the position calibration error of reference lens and reference camera are calculated and compensated, the calibration error of exposure lens magnification, angle and exposure lens position relationship is monitored and compensated, the grid error of platform in exposure position is monitored and compensated, the error generated by each subsystem in horizontal direction can be decomposed and compensated, finally ensure the accuracy of overlay.

A method for correcting time-varying ionospheric error in high-orbit SAR based on Faraday rotation estimation is proposed. The method first performs zero-padding of the azimuth signal, then calculates the azimuth decompression phase, reconstructs the azimuth echo, estimates the time-varying ionospheric error phase, performs time-varying ionospheric error correction, acquires the corrected full image data, and finally obtains the final corrected image data. This invention utilizes the Faraday rotation error caused by the time-varying ionosphere in the fully circularly polarized signal wave of high-orbit SAR. By employing azimuth echo reconstruction and Faraday rotation angle estimation inversion, it can achieve high-precision correction of the time-varying ionospheric error in high-orbit SAR images. Its phase correction accuracy is better than 0.01 rad, and the correlation between the corrected image and the original image is as high as 99%. The system is simple and low-cost.

The invention provides a geomagnetic vector matching navigation method based on deep reinforcement learning and a related device. The electronic equipment obtains a plurality of track points, and determines a plurality of reference track points corresponding to the plurality of track points from a standard geomagnetic isoline according to the actually measured geomagnetic information of the plurality of track points; obtaining a rotation deviation and a translation deviation according to the plurality of track points and the plurality of reference track points; and adjusting the positions of the plurality of track points according to the rotation deviation and the translation deviation to obtain a plurality of updated track points. Therefore, a plurality of pieces of actually measured geomagnetic information on the standard geomagnetic isoline are introduced to serve as the reference basis, it is ensured that the error correction process has clear physical significance and reliable reference basis, and the accuracy of error correction is improved by correcting the translation error and the rotation error at the same time. The problem of insufficient positioning precision caused by single-dimension correction in a traditional geomagnetic contour matching method is solved, so that the positioning precision is improved.

The application discloses a kind of for the correction method and device of cone beam CT system geometry parameter error, method includes: acquisition projection image projected on flat panel detector;Obtain the geometry parameter error of cone beam CT system;By the translation error of transverse and longitudinal of the plane where flat panel detector is, correct projection image, obtain first correction image;The normal rotation error of the plane where flat panel detector is and the distance error between flat panel detector and ray source are corrected to first correction image, obtain second correction image;For second correction image, respectively correct along the rotation error of transverse and longitudinal of the plane where flat panel detector is, obtain third correction image;The distance error of third correction image's rotating table and ray source is corrected, obtain the ideal image of geometry parameter error correction.By geometry parameter error correction projection image, without adjusting the position of cone beam CT system device, it is easy to calculate, effectively eliminate the influence of system error on image three-dimensional reconstruction.

The present application relates to the technical field of visual detection of product quality, and particularly relates to a commutator hook type visual detection system and method based on light-mechanical hybridization, which comprises a hook type rotating oblique angle front-back side imaging module and a hook type dynamic predictive correction measurement module; based on the hook type rotating oblique angle front-back side imaging module, an unobstructed hook type image to be detected is acquired, a hook type rotating error predictive model is used to calculate a hook type rotating error compensation value in the hook type image to be detected, then a hook type parameter in the image is calculated, a current hook type parameter measurement value is corrected by using the hook type rotating error compensation value, and a hook type parameter actual value is obtained. Finally, based on a detection threshold value set by a product standard, it is judged whether the product to be detected is a qualified product or a substandard product. The system can quickly and accurately detect the hook type, and solve the detection problems caused by the complex shape, small size of the commutator hook type, and the rapid rotation of the object for collecting the hook type image.

The present invention discloses a method for measuring the spindle rotation error based on dual probes. The method is as follows: First, a cylindrical sample is coaxially installed on the spindle to be measured. The probe device is arranged radially along the cylindrical sample; after the two probe devices simultaneously perform data acquisition in the tapping mode, they simultaneously perform data acquisition in the contact mode. In the data acquisition in the tapping mode, the spindle to be measured rotates for multiple circles to obtain multiple sets of displacement data. In the contact mode, the spindle to be measured rotates for one circle, leaving scratch marks on the spindle to be measured. Second, the inclination error of the spindle is calculated based on the displacement data; third, the axial error of the spindle to be measured is obtained based on the scratch marks. The present invention obtains radial displacement data and scratch marks through the probe scratching function, and with the corresponding calculations, it can simultaneously measure the inclination error, radial error and axial error of the spindle to be measured, thereby accurately evaluating the rotation accuracy of the spindle to be measured.

The present application provides a kind of measuring device, elevator system and installation position confirmation method, in the measuring device for measuring the information about the movement of mobile body, the relative distance and angle relative to the stationary structure as reference are measured with high accuracy, determine and output whether the measuring device is placed in the specified installation position with proper accuracy.When confirming the installation position of measuring device (110) relative to stationary structure (guide rail 140), image processing unit (240) calculates the translational error along a certain direction or the rotational error with the direction as axis of the placement position of measuring device (110) relative to the specified installation design position for at least one of x, y, z direction based on the electrical signal converted by camera unit (230), determines whether the placement position conforms to the installation design position based on the calculated result, and sends installation site determination information about the determination.

The invention discloses a photoetching machine mask alignment method based on a Transform model, relates to the technical field of photoetching machines, and is used for solving the problem of inaccurate mask alignment precision of a current photoetching machine. The method comprises the following steps: firstly, collecting image data of a mask and wafer combination, and carrying out noise removal and normalization processing on an image; and then, calculating a dynamic coefficient of each sub-region through region division, physical property analysis and a multi-factor fusion algorithm, serializing the extracted feature data and the dynamic coefficients, inputting the serialized feature data and dynamic coefficients into a Transform model, carrying out self-attention mechanism processing, and outputting an alignment deviation predicted value of the mask and the wafer. And finally, dynamically adjusting the position and the angle of the mask plate by adopting a self-adaptive stepping motor control strategy according to the deviation predicted value, and accurately compensating translation and rotation errors. According to the method, the position of the mask of the photoetching machine can be accurately adjusted in real time, and the photoetching precision and the production efficiency are improved.

This invention relates to a low signal-to-clutter ratio ISAR imaging method for ship targets based on multi-aperture rotation alignment. Specifically, it relates to ISAR signal processing and imaging, and more specifically to a ship target ISAR imaging method. The purpose of this invention is to address the problem that existing methods cannot simultaneously solve non-stationary Doppler blurring, sub-aperture rotation errors, and strong clutter interference during the imaging process, leading to low accuracy in ship target ISAR imaging. This invention establishes an echo signal model of the three-dimensional motion of ship targets in a marine environment and introduces sea clutter interference. It utilizes Keystone transform combined with a minimum entropy phase autofocus algorithm to compensate for range migration and phase error in the pulse-compressed signal. The full-aperture observation data is divided into multiple sub-aperture data blocks to generate sub-image sequences. A screening threshold is introduced to select high-quality sub-frames. The rotation error of each preferred sub-image relative to the reference frame is estimated and resampled for correction. Finally, a geometric mean fusion algorithm is used to preserve the strong scattering point features of the target.

The present invention discloses a shear rate calibration device and method for a transverse shearing interferometer. The device allows the calibration plate to be tilted at any angle in the direction perpendicular to the optical axis and is simple to operate. The device is also applicable when the incident light is a spherical wave with a certain known divergence or convergence angle. The method can make adjustments when there is a rotation error in the shear direction, and reduces the steps of image processing, thereby improving the accuracy and computational efficiency of shear rate measurement. The device includes a calibration platform, a plug-in fixture, a double-slit calibration plate, a grating, a CCD detector, and a computer. First, the calibration component, the double slit, is placed between the light source and the detection surface of the CCD. The double slit is fixed with a fixture and can move freely in the axial direction of the system. The position of the shear rate required by the grating measured using the double slit is recorded, and the axial movement of the fixture is restricted. The double slit is removed from the plug-in fixture and the grating is inserted to complete the calibration.

The present invention relates to the field of medical equipment technology, and provides a medical imaging system and a rotation error compensation method and storage medium thereof. The compensation method of the present invention can select an appropriate compensation interpolation boundary based on the different motion states of a magnetic scale, thereby defining the transition segment of the magnetic scale based on the selected compensation interpolation boundary and the factory interpolation boundary. Specifically, different transition segments are determined based on the different motion states of the magnetic scale, and the interpolation compensation transition segment is predicted based on a kinematic function. This ensures that the reading head maintains normal counting when transitioning through a virtual gap segment of the magnetic scale and reduces the probability of the reading head misreading a false zero signal during the interpolation process, thereby ensuring the quality of medical images.

This application relates to CNC machine tool technology, specifically to a table rotation calibration method, electronic device, and computer-readable storage medium. The method includes: acquiring calibration information from the detection probe of a calibration device; if the detection probe meets preset requirements based on the calibration information, controlling the detection probe to detect a first preset detection point and a second preset detection point on the worktable at its initial rotation position, obtaining first distance information and second distance information respectively; if the difference between the first and second distance information is within a preset range, obtaining the initial rotation angle error of the worktable based on the difference between the first and second distance information and the distance between the two preset detection points; compensating for the machining rotation coordinates of a preset workpiece based on the initial rotation angle error, and machining the preset workpiece based on the compensated coordinates. This application can compensate for the rotation error of the CNC machine tool's worktable, improving the workpiece machining accuracy of the machine tool.

A kind of data processing method for detecting cylindrical mirror based on three-coordinate profile measuring instrument, it is related to optical processing detection technical field, and the method includes the following steps: step S1: cylindrical surface is measured using three-coordinate measuring machine, obtains a group of cylindrical surface three-coordinate values as [x, y, z], wherein x is non-plane direction coordinate value, y is plane direction coordinate value, and z is vector height direction coordinate value;Step S2: using conic section and least square method fitting method, corrects three-coordinate measurement cylindrical original data around z rotation error and in plane direction inclination error, solves the cylindrical vector height z' after correction error;Step S3: remove the high order term part contained in cylindrical surface equation;Step S4: using linear fitting algorithm, fitting cylindrical surface type, solves the cylindrical vector height z'';Step S5: the cylindrical vector height z' solved in step S2 is subtracted from the cylindrical vector height z'' solved in step S4, and the detection surface type residual σ is obtained, and the method improves the accuracy of surface type information when three-coordinate or other profilometer detects cylindrical mirror.