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1222 results about "Linear arrays" patented technology

High repetition rate laser produced plasma EUV light source

An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The target tracking system may provide information enabling the creation of a laser firing control signal, and may comprise a droplet detector comprising a collimated light source directed to intersect a point on a projected delivery path of the target, having a respective oppositely disposed light detector detecting the passage of the target through the respective point, or a detector comprising a linear array of a plurality of photo-sensitive elements aligned to a coordinate axis, the light from the light source intersecting a projected delivery path of the target, at least one of the which may comprise a plane-intercept detection device. The droplet detectors may comprise a plurality of droplet detectors each operating at a different light frequency, or a camera having a field of view and a two dimensional array of pixels imaging the field of view. The apparatus and method may comprise an electrostatic plasma containment apparatus providing an electric plasma confinement field at or near a target ignition site at the time of ignition, with the target tracking system providing a signal enabling control of the electrostatic plasma containment apparatus. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap. The apparatus and method may comprise a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of the target ignition site to confine the plasma to the target ignition site, which may be pulsed and may be controlled using outputs from the target tracking system.
Owner:ASML NETHERLANDS BV

Spatial magnetic interrogation

PCT No. PCT / GB96 / 00823 Sec. 371 Date Jan. 12, 1998 Sec. 102(e) Date Jan. 12, 1998 PCT Filed Apr. 3, 1996 PCT Pub. No. WO96 / 31790 PCT Pub. Date Oct. 10, 1996Magnetic tags or markers are disclosed, together with a variety of techniques by means of which such tags may be interrogated. In one aspect, the magnetic marker or tag which is characterized by carrying a plurality of discrete magnetically active regions in a linear array. In another aspect, the invention provides a method of interrogating a magnetic tag or marker within a predetermined interrogation zone, the tag comprising a high permeability magnetic material, for example to read data stored magnetically in the tag or to use the response of the tag to detect its presence and / or to determine its position within the interrogation zone, characterized in that the interrogation process includes the step of subjecting the tag sequentially to: (1) a magnetic field sufficient in field strength to sacurate the high permeability magnetic material, and (2) a magnetic null as herein defined. Applications of such techniques are describer, inter alia, in relation to (a) identifying articles to which tags are attached; (b) accurate determination of position, as in the location of surgical probes; and (c) totalisation of purchases, where cash item carries a tag coded with data representing its nature and its price.
Owner:DIGITAL MAGNETIC TECH L L C

Phased array antenna interconnect having substrate slat structures

A phased array antenna is provided having a plurality of phase shifter devices for phase shifting and beam steering a radiated beam of the phased array antenna. The plurality of phase shifter devices are interconnected with an interconnect structure comprising a plurality of linear array substrate slats. Each linear array substrate slat includes a plurality of radiating elements formed using first and second metal layers of the substrate slat, a plurality of phase shifter devices and a common RF feed conductor for the plurality of radiating elements. The common RF feed conductor is formed on a third metal layer of the substrate slat that is disposed between the first and second metal layers. The common RF feed conductor is configured to include a single location for electrical connections to receive RF signals for the plurality of radiating elements. The phased array antenna also includes bias / control conductors applied to selected areas of the third metal layer, a fourth metal layer applied over the second metal layer and a shielding metal layer applied on the fourth metal layer. The bias / control conductors are configured to include a single location for electrical connections to receive bias voltages and control signals. The fourth metal layer includes circuit connections from the bias / control circuitry to the plurality of phase shifter devices. Each phase shifter device is attached to a radiating element via a mounting location on the shielding metal layer. Accordingly, a phased array antenna interconnect structure is provided that reduces the number of electrical connections required to provide RF signals and bias / control signals to multiple radiating elements and phase shifters, respectively, of the phased array antenna and provides a cost effective phased array antenna architecture that has a single locus of electrical connection for RF and bias control signals embedded in a multi-layer linear array or slat substrate of the phased array antenna.
Owner:ADVANCED HEALTH MEDIA +1
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