Optical measurement method and optical measurement device for five-degree-of-freedom rotation errors of spindle

Abstract

The invention discloses an optical measurement method and an optical measurement device for the five-degree-of-freedom rotation errors of a spindle. The optical measurement device comprises a precision-turned flange, four point laser generators, four CCD (Charge Coupled Device) cameras (CCD for short) and other fittings, wherein the flange is mounted on the end of the measured spindle. In the process of measurement, the flange is rotated along with the measured spindle, the four point laser generators emit four laser beams into the conical surface of the flange, and the laser beams are reflected by the conical surface and are then projected onto the four CCDs. When the spindle does not have rotation errors, the position of the light spot on each CCD is at the center of the CCD; and when the spindle has rotation errors, the positions of the light spots on the CCDs are changed. By capturing and subsequently processing the positions of the laser on the CCDs, the invention can measure theradial play (Delta x, Delta y) and axial play (Delta z) of the spindle and the deflection errors (Epsilon x, Epsilon y) of the spindle around the X axis and the Y axis. The method has a simple structure, the equipment cost is low, and the invention can carry out non-contact on-line measurement on the five-degree-of-freedom rotation errors of the spindle, and has higher measurement speed.

Description

technical field [0001] The invention relates to a method and a device for measuring the rotation error of a main shaft, in particular to an optical measurement method and a device for the five-degree-of-freedom rotation error of a main shaft. Background technique [0002] The high-precision spindle is a key component of ultra-precision equipment or large-scale basic equipment such as nano-diamond lathes, precision machining centers, hard disk drives, high-precision rotating motors, and large turbogenerators. The movement error of the spindle has a great influence on the working accuracy and performance of the whole machine direct impact. For example, the movement accuracy of the diamond lathe spindle directly affects the shape accuracy and surface roughness of the workpiece. Relevant experiments have shown that about 30% to 70% of the roundness error of precision turning is caused by the rotation error of the spindle, and the higher the accuracy of the machine tool, the gre...

AI Technical Summary

Problems solved by technology

Korean scholar Hyeong-Joon Ahn proposed a cylindrical capacitive displacement sensor to measure radial displacement (two degrees of freedom). At the same time, the scholar also carried out research on the method of measuring the geometric error of the five degrees of freedom of the rotation axis based on a disc-shaped planar capacitive sensor. Although the method can measure the errors of the five degrees of freedom of the main shaft at the same time, the capacitive sensors are distributed on concentric planes, the calculation model is complex, and there are serious nonlinearities.

Suzhou Guangdong Precision Instrument Co., Ltd. installs a standard ball on the spindle and uses a laser interferometer to detect the motion error of the standard ball to indirectly measure the motion error of the spindle. However, the structure of the system is relatively complicated, and only two degrees of freedom error detection can be realized.

Wang Kai of Xi'an University of Technology proposed a method of using laser light to irradiate a concave mirror installed on the end surface of the measured shaft, and using a photodiode to detect the position of the reflected light to detect the rotation error of the two degrees of freedom of the main shaft, but this method can only realize the two degrees of freedom of the main shaft Measurement of rotation error

Images