Morphology registration analysis-based method for detecting precision of precise main shaft rotation
A rotary precision and precision technology, applied in the direction of measuring devices, measuring/indicating equipment, instruments, etc., can solve problems such as complex test systems and test processes, expensive standard outer circle contours, etc., and achieve the effect of simple measurement methods
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[0012] For a preferred embodiment of the present invention, see figure 1 with figure 2 , first, the surface sample 2 is installed on the precision spindle 3 to be measured, and the position of the surface sample 2 is adjusted so that it is near the center of rotation of the precision spindle 3 to be measured; two, the surface microtopography measurement sensor 1 is adjusted relative to the surface sample 2, so that the measurement range of the surface micro-topography measurement sensor 1 covers the center of rotation position when the surface sample 2 rotates with the precision spindle 3 to be measured; 3. The control system 4 controls the precision spindle 3 to be measured to a certain angular position ( Such as to the 0° position or the origin position), a surface topography map is measured by the surface micro-topography measurement sensor 1; the control system 4 controls the precision spindle 3 to be measured to an angle θ position (which can be uniformly distributed on ...
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