Morphology registration analysis-based method for detecting precision of precise main shaft rotation

A rotary precision and precision technology, applied in the direction of measuring devices, measuring/indicating equipment, instruments, etc., can solve problems such as complex test systems and test processes, expensive standard outer circle contours, etc., and achieve the effect of simple measurement methods

Active Publication Date: 2011-11-23
HARBIN INST OF TECH
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Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the traditional precision spindle rotation error measurement method needs expensive standard ou

Method used

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  • Morphology registration analysis-based method for detecting precision of precise main shaft rotation
  • Morphology registration analysis-based method for detecting precision of precise main shaft rotation
  • Morphology registration analysis-based method for detecting precision of precise main shaft rotation

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Embodiment Construction

[0012] For a preferred embodiment of the present invention, see figure 1 with figure 2 , first, the surface sample 2 is installed on the precision spindle 3 to be measured, and the position of the surface sample 2 is adjusted so that it is near the center of rotation of the precision spindle 3 to be measured; two, the surface microtopography measurement sensor 1 is adjusted relative to the surface sample 2, so that the measurement range of the surface micro-topography measurement sensor 1 covers the center of rotation position when the surface sample 2 rotates with the precision spindle 3 to be measured; 3. The control system 4 controls the precision spindle 3 to be measured to a certain angular position ( Such as to the 0° position or the origin position), a surface topography map is measured by the surface micro-topography measurement sensor 1; the control system 4 controls the precision spindle 3 to be measured to an angle θ position (which can be uniformly distributed on ...

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Abstract

The invention provides a morphology registration analysis-based method for detecting precision of precise main shaft rotation. A surface sample is installed on a to-be-detected precise main shaft; a control system controls the to-be-detected precise main shaft to be at a position at an angle theta; surface morphology graphs of the surface sample are collected in order, wherein the surface morphology graphs are obtained when the to-be-detected precise main shaft at complete circumference positions. A morphology data registration analysis processing system analyzes the plurality of surface morphology graphs and error evaluation is simultaneously carried out. According to the invention, a morphology of a surface sample that makes rotation with a precise main shaft is measured and subsequent morphology registration is analyzed and processed; there is no high precision requirement on the surface sample; and an expensive standard external circle profile or a complex testing system and a testing process are not needed. If a two-dimensional morphology/image sensor is selected for utilization, a radial rotation error of the main shaft can be measured; If a three-dimensional morphology measurement sensor is selected for usage, radial and axial rotation errors of the main shaft can be measured simultaneously. The utilization of a measurement sensor with high resolution enables main shaftrotation error detection with nanometer-level precision to be realized.

Description

technical field [0001] The invention relates to a detection method for the rotation error of a precision main shaft. Background technique [0002] Precision rotary spindles are key components of precision machining machine tools and testing equipment. With the development of ultra-precision machining and nanotechnology, people have higher and higher requirements for the accuracy of mechanical parts and measuring instruments, especially high-precision rotary parts, such as ultra-precision machine tool spindles, test turntables, laser gyroscope rotors, circular Standards, laser fusion target devices, etc., the manufacturing tolerance is generally between a few nanometers to tens of nanometers, which has reached or exceeded the accuracy level of existing precision roundness instruments (radial rotation error is about 10-50nm) . Improving the rotation accuracy of the spindle to meet the processing requirements of the parts under the limit state and to ensure the accuracy of th...

Claims

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Application Information

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IPC IPC(8): G01B11/02B23Q17/00
Inventor 赵学森孙涛闫永达胡振江吴玉东董申
Owner HARBIN INST OF TECH
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