Precise main shaft rotation accuracy detecting device and method
A technology of rotation accuracy and detection device, applied in the direction of machine gear/transmission mechanism testing, etc., can solve the problem of low precision spindle accuracy, and achieve the effect of improving accuracy and simple operation.
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[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0018] A specific embodiment of the present invention provides a precision spindle rotation accuracy detection device, such as figure 1 shown, including:
[0019] Atomic force microscope AFM1, planar sample 2, manual two-dimensional adjustment stage 3, two-dimensional electric displacement stage 5 and precision spindle controller 6, wherein, the AFM is used in conjunction with the planar sample 2 to obtain the scribed topography map, and the planar sample 2 is fixe...
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