Self-separation method and device for spatial error of superprecise revolution reference

Abstract

The present invention belongs to the field of precise instrument manufacture and measurement technology, and is especially self-separation method and device for spatial error of super-precise revolution reference. The method of Z-direction section-by-section separation of super-precise revolution reference spatial motion error can meet the requirement of high precision cylindricity instrument to reduce spatial revolution error. The self-separation device for spatial error of super-precise revolution reference is developed by means of integrating roundness error separating system and cylindricity instrument revolution main shaft system. The bench revolving single-transposition small-angle error separation method is adopted in realizing the section-by-section separation of spatial revolution motion error of cylindricity instrument revolution main shaft, so as to reach the aim of reducing the effect of the spatial revolution motion error on measurement result.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, in particular to a method and device for self-separating ultra-precision rotary reference space errors. Background technique [0002] The rotation error of the main shaft of the cylindricity measuring instrument, the straightness of the vertical guide rail, and the parallelism between the guide rail and the axis of rotation are the three major error sources that constitute the cylindricity measuring instrument. Among these three error sources, the straightness of the guide rail can be corrected and compensated by methods such as laser monitoring method and flat crystal separation method, and the parallelism can be pre-corrected by the reverse method or standard column inversion method, while the spindle rotation error has so far No effective way to correct and compensate has been found. In fact, the rotation error of the main shaft of the cylindricity m...

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Problems solved by technology

[0006] The above-mentioned circular profile error separation technology and system cannot effectively separate the spatial rotation error of the cylindricity measuring instrument

like Figure 4 As shown, the reasons are as follows: 1) The error separation turntable 5 and the rotary reference system 12 of the cylindricity measuring instrument are independent of each other. Due to the influence of the turntable control wire 11, the separation process will inevitably require human intervention, resulting in complex structure, long separation time, and increased error links; 2) Existing error separation methods such as multi-step method (commonly used 12 indexing), reverse method, etc. When performing space rotation error separation, the separation process is complicated, the separation time is long, and various drifts introduced are relatively large; 3) The error separation turntable 5 raises the measured workpiece 4 by h, which increases the measurement chain and sacrifices the original accuracy of the rotation reference , such as the axial size increases, the angular rotation error doubles, etc.; 4) It is difficult to adjust, and each measurement needs to adjust the error separation turntable 5 and the workpiece 4 to make the error separation turntable 5 The axis of rotation and the axis of rotation of the workpiece 4 It is on the same axis as the 15 rotation axis of the spindle rotation reference of the cylindricity meter, which also puts forward high requirements for the manufacturing accuracy of the error separation turntable

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