Self-separation method and device for spatial error of superprecise revolution reference

A space error and error separation technology, which is applied in the field of self-separation of ultra-precision rotary reference space error, can solve the problems of increased axial size, increased error links, and inability to separate space rotation errors of cylindricity measuring instruments, etc., to achieve shortened axial Size, Simplified Error Separation Device and Effect of Error Separation Process

Active Publication Date: 2004-09-08
HARBIN INST OF TECH
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Problems solved by technology

[0006] The above-mentioned circular profile error separation technology and system cannot effectively separate the spatial rotation error of the cylindricity measuring instrument
like Figure 4 As shown, the reasons are as follows: 1) The error separation turntable 5 and the rotary reference system 12 of the cylindricity measuring instrument are independent of each other. Due to the influence of the turntable control wire 11, the separation process will inevitably require human intervention, resulting in complex structure, long separation time, and increased error links; 2) Existing error separation methods such as multi-step method (commonly used 12 indexing), reverse method, etc. When performing space rotation error separation, the separation process is complicated

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  • Self-separation method and device for spatial error of superprecise revolution reference

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Embodiment Construction

[0035] The structure and working principle of the ultra-precision rotary reference space error self-separation device of the present invention are described in detail in combination with the embodiments and accompanying drawings as follows:

[0036] Schematic diagram of the structure of an embodiment of the ultra-precision rotary reference space error self-separation device of the present invention. Such as Figure 7 As shown, it includes: a circular profile measurement sensor 3, a measured cylinder 4, a rotary table 13, an error separation turntable 14, the B end of the air bearing shaft system of the error separation turntable, an indexing angle (small angle) generating system 20, and an instrument Rotary spindle 15, indexing angle (small angle) detection system 25 (commonly used reflective sector grating and combined photoelectric receiver), conductive slip ring 17, motor drive system 18, angle measuring encoder 19, base 10, closing force Generator 23, threaded PZT 24 etc....

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Abstract

The present invention belongs to the field of precise instrument manufacture and measurement technology, and is especially self-separation method and device for spatial error of super-precise revolution reference. The method of Z-direction section-by-section separation of super-precise revolution reference spatial motion error can meet the requirement of high precision cylindricity instrument to reduce spatial revolution error. The self-separation device for spatial error of super-precise revolution reference is developed by means of integrating roundness error separating system and cylindricity instrument revolution main shaft system. The bench revolving single-transposition small-angle error separation method is adopted in realizing the section-by-section separation of spatial revolution motion error of cylindricity instrument revolution main shaft, so as to reach the aim of reducing the effect of the spatial revolution motion error on measurement result.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, in particular to a method and device for self-separating ultra-precision rotary reference space errors. Background technique [0002] The rotation error of the main shaft of the cylindricity measuring instrument, the straightness of the vertical guide rail, and the parallelism between the guide rail and the axis of rotation are the three major error sources that constitute the cylindricity measuring instrument. Among these three error sources, the straightness of the guide rail can be corrected and compensated by methods such as laser monitoring method and flat crystal separation method, and the parallelism can be pre-corrected by the reverse method or standard column inversion method, while the spindle rotation error has so far No effective way to correct and compensate has been found. In fact, the rotation error of the main shaft of the cylindricity m...

Claims

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Application Information

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IPC IPC(8): G01B5/20
Inventor 谭久彬赵维谦杨文国金国良
Owner HARBIN INST OF TECH
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