165 results about "Angular error" patented technology

The invention provides an exoskeleton robot self-adaptive control method and related equipment, and relates to the technical field of exoskeleton robots. The method comprises the following steps: acquiring motion information and position information of each movable joint in the exoskeleton robot; inputting the motion information and the position information into a pre-trained angle prediction model to obtain a target angle of each movable joint; the difference value between the target angle and the actual angle output by the exoskeleton controller serves as an angle error; constructing a virtual control quantity based on the angle error; the virtual control quantity is combined with motion parameters of the exoskeleton robot to be input into a disturbance observer, and estimated disturbance is generated; the angle error, the virtual control quantity and the estimated disturbance are input into an adaptive neural network controller, and the control torque of each movable joint is obtained; and based on the control torque of each movable joint, generating a control signal of each movable joint. The method and the device have good control precision.

The invention belongs to the technical field of mechanical arm control, relates to a bionic mechanical arm elbow joint adjusting angular velocity control method, and solves the problem that an existing method is difficult to meet the collaborative requirements of smooth starting, smooth transition and quick response in bionic actions. Acquiring starting and target positions to generate a motion trail; deducing an expected angle sequence based on forward and reverse kinematics, calculating a target angular velocity, and collecting current angle and angular velocity information in real time; an angle error signal is constructed, an angular velocity control instruction is generated by using a position type PID controller, and PID parameters are dynamically set through an improved algorithm based on state optimization; and a control instruction is input into the elbow joint driving unit, and dynamic adjustment and closed-loop control of the angular speed are achieved. The effect of the method is verified through experiments, and the experiments prove that the precision, robustness and dynamic response capability of angular velocity control of the bionic mechanical arm can be remarkably improved through the method.

The present invention relates to a calibration method, system and calibration device for an omnidirectional ring three-dimensional scanner. The calibration method includes: setting the lens axis of the camera as the coordinate origin, taking the lens axis of the camera as the Z-axis to establish a three-dimensional coordinate system, and setting the Z-axis as the standard axis. Measuring the coordinate error from the axis of the annular structure generating device to the lens axis of the camera, and the coordinate error from the axis of the hyperbolic mirror to the lens axis of the camera, and sequentially marking the two coordinate errors as the first position error and the second position error. Measuring the angle between the axis of the annular structured light generating device and the lens axis of the camera, and the angle between the axis of the hyperbolic mirror and the lens axis of the camera, and sequentially marking the two angles as the first angle error and the second angle error, and finally calculating the installation error. The present invention obtains the installation error through manual measurement and calculation, which is beneficial to improving the installation accuracy and the measurement accuracy and range of the scanner.

The invention relates to the technical field of article conveying, in particular to a clamping and overturning device and method for carton conveying, the clamping and overturning device comprises two symmetrically-distributed conveying frames, a plurality of conveying rollers are evenly arranged between the conveying frames in the length direction of the conveying frames, and the two ends of each conveying roller are installed on the conveying frames on the corresponding sides through bearings; the aligning mechanism and the reversing mechanism are jointly installed on the two conveying frames, the aligning mechanism can automatically align the cartons to enable the length direction of the cartons to be parallel or perpendicular to the conveying direction, and then the aligned cartons are conveyed to the reversing mechanism. The reversing mechanism only needs to rotate by 90 degrees or does not rotate according to the aligned carton state, so that the carton can be reversed to the final conveying direction, and the phenomenon that the reversing mechanism needs to rotate for many times to compensate for angle errors due to carton input angle deviation is avoided; finally, the aligned cartons are output to the reversing mechanism in the state that the length direction of the cartons is parallel to or perpendicular to the conveying direction, and the reversing precision and efficiency of the reversing plate are improved.

The invention discloses a radar and photoelectric equipment detection error solving method. The method comprises the steps of S1, radar and photoelectric equipment base levelness error detection, S2, equipment orientation and pitching zero position reference error detection, S3, radar reference error detection, S3, radar and equipment angle detection, S4, error matrix fitting, S5, error value correction and S6, error correction. According to the radar and photoelectric equipment detection error solving method, a measurement tool, a calibration device, an unmanned aerial vehicle and carrying equipment are finely prepared and calibrated, the accuracy of a measurement result is ensured, in the step S3 and the step S4, collected error data are processed, an angle error matrix is constructed, and the accuracy of the measurement result is ensured. The generalization ability of the fitting model is evaluated by adopting technical means such as cross validation, all angle ranges needing to be measured are comprehensively covered by planning flight paths in different directions, heights and distances, error data are obtained, model parameters are optimized, an angle error calibration function is obtained, and the effectiveness and accuracy of the angle error calibration function are evaluated through verification.

The invention relates to a method and equipment for detecting deflection of a galvanometer motor in a medical galvanometer scanning system. The method mainly comprises the steps that a dynamic threshold value library is established, a dynamic threshold value set matched with a current scene is called, and the dynamic threshold value set comprises an angle error threshold value, a vibration threshold value and a driver temperature threshold value; acquiring inner ring control signals in real time, wherein the inner ring control signals at least comprise a motor angle error signal, a vibration signal and a driver temperature signal; carrying out quantitative fusion on the collected signals through a multi-signal weight fusion algorithm and carrying out preliminary judgment; and comparing the preliminarily judged signals with a dynamic threshold group, judging whether each signal meets a corresponding threshold condition or not, and if all the signals meet the corresponding threshold condition, judging that the galvanometer motor deflects in place. Compared with the prior art, the precision is remarkably improved, the normal skin burn risk caused by position deviation is avoided, and the high-precision safety requirement of a medical scene is met.

The invention belongs to the field of aircraft digital assembly automatic drilling and riveting, and particularly discloses an automatic drilling and riveting machine actuator normal alignment method and system.The method comprises the steps that firstly, the original distance from the end face of a presser foot to the plane around a to-be-machined hole is collected through a sensor; then, a KF-MAF algorithm combining Kalman filtering and moving average filtering is adopted to suppress dynamic noise, and accurate distance information is obtained; then, the deviation between the feeding direction of an actuator and the normal direction of the surface of the hole to be machined is calculated, and the angle error amount of a target hole site is obtained through a bilinear interpolation method; and finally, an actuator is controlled to rotate to compensate errors, the position of the center point of the tool is kept unchanged, the axis of the drill bit coincides with the local surface of the workpiece in the normal direction, and normal alignment is achieved. According to the method, the needed original information is less and easy to obtain, alignment can be accurately and rapidly completed, and the drilling precision is guaranteed.

The invention discloses a sound wave detection method and system for an underground pipeline, and the method comprises the following steps: 1, dynamically adjusting the detection height in the radial direction of a pipeline through a lifting adjustment device of a first sound wave detection mechanism, and enabling a sound wave transmitting end to adapt to the inner walls of pipelines with different pipe diameters; 2, a rotation driving device of a second sound wave detection mechanism controls a sound wave transmitting end to conduct multi-angle rotation scanning around the axis of the pipeline, and the circumferential area of the cross section of the pipeline is covered; 3, based on the pipeline inner diameter D, the material acoustic characteristics and the preset coverage rate eta, motion parameters are generated through a dynamic optimization algorithm; 4, collecting a reflected sound wave signal and carrying out multi-stage processing; through the implementation of the method, a dynamic optimization algorithm of full-dimensional scanning coverage enables the screw pitch error of a spiral track to be small, 100% non-blind area coverage of the cross section of the pipeline is achieved, the self-adaptive focusing lens controls the sound beam focusing angle error to be within + / -2 degrees, and the detection sensitivity of the thin-walled pipe is improved.

To provide a radar device with which it is possible to calculate azimuth errors with high accuracy.SOLUTION: A radar device is mounted to a mobile body 80, and comprises a detection unit 410, a speed acquisition unit 411, a tracking unit 413, a stationary object determination unit 414, a distance acquisition unit 415, an assumed angle calculation unit 416, and an error calculation unit 417. The tracking unit acquires the time sequence of object information corresponding to at least one object which is determined to be the same as a first object. The distance acquisition unit acquires a first distance which was acquired when a vehicle passed through the side of the first body out of the acquired time sequence of object information, when it is determined that the first object is a stationary object. The assumed angle calculation unit calculates an assumed angle on the basis of the acquired first distance and a second distance detected at this round of time. The error calculation unit calculates the difference between the calculated assumed angle and a first azimuth angle as the amount of an azimuth error at the first azimuth angle detected at this round of time.SELECTED DRAWING: Figure 9A

This invention relates to the field of flying shear equipment, specifically a manufacturing method for a double-edged rotary drum cutter shaft. The method includes: optimizing the heat treatment allowance diagram of the cutter shaft; rough grooving the shear blade mounting surface, without opening the two ends of the groove; heat treating the workpiece shaft according to the optimized heat treatment allowance diagram to ensure the allowance meets the set requirements; configuring a counterweight: machining a counterweight according to the outer dimensions of the groove on the shear blade mounting surface, and placing the counterweight in the rotating body to restore the outer contour and center of gravity of the rotating body; and using an angle plate for auxiliary positioning: setting an angle plate on the transmission side, and using a dial indicator to calibrate the auxiliary reference hole axis of the angle plate to be parallel to the machine tool shaft. This invention solves the technical problems of the surface hardness of the double-edged rotary drum cutter shaft after machining not meeting design requirements, the impact of unbalanced inertial forces on machining accuracy during turning, and the difficulty in controlling the parallelism and compound angle errors of the shear blade mounting surface and locking cylinder.

The present invention discloses a method, system, and medium for detecting the spatial posture error of a moving component. The method comprises the following steps: obtaining posture information of a machine tool moving component based on an IMU module and an electronic level: accelerometer signals and angular velocity signals obtained by the IMU module, and angular error signals obtained by the electronic level; fusing the posture information to obtain linear error and angular error; establishing an error prediction model using a BP neural network based on the linear error, angular error, and the motion speed of the machine tool linear axis; obtaining the optimal initial weights and thresholds of the BP neural network using a longhorn beetle whisker search algorithm, substituting these values ​​into the error prediction model for model training to obtain a trained error prediction model; and performing spatial posture error detection on the moving component based on the trained error prediction model to obtain posture error detection results. The present invention can measure the spatial posture error of equipment motion and improve measurement precision while ensuring accuracy.

The invention discloses a five-axis numerical control machine tool rotating shaft reference point position error correction method and system. The method comprises the steps that a special tool and a measuring probe are installed on a machine tool workbench; the straight shank inspection rod is installed on a machine tool spindle, and the length parameter of the straight shank inspection rod is input into a numerical control system; controlling each axis of the machine tool to move, enabling the measuring probe to respectively touch the near end and the far end of the straight shank inspection rod, and recording coordinate values in a preset direction during two times of touch; according to the coordinate value in the preset direction during touch and the distance between the near end and the far end in the direction perpendicular to the preset direction, the angle error of the rotating shaft is calculated; reading the reference point compensation value of the current rotating shaft in the numerical control system, and correcting the reference point position of the current rotating shaft according to the reference point compensation value and the angle error. The special tool is arranged on the machine tool, and the measuring probe is combined with the machine tool spindle to realize automatic measurement and compensation of the spindle reference point error, so that the detection and compensation are short in time and high in efficiency.

This invention discloses a multi-station tooling, belonging to the field of machining tooling and fixture technology. The tooling includes a base, a single cylinder, a movable arm, multiple clamping modules, spherical washers, and limiting components. The single cylinder drives the movable arm to perform overall linear translation. The movable arm has multiple spherical grooves, and each pull core forms a spherical adaptive fit pair with the spherical grooves through the spherical washers. The clamping modules are configured as interchangeable inner support modules or outer clamping modules, allowing switching of working modes on the same base by changing the pull cores and elastic chucks. The spherical adaptive fit pair between the spherical washers and spherical grooves automatically compensates for axial eccentricity and angular errors caused by the interchangeability of the inner support modules and outer clamping modules and assembly deviations. This invention achieves unified high-precision synchronous clamping at multiple stations with a single cylinder and rapid switching between inner support / outer clamping, significantly improving clamping force consistency, machining yield, and changeover efficiency.

The application discloses a kind of anti-UAV array direction finding calibration method and device, it is related to anti-UAV technical field, realize multi-dimensional error correction, realize the accurate calibration of all error sources, all directions.The first time that array element position error is included in anti-UAV array direction finding calibration system, through GPS / inertial navigation module real-time acquisition array element position, calculate the influence coefficient of position deviation to direction finding, and into calibration formula, solve the direction finding error problem caused by outdoor array element installation deviation;Meanwhile, discard single 0 degree auxiliary signal source, add 30°, 60°, 90° and so on 7 direction multi-angle calibration signal source, establish the angle-error mapping table of all directions, realize the accurate calibration of different angle incident UAV signal, eliminate direction dependent error, cover the full direction incident demand of UAV signal in anti-UAV scene.

Disclosed is a simulator and simulation method with increased precision, in particular a weapon system simulator, and weapon system provided with such a simulator. —The simulator (1) comprises a unit for generating a virtual image (I1) which is defined according to an orientation reference and a sighting reference, a unit for generating a so-called captured image from angle-error and telemetry measurements relating to one or more real actors (R1 to R4) each of which is equipped with a retroreflector (10), the angle-error and telemetry measurements being performed using a rangefinder, a comparison unit for comparing the current virtual image (I1) and the captured image so as to determine an error value representative of an orientation and / or sighting error, and a resetting unit for resetting the orientation reference and / or the sighting reference in order to correct said error value so as to create an optimised virtual image which is displayed on the vision element (2) in place of the current virtual image.

A calibration method for LiDAR channel angular error is applied to a calibration device with a controller and a moving component. The LiDAR optical engine on the moving component is controlled by the controller to deflect. The method includes: aligning the LiDAR's detection center with the calibration-target center; selecting channels to be calibrated; controlling the selected channels to project onto the target based on their positional relationship; acquiring an image of the target to get real and reference spots; determining vertical and horizontal offset angles according to the spot positions; and calibrating the channels using these offset angles.

The application provides a satellite splicing imaging posture maneuver angle error correction method and related device, and relates to the technical field of satellites. A plurality of ground imaging points are acquired, and then actual posture angles of the satellite pointing to each ground imaging point are obtained respectively; and simulation posture angles of the satellite pointing to each ground imaging point obtained by using a satellite simulation tool are obtained respectively. Finally, based on the actual posture angles and the simulation posture angles of each ground imaging point, a posture angle deviation mean value is obtained. In this way, the posture angle error of the collected remote sensing image can be corrected based on the real-time flight state of the satellite using the posture angle deviation mean value, so that deviation of the collected remote sensing image is avoided.

The invention discloses a mechanical arm control method and system for high-precision machining, and relates to the technical field of machining control. According to the method, an operation data set is constructed, a lead screw displacement error Wx (t) is calculated, and a mapping relation between time and an angle is established through a lead screw transmission ratio to obtain an angle error vector epsilon (phi); superposing and averaging the angle error vector by adopting a periodic signal superposition technology to obtain a lead screw angle error amount Es (phi); solving a fitting parameter group through a least square fitting algorithm, constructing a screw pitch error index Wwc (phi), performing dynamic error compensation on a screw rotation angle variable phi, and generating a corrected path track Xc; and calculating a periodic residual error ratio Rre of an error before and after correction by extracting actual displacement and theoretical displacement data, and evaluating a compensation state. According to the method, through time and angle domain collaborative modeling and periodic residual error closed-loop evaluation, dynamic correction and precise control over the motion error of the mechanical arm lead screw are achieved.

The present invention relates to an underwater acoustic image reconstruction method based on angle error compensation, comprising the following steps: (1) For each subsystem composed of a receiving array element and a transmitting array element, calculate the spatial coordinate information of the transmitting array element and the receiving array element and the two-way slant range history; (2) Calculate the two-way slant range history after phase center approximation; (3) Calculate the system function in the range-Doppler domain; (4) Calculate the Doppler phase error; (5) Divide the data into non-overlapping data blocks and compensate for the micro range migration error caused by the range error; (6) Obtain the signal after range delay error compensation; (7) Perform differential range migration correction processing, range direction pulse compression, secondary range pulse compression, and consistent range migration correction processing; (8) Perform azimuth focusing processing, residual phase error compensation operation, and azimuth walk correction processing; (9) Perform coherent fusion processing and inverse Fourier transform to obtain the final high-resolution image. The present invention can quickly reconstruct images and meet the requirements of real-time processing.

The invention relates to an assembly error elimination method for a liquid crystal polarization state controller, which comprises the following steps of: constructing an assembly error model by adopting a Mueller matrix, and simulating and analyzing an influence rule of an angle error of a polaroid and an LCVR2 (Liquid Crystal Voltage Receptor 2) on a polarization state; based on an influence rule of assembly errors, a two-step correction strategy based on computer-aided assembly and adjustment is provided. The two-step correction strategy comprises the following steps: firstly, carrying out angle correction on a polaroid by taking ellipsometric skewness of circularly polarized light as a criterion; then, angle correction of the LCVR2 is carried out on the basis of the included angles among the three pieces of linearly polarized light; an experiment light path is built for experiment verification, and meanwhile, the installed and adjusted liquid crystal polarization state controller is used for generating elliptically polarized light to verify the effectiveness of installation and adjustment. The method can effectively eliminate the assembly error, and achieves the high-precision output of the polarization state.

The invention discloses an angle-adjustable frequency stabilization device for a laser gyroscope, and belongs to the field of laser gyroscopes. The device comprises a frequency stabilization spherical mirror and an annular thin rib structure formed by processing a glass material, coaxial columnar protrusions are arranged at the two ends of the center of the frequency stabilization spherical mirror, the end of the columnar protrusion at one end is a concave spherical surface, and the columnar protrusion at the other end is a jackscrew contact surface; the clamping mechanism is used for installing the frequency stabilization spherical mirror; the 3-4 jackscrews are connected with the grabbing and clamping mechanism through threads, and the end surfaces of the jackscrews are in tight contact with the jackscrew contact surfaces on the columnar bulges of the frequency stabilization spherical mirror; the two piezoelectric ceramic pieces are arranged on the upper surface and the lower surface of the card grabbing mechanism respectively and used for achieving frequency stabilization through voltage control. According to the invention, through different screw-in amounts of 3-4 jackscrews, the reflection angle of the frequency stabilization spherical mirror can be accurately adjusted, the angle processing error of a laser gyroscope cavity is made up, and the problem that a new angle error may be introduced due to the fact that the angle of an existing clamping type frequency stabilization control mirror cannot be adjusted is solved.

The invention provides a pointing error correction method and device of a beam waveguide system, equipment and a storage medium, which can be applied to the technical field of antennas. The method comprises the following steps: acquiring laser incident to a beam waveguide system along a current beam transmission direction every time an antenna rotates to an angle; laser is reflected to the target through first to Sth plane mirrors in the beam waveguide system, a first laser point is obtained, and the first to Sth plane mirrors are plane mirrors which are closer to the target in sequence; determining an angle error according to the first laser point, the second laser point incident to the Sth plane mirror and the target point; rotating angles of waveguide reflectors are adjusted, angle errors are corrected, the waveguide reflectors are used for reflecting a current wave beam, and a plane mirror is placed in the center of each waveguide reflector; re-acquiring the first laser point, and determining a displacement error according to the re-acquired first laser point and the target point; and adjusting the displacement of the waveguide reflector, and correcting the displacement error.

The application belongs to the field of grating measurement, and provides an error compensation method for grating interferometer measurement, which comprises the following steps: constructing an angle error function based on the angle error of grating interferometer measurement; constructing a relative displacement error function based on the relative displacement error of grating interferometer measurement; constructing an explicit compensation model based on the angle error function and the relative displacement error function; constructing an implicit compensation model based on the data set formed by the angle error and the relative displacement error; obtaining an explicit accuracy mean value based on the explicit compensation model, and obtaining an implicit accuracy mean value based on the implicit compensation model; when the implicit accuracy mean value is not less than the explicit accuracy mean value, the explicit compensation model is used to compensate the error of the grating interferometer measurement value. The method guarantees the reliability of the selected model by analyzing the consistency of the internal mapping of the model and the physical law, so as to realize high-precision, high-robustness and strong-explainability displacement measurement compensation.

The invention discloses an angle error detection method and system for a photoelectric encoder, and relates to the technical field of encoder error detection, and the method comprises the following steps: obtaining an original angle signal, a standard angle signal and a vibration signal of the photoelectric encoder, which are synchronously collected in a vibration state; determining an instantaneous angle error according to the standard angle signal and the original angle signal; based on the vibration signal and the instantaneous angle error, establishing an error model for describing a mapping relation from vibration to angle error; acquiring a current angle signal and a current vibration signal of the photoelectric encoder in real time; determining a real-time angle error compensation value according to the current vibration signal and the error model; and compensating the current angle signal by using the real-time angle error compensation value, and outputting an accurate angle value. A dynamic error model is constructed by actively introducing controllable vibration and synchronously analyzing the controllable vibration, a real vibration working condition is simulated, and the repeatability and reliability of measurement are improved.

The invention relates to the technical field of silicon wafer production in the photovoltaic industry, and discloses a laser scribing deviation rectifying method and system, and the method comprises the steps: obtaining coordinates of two end points of laser scribing and an included angle related to two driving mechanisms; calculating the coordinates of the center point of the target edge according to the coordinates of each vertex angle of the film source; calculating coordinates of an intersection point of the laser scribing line and the target vertical line; calculating a compensation value of the central point in the XY direction according to the coordinates of the central point, the intersection point and the laser scribing endpoint; if the included angle is not 90 degrees, performing included angle compensation on the X compensation value based on the included angle; the difference value of the two included angle compensation values in the X direction serves as the walking distance compensation value of the first driving mechanism, and the difference value of the two Y compensation values serves as the walking distance compensation value of the second driving mechanism. According to the invention, systematic angle deviation can be effectively eliminated, the silicon wafer positioning precision is improved, and the silicon wafer production loss is reduced. According to the invention, the angle deviation is calibrated in a full-automatic manner, real-time dynamic angle error compensation of multiple devices can be realized, and the debugging time is greatly reduced.

Systems and methods for operating an electric drive system for an electric or hybrid vehicle are described. In one example, an angular error between a rotor reference position of an electric machine and a position sensor reference position of the electric machine is estimated when high voltage is present and when the electric machine is commanded to zero torque.

The invention discloses a heavy-load hydraulic mechanical arm integrated control method and system based on reinforcement learning, relates to the technical field of mechanical arms, and solves the problem that an operator determines an excavation position only by visual judgment or simple two-dimensional image analysis and is difficult to accurately recognize the optimal stress surface of a target body. The virtual model is continuously compared with actual mechanical arm parameters, an error signal is generated, strategy updating of the reinforcement learning model is triggered, self-adaptive control over the hydraulic mechanical arm is achieved through the closed-loop process of state input-action output-reward feedback, and the angle error is reduced to be within + / -0.5 degrees; and in combination with geometric feature analysis of the model body, the optimal working face is locked innovatively according to dual judgment standards of the mean value and 180-degree difference value of the regional included angle and the regional flatness, so that the problems of overlarge excavation resistance, aggravated mechanical loss and the like caused by improper selection of the working face are effectively avoided, and the shoveling stress of the excavator is more reasonable.

The invention discloses an instantaneous rotating speed real-time compensation method for a motor test board, which comprises the following steps of: firstly, carrying out self-inspection on equipment, then testing by using a qualified motor, judging the reasonability of an error, then carrying out measured value compensation on a component, continuously carrying out rotating speed test on the compensated test board, and carrying out real-time compensation on the instantaneous rotating speed on the basis of a secondary test result. The angle error represented by the number of teeth of the fluted disc is reasonably compensated, real equipment to be tested is tested, and whether the equipment to be tested is qualified or not is judged. According to the invention, through the core idea of variable control, a qualified motor is taken as a test object, numerical compensation is carried out on components of a test bench, the main compensation is the influence brought by the instrument reaction time difference, and then the compensation amount of the fluted disc angle is derived according to the compensated numerical value. The influence on errors caused by oscillation and distortion generated in the processes of a fluted disc structure on a motor shaft, installation conditions and rotation is eliminated, the finally measured instantaneous rotating speed of the motor is compared with a product standard requirement to judge whether the instantaneous rotating speed is qualified or not, and the result is more scientific and accurate.

The application discloses a two-dimensional white light microscopic splicing interferometer measuring device and method, and belongs to the technical field of precise optical detection. The device comprises a base platform, vertical motion tables arranged on both sides of the base platform, a non-Schlieren interferometer and a white light profiler respectively carried by the vertical motion tables, an X-direction linear guide rail, and a large-scale rotary table assembly and a small-scale rotary table assembly arranged on the X-direction linear guide rail. The method uses the white light profiler and the non-Schlieren interferometer in cooperation, acquires the relative angle difference between sub-apertures in real time, adopts a dynamic angle compensation mechanism, and combines a specific splicing algorithm to realize high-precision fusion of surface shape data. The application effectively solves the angle error accumulation problem in sub-aperture splicing measurement of a small curvature radius curved mirror, realizes sub-nanometer level surface shape measurement precision, and is particularly suitable for high-precision detection of an X-ray curved mirror.