The invention belongs to the technical field of micro electro mechanical systems (MEMS), and particularly provides a low-loss planar vibration double-tuning-fork
resonator based on an AlN-on-Si structure. The double-tuning-fork
resonator provided by the invention comprises resonant beams,
coupling beams, anchor points, piezoelectric
layers,
metal layers and insulating
layers, the two resonant beams are connected through the double-end
coupling beams, and then double-end fixing constraint is carried out through the anchor points on the two sides; the piezoelectric layer and the
metal layer on the surface of the resonant beam form an active area, and the active areas are arranged on the upper surface and the lower surface of the resonant beam at the same time and used for exciting an in-plane mode of the double-tuning-fork
resonator, limiting out-of-plane displacement, reducing energy dissipation between an
anchor point and the outside, achieving low loss and a high Q value, and improving the performance of the double-tuning-fork resonator. The complicated snakelike
electrode design in the prior art is also avoided; furthermore, a clamping
coupling beam structure is introduced between the two resonant beams, the displacement of the resonator is further limited in a plane, meanwhile, the area and the displacement of an active region are increased, and the
signal strength is improved.