75results about How to "High movement precision" patented technology

The application provides a focusing motor and a camera module. The focusing motor comprises a fixed part, a moving part, a focusing assembly, a magnetic attraction sensing part, a guide part and a position sensor. The fixed part comprises a first support arm and a second support arm connected with each other, and a light passage hole formed between the first support arm and the second support arm. The moving part is arranged in the light passage hole and can move in a preset direction. The magnetic attraction sensing part is arranged in the moving part. The angle between the magnetization direction of the magnetic attraction sensing part and the first direction and the second direction perpendicular to the preset direction is an acute angle. The guide part is arranged on the first support arm and corresponds to the magnetic attraction sensing part. The position sensor is arranged on the second support arm and corresponds to the magnetic attraction sensing part. The position sensor can generate an induction force with the magnetic attraction sensing part, so that the position sensor can sense the moving position of the moving part. The focusing motor can significantly reduce the size of the focusing motor, and can guarantee the guiding stability and the position detection precision required by the automatic focusing function while realizing the miniaturization of the camera module.

The application provides a kind of control method and system of robot synchronous movement based on multiple heterogeneous components decoupling, it is related to robot technical field;The method accesses heterogeneous hardware with uniform interface, establishes the standardized capability description containing coordinate system, constructs uniform space mapping between components, includes the same space reference with robot and target object;Uniformly encode the generalized state vector of each component motion degree of freedom, calculate the generalized jacobian matrix combined with task target, assign weight in generalized null space according to task priority, calculate synchronous control quantity and complete safety boundary verification;Convert the verified high-order geometric path into time synchronization trajectory conforming to the three-order control limit, issue execution unit and close-loop correction.The application solves the problems of poor universality, difficult integration and reuse, full-body synchronous movement of chassis and operating arm that cannot realize space-time reference unification, and lack of unified safety verification and data recording, effectively improves operation accuracy, operation safety and system maintainability.

The application provides a kind of general servo system control method and system based on special equipment application, it is related to special equipment control technical field, first receive the operation instruction sequence corresponding to special equipment application scene, then according to operation instruction sequence construction job flow timing diagram, the time sequence correlation of each operation instruction unit is clear, then obtain the real-time running state data set of special equipment, based on job flow timing diagram and real-time running state data set generate predicted motion trajectory curve, cover the expected position and speed parameter of each time point in future time window, finally call the trajectory tracking controller of general servo system to the deviation correction processing of predicted motion trajectory curve and real-time running state data set, generate the control signal sequence of driving component, drive special equipment to move according to predicted motion trajectory curve, effectively improve the motion precision and dynamic response capability of special equipment, enhance the adaptability and reliability of equipment in complex application scene.

The utility model discloses an interactive hand clamping mechanism, which comprises an X-axis cross beam, an X-axis cross beam, an X-axis cross beam, a Y-axis cross beam, a Y-axis cross beam, a Y-axis cross beam and a Y-axis cross beam, the upper clamping hand module reciprocates along the X-axis cross beam in the upper clamping hand moving area; the upper clamping hand module comprises an upper clamping hand, an upper clamping hand X-axis translation seat and a Y-axis driving unit; the Y-axis driving unit drives the upper clamping hand to extend towards one side part of the X-axis cross beam to wait for materials and to retract to avoid one side part deviating from the X-axis cross beam; the lower clamping hand module reciprocates along the X-axis cross beam in the lower clamping hand moving area; the lower clamping hand module comprises a lower clamping hand, a lower clamping hand X-axis translation seat and a Z-axis driving unit for driving the lower clamping hand to move in the Z-axis direction relative to the lower clamping hand X-axis translation seat; and the Z-axis driving unit drives the lower clamping hand to ascend for material waiting and descend for avoiding. The structural compactness, the movement precision, the working stability and the structural reliability are improved.

The utility model relates to a kind of ejection force reinforcing structure based on small elastic block, belongs to injection mould technical field, including injection mould, the injection mould is equipped with injection product, the injection product side lower end is equipped with ejection elastic block subassembly with injection mould interval.The ejection elastic block subassembly includes elastic block, the elastic block is equipped with the isohypse screw extending out the lower end of elastic block, the isohypse screw and the elastic block are equipped with the boss with isohypse screw hole type screw thread sleeve joint, the lower part of the elastic block and isohypse screw are equipped with the spring with isohypse screw sleeve joint.It has the characteristics of simple structure, good effect and high running stability.Through ejection elastic block subassembly, more powerful, more stable ejection force is provided in limited space, the powerful, stable, accurate ejection to difficult demoulding product is realized, while ensuring the accuracy of ejection action and the long life of mould.

The invention provides a sewing machine, a needle bar crank of the sewing machine and a design method of the needle bar crank. The design method comprises the following steps: establishing a dynamic model of the needle bar crank in dynamic simulation software, and establishing a simulated mass center of the needle bar crank; setting a plurality of groups of parameter conditions, adjusting the simulated mass center according to the plurality of groups of parameter conditions in dynamics simulation software, and calculating the inertia force of the needle bar crank to the front bearing seat under different parameter conditions. The inertia force meeting the set condition is selected from the inertia force of the needle bar crank on the front bearing seat under the condition of different parameters, and the needle bar crank is designed according to the parameter condition corresponding to the inertia force. According to the technical scheme, the parameters of the mass center of the needle bar crank are simulated and adjusted through the dynamic simulation software, the parameter conditions enabling the inertia force of the needle bar crank mechanism to meet the set conditions are selected, the optimal needle bar crank can be rapidly designed according to the parameter conditions, then vibration and noise generated when the sewing machine works are weakened and improved, and the working efficiency of the sewing machine is improved. And the motion precision and stability of the sewing machine are improved.

This invention provides an automatic attachment switching control system (100) for unmanned attachment switching of emergency rescue engineering equipment. The system comprises a complete machine system (110) and an attachment system (120). The complete machine system (110) includes a control unit (111), a main engine oil circuit (118), a main engine solenoid valve group (112), a quick-change device solenoid valve group (117), an execution unit (113), a working unit (114), a motion feedback unit (115), and a visual feedback unit (116). The attachment system (120) includes a working attachment (121) and a position tag (122). The working attachment (121) is used to perform operations such as grasping, crushing, cutting, shearing, and breaking. This invention also provides an automatic attachment switching control method. This control system and method enable unmanned attachment switching of emergency rescue engineering equipment, improving the safety and efficiency of operators during rescue and disaster relief operations.

The utility model relates to a kind of portal frame and machine tool, comprising: first crossbeam and reinforcing square tube, the cavity is formed in the first crossbeam inside, the first crossbeam extends horizontally, the reinforcing square tube extends longitudinally, the reinforcing square tube is inserted into first crossbeam longitudinally and is fixedly connected with first crossbeam.The first crossbeam of the utility model is divided into multiple segments by reinforcing square tube, the first crossbeam part of the lateral two sides of reinforcing square tube is different segment, the lateral two ends of segment are supported by support structure, and the lateral length of segment is shorter than first crossbeam, so the middle part of segment is more difficult to produce bending deformation due to external force or dead weight, the first crossbeam of multiple segments is also more difficult to produce deformation, and the movement accuracy of the drive mechanism installed on the first crossbeam is improved, and the machining accuracy of workpiece is finally improved.

This invention relates to a rigid-flexible coupling collaborative aerospace blade grinding robot, comprising a frame, a lifting mechanism within the frame, and an auxiliary gripper, a conveyor belt, and a grinding mechanism at the bottom of the frame. The lifting mechanism includes a primary platform, a secondary platform, and a self-locking gripper arranged sequentially from top to bottom. The primary platform is connected to a first drum in the primary platform control mechanism via a first flexible cable, and the self-locking gripper is connected to a second drum in the gripper attitude control mechanism via a second flexible cable. As can be seen from the above technical solution, this invention features rigid-flexible coupling, high efficiency, modular reconfigurability, large workspace, stable grinding quality, and full-process automation. Furthermore, this robot can automatically complete clamping, omnidirectional grinding, and lifting tasks, and is adaptable to grinding aerospace blades of different sizes and structures.

The application relates to an environment perception-based mechanical arm obstacle avoidance trajectory planning method and system, which comprises the following steps: acquiring joint angle data and end effector position data of a mechanical arm, establishing a joint space for mechanical arm work according to the joint angle data and the end effector position data; acquiring environment point cloud data, extracting obstacle information based on the environment point cloud data, and acquiring a safe operation space of the mechanical arm through the obstacle information; acquiring a current joint angle combination of the mechanical arm, converting a position difference between the current joint angle combination and a target position into an angle increment in the joint space, and adjusting an angle value exceeding the boundary of the safe operation space, so as to complete obstacle avoidance trajectory planning of the mechanical arm. The application can realize a grabbing task while avoiding obstacles.

This utility model relates to the field of wall flatness testing technology, and discloses a wall flatness testing device, including a base and four universal wheels. A fixed housing is located at the center of the upper surface of the base. A lead screw moving device is located at the center of the interior of the fixed housing. A moving block is threadedly connected to the center of the outer side of the lead screw moving device. A lubrication device is located at the center of the upper surface of each fixed housing. A moving housing is located at the center of the front end face of each moving block. A toothed belt is located at the center of the rear inner wall of each moving housing. A moving rod is slidably connected inside a sliding groove. A transmission wheel is located at the center of the rear end face of the moving rod. A fixed block is located at the center of the front end face of the moving rod. A flatness testing instrument is located at the center of the fixed block. In this utility model, the lubrication device enables efficient movement of the flatness testing instrument and increases the motion accuracy and stability of the device, thereby improving the lubrication effect.

The application relates to the technical field of underground cavity detection, and discloses a three-dimensional ground penetrating radar underground cavity disengaging recognition device and method based on AI, which comprises a recognition machine arranged at the top of a three-dimensional ground penetrating radar, and a fixing frame is arranged at the bottom of the recognition machine; the device further comprises a moving assembly which is used for recognizing the recognition machine; the three-dimensional ground penetrating radar underground cavity disengaging recognition device based on AI is provided with the moving assembly; a micro motor drives a cam to rotate; an active rod and a connecting block are pushed to make reciprocating linear motion; a sliding plate is driven to reciprocatingly slide along a sliding groove of a fixed plate. The groove and the sliding groove are matched to improve the sliding stability; the sliding plate drives a moving plate to scrape off obstacles through elastic sheets; the radar signal is prevented from being interfered; the rigid collision damage of components is prevented; the service life is prolonged; and the recognition accuracy and continuity are ensured.

The utility model provides an anti-impact electric cylinder, which belongs to the technical field of engineering machinery and comprises a lead screw pair mounted in an outer pipe, a lead screw in the lead screw pair is driven by a servo motor to rotate, the lead screw drives a nut to do reciprocating rectilinear motion along the surface of the lead screw when rotating, a connecting pipe is fixed at the upper end of the nut, and a push rod is sleeved at the upper end of the lead screw. The push rod is matched with an extension block at the upper end of the connecting pipe in a hooking and pulling mode, the surface of the connecting pipe is sleeved with a compression spring, the upper end of the compression spring makes contact with the lower end face of the push rod, and when the nut pushes the push rod to do forward linear movement through the compression spring, impact energy can be absorbed and converted into elastic potential energy; direct damage of impact to core components such as a lead screw pair and a gear pair is effectively reduced, component failure caused by impact is avoided, and the service life of the electric cylinder under the high-impact working condition is remarkably prolonged.

The utility model discloses a swing flushing and blow-drying structure for a self-cleaning pedestal pan, which comprises a cleaning box body arranged behind a pedestal pan main body, a pedestal pan seat ring capable of being opened and closed is arranged on the pedestal pan main body, the pedestal pan seat ring can rotate into the cleaning box body, a driving unit and a flushing and blow-drying unit are arranged in the cleaning box body, and the driving unit is connected with the flushing and blow-drying unit. The flushing and blow-drying unit comprises at least one flushing pipe and an air drying pipe, the flushing pipe is connected with an external water source with pressure, the air drying pipe is connected with the fan, outlets of the flushing pipe and the air drying pipe face a toilet seat ring located in the cleaning box body, the driving unit is connected with the flushing and blow-drying unit, and the driving unit can drive the flushing pipe and the air drying pipe to rotate. Therefore, the outlets of the flushing pipe and the air drying pipe can cover the whole surface of the toilet seat in the cleaning box body. The flushing pipe and the air drying pipe are driven by the driving unit to perform multi-degree-of-freedom compound motion, so that a cleaning blind area is effectively eliminated, and no-dead-corner cleaning of the surface of the toilet seat ring can be realized.

The utility model provides a leadless coating structure for resistor production, which comprises a transmission wheel, a base arranged above the transmission wheel, a sealing cover fixedly mounted at the upper end of the base, and a connecting strip movably mounted between the base and the sealing cover. According to the leadless coating structure for resistor production, through the arrangement of the structures such as the protrusions, the limiting holes, the base and the limiting springs, the protrusions are ingeniously matched with the limiting holes, and it is ensured that the transmission wheels can accurately transmit power to the connecting strips. In the transmission process, the protrusions are clamped into the limiting holes all the time, so that the connecting strips stably move in the preset direction and do not deviate or shake, and the stability of the structure is further enhanced through the arrangement of the limiting springs. Under the condition of thermal expansion and cold contraction, the limiting spring can pull the base to prevent the base from deviating outwards due to thermal expansion, the limiting spring can be matched with the base to recover to the initial state during contraction, and the stability of the base under different temperature conditions is guaranteed.

This invention discloses a torque balancing device and an oil supply and return system, belonging to the technical field of submersion motion test equipment. The torque balancing device is installed on a submersion motion test bench, which includes a column, a platform located inside the column, a crossbeam fixed to the top of the column, and a lifting actuator fixed above the crossbeam. The movable end of the lifting actuator is connected to the platform. The torque balancing device is located between the column and the platform. It is used to counteract the overturning torque caused by the control error of the lifting actuator and the overturning torque caused by a malfunction in the control system of the submersion motion test bench, thus enabling the platform to move vertically along the column. The torque balancing device includes a torque balancing cylinder, a ball joint, and a hydrostatic support plate. The torque balancing cylinder is fixed to the corner beam of the platform, and the hydrostatic support plate is attached to the surface of the column. The piston rod of the torque balancing cylinder is connected to the ball head of the ball joint by screws, and the ball socket of the ball joint is connected to the hydrostatic support plate by screws.

The utility model relates to a kind of prism driving device, camera module and electronic equipment, including pedestal, and the dynamic frame of being located in pedestal and rotating relative to pedestal, prism driving device further include motion holding component and magnetic attraction fixed component, motion holding component is at least partially placed in accommodating groove, accommodating groove is located in base and / or dynamic frame, at least part of magnetic attraction fixed component is located in pedestal, the remaining part of magnetic attraction fixed component is located in dynamic frame, motion holding component and accommodating groove are distributed along emergent optical axis and at least part of magnetic attraction fixed component and the remaining part are mutually magnetically attracted along emergent optical axis.Optical axis is distributed along emergent optical axis from structure to motion holding component and accommodating groove, while magnetic attraction fixed component is mutually magnetically attracted along emergent optical axis, for dynamic frame provides in optical axis direction stability, significantly improves the motion precision and control stability of mechanism.

The application discloses a height adjusting device and a mowing device, and relates to the technical field of mowing devices. The height adjusting device comprises a first connecting arm, a second connecting arm and a height adjusting assembly. The second connecting arm is arranged in parallel with the first connecting arm and is arranged on the side of the first connecting arm close to the ground along the height direction. The height adjusting assembly comprises a height adjusting piece and an abutting piece. The height adjusting piece is movably connected with the first connecting arm, the abutting piece is connected with the second connecting arm, the height adjusting piece abuts against the abutting piece, and the height adjusting piece can move relative to the first connecting arm so that the height adjusting piece pushes the abutting piece to move towards the direction close to or away from the first connecting arm. The height adjusting device can improve the height adjusting precision of the mowing device.

The utility model discloses a draw bar type shoulder and back massaging machine core, including machine core casing, drive motor, first transmission mechanism, second transmission mechanism, two eccentric mechanism, shoulder massage mechanism and back beating mechanism. Drive motor sets up in the machine core casing, and first transmission mechanism has kneading axle, and second transmission mechanism has beating axle and one -way limiting mechanism, and eccentric mechanism is fixed in the kneading axle both ends and includes first eccentric wheel and the eccentric wheel of inclination setting, and shoulder massage mechanism includes the kneading swing arm of the eccentric wheel on the sleeve setting, and back beating mechanism includes the second eccentric wheel of the beating axle on the sleeve setting, the massage top rod of the second eccentric wheel on the sleeve setting and the draw bar of hinged massage top rod and first eccentric wheel. The utility model discloses through single drive motor realizes shoulder kneading, back beating and shoulder and back clamping relaxation's compound massage function of relaxing, and the structure is compact, and the massage effect is good.

The utility model discloses a quick positioning fixture and laser engraving device relates to laser engraving machine technical field, including work table, laser engraving device ontology and engraving plate, the symmetrical setting of clamp plate has a number of accurate positioning components, and accurate positioning components include the shell, and the middle part fixed connection of shell inner chamber has connecting rod, and the outer surface of shell inner chamber and connecting rod are slidably connected with the limit block in common, and the side fixed connection of connecting rod away from limit block has electromagnet, and the side fixed connection of limit block close to electromagnet has magnet. The utility model discloses through the slider no.

The application discloses a parameter self-calibration method and device of a rope-driven snake-shaped mechanical arm and a storage medium. The method comprises the following steps: a Jacobian matrix mapping method is adopted, a rope is positioned, the joint angle of a rope-driven joint is determined, a D-H coordinate system is established, the rope hole position vector formula of a plurality of rope-driven joints is obtained, a kinematic correction model and a kinematic error model are introduced, a rope length calculation function of a driving rope in the rope-driven joint is obtained, a linear relationship function is obtained according to the rope length calculation function, the linear relationship function is iteratively solved by using the Newton-Raphson method, and the to-be-calibrated parameters are updated. The kinematic correction model, the kinematic error model and the parameter self-calibration method can realize the rapid self-calibration of the kinematic parameters of the rope-driven snake-shaped mechanical arm, improve the motion accuracy of the mechanical arm, and eliminate the influence of errors generated in processing and assembly. The application can be widely applied to the technical field of robot control.

The utility model discloses a punching die for a photoelectric film, and relates to the technical field of punching dies. The punching die for the photoelectric film comprises a cover plate and a die base, a hollow hole is formed in the upper surface of the cover plate, a concave pit is formed in the upper surface of the die base, a positioning pin is fixedly connected to the side of the upper surface of the die base, a groove is formed in the side of the upper surface of the cover plate, and a positioning hole is formed in the middle of the bottom of the groove. The bottom of the inner surface of the concave pit is fixedly connected with a fixing seat, a guide rod is sleeved with the fixing seat, the bottom end of the guide rod is fixedly connected with a fixing plate, the outer surface of the guide rod is sleeved with a spring, the top end of the guide rod is fixedly connected with a connecting plate, and the upper surface of the connecting plate is fixedly connected with an inner supporting push block. The side of the lower surface of the connecting plate is fixedly connected with a connecting seat, a second internal groove is formed in the outer surface of the connecting seat, the service life of the die can be prolonged, abrasion of parts can be reduced, and the overall durability is enhanced.

The linear executing mechanism comprises a lead screw, a nut seat and an injection molding nut, the lead screw is in threaded fit with the injection molding nut, a mounting hole is formed in the nut seat, the injection molding nut is integrally arranged in the mounting hole in an injection molding mode, and the lead screw is in threaded fit with the injection molding nut. A plurality of limiting grooves extending in the circumferential direction and the axial direction are formed in the inner surface of the mounting hole, and limiting ribs are formed in the limiting grooves of the injection molding nut. According to the utility model, the nut is injection-molded in the nut seat, so that the injection-molded nut is completely positioned in the nut seat and does not occupy the movement stroke of the screw rod, and the injection-molded nut is limited and resists torsion by processing the limiting groove in the mounting hole of the nut seat, so that the injection-molded nut is prevented from being separated from the nut seat; therefore, the overall motion precision of the linear module is improved, and miniaturization design of the linear module is facilitated.

The embodiment of the application provides a robot precise landing planning method and device based on a priori terrain model, which carries out digital modeling on a preset terrain in a simulation environment, constructs a digital map containing terrain geometry and semantic information, and clearly calibrates the center coordinates of each ideal landing area as a target landing point. In the training process, the global coordinates of the robot foot end are tracked in real time, and the three-dimensional deviation of the robot foot end from the nearest target landing point is determined through map mapping, and then a reward function with the deviation size as the evaluation index is designed to drive the robot to learn a high-precision landing strategy. The present application introduces the priori terrain target point as a guide, so that the reward signal has a clear geometric meaning and can directly and efficiently drive the strategy to converge to the precise landing behavior, greatly improving the motion accuracy and reliability on the structured terrain.

The utility model discloses a transfer device and a robot, and belongs to the technical field of robots. The transfer device comprises a support, a linear driving part, a rotary driving part and a vacuum adsorption part. The fixed end of the linear driving piece is connected with the support; the fixed end of the rotary driving part is connected with the output end of the linear driving part; and the vacuum adsorption piece is connected with the output end of the rotary driving piece and is used for adsorbing the workpiece. According to the transfer device, the size of the transfer device is effectively reduced, the structure of the transfer device is simplified, transmission errors and abrasion caused by intermediate transmission are reduced, and therefore the motion precision of the transfer device is effectively improved.

The invention provides a general servo system control method and system based on special equipment application, and relates to the technical field of special equipment control, and the method comprises the steps: firstly receiving an operation instruction sequence corresponding to a special equipment application scene, then constructing a work flow time sequence diagram according to the operation instruction sequence, determining the time sequence correlation of each operation instruction unit, and obtaining a work flow time sequence diagram; then, acquiring a real-time operation state data set of the special equipment, and generating a predicted motion trajectory curve based on the operation process sequence diagram and the real-time operation state data set, covering expected positions and speed parameters of all time points in a future time window; and finally, a trajectory tracking controller of the universal servo system is called to carry out deviation correction processing on the predicted motion trajectory curve and the real-time operation state data set, a control signal sequence of a driving part is generated, the special equipment is driven to move according to the predicted motion trajectory curve, the motion precision and the dynamic response capability of the special equipment are effectively improved, and the service life of the special equipment is prolonged. And the adaptability and the reliability of the equipment in a complex application scene are enhanced.

The application relates to the technical field of marble toys, in particular to a marble grabbing and conveying device which comprises a marble conveying unit and a transmission unit, the transmission unit comprising a power input part, a transmission assembly and an execution part; a marble clamping unit is fixed on the execution part and moves with the execution part to grab marbles in a ball storage assembly and move the marbles to a discharging assembly; the ball storage assembly and the discharging assembly are arranged, so that the marbles can be orderly temporarily stored, accurately inducted into a track and prevented from being outputted back, and the conveying stability is ensured; the transmission unit is arranged, so that the manual power can be converted into vertical reciprocating and rotating compound motion of the execution part without an additional power source, and more stable and reliable power and position guarantee are provided for grabbing and moving; meanwhile, all the components of the overall mechanism are common types on the market and are similar to existing mechanical component mechanisms, can be used as a toy carrier with interestingness and knowledge, and can realize double values of entertainment and knowledge acquisition.

The application provides a water tank capable of simulating a decompression environment and a multi-degree-of-freedom underwater launching device and a use method thereof, and belongs to the technical field of ocean engineering test. The application solves the problems of insufficient flexibility, complex structure and poor environmental adaptability of a traditional underwater launching device, and provides a test method for researching the multi-degree-of-freedom motion characteristics of a cross-medium water-exiting underwater multi-degree-of-freedom motion. The application comprises a decompression water tank, a lifting platform structure, a two-degree-of-freedom holder device and a horizontal sliding platform device. The application can realize the simulation of the multi-degree-of-freedom motion conditions of an environmental pressure, an attack angle, a pitch angle, a roll angle and a heave motion single-degree-of-freedom or multi-degree-of-freedom superposition of a carrying platform, and can meet the inclined launching test of a water-exiting vehicle. The application is mainly applied to the simulation of the underwater multi-degree-of-freedom motion of a cross-medium vehicle under a scale model ejection condition.

The application discloses a kind of laser scanning cutting endoscope robots based on carbon fiber paper micro-vibration mirror, the endoscope robot is fixedly installed with paper transmission structure in one end of support structure, and the other end is fixedly installed with GRIN lens;Fixed mirror, X galvanometer and Y galvanometer are fixedly installed in paper transmission structure, and optical path is formed by optical fiber, GRIN lens, fixed mirror, X galvanometer and Y galvanometer;First piezoelectric bimorph driver and second piezoelectric bimorph driver are piezoelectric bimorph driver installed between support structure and paper transmission structure;First piezoelectric bimorph driver is used to drive X galvanometer to rotate around Y axis and / or by paper transmission structure;Second piezoelectric bimorph driver is used to drive Y galvanometer to rotate around Z axis by paper transmission structure.The above-mentioned endoscope robot is compact, light, stable in motion and has excellent dynamic performance by using piezoelectric bimorph driver and paper transmission structure.

The application discloses a kind of metrology machine, belong to integrated circuit technical field, the metrology machine includes: metrology optical system, magnetic levitation wafer workstation and at least three gratings;Metrology optical system and grating are located in the upper of magnetic levitation wafer workstation;The position of metrology optical system is fixed;Grating is arranged along the circumferential direction of metrology optical system;Magnetic levitation wafer workstation includes magnetic levitation workstation, wafer chuck and at least three position sensor readheads;Wafer chuck and position sensor readhead are arranged on the surface of magnetic levitation workstation close to metrology optical system;Position sensor readhead is arranged along the circumferential direction of wafer chuck;When measuring wafer, each grating and the light signal interaction of corresponding one position sensor readhead with grating is carried out to measure the position information of magnetic levitation wafer workstation.The application can accurately control magnetic levitation wafer workstation to realize 6 degrees of freedom motion, to reduce transmission error, improve motion accuracy.