174results about How to "High movement precision" patented technology

The invention discloses a three-degree-of-freedom series-parallel hybrid humanoid robot waist structure, and relates to the technical field of robots. The defects that an existing multi-degree-of-freedom waist structure is not compact enough, limited in precision, low in rigidity and poor in stability are overcome. The robot comprises a yaw joint mechanism and a pitching-sidesway joint mechanism which are connected in series, upper limbs and legs of the robot are connected through the yaw joint mechanism and the pitching-sidesway joint mechanism, and the yaw joint mechanism can drive the upper limbs of the robot to do yaw motion; the pitching-sidesway joint mechanism comprises a movable platform, a static platform, a joint universal joint and two joint driving assemblies, the movable platform is fixedly connected with the upper limbs of the robot, the static platform is fixedly connected with the legs of the robot, the joint universal joint is connected with the movable platform and the static platform, and the two joint driving assemblies are symmetrically arranged on the left side and the right side of the joint universal joint; and the two joint driving assemblies are connected with the movable platform and the static platform correspondingly, and when the two joint driving assemblies drive the movable platform, the movable platform can do pitching motion and / or side-sway motion around the joint universal joint.

The invention discloses a quadruped robot autonomous decision control system based on multi-modal perception, and belongs to the technical field of robot motion, and the system specifically comprises the steps: collecting visual, force and sound information through multiple sensors of a camera, a force sensor and a microphone array, and carrying out the preprocessing; according to the processed information, a diagonal gait, leg track and motion path planning scheme is generated by adopting a motion planning strategy; generating a specific control instruction to drive the robot to move, and monitoring and adjusting in real time; after the task is completed, the motion performance of the robot is evaluated, and a motion planning and control method is optimized according to an evaluation result; the autonomous motion ability and adaptability of the quadruped robot in a complex environment are improved.

The utility model discloses a fluid connector, and relates to the technical field of fluid communication equipment.The fluid connector comprises at least two valve seats with communication channels and valve elements rotationally arranged on the opposite sides of the valve seats and used for opening and closing the communication channels, a positioning groove is formed in one valve element, and a positioning part is correspondingly arranged on the other valve element; the positioning part extends into the positioning groove and is axially interfered and circumferentially limited with the valve core with the positioning groove after the two valve cores relatively move, and the two valve cores are circumferentially limited to synchronously rotate, so that the communicating part on the valve cores is communicated with the communicating channels on the two valve seats. Synchronous circumferential transmission is formed between the two valve elements, so that associated structures between the valve elements and the valve seat are reduced, and through the synchronous circumferential transmission between the valve elements, the movement precision of the valve elements in the on or off movement can be improved, so that the conditions of dislocation of a communicating part and the like are effectively avoided, and the service life of the valve element is prolonged. Motion errors caused by the fact that the valve seat serves as an intermediate transmission component are reduced.

The invention relates to the technical field of robots, in particular to a dexterous hand finger, a dexterous hand and a robot, and solves the problems that the dexterous hand capable of realizing motion decoupling between two degrees of freedom of bending and side swaying of the dexterous hand finger is complex in structure and poor in reliability. The dexterous hand finger comprises a side swing assembly, a first knuckle, a first connecting rod assembly, a second connecting rod assembly, a first driving assembly and a second driving assembly. The side swing assembly, the first knuckle, the first connecting rod assembly, the second connecting rod assembly and the first driving assembly form a space crank sliding block mechanism so as to drive the knuckles to rotate around the second axis, and bending of the first knuckle is achieved. And the knuckles can rotate around the first axis under the driving of the second driving assembly, so that the lateral swinging of the first knuckles is realized. The first end of the second connecting rod assembly and the second end of the first connecting rod assembly form a spherical pair, motion decoupling between the two freedom degrees of bending and side swing is achieved, the structure is simple, and the reliability of the dexterous hand finger is improved.

The invention relates to the technical field of two-way sealing butterfly valves, in particular to a condenser cut cylinder two-way sealing butterfly valve which comprises a valve body, a valve rod and a valve plate, a driving cavity is formed in the valve body, the valve rod is sleeved with a transmission piece, two sliding blocks are arranged in the driving cavity, and expansion rings are arranged below the two sliding blocks. A runner is arranged between the expansion ring and the sliding block on the valve body; a first sealing groove is formed in the valve plate, the transmission piece is driven through rotation of the valve rod, and the two sliding blocks are driven to slide through the transmission piece. The sliding block moves to drive fluid in the flow channel to flow, the expansion ring is driven to expand towards the first sealing groove of the valve plate, the expansion ring is tightly attached to the first sealing groove through deformation, and sealing of the valve body is achieved. Compared with the prior art, through the more compact structure and space layout, a sealing mechanism is simplified, and the requirements of an external transmission assembly and a complex adjusting mechanism are reduced, so that the overall size of the valve is effectively reduced, and the problem that side space is occupied is avoided.

The invention discloses a robot mechanical arm joint motion track planning and motion control method. The method comprises the steps that S1, high-precision vibration sensors are installed on a pipe joint and an end effector of a mechanical arm and calibrated; s2, starting a vibration sensor, collecting vibration data of each part in real time, and transmitting the data to a control system; s3, the control system carries out real-time calculation and analysis on the vibration data, and vibration abnormity of the mechanical arm in the operation process is recognized; s4, the mechanical arm is adjusted in real time according to the analysis result, and the stability and precision of the mechanical arm are guaranteed; and S5, storing related data of machine operation and adjustment, thereby facilitating later learning use. Through the technical means of the high-precision vibration sensor, real-time data acquisition and analysis, real-time adjustment, data storage and the like, the vibration condition of the mechanical arm can be monitored in real time, and the movement precision and stability of the robot mechanical arm are remarkably improved.

The utility model relates to the field of 3D printing, in particular to a movement device and a 3D printer, and the movement device comprises a first transmission belt extending in the first direction; a second transmission belt extending in the first direction; the third transmission belt extends in the second direction perpendicular to the first direction, the first end of the third transmission belt is in transmission connection with the first transmission belt, and the second end of the third transmission belt is in transmission connection with the second transmission belt; the output assembly is fixed on the third transmission belt; the third transmission belt is configured to drive the output assembly to move in the second direction under the condition that the first transmission belt and the second transmission belt rotate in the same direction; under the condition that the first transmission belt and the second transmission belt rotate reversely, the third transmission belt drives the output assembly to move in the first direction. The problem that the transmission belt is loosened after being used for a long time can be solved, the movement precision of the output assembly is improved, and therefore the printing precision and the model quality are improved.

The invention relates to the technical field of wet blank transfer, in particular to an arc-shaped guide rail servo synchronous follow-up device which comprises an arc-shaped guide follow-up mechanism and a motor driving mechanism. The arc-shaped guide follow-up mechanism comprises an arc-shaped guide plate and a lifting mounting plate; the motor driving mechanism comprises a motor mounting plate, a driving motor, a driving wheel, a double-groove guide wheel and a traction rope; the driving motor is mounted on the motor mounting plate; a curved groove is formed in the circumferential surface of the driving wheel; the first end of the traction rope is connected with the first end of the arc-shaped guide plate, and the second end of the traction rope sequentially bypasses the first annular guide groove, the curve-shaped groove and the second annular guide groove, penetrates out of the right end of the first arc-shaped rail and is connected to the second end of the arc-shaped guide plate. The arc-shaped guide plate is driven by the motor in a traction rope wire pulling mode to move precisely, and the device has the advantages of being high in environmental adaptability, free of lubrication, free of pollution, stable and reliable in synchronous transmission, high in motion precision, light in action mass (weight), low in consumption and efficient.

The invention discloses a Z-axis motion platform and a use method. Wherein the Z-axis motion platform comprises a bottom plate, an adsorption mechanism, a jacking mechanism, a guide mechanism and a driving mechanism; the adsorption mechanism comprises an electrostatic chuck, the jacking mechanism can move in the Z-axis direction and is used for jacking off a wafer on the electrostatic chuck, the driving mechanism is used for providing moving driving force for the jacking mechanism, and the guiding mechanism is arranged between the jacking mechanism and the bottom plate and is used for guiding when the jacking mechanism moves in the Z-axis direction; the guide mechanism comprises a fixed support, a sliding block, a sliding rail, an elastic piece and a movable support. The fixed support is connected with the bottom plate, the sliding block or the sliding rail is fixed to the fixed support, the movable support is connected with the jacking mechanism, the sliding rail or the sliding block is fixed to the movable support, and the elastic piece is used for providing reset force for the movable support to move to the low position. The Z-axis motion platform has the advantages of being high in motion precision, good in stability, low in installation and adjustment difficulty, small in mass and the like, and the problems of motion clamping stagnation, low return speed and the like can be prevented.

The invention provides a parallel structure micro-operation robot parameter calibration method based on microscopic vision, and belongs to the technical field of robot parameter calibration, the method mainly uses a microscopic camera to amplify the motion of an end effector of a micro-operation robot, obtains the position of the end effector through image processing, and determines the position of the end effector according to a kinematics analysis result. Kinematics parameters are obtained through calculation, and then the motion precision of the micro-operation robot is measured. The method mainly comprises the following steps of parallel structure robot modeling and kinematics analysis, camera correction, proportional scale determination, robot orthogonality correction, parameter calibration, repeated positioning precision measurement, translation precision measurement and rotation precision measurement. According to the method, the problem of kinematics parameter calibration of the parallel structure micro-operation robot is solved, calibration of the kinematics parameters under the high-precision requirement is achieved, and the kinematics precision of the micro-operation robot is improved.

The invention discloses a mechanical arm remote control method and system based on artificial intelligence and a robot technology, and relates to the technical field of automatic control, and the method comprises the steps: constructing a motion model of a mechanical arm through integrating an intelligent trolley lower computer, a high-torque servo motor and a fuzzy control algorithm, and carrying out the path optimization through a high-fidelity 3D pre-planning module. The method comprises the steps of natural language processing instruction conversion, reinforcement learning optimization path planning and remote control execution. The whole interaction process realizes closed-loop control from user instruction input to precise action of the mechanical arm. According to the method, the intelligence, the flexibility and the accuracy of operation are improved, the operation complexity is reduced, the working efficiency and the safety are improved, and an efficient and visual solution is provided for remote control of the mechanical arm.

The invention discloses a pull-push continuum robot, and belongs to the technical field of continuum robots. The robot comprises a tendon pulling module, a middle module and a structural backbone pushing module. The middle module is arranged between the tendon pulling module and the structural backbone pushing module; the tendon pulling module transmits tendon driving force to the structure backbone pushing module through the middle module, and continuous robot structure deformation is completed. Tendon driving and rod driving are naturally fused, a complex spatial configuration can be achieved through at least one motor, the tendon driving rigidity is improved, and the robot control difficulty is reduced.

The invention discloses an error self-calibration method for a parallel coordinate measuring machine based on a characteristic component, and the method comprises the steps: constructing a geometric error model of a parallel mechanism, measuring the characteristic component through the coordinate measuring machine, installing the characteristic component in a working space of the parallel coordinate measuring machine, and carrying out the self-calibration of the error of the parallel coordinate measuring machine. Carrying out data acquisition based on a sphere center distance constraint and a sphere diameter constraint, and correspondingly constructing an error equation based on the sphere center distance constraint and an error equation based on the sphere diameter constraint; combining the error equations to obtain an error calibration model based on multiple feature constraints, using an LM method to identify, correct and substitute kinematic error parameters of the error calibration model, repeating the steps until the kinematic error parameters do not change any more, and stopping iteration to obtain corresponding geometric error parameters of the parallel coordinate measuring machine; and compensating the tail end attitude error caused by the geometric error in the coordinate measuring machine according to the geometric error parameter. According to the invention, the motion precision of the parallel coordinate measuring machine is greatly improved.

The upper limb mechanism comprises a shoulder joint assembly, an arm assembly and at least two locking pieces, the shoulder joint assembly comprises a pitching driving piece and a connecting plate, the pitching driving piece is connected with the connecting plate, one of the connecting plate and the arm assembly is provided with a limiting protrusion, and the other one of the connecting plate and the arm assembly is provided with a limiting groove; the limiting protrusion extends into the limiting groove so that the arm assembly and the connecting plate can be relatively fixed in the circumferential direction of the pitching driving piece. The connecting plate is further provided with a first locking groove, and the arm assembly is further provided with a second locking groove. The adjacent locking pieces are detachably connected and extend into the first locking groove and the second locking groove so that the arm assembly and the connecting plate can be relatively fixed in the axial direction of the pitching driving piece. When the arm assembly and the shoulder joint assembly are assembled, the arm assembly and the shoulder joint assembly can be assembled into a whole on respective assembly lines, and then the arm assembly and the shoulder joint assembly are quickly connected through the limiting bulge, the limiting groove and the locking piece, so that the assembly process is simplified.

A lifting mechanism of an ultrasonic welding machine comprises a lifting assembly and a holding assembly, the lifting assembly comprises a driving air cylinder, a lifting seat and a guide rail, the driving air cylinder is arranged at the top of a rack, a floating connector is arranged at the top of the lifting seat, and the floating connector is connected with the output end of the driving air cylinder; the guide rail is arranged on the rack. The lifting base is slidably connected with the guide rail. The enclasping assembly comprises a fixed seat, and an amplitude-change pole enclasping seat is arranged at the rear section of the fixed seat; and a first node mounting seat and a second node mounting seat are arranged at the front section of the holding assembly. According to the utility model, the welding triplet is arranged by adopting the detachable enclasping assembly, so that the mounting and debugging difficulty of the welding triplet is reduced. The sliding rail is used as a guide device for lifting motion, meanwhile, the floating connector is connected with the lifting drive, the parallelism deviation and the angle deviation between the connecting shafts are automatically compensated in the motion process, and the motion precision of the lifting assembly is improved. And the limiting mechanism is adopted for carrying out area limiting on the movement of the lifting assembly, and sliding derailing caused by control errors is avoided.

The utility model relates to a single-key pulling clamp for a helical gear, which solves the problems that the existing clamp fixing structure is easy to loosen due to the vibration generated by a machine tool when in use, so that a positioning piece for positioning the gear shifts left and right, and the machining precision of the gear is influenced, and the single-key pulling clamp for the helical gear comprises a clamp body, the clamp body guides the tooth aligning sliding block assembly in the mode that a linear guide rail is matched with a linear sliding block, transmission is achieved through a transmission lead screw, and the clamp body fixes a helical tooth gear through a single-key tire pulling shaft in a mounting hole. The tooth aligning sliding block assembly comprises a sliding block body in threaded connection with the transmission lead screw and a movable sliding block arranged on the sliding block body, and the end face of a limiting bolt on the outer side face of the sliding block body abuts against the side wall of the movable sliding block. The movable sliding block is provided with a plurality of fixing bolts which penetrate through long holes formed in the movable sliding block in the horizontal direction and then are installed in the fixing threaded holes of the sliding block body in a screwed mode, and the bottom of the movable sliding block is provided with a tooth aligning block used for being matched with a tooth groove of the helical tooth gear.

The application provides a focusing motor and a camera module. The focusing motor comprises a fixed part, a moving part, a focusing assembly, a magnetic attraction sensing part, a guide part and a position sensor. The fixed part comprises a first support arm and a second support arm connected with each other, and a light passage hole formed between the first support arm and the second support arm. The moving part is arranged in the light passage hole and can move in a preset direction. The magnetic attraction sensing part is arranged in the moving part. The angle between the magnetization direction of the magnetic attraction sensing part and the first direction and the second direction perpendicular to the preset direction is an acute angle. The guide part is arranged on the first support arm and corresponds to the magnetic attraction sensing part. The position sensor is arranged on the second support arm and corresponds to the magnetic attraction sensing part. The position sensor can generate an induction force with the magnetic attraction sensing part, so that the position sensor can sense the moving position of the moving part. The focusing motor can significantly reduce the size of the focusing motor, and can guarantee the guiding stability and the position detection precision required by the automatic focusing function while realizing the miniaturization of the camera module.

The application provides a kind of control method and system of robot synchronous movement based on multiple heterogeneous components decoupling, it is related to robot technical field;The method accesses heterogeneous hardware with uniform interface, establishes the standardized capability description containing coordinate system, constructs uniform space mapping between components, includes the same space reference with robot and target object;Uniformly encode the generalized state vector of each component motion degree of freedom, calculate the generalized jacobian matrix combined with task target, assign weight in generalized null space according to task priority, calculate synchronous control quantity and complete safety boundary verification;Convert the verified high-order geometric path into time synchronization trajectory conforming to the three-order control limit, issue execution unit and close-loop correction.The application solves the problems of poor universality, difficult integration and reuse, full-body synchronous movement of chassis and operating arm that cannot realize space-time reference unification, and lack of unified safety verification and data recording, effectively improves operation accuracy, operation safety and system maintainability.

The present invention belongs to the technical field of cam drive, and in particular relates to a cam driven feeding device, comprising a frame, a cam mechanism and a feeding mechanism; the cam mechanism comprises a first driving unit, a driving shaft and a swinging frame; the driving shaft is rotatably arranged on the frame, and a first cam and a second cam are fixedly arranged on the driving shaft; the swinging frame is rotatably arranged on the frame through a rotating shaft, and a first rocker arm and a second rocker arm are respectively provided with a first rolling element and a second rolling element, and the first rolling element and the second rolling element are respectively tightly attached to the peripheral walls of the first cam and the second cam; one end of the first rocker arm away from the rotating shaft is connected to the feeding mechanism; the first driving unit is arranged on the frame and is used to drive the driving shaft to rotate so as to drive the first cam and the second cam to rotate synchronously, so that the swinging frame swings back and forth to drive the feeding mechanism to reciprocate, and the mechanical push of the cam replaces the elastic push of the spring, the travel trajectory is accurate, the movement accuracy is high, and the wear of the cam is reduced, thereby increasing the service life.

The present invention discloses a safe wiring system and method based on intelligent construction, including a drive box, a guide sleeve and a creeping assembly, wherein a shaft frame is fixedly installed on the inner side of the drive box, and a driving motor is installed on the surface of the shaft frame, a moving groove is provided on the surface of the drive box, and the creeping assembly includes a plurality of moving plates slidably installed on the inner side of the moving groove, and the plurality of moving plates are evenly distributed on the inner side of the drive box in a circumferential direction, and a shaft rod is sleeved on the inner side of the moving plate by rotation, and a deflection wheel sleeve is sleeved on the surface of the shaft rod. In the present invention, both traction mode and wire feeding mode are provided, and the mode is automatically switched according to different pipeline environments, which greatly improves the adaptability and flexibility of cable wiring, ensures wiring efficiency, realizes automation of wiring work, and is particularly suitable for wiring in complex, narrow or long-distance pipelines, avoids the inefficiency and safety hazards of traditional manual wiring, and significantly improves construction efficiency.

The invention discloses a single-degree-of-freedom liquid crystal panel carrying mechanical arm and a carrying method thereof.The single-degree-of-freedom liquid crystal panel carrying mechanical arm comprises a driving base, the driving base is rotationally connected with one end of a large arm, and the other end of the large arm is rotationally connected with one end of a small arm; the other end of the small arm is rotationally connected with one end of the fork arm bearing mechanism, and the other end of the fork arm bearing mechanism is used for bearing a liquid crystal product to be transferred; and the driving relation between the articulated arms is determined through a method for determining the length of the arm lever of the single-degree-of-freedom liquid crystal panel carrying mechanical arm and the rotation angle of the corresponding arm lever. The invention discloses a single-degree-of-freedom liquid crystal panel carrying mechanical arm and a carrying method thereof. The single-degree-of-freedom liquid crystal panel carrying mechanical arm has the effects of being low in driving cost, small in movement inertia, small in control difficulty and high in movement precision of a single-degree-of-freedom articulated arm. And the tail end movement precision can be effectively guaranteed, and safe and efficient carrying of advanced-generation liquid crystal panels is achieved.

The utility model provides a Z-axis motion platform, and relates to the field of motion platforms. The motion platform comprises a base, a load plate, a voice coil motor and a first connecting plate, and a first mounting cavity is formed in the center of the load plate; the voice coil motor is mounted in the accommodating space of the base, the stator is fixedly connected with the bottom plate of the base, and the rotor is inserted into the first mounting cavity; the first connecting plate is fixedly connected with the top of the load plate and the top of the rotor, and the connecting position of at least one of the first connecting plate and the load plate is horizontally adjustable. According to the motion platform, the first mounting cavity of the load plate is arranged in the middle, so that the weight borne by the rotor of the voice coil motor in each direction is relatively balanced, and the motion precision of the load plate can be preliminarily ensured; the loading plate and the top of the mover are connected through the first connecting plate, disassembly and assembly are very convenient, the connecting position of the first connecting plate and the mover and / or the loading plate is horizontally adjustable, therefore, the parameters such as the coaxiality between the loading plate and the mover can be conveniently adjusted, and then the motion precision can be further improved.

The application provides a kind of general servo system control method and system based on special equipment application, it is related to special equipment control technical field, first receive the operation instruction sequence corresponding to special equipment application scene, then according to operation instruction sequence construction job flow timing diagram, the time sequence correlation of each operation instruction unit is clear, then obtain the real-time running state data set of special equipment, based on job flow timing diagram and real-time running state data set generate predicted motion trajectory curve, cover the expected position and speed parameter of each time point in future time window, finally call the trajectory tracking controller of general servo system to the deviation correction processing of predicted motion trajectory curve and real-time running state data set, generate the control signal sequence of driving component, drive special equipment to move according to predicted motion trajectory curve, effectively improve the motion precision and dynamic response capability of special equipment, enhance the adaptability and reliability of equipment in complex application scene.

The present invention relates to the technical field of bearing design, specifically to a high-precision cylindrical roller bearing for industrial robots, including a bearing body, the bearing body including a bearing outer ring and a bearing inner ring, and a rolling groove for installing a cylindrical roller is formed between the bearing outer ring and the bearing inner ring. The high-precision cylindrical roller bearing for industrial robots proposed by the present invention can use a retaining frame to reduce the wear of the cylindrical roller during movement, store a large amount of lubricating oil in the oil storage cavity to maintain a good lubrication effect on the cylindrical roller, and can use a heat exchange device to reduce the bearing wear caused by bearing deformation caused by high temperature, thereby effectively improving the bearing and ensuring the bearing's motion accuracy, and also facilitating the maintenance of the bearing interior, solving the problem that the existing cylindrical roller bearing is easy to wear, resulting in the inability to ensure motion accuracy and high maintenance cost, and can effectively improve the motion accuracy of the cylindrical roller bearing and reduce the maintenance cost.

The present invention provides a magnetic wheel adsorption underwater MIG welding robot, comprising a magnetic adsorption trolley, a wire feeding device, a welding gun moving device and a welding gun; the wire feeding device and the welding gun moving device are respectively arranged on the magnetic adsorption trolley; the welding gun is located on one side of the magnetic adsorption trolley; the welding gun moving device is connected to the welding gun through a welding gun arm to achieve lifting and horizontal movement of the welding gun; the welding gun is also connected to the wire feeding device through a cable to realize the input of welding wire from the wire feeding device into the welding gun. The welding robot can achieve effective movement on complex geometric metal surfaces, has good movement stability, is conducive to improving the welding process, and can control the welding wire to be transported to the molten pool along the cable at a stable wire feeding speed to ensure the weld forming effect.

The utility model discloses an interactive hand clamping mechanism, which comprises an X-axis cross beam, an X-axis cross beam, an X-axis cross beam, a Y-axis cross beam, a Y-axis cross beam, a Y-axis cross beam and a Y-axis cross beam, the upper clamping hand module reciprocates along the X-axis cross beam in the upper clamping hand moving area; the upper clamping hand module comprises an upper clamping hand, an upper clamping hand X-axis translation seat and a Y-axis driving unit; the Y-axis driving unit drives the upper clamping hand to extend towards one side part of the X-axis cross beam to wait for materials and to retract to avoid one side part deviating from the X-axis cross beam; the lower clamping hand module reciprocates along the X-axis cross beam in the lower clamping hand moving area; the lower clamping hand module comprises a lower clamping hand, a lower clamping hand X-axis translation seat and a Z-axis driving unit for driving the lower clamping hand to move in the Z-axis direction relative to the lower clamping hand X-axis translation seat; and the Z-axis driving unit drives the lower clamping hand to ascend for material waiting and descend for avoiding. The structural compactness, the movement precision, the working stability and the structural reliability are improved.

The invention provides a wafer claw using a flexible hinge, and relates to the technical field of silicon wafer conveying devices. The sheet claw comprises a driving assembly and an adsorption assembly, the driving assembly comprises a base and a driving piece, the driving piece is used for driving the adsorption assembly to ascend and descend, the driving piece comprises a fixed part and a movable part, the fixed part is fixedly connected with the base, and the movable part is fixedly connected with the adsorption assembly; the sheet claw further comprises a plurality of fixing bases which are evenly arranged around the axis of the movable part, and a flexible hinge is connected between each fixing base and the movable part. The flexible hinge comprises at least one branch chain, each branch chain comprises at least one flexible piece, and the flexible pieces extend in the direction perpendicular to the lifting direction of the adsorption assembly. The wafer claw can achieve the guiding effect of a linear bearing, does not use a lubricant, can avoid the situation that grease volatilizes in high-vacuum and ultrahigh-vacuum environments to generate particles to pollute the environment and silicon wafers, and does not have the problem of gas leakage.

The present application discloses a wafer bearing device and wafer processing equipment, wherein the bearing device comprises: a translation mechanism, a lifting mechanism, a rotating mechanism and a bearing platform, wherein the bearing platform is connected to the rotating mechanism, wherein the rotating mechanism is connected to the lifting mechanism, wherein a translation space is formed in the translation mechanism, wherein the lifting mechanism is arranged in the translation space; wherein the rotating mechanism comprises a first shell, a first driving assembly and a rotating shaft, wherein the bearing platform is installed at one end of the rotating shaft; wherein the lifting mechanism comprises a second shell and a second driving assembly, wherein the second shell is connected to the translation mechanism, wherein the second driving assembly is connected to the first shell, wherein a lifting cavity is formed in the second shell, wherein a throttling assembly is arranged on the inner wall surface of the lifting cavity, and wherein the first shell can be lifted and lowered without contact in the lifting cavity. The present device realizes that the three mechanisms are nearly coplanar, thereby reducing the system's working center of gravity, reducing the system's vertical dimension, reducing the mass of moving parts, and improving the operating accuracy and positioning accuracy of the entire system.

According to the body surface breathing movement simulation device and the target spot monitoring system based on binocular vision, the body surface breathing movement simulation device is simple in structure, the thoracico-abdominal body surface is simply divided into four blocks, and abdominal respiration of the human body and movement of the thoracico-abdominal body surface during the thoracico-respiration are simulated by controlling reciprocating movement of the four thoracico-abdominal body surface simulation plates. According to the device, rigid components are used, the lead screw stepping motor is used for directly driving the thoracico-abdominal body surface simulation board to move, higher repeatability is achieved, the motion precision is high, the motion control capacity is better, control is easier, and the cost of the whole system is low. The monitoring system can measure the distance of a placed body surface target spot in real time and draw a real-time displacement curve of the target spot, the system can monitor the motion state of a body surface breathing motion simulation device after the body surface breathing motion simulation device is combined with the system, and codes in a driving plate can be changed to correct the motion of a thoracico-abdominal body surface simulation plate if the requirements are not met, so that the operation is convenient. Therefore, the reliability of the body surface breathing movement simulation device is improved.