1results about How to "Achieving Motion Decoupling" patented technology

The invention provides a displacement table and a conveying device, and relates to the technical field of semiconductor equipment manufacturing. The displacement platform provided by the invention comprises a stator unit, a mover unit arranged above the stator unit, a piezoelectric driving module capable of driving the mover unit to move relative to the stator unit, and an electromagnetic driving module, the piezoelectric driving module comprises a piezoelectric driving mechanism connected with the mover unit, and the piezoelectric driving mechanism is configured to act on the upper surface of the stator unit; the electromagnetic driving module comprises a conductor array arranged on the stator unit and a magnet array which is arranged on the mover unit and matched with the conductor array. According to the displacement table, large-stroke, high-speed and high-acceleration long-distance transmission can be achieved, meanwhile, high-precision positioning can be achieved, good position stability is achieved, the mover unit can span the stator units of the multiple displacement tables through the electromagnetic driving module, and therefore handover is achieved, and manual work or handover of a manipulator is not needed.