The application provides a nanometer vision micro-control
robot system and a control method thereof, and relates to the technical field of micro-nano operation robots.The application adopts a composite configuration of a large-
stroke motion module, a multi-degree-of-freedom
manipulator and a micro-positioning module, specifically, the large-
stroke motion module provides
macro movement ability for finding a target, the multi-degree-of-freedom
manipulator provides flexible posture adjustment ability for approaching the target, and the micro-positioning module provides nanometer-level accurate positioning ability for final operation, and through the
control system, the Cartesian space error of the end is mapped and distributed to each joint through
inverse kinematics calculation, so that parasitic displacement caused by joint
coupling of the multi-degree-of-freedom
manipulator is effectively decomposed and compensated; meanwhile, through real-time tuning of PID parameters, the remaining unmodeled dynamics and disturbances can be effectively coped with, so that the whole
system can still show high control precision and stability when facing multiple complex nonlinear factors such as vacuum
dry friction,
hysteresis and motion
coupling.