The invention discloses an integrated
grating piezoelectric modulation closed-loop high-precision acceleration micro-sensor which comprises a shell. A
light source, a
grating, a piezoelectric
ceramic component and an MEMS (micro-electromechanical
system) sensing mechanism are arranged in the shell sequentially along a light path, the MEMS sensing mechanism comprises a
mass block and a
cantilever beam connected with the
mass block, and one surface, facing to the
grating, of the
mass block is a light reflecting surface. The acceleration micro-sensor is further provided with a photoelectric
detector, a
signal processing module, a first electromagnetic
force generation device, a second electromagnetic
force generation device and a current driving module, the photoelectric
detector is used for detecting
light intensity of interfering beams which are formed by interference of beams reflected by the grating and beams reflected by the light reflecting surface, the
signal processing module is used for computing corresponding acceleration signals according of signals of the photoelectric
detector, the first electromagnetic
force generation device is fixed at the bottom of the mass block, the second electromagnetic force generation device is positioned in the shell and matched with the first electromagnetic force generation device, and the current driving module is used for transmitting current to the first electromagnetic force generation device and the second electromagnetic force generation device, and is connected with the
signal processing module.