The invention discloses an integrated grating piezoelectric modulation closed-loop high-precision acceleration micro-sensor which comprises a shell. A light source, a grating, a piezoelectric ceramic component and an MEMS (micro-electromechanical system) sensing mechanism are arranged in the shell sequentially along a light path, the MEMS sensing mechanism comprises a mass block and a cantilever beam connected with the mass block, and one surface, facing to the grating, of the mass block is a light reflecting surface. The acceleration micro-sensor is further provided with a photoelectric detector, a signal processing module, a first electromagnetic force generation device, a second electromagnetic force generation device and a current driving module, the photoelectric detector is used for detecting light intensity of interfering beams which are formed by interference of beams reflected by the grating and beams reflected by the light reflecting surface, the signal processing module is used for computing corresponding acceleration signals according of signals of the photoelectric detector, the first electromagnetic force generation device is fixed at the bottom of the mass block, the second electromagnetic force generation device is positioned in the shell and matched with the first electromagnetic force generation device, and the current driving module is used for transmitting current to the first electromagnetic force generation device and the second electromagnetic force generation device, and is connected with the signal processing module.