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Dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS

A technology of digital holography and measurement methods, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of reducing vibration isolation requirements and inability to realize high-precision dynamic measurement, so as to reduce stringent requirements, be suitable for popularization and use, and reduce costs. low effect

Active Publication Date: 2020-10-23
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the existing technical problems, the purpose of the present invention is to overcome the defect that the existing multi-wavelength digital holographic method cannot realize high-precision dynamic measurement, and provide a dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS, which can realize simultaneous acquisition of three wavelengths. A multi-wavelength hologram can be used to achieve high-precision dynamic measurement. Since this method significantly reduces the vibration isolation requirements of the multi-wavelength digital holography method for environmental vibration and air disturbance, it can be more widely used in more measurement objects.

Method used

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  • Dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS
  • Dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS
  • Dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS

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Embodiment 1

[0034] In this embodiment, a dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS, see figure 2 and image 3 , using 3CCD or 3CMOS image acquisition system to carry out dynamic three-wavelength digital holographic measurement on the surface of the test object S, the dynamic three-wavelength digital holographic measurement method based on 3CCD or 3CMOS is as follows:

[0035] a. Using 3 wavelengths of laser, such as figure 2 As shown, using λ 1 =593.5nm, λ 2 =561nm, λ 3 = Lasers with three wavelengths of 450nm form 3 independent Mach-Zehnder interference optical paths, and each wavelength of laser light corresponds to a Mach-Zehnder interference optical path; the interference hologram generated by the 3 interference optical paths is displayed at the receiving end The photoelectric device is received by 3 CCD or 3 CMOS cameras;

[0036] b. The wavelength is λ 1 The Mach-Zehnder interference optical path emits the first laser beam from th...

Embodiment 2

[0050] This embodiment is basically the same as Embodiment 1, especially in that:

[0051] In this embodiment, by adjusting the first mirror M in the optical path 1 , the third beam splitter BS 3 and the fourth beam splitter BS 4 and the fifth beamsplitter BS 5 , to control the angle between the reference light and the object light, so that the measurement light path meets the separability condition between the off-axis holographic reconstruction images.

Embodiment 3

[0053] This embodiment is basically the same as the previous embodiment, and the special features are:

[0054] In this embodiment, light is split through corresponding beam splitters in each optical path, including the first beam splitter BS 1 , the second beam splitter BS 2 , the third beam splitter BS 3 , the fourth beam splitter BS 4 and the fifth beamsplitter BS 5 ;

[0055] The first laser beam is split by the first polarizing beam splitter PBS 1 Divided into two beams; among them, one beam of sub-beams passes through the first mirror M as a reference light 1 After reflection, it passes through the third beam splitter BS in turn 3 , the fourth beam splitter BS 4 and the fifth beamsplitter BS 5 Split the light, and then enter the CCD or COMS target surface; another beam of split light passes through the first beam splitter BS in turn 1 , the second beam splitter BS 2 After splitting, the second mirror M 2 After reflection, it is converged by the converging lens C...

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Abstract

The invention discloses a dynamic three-wavelength digital holographic measurement method based on a 3CCD or a 3CMOS. The dynamic three-wavelength digital holographic measurement method is characterized by comprising the steps of: utilizing a 3CCD or 3CMOS image acquisition system to carry out dynamic three-wavelength digital holographic measurement on the surface of a tested piece (S); and forming an image acquisition system by means of three CCD chips or three CMOS chips at a receiving end, so as to realize simultaneous acquisition of three wavelength holograms, obtain laser holograms corresponding to three laser wavelengths, and then acquire three-dimensional topography information of the surface of the tested piece (S). According to the dynamic three-wavelength digital holographic measurement method, three multi-wavelength holograms can be acquired at the same time, so that high-precision dynamic measurement is achieved, and due to the fact that the dynamic three-wavelength digitalholographic measurement method remarkably reduces the vibration isolation requirement of a multi-wavelength digital holographic method for environmental vibration and air disturbance, the dynamic three-wavelength digital holographic measurement method can be more widely applied to more measurement objects.

Description

technical field [0001] The invention relates to a three-wavelength dynamic digital holographic measurement method based on 3CCD or 3CMOS, belonging to the technical field of photoelectric detection. Background technique [0002] Digital holography is a new imaging technology developed on the basis of traditional optical holography technology combined with modern digital image technology. Different from the traditional optical holography method, it uses CCD (Charge Coupled Device, Charge Coupled Device), CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) and other photoelectric devices to record holograms and store them in the computer, and simulate optical diffraction through computer numerical simulation. The process reproduces the hologram, and the result is directly displayed and output, which realizes the digitization of the entire holographic process from recording to reproduction. Compared with traditional optical holography, digit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02027G01B9/02047
Inventor 李凯
Owner SHANGHAI UNIV
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