The invention discloses a device for detecting attitudes of micro-devices on line during
assembly based on micro-vision. The device is suitable for detecting the attitudes of the micro-devices and aligning and assembling the micro-devices, comprises a control host, a three-path orthogonal micro-vision
system, a vision
system attitude adjusting mechanism, micro-device clamping devices, micro-device attitude adjusting motion mechanisms, a
light source system and a digital prototype and has twenty-five
degrees of freedom, wherein the two micro-devices are arranged on the corresponding clamping devices; the clamping devices are arranged on the corresponding motion mechanisms; and the digital prototype can feed back the attitudes of the micro-devices, which are detected on line, in real time and can observe the current
assembly state of the micro-devices in 360-degree panoramic and
zoom modes.
Millimeter-level micro-parts can be conveniently and efficiently detected and assembled on line in a man-
machine cooperation mode, the size range of the assembled parts is 10 to 12mu m, detection position accuracy is 3 to 5mu m, angle accuracy is 0.3 to 0.5 degree, and a wide application prospect and considerable social and
economic benefits are achieved.