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128 results about "Micro devices" patented technology

Power equipment intelligent inspection abnormity identification method based on multi-dimensional data fusion

The invention provides a power equipment intelligent inspection abnormity identification method based on multi-dimensional data fusion, and the method comprises the steps: obtaining historical operation data and real-time monitoring data, fusing the historical operation data and the real-time monitoring data through a time sequence alignment method, generating a unified data set containing voltage, current, temperature and load information, and obtaining multi-dimensional equipment operation features; aiming at the outlier feature vector, adopting an adaptive neural network to adjust a weight coefficient of the health state evaluation model, generating an optimized weight parameter, and determining an optimized model structure; and performing health state evaluation on the unified data set through the optimized model structure, generating a health index scoring result of the equipment in combination with load over-limit period counting and a temperature abnormal fluctuation range, and determining an evaluation basis for guiding local maintenance of the miniature equipment.
Owner:GUANGZHOU ZHONGKE ZHIXUN TECH CO LTD

Method of manufacturing micro devices

ActiveUS12336326B2Micro devicesPhotoresist
A method of manufacturing micro devices includes: preparing a GaN-based epitaxial structure including a p-type GaN layer, a n-type GaN layer on the p-type GaN layer, and an undoped GaN layer on the n-type GaN layer; forming a photoresist layer on the GaN-based epitaxial structure with the undoped GaN layer contacting the photoresist layer; patterning the photoresist layer; performing a plasma etching process to the GaN-based epitaxial structure through the patterned photoresist layer until the patterned photoresist layer is completely removed, such that a plurality of mesas are formed on the etched GaN-based epitaxial structure, in which a height of the mesas is at least 1.0 μm; and continuing to perform the plasma etching process until the undoped GaN layer is completely removed and the etched GaN-based epitaxial structure is cut into a plurality of micro devices.
Owner:MIKRO MESA TECH

Device transfer apparatus using plurality of vibration sources and method of controlling the same

A device transfer apparatus is provided. The device transfer apparatus includes a container of a polygonal shape which contains a substrate including device holes, vibration sources which generates vibration and transfers the vibration to a fluid in the container, and a processor which controls outputs of the vibration sources. The vibration sources include first group vibration sources arranged on a circumference of a first circle having a radius of a first distance from a central point, and second group vibration sources arranged on a circumference of a second circle which is concentric with the first circle and has a radius of a second distance that is longer than the first distance. The container is arranged on the central point and contains a fluid and micro devices distributed in the fluid. The processor controls the first group vibration sources and the second group vibration sources to output vibration.
Owner:CHUNG ANG UNIV IND ACADEMIC COOP FOUND

Tiled display for optoelectronic system

The present invention discloses structures and methods for making tiled displays for optoelectronic systems. The invention provides for a method of making a micro device tiled display. The method provides a tile substrate having a plurality of tiles. The method provides for a backplane layer. The method provides for covering a first surface of one of the backplane layer or the tile substrate with an adhesive. The method provides for aligning and releasing the tiles to the backplane. The method provides for curing the adhesive. The method provides for filling an area or a trench between the plurality of tiles and an area or trench between micro devices with a filler layer, wherein the filler layer is extended to either side of the tile depending on the view direction.
Owner:VUEREAL INC

Front-to-back connection within double diffusion interruptions

A semiconductor IC device (50) includes a conductive through device connection. The connection may be located within a double diffusion break (DDB) region (51) separating the active regions (52, 53). The connection may include a dummy S / D region (24) between the front contact (30) and the back contact (32). The semiconductor IC device may further include a first (20) and / or a second diffusion interruption isolation rail (22). A connection may be between the first and second diffusion-interrupting isolation rails. The connection locations within the DDB region thus increase the packaging density of the semiconductor IC device. In addition, the connection may reduce wiring complexity and resistance through the semiconductor IC device, which may improve semiconductor IC device performance. Furthermore, the connections may utilize structural instances (e.g., front contacts, back contacts, dummy S / D regions, etc.) mirrored with structural instances used by micro devices (e.g., transistors, etc.) within the active region, which may reduce manufacturing complexity.
Owner:INTERNATIONAL BUSINESS MACHINE CORPORATION

Machine learning SOC estimation method and system using relaxation time distribution and fractional order model parameters

The invention belongs to the technical field of lithium ion batteries, and discloses a machine learning SOC estimation method using relaxation time distribution and fractional order model parameters, and the method comprises the steps: firstly, employing a DRT and a fractional order model to comprehensively analyze EIS data; the DRT can make up for the defect that the fractional order model cannot completely describe the EIS data, and can obtain the characteristics related to SOC estimation on multiple scales with the fractional order model, thereby providing guarantee for the accuracy of the SOC, and greatly reducing the data volume. And secondly, combining advanced intelligent technologies such as a machine learning model to realize real-time estimation of the SOC. According to the method, the fractional order model and the data driving model are combined, and the SOC estimation precision is improved. The method can be widely applied to products using lithium ion batteries, such as electric automobiles, micro equipment and the like, especially electric automobiles with vehicle-mounted EIS, and has important social and economic values.
Owner:GUILIN UNIVERSITY OF TECHNOLOGY

Translation lookaside buffer (TLB) poisoning attacks on secure encrypted virtualization

TLB poisoning attacks take advantage of security issues of translation lookaside buffer (TLB) management on SEV processors in Secure Encrypted Virtualization (SEV) virtual machines (VMs). In various embodiments, a hypervisor may poison TLB entries between two processes of a SEV VM to compromise the integrity and confidentiality of the SEV VM. Variants of TLB poisoning attacks and end-to-end attacks are shown to be successful on both Advanced Micro Devices (AMD) SEV and SEV-Encrypted State (SEV-ES). Countermeasures for thwarting TLB poisoning attacks include hardware-enforced TLB flush processes and re-exec schemes that, among other things, prevent attackers from manipulating TLB entries and causing a privileged victim process to execute malicious code in an attempt to bypass a password authentication.
Owner:BAIDU USA LLC

Miniaturized ear stud type positioning device based on hybrid power supply system and active signal enhancement technology

The invention provides a miniaturized ear stud type positioning device based on a hybrid power supply system and an active signal enhancement technology, and belongs to the technical field of pet positioning. Comprising a titanium alloy shell, a zirconia ceramic wave-transparent layer is arranged on the inner wall of the titanium alloy shell, a magnetic type ear stud and a safety contact electrode are arranged outside the titanium alloy shell, a transparent nanowire solar film electrically connected with the safety contact electrode is arranged on the surface of the magnetic type ear stud, and a communication layer, a processing layer and a hybrid power supply layer are arranged in the titanium alloy shell. The communication layer comprises a UWB / BLE dual-mode antenna array, an IMU inertial navigation module and a signal processing FPGA module. According to the invention, the problem of long-acting power supply of the micro equipment in a continuous positioning mode can be solved, the cruising ability is high, and the signal transmission reliability in a complex indoor environment (the positioning success rate gt; 95%), the signal penetrability is better, non-sensitive wearing is achieved through the ear stud type design, wearing comfort is achieved, the functions are rich, and positioning-health monitoring integration is achieved by integrating a multi-mode sensor.
Owner:XINJIANG CITIC IFLYTEK INFORMATION TECH CO LTD

Method for preparing dielectric microspheres by combining ultraviolet curing and microfluidic technology

The invention relates to the technical field of dielectric microspheres, in particular to a method for preparing dielectric microspheres by combining ultraviolet curing and a microfluidic technology. The invention provides a preparation method of a dielectric microsphere by combining ultraviolet curing and a microfluidic technology. The specific preparation method comprises the following steps: uniformly mixing a polymer ceramic precursor solution with a surfactant, photosensitive resin and a photoinitiator, forming monodisperse liquid drops in the micro-fluidic chip, and carrying out ultraviolet light curing molding in a collection bottle. And cleaning the polymer microspheres, drying and curing the polymer microspheres in a drying oven, and degreasing and sintering the polymer microspheres in a tubular furnace and a muffle furnace respectively to prepare the dielectric microspheres. The dielectric microsphere prepared by combining ultraviolet curing and a microfluidic technology has the characteristics of uniform size, good dispersity, easiness in size and composition regulation and control and the like, and has a wide market prospect in the fields of micro devices and sensors.
Owner:SOUTH CHINA UNIV OF TECH +1

TELECENTRAL IMAGE: MULTIPLE LIGHT RAYS INTO A TARGET AREA

The present application relates to an imaging device for telecentrically imaging multiple light beams into a target area and an associated micromirror device. The imaging device comprises a beam inclination correction element and a beam control device configured to image N ≥ 2 substantially non-overlapping light beams onto the beam inclination correction element and to control the position of one or more of the N light beams on the beam inclination correction element. The imaging device further comprises a beam imaging device configured to image the light beams corrected by the beam inclination correction element onto the target area, wherein the beam inclination correction element is configured to correct the inclination of the N light beams in each case such that the N light beams are imaged onto substantially non-overlapping positions in the target area.The beam inclination correction element can be implemented, for example, by a micromirror device.
Owner:FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV +1

Graphene-based microneedle sensing electrode preparation method and blood fat detection system

The invention discloses a graphene-based microneedle sensing electrode preparation method and a blood fat detection system. The method comprises the following steps: preparing a microneedle array, preparing a graphene structure on the surface of the microneedle array by utilizing a chemical vapor deposition technology, and modifying cholesterol oxidase on the surface of the microneedle array; and coating the microneedle array with a water-soluble polymer to obtain the microneedle sensing electrode. According to the application, a graphene nanostructure is constructed on the surface of the microneedle, and cholesterol oxidase is fixed on the surface of the electrode, so that a great specific surface area and high electron mobility of the sensor are realized, the biocompatibility and detection precision of the sensor are improved, and accurate and convenient subcutaneous in-situ detection of cholesterol is realized. The method can be widely applied to the technical field of biomedical engineering micro devices.
Owner:SUN YAT SEN UNIV

Microdevice cartridge structure

What is disclosed is structures and methods of integrating micro devices into system substrate. Further, the disclosure, also relates to methods and structures for enhancing the bonding process of micro-devices into a substrate. More specifically, it relates to expanding the micro device area or bonding area of micro devices.
Owner:VUEREAL INC

Gas sensor and electronic device

This application discloses a gas sensor and electronic device. The gas sensor includes a substrate, a micro-hot plate, and a microphone. At least one of the micro-hot plate and the microphone is disposed on the substrate. The micro-hot plate includes a heating element, and a thermoacoustic cavity is formed around the heating element. The microphone has a sensing cavity, with the sensing surface of the microphone facing the sensing cavity, and the sensing cavity communicating with the thermoacoustic cavity. The micro-hot plate also includes a first substrate and a heat insulation layer stacked together. The first substrate has a first through-hole, and the heating element is located within the heat insulation layer. Thus, the gas sensor of this embodiment, through the coordinated operation of the micro-hot plate and the microphone, can accurately detect the composition and concentration of gas using the thermoacoustic effect. Furthermore, it is fabricated using microfabrication technology, making it easy to integrate into various micro-devices and possessing broad application prospects.
Owner:GOERTEK MICROELECTRONICS CO LTD

Coupling probe for micro device inspection

The present disclosure describes a probe design to measure cycles of microdevices. In particular, the probe comprises, electrodes, dielectric, stimulating capacitor, voltage stimulating source for time varying stimulating voltage signal and a series switch to control biasing condition. The probe structure further has a probe tip and resting pads (ring shape or otherwise) along with a leveling mechanism and apparatus. The disclosure also describes a method to measure cycles of microdevices using the probe structure.
Owner:VUEREAL INC

Shape memory alloy film and preparation method and application thereof

The invention relates to the technical field of metal materials, and discloses a shape memory alloy film and a preparation method and application thereof. The shape memory alloy film comprises the following components: 50-55 at.% of Ni, 40-45 at.% of Ti, 3-5 at.% of Cu and 2-4 at.% of M, and M is selected from one or more of Zr, Hf and Nb. The shape memory alloy film has remarkable superelasticity, the recoverable strain of the shape memory alloy film can reach 8% or above, meanwhile, the compressive yield stress exceeds 1.5 GPa, and the shape memory alloy film shows excellent cycle stability. The preparation method is simple in process and high in controllability, a new scheme is provided for solving the problem of unstable performance of an existing NiTi-based film, and the preparation method is particularly suitable for high-performance micro devices such as a micro electro mechanical system.
Owner:SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY

Coaxial telescopic tubular piezoelectric linear motor, driving equipment and system

The invention provides a coaxial telescopic tubular piezoelectric linear motor, a driving device and a system, the coaxial telescopic tubular piezoelectric linear motor comprises a stick-slip moving assembly, the stick-slip moving assembly comprises a first moving tube body and a second moving tube body, the first moving tube body is provided with a moving groove and fins, the fins abut against the second moving tube body so as to form a friction pair, and the second moving tube body is provided with a second moving groove; the second movable pipe body is provided with a pin shaft and a connecting groove; and the piezoelectric driving assembly comprises a piezoelectric ceramic tube, and the piezoelectric ceramic tube is connected to the first movable tube body and is externally connected with power supply equipment. In the invention, all functional components are arranged along the same axis, so that the radial size is obviously reduced, the device is suitable for being integrated on micro equipment, parts such as traditional guide rails and springs are omitted in structural design, and the assembly complexity and cost are reduced. System integration is facilitated, and the movement precision can be further improved. Compared with a conventional piezoelectric driving motor, the piezoelectric driving motor has the advantages of miniaturization, integration, high precision, high compatibility and applicability and the like.
Owner:JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD

Integrating micro devices into a system substrate

This application relates to the integration of microdevices into a system substrate. In the microdevice integration process, a donor substrate is provided, on which initial fabrication and pixellation steps will be performed to define microdevices, which include a functional layer, such as a light-emitting layer, sandwiched between a top conductive layer and a bottom conductive layer. The microdevices are then transferred to a system substrate for finalization and electronic control integration. The transfer can be facilitated in various ways, including providing a continuous light-emitting functional layer, breakable anchors on the donor substrate, a temporary intermediate substrate that enables thermal transfer techniques, or a temporary intermediate substrate with a breakable substrate bonding layer.
Owner:VUEREAL INC

Microdevice cartridge mapping and compensation

The invention relates to micro device barrel mapping and compensation. In particular, the disclosure relates to compensation of micro devices based on cartridge information.
Owner:VUEREAL INC

Electromagnetic shielding device and preparation method thereof

The invention relates to the technical field of electromagnetic shielding equipment, and provides an electromagnetic shielding device and a preparation method thereof, and the device comprises a flexible substrate and liquid metal; a shielding area is formed on the flexible substrate, and a plurality of shielding runners are arranged in the flexible substrate; at least two layers of flexible substrates are arranged, the multiple shielding runners are distributed in each layer of the flexible substrates, and the shielding runners in the multiple layers of flexible substrates cover the shielding area in at least two directions with included angles; the shielding flow channel is filled with the liquid metal. In this way, due to the fact that the shielding effect on electromagnetic waves in different polarization directions is brought by the directions of the shielding flow channels in different layers, and multi-layer reflection and absorption of the electromagnetic waves are brought by the structural size difference between the shielding flow channels in different layers, the more excellent and adjustable electromagnetic shielding effect is achieved; the flexible shielding flow channel is filled with the liquid metal, so that the electromagnetic shielding device has good flexibility, and fine management and regulation of electromagnetic shielding of micro devices can be realized.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

High throughput microreplication process

ActiveCN114008763BMicro devicesDisplay device
Embodiments disclose methods of transferring selected micro devices on a receiver substrate. In one embodiment, a high resolution display containing an array of light emitting devices (LEDs) can be provided to assist in transferring the micro devices. The array of LEDs can selectively release a layer of adhesive or cure a bonding layer using light. Pixels in the display can be turned on at a predefined intensity corresponding to a group of selected micro devices to release the group of selected micro devices from a donor substrate.
Owner:VUEREAL INC

Micro-miniature device assembly type component for nursing home and following waistband of micro-miniature device assembly type component

The assembly comprises a side pocket used for placing a micro-miniature device, and a barrier strip used for being in contact with the upper end face of the micro-miniature device and enabling the micro-miniature device to be fixed in the side pocket is fixedly arranged on the inner wall of the outer side of a pocket opening of the side pocket; one end of the elastic piece is fixed on the bottom surface of the barrier strip, and the other end of the elastic piece is connected with the inner wall of the inner side of the side pocket or the bottom of the side pocket; after the micro-miniature device is put in, the elastic piece is stretched, and the stretched elastic piece is matched with the barrier strip to clamp the micro-miniature device in the vertical direction; through the cooperation of the elastic piece and the barrier strip, the micro-miniature device is fixed in the side pocket, the possibility that the micro-miniature device deviates or falls in the activity process of the old is reduced, whether the micro-miniature device is installed or not can be observed through the cooperation of the transparent window, and more convenience and intuition are achieved; according to the waistband provided with a plurality of assemblies, the use cost can be reduced, and when a user changes the waistband, only the placed micro devices need to be replaced.
Owner:ANHUI JIUJIU SUNSET RED HEALTH TECHNOLOGY CO LTD +1

Circuit and system integration onto a microdevice substrate

An integrated optical display system includes a backplane with appropriate electronics, and an array of micro-devices. A touch sensing structure may be integrated into the system. In one embodiment, an integrated circuit and system is integrated on top of micro-devices transferred to a substrate. Openings in a planarization layer (or layers) may be provided to connect the micro-devices with electrodes and other circuitry. Light reflectors may be used to redirect the light, and color conversion layers or color filters may be integrated before the micro-devices or on the substrate surface opposite to the surface of micro-devices.
Owner:VUEREAL INC

A device for real-time monitoring and analysis of lunar soil drilling process

The present invention discloses a device for real-time monitoring and analysis of the lunar soil drilling process. The device comprises a drill rod having an inner and outer sandwich structure, comprising, from the inside out, a transparent layer, a micro-device mounting layer, and a rigid protective surface. The transparent layer houses a sampling chamber, which is equipped with a central piston and a central piston controller disposed at the top of the sampling chamber. The central piston controller is capable of controlling the upward and downward movement of the central piston within the sampling chamber. A sidewall image recognition sensor is mounted on the inner side of the micro-device mounting layer, and a top image recognition sensor is mounted within the sharp corner of the central piston. A foldable baffle is also provided at the bottom of the drill rod. The device can monitor the velocity field, displacement field, and stratigraphic information of the lunar soil particle flow in real time during lunar soil drilling, providing reference information for astronauts' drilling operations and thus guiding them in optimizing the sampling process in real time.
Owner:XI AN JIAOTONG UNIV

Electromagnetic field gradient coil arrangement for micro device positioning

ActiveCN114829964BEndoradiosondesUsing electrical meansMagnetic field gradientMagnetic field amplitude
An apparatus for generating magnetic field gradients, comprising (a) a first planar electromagnetic coil set configured to generate a first magnetic field gradient with respect to a first axis, (b) a second planar electromagnetic coil set configured to generate a second magnetic field gradient with respect to a second axis orthogonal to the first axis, (c) a third planar electromagnetic coil set configured to generate a third magnetic field gradient with respect to a third axis orthogonal to the first and second axes, and (d) a controller configured to selectively power the first, second, and / or third electromagnetic coil sets to sequentially generate positioning magnetic field gradients with respect to each of the first, second, and third axes, at least a portion of each positioning magnetic field gradient having a magnetic field magnitude that monotonically varies along the respective axis.
Owner:CALIFORNIA INST OF TECH

Device and method for evaluating influence of human activities on plateau lake ecosystem

The invention discloses a device and method for evaluating influence of human activities on a plateau lake ecosystem, a barrel body is arranged in a semi-buried mode, the input end of an independent pumping system is externally connected with at least one liquid medicine bin, and the output end of the independent pumping system is arranged corresponding to the interior of the barrel body; a test end of the independent ecological monitoring part is arranged corresponding to the interior of the barrel body and is used for monitoring water environment parameters and macroscopic plant states; one end of the common pumping system comprises a plurality of inner end pipelines connected in parallel, and the common ecological monitoring part is arranged at the other end of the common pumping system and used for detecting the microcosmic plant state; according to the device and method for evaluating the influence of human activities on the plateau lake ecosystem, the semi-buried barrel body is combined with the hydrological control module, the plateau lake low-temperature environment and underground heat exchange characteristics are effectively restored, and the influence of human activities on the plateau lake ecosystem is evaluated through cooperative operation of the atmosphere testing part independent ecological monitoring part independent pumping system hydrological control module. The dynamic superposition interference simulation of eutrophication and climate warming is realized, and the limitation of a laboratory microcosmic device is broken through.
Owner:INST OF AQUATIC LIFE ACAD SINICA

Driving pump, liquid cooling module, electronic device and vibrator manufacturing method

Drive pump, liquid cooling module, electronic equipment and vibrator preparation method relate to medium drive micro device technical field, and drive pump includes casing and vibrator; The casing has first channel and second channel, and the casing is equipped with pump cavity, and the first channel, the pump cavity and the second channel are communicated in proper order to form flow channel; The vibrator includes electrode layer, piezoelectric layer, electrode connecting layer and support layer which are connected in layers; The piezoelectric layer, electrode connecting layer and support layer form co-sintered body, the electrode layer is attached on the side of piezoelectric layer away from support layer, and the electrode connecting layer is located between piezoelectric layer and support layer; The vibrator is located in the casing and constitutes part of the side wall of the pump cavity, for driving medium to flow in the flow channel. The co-sintered body formed by sintering the piezoelectric layer and the support layer can effectively improve the yield and reliability of the finished drive pump, increase the amplitude and conversion efficiency of the vibrator, and the connection between the piezoelectric layer and the support layer is more firm, so that the performance and reliability of the drive pump are improved.
Owner:HUAWEI TECH CO LTD

Method and system for high precision alignment and transfer of micro devices in optoelectronic manufacturing

An advanced method for manufacturing an optoelectronic system array is disclosed in which micro-devices are developed separately and then transferred into a system substrate. Various embodiments are disclosed, including distributed sacrificial reference points, real-time monitoring with various sensing techniques, laser generated alignment marks, non-contact laser triangulation, and marking using polymers to dynamically estimate and correct alignment during each transfer phase. The invention further discloses a method for detecting and correcting errors caused by wear, environmental changes, load variability and mechanical vibrations, which may be AI-based. Generally, the system for pre-transfer calibration, monitoring, error detection, and compensatory adjustment enables precise and reliable integration of micro-devices into optoelectronic systems, thereby significantly enhancing alignment accuracy, stability, and reliability throughout the manufacturing process. The system may further be AI-based calibration verification in a micro device transfer system.
Owner:VUEREAL INC

Method for preparing light foaming cement by adopting split type micro equipment

After a proper amount of the slow-release water reducing agent is added into the basic magnesium sulfate foamed cement material, the compressive strength of the foamed cement can be remarkably improved. Specifically, along with the increase of the dosage of the slow-release type water reducing agent, the compressive strength of the foaming cement is in a trend of firstly increasing and then reducing, and meanwhile, the drying density of the foaming cement is gradually increased. The foaming cement material pursues lighter texture, so that the use amount of the slow-release water reducing agent needs to be strictly controlled in actual use. On the other hand, split type micro equipment with a foaming machine and a stirring machine separated is adopted, and finer and more uniform foam can be obtained in the foaming process.
Owner:HUNAN FUMINLE BUILDING MATERIALS TECH DEV CO LTD

Micro device integration into system substrate

This disclosure is related to post processing steps for integrating of micro devices into system (receiver) substrate or improving the performance of the micro devices after transfer. Post processing steps for additional structure such as reflective layers, fillers, black matrix or other layers may be used to improve the out coupling or confining of the generated LED light. In another example, dielectric and metallic layers may be used to integrate an electro-optical thin film device into the system substrate with the transferred micro devices. In another example, color conversion layers are integrated into the system substrate to create different output from the micro devices.
Owner:VUEREAL INC

Vision-based laser cutting wall-to-wall loss prevention method

The invention relates to the technical field of laser cutting, in particular to a laser cutting wall-to-wall loss prevention method based on vision. According to the technical scheme, the method comprises the following steps that a component and an aluminum framework are fixed, a to-be-machined pattern is set, laser machining parameters are initialized, seed parameters of the half-cutting process are determined, first-time laser machining is executed based on the initialized parameters, laser emission is stopped after set machining times are completed, and a cutting channel is photographed through a high-power vision camera; and processing the shot image by adopting an image processing algorithm, extracting cutting channel information, and judging whether cutting is completed or not according to an image analysis result. According to the method, a visual algorithm is combined with dynamic management and control, the problem of wall damage prevention in the laser cutting process is effectively solved on the premise of not depending on expensive equipment, meanwhile, the cutting precision and the machining efficiency are considered, and the method is suitable for scenes such as micro devices with high requirements for machining precision and damage prevention.
Owner:INST OF ENERGY HEFEI COMPREHENSIVE NAT SCI CENT (ANHUI ENERGY LAB)