The present application provides an
information processing device, an
information processing method, and a computer readable recording medium, which can form a structure such as a film on a substrate with high precision. An example of the
information processing device includes: a prediction unit configured to calculate a predicted film thickness when a substrate
processing device processes a substrate based on a film thickness model and prior data, the film thickness model indicating a relationship between a state of the substrate
processing device and a film thickness of a
coating film formed on a surface of the substrate by the substrate
processing device, and the prior data indicating a state of the substrate processing device before the substrate processing device processes the substrate; and an output unit configured to output instruction information related to processing of the substrate based on the predicted film thickness before the substrate processing device processes the substrate.