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3results about How to "High precision forming" patented technology

Metal film forming apparatus

PendingCN122279693Ahigh precision formingRubber materialElectrolyte
This invention provides a metal film forming apparatus that uses a mask member having a mask portion made of rubber material to form a metal film with a specified pattern with high precision. The mask member (60) of the film forming apparatus (1) has a through portion (68) and a mask portion (65) made of rubber material. An insulating porous plate (30) is disposed between the electrolyte membrane (13) and the mask portion (65) to cover the through portion (68). The porous plate has a plurality of fine holes through which the electroplating solution passes.
Owner:TOYOTA JIDOSHA KK

Information processing apparatus, information processing method, and computer-readable recording medium

The present application provides an information processing device, an information processing method, and a computer readable recording medium, which can form a structure such as a film on a substrate with high precision. An example of the information processing device includes: a prediction unit configured to calculate a predicted film thickness when a substrate processing device processes a substrate based on a film thickness model and prior data, the film thickness model indicating a relationship between a state of the substrate processing device and a film thickness of a coating film formed on a surface of the substrate by the substrate processing device, and the prior data indicating a state of the substrate processing device before the substrate processing device processes the substrate; and an output unit configured to output instruction information related to processing of the substrate based on the predicted film thickness before the substrate processing device processes the substrate.
Owner:TOKYO ELECTRON LTD