Device for detecting micro-devices on line during assembly based on micro-vision

Abstract

The invention discloses a device for detecting attitudes of micro-devices on line during assembly based on micro-vision. The device is suitable for detecting the attitudes of the micro-devices and aligning and assembling the micro-devices, comprises a control host, a three-path orthogonal micro-vision system, a vision system attitude adjusting mechanism, micro-device clamping devices, micro-device attitude adjusting motion mechanisms, a light source system and a digital prototype and has twenty-five degrees of freedom, wherein the two micro-devices are arranged on the corresponding clamping devices; the clamping devices are arranged on the corresponding motion mechanisms; and the digital prototype can feed back the attitudes of the micro-devices, which are detected on line, in real time and can observe the current assembly state of the micro-devices in 360-degree panoramic and zoom modes. Millimeter-level micro-parts can be conveniently and efficiently detected and assembled on line in a man-machine cooperation mode, the size range of the assembled parts is 10 to 12mu m, detection position accuracy is 3 to 5mu m, angle accuracy is 0.3 to 0.5 degree, and a wide application prospect and considerable social and economic benefits are achieved.

Description

technical field [0001] The invention belongs to the technical field of micro-assembly and micro-operation, in particular to a device for micron-level precision space alignment and assembly of two millimeter-level micro devices under the guidance of three-way orthogonal microscopic vision. Background technique [0002] Micro-assembly is a technology that assembles multiple micro-parts into complex micro-systems through accurate grasping, positioning, alignment and other operations. It mainly refers to the assembly of parts with a size of tens of microns to millimeters. Micro-Electro-Mechanical Systems, MEMS) research core content and hot topic, has a wide range of application prospects and significance. Micro-assembly technology can be widely used in electronics, aerospace, biology, semiconductor integrated circuits and other fields, and has received widespread attention from all over the world. [0003] The micro-assembly robot system designed by Huazhong University of Scie...

AI Technical Summary

Problems solved by technology

It can complete automatic micro-assembly and dispensing operations, but it has fewer degrees of freedom and cannot complete the complex assembly of precision parts

[0005] In short, although some progress has been made in the research on the assembly of tiny parts at home and abroad, the visual systems of these technologies are relatively simple, mostly for plane detection, and the detection of space attitude is difficult and the accuracy is low; The flexibility of complex assembly is not enough; there are few researches on digital prototype system based on physical device in micro-assembly system

Images