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All optical fiber frequency domain interference absolute distance measurement method and device

A measurement method and absolute distance technology, which is applied in the field of all-fiber frequency domain interference absolute distance measurement method and device, and can solve problems such as limited wide application, poor anti-interference ability, and negative impact of the measured object

Active Publication Date: 2014-12-10
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Inductive sensors have non-sliding contacts. Although they are not affected by non-metallic factors such as dust during operation, and have low power consumption and long life, the measurement object must be a metal conductor. In addition, because it is a contact measurement, it may affect the Negative impact on test subjects
Although the grating sensor has the advantages of easy digitization, strong anti-interference ability, no artificial reading error, convenient installation, and reliable use, etc., the measurement accuracy is generally at the micron level, and most grating sensors can only measure the distance generated during the movement of objects. Changing the value (i.e. displacement), cannot measure the absolute distance of the static object relative to a certain origin
The eddy current sensor uses the eddy current effect to measure the distance between the measured metal conductor and the probe surface statically and dynamically, with high linearity and high resolution, but the measured object must be a metal conductor, which limits its wide application.
Scanning sensors include wavelength scanning, time scanning and space scanning. Scanning displacement sensors are difficult to take into account the measurement accuracy and measurement range, and the system's anti-interference ability is poor. Typical wavelength scanning displacement sensor, its measurement accuracy can reach nanometers, but the measurement range is only a few millimeters
To sum up, the current precision distance measurement technology is difficult to take into account the distance measurement accuracy and measurement range, and it is difficult to meet the growing requirements of precision measurement and micro-electromechanical systems.

Method used

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  • All optical fiber frequency domain interference absolute distance measurement method and device
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Embodiment Construction

[0053] All features disclosed in this specification, or steps in all methods or processes disclosed, may be combined in any manner, except for mutually exclusive features and / or steps.

[0054] Any feature disclosed in this specification (including any appended claims, abstract and drawings), unless expressly stated otherwise, may be replaced by alternative features which are equivalent or serve a similar purpose. That is, unless expressly stated otherwise, each feature is one example only of a series of equivalent or similar features.

[0055] Relevant description of the present invention:

[0056] 1. The pigtail of the fiber optic probe 4 is connected to the second port II of the circulator 3. The light emitting end face of the fiber optic probe 4 irradiates the light wave on the surface of the reflector and simultaneously receives the reflected light wave returned from the surface of the reflector. The received reflected light wave is input to the adjustable optical fiber ...

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Abstract

The invention relates to an accurate absolute distance measurement system, in particular to an all optical fiber frequency domain interference absolute distance measurement method and device and aims to solve the problems of the prior art. The device is convenient and easy to operate and is capable of measuring the absolute distance between a reflector surface and an optical fiber probe light emitting end face, the measurement accuracy is above 10nm, and the measurement distance can be 100cm. The device comprises a broadband light source, an array optical fiber filter, an optical fiber circulator, an optical fiber probe, an adjustable optical fiber filter and the like. The broadband light source, the array optical fiber filter and a first end of the optical fiber circulator are connected sequentially, a second end of the optical fiber circulator is connected to the optical fiber probe, the optical fiber probe emits the optical wave to the reflector surface and receives the reflected optical wave from the reflector surface, and a third end of the optical fiber circulator, the adjustable optical fiber filter, an optical fiber amplifier, an optical fiber spectrometer and a computer are connected sequentially.

Description

technical field [0001] The invention relates to an absolute distance precision measurement system, in particular to an all-fiber frequency-domain interference absolute distance measurement method and device with micro-nano resolution capability. Background technique [0002] As the first basic physical quantity in physics, distance (or length) has a wide range of uses in the fields of scientific and technological research, engineering applications, and instrument manufacturing. The measurement of distance involves a wide range of areas. Among them, precision distance measurement involves precision measurement. With microelectromechanical systems, etc., many physical quantities, such as acceleration, pressure and stress, can be detected indirectly by measuring distance and its changes. At present, inductive, grating, eddy current and scanning sensors are usually used for precision distance measurement. Inductive sensors have non-sliding contacts. Although they are not affect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 翁继东马鹤立陶天炯刘盛刚王翔陈宏戴诚达刘仓理吴强谭华李剑峰蔡灵仓王为叶素华汪小松贾路峰
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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