The invention discloses a
signal calibration method and
system for
semiconductor testing equipment, and relates to the technical field of
semiconductor testing, and the method comprises the steps: selecting a calibration port, controlling a
relay matrix to enable a source measurement channel, a time measurement channel and an electrical sensor to be connected to a same
Kelvin terminal, and carrying out the calibration of a calibration
signal; transmitting a calibration pulse
train, extracting a sending segment, an arrival segment and a
backflow segment, and obtaining a port
mirror image routing table and a baseline segment table; controlling the calibration pulse
train to execute commutation sending and polarity flipping along a path corresponding to the port
mirror image routing table, and comparing an arrival fragment, a
backflow fragment and a front and back edge sequence to obtain a commutation difference table and a polarity setting
code table; and the calibration pulse
train is controlled to enter the measured
branch and the reference straight-through
branch respectively, and single-stage trimming is carried out on the comparison judgment chain and the
delay unit chain. According to the invention, the measured
branch and the reference straight-through branch are compared in parallel, and the comparison judgment chain and the
delay unit chain are trimmed step by step, so that the measurement resolution of the
time parameter is remarkably improved.