Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

161 results about "Scanning beam" patented technology

Miniaturized oct package and assembly thereof

A chip package includes a housing, one or more electrical connections coupled to an exterior of the housing, a photonic integrated circuit, and a scanning unit. Both the photonic integrated circuit and the scanning unit are disposed within the housing. The photonic integrated circuit has at least one waveguide designed to guide a beam of light. The scanning unit is designed to laterally scan the beam of light across a focal plane outside of the housing. The scanning unit is aligned with the photonic integrated circuit such that the beam of light is coupled between the photonic integrated circuit and the scanning unit.
Owner:MEDLUMICS

Projection dimension reduction rapid calculation method and system for large-scale spherical column phased array scanning beam dynamic activation subarray plane

The invention discloses a projection dimensionality reduction rapid calculation method and system for a large-scale spherical column phased array scanning beam dynamic activation subarray plane, and belongs to the field of phased array measurement and control performance modeling, and the method comprises the steps: S1, setting parameters of a scheduling problem model; s2, acquiring orbit data of the aircraft, obtaining a visible time window set and calculating a visible arc section; s3, establishing a phased array resource set, and searching for an activated array element; and S4, establishing a large-scale phased-array antenna multi-beam scheduling objective function, and obtaining a final calculation result. According to the invention, the multi-beam measurement and control performance can be improved.
Owner:10TH RES INST OF CETC

Broadband interferometric confocal microscope

A scanning imaging method includes splitting an optical beam into a reference beam and a scanning beam, generating an interference map, and processing the interference map to produce a reconstructed image of a sample. Generating the interference map includes, for each of a plurality of sections of the sample, generating a respective interference-map element of the interference map by: (i) illuminating the section with the scanning beam to generate a plurality of scattered beams, each scattered beam corresponding to a respective spatial frequency of the scanning beam, (ii) attenuating the reference beam, (iii) generating a plurality of interference signals at least in part by interferometrically combining the plurality of scattered beams and the attenuated reference beam while modulating a phase difference between the reference beam and the plurality of scattered beams, and (iv) detecting the plurality of interference signals to yield the respective interference-map element.
Owner:UNIVERSITY OF ROCHESTER

High-throughput multi-row parallel high-speed scanning high-resolution microscopic imaging device and method based on adaptive optics

The invention discloses a high-throughput multi-row parallel high-speed scanning high-resolution microscopic imaging device and method based on adaptive optics. A spatial light modulator is used for carrying out pixel-level regulation and control on a light beam phase to generate a strip-shaped light spot, and a special arrangement mode of a detector array is used for realizing a one-to-many relationship between a scanning line and an imaging line and realizing improvement of an imaging speed, a signal-to-noise ratio of an imaging result and a resolution ratio; a full-digital area array wavefront regulation and control method is utilized, a spatial light modulator is used for rapidly and dynamically compensating a laser wave surface according to imaging result feedback, the laser wave surface is free of distortion, and the influence of aberration on an imaging result is reduced; designing a double telecentric Fourier transform structure capable of simultaneously keeping rotational symmetry of object plane and image plane light beams, and realizing distortionless mapping of scanning light beam quality and a linear signal system; a switchable design of two scanning modes is developed, high-flux, high-resolution and high-speed light field scanning is realized, and the advantages of large visual field, high resolution and high frame rate imaging are achieved.
Owner:ZHEJIANG UNIV

Real-time estimation method and system for adaptive signal-to-noise ratio of small-target radar

The invention provides a real-time estimation method and system for a small-target radar adaptive signal-to-noise ratio. According to the method, a motion model is established based on a historical trajectory of a maneuvering target, and a dynamic position prediction sequence is generated; acquiring a scanning beam pointing angle sequence and a timestamp echo signal intensity sequence; starting multiple rounds of iterative detection for each target position point in the prediction sequence, and shrinking a detection window bidirectionally until the boundary is smaller than the width of a beam half-power point; a signal intensity peak value and background noise intensity in a final iteration window are extracted, a beam irradiation efficiency factor is generated in combination with the spatial matching degree of the scanning beam directional angle sequence and the position prediction sequence, and a signal-to-noise ratio dynamic correction is cooperatively calculated; and weighting and fusing the correction, the signal peak value and the noise intensity, and outputting a final signal-to-noise ratio value of the maneuvering target in real time. According to the invention, the signal-to-noise ratio real-time estimation precision and stability of a small target radar when a high-speed maneuvering target passes through a beam edge are improved.
Owner:BEIJING ZHAOKE HENGXING SCI & TECH CO LTD

Communication method, device and system, computer program product and readable storage medium

The invention provides a communication method, device and system, a computer program product and a readable storage medium, and the method can be applied to a communication scene exemplarily. In the method, the terminal device can perform blocking sensing based on the variation of the pose data and the variation of the signal quality data, and reports the sensed whether the terminal device is blocked or not and the blocking sensing type under the blocked condition to the network device. Thus, the network device can perform beam adjustment according to the blocking sensing type reported by the terminal device, such as frequency band or bandwidth adjustment, or determine a small number of candidate scanning beams corresponding to the blocking sensing type to perform selection and switching of available beams. According to the method, the network equipment can quickly determine a small number of accurate candidate scanning beams according to the blocking sensing type, the overhead of full beam scanning is reduced, and beam recovery is quickly realized.
Owner:HONOR DEVICE CO LTD

Accurate spraying control method and device based on combination of laser scanning and neural network

The invention relates to the technical field of spraying control, and discloses a precise spraying control method based on combination of laser scanning and a neural network, and the method comprises the following steps: scanning an environment through a laser radar, dynamically adjusting the scanning harness density based on the real-time speed of equipment, and generating sparse sampling point cloud data; performing compressed sensing reconstruction on the sparse sampling point cloud data, inputting the reconstructed three-dimensional point cloud into a neural network model for target positioning, and outputting a three-dimensional coordinate of a target; calculating a spraying error of the current position of the equipment according to the three-dimensional coordinates; the invention further discloses a precise spraying control device based on combination of laser scanning and the neural network. The precise spraying control device comprises a laser scanning module, a data processing module, a control calculation module, an execution mechanism module and a feedback closed loop module. Through laser radar linkage regulation and control, neural network dynamic allocation and fractional order control, spraying precision improvement, response acceleration and resource optimization are realized.
Owner:BEIJING ZEHUIFENG FIRE TECH CO LTD

Time difference and angle measurement method and device for microwave navigation landing system and medium

The invention belongs to the technical field of radio metering detection, and particularly discloses a time difference and angle measurement method and device for a microwave navigation landing system and a medium, and the method comprises the steps: responding to a received barker code, obtaining reference time, and carrying out the time synchronization; obtaining a scanning pulse according to the scanning interval and the back-scanning interval; analyzing and extracting the A / D sampling signal according to the scanning pulse to obtain a forward scanning beam and a backward scanning beam in the scanning pulse; obtaining a scanning time difference according to the forward scanning beam and the backward scanning beam; according to the scanned time difference, analysis is carried out based on non-constant clock counting, and a time difference signal is obtained; obtaining MLS angle data based on preset space angle position coding data according to the time difference signal; the invention aims to solve the problems of weak anti-interference acting force and low angle guiding precision of a microwave navigation landing system in the prior art.
Owner:CHENGDU AIRCRAFT INDUSTRY GROUP

Three-unit leaky-wave antenna array structure based on dielectric ridge parallel plate waveguide and design method

The invention discloses a three-unit leaky-wave antenna array structure based on a dielectric ridge parallel plate waveguide, which comprises the following steps: S1, designing a three-unit array structure based on the coupling characteristic of the dielectric ridge parallel plate waveguide, and feeding a two-port array antenna in parallel by a probe; and S2, according to the product theorem of a directional diagram, determining the gap design of the three units according to the relationship between the gap size and the leakage amount, so as to design a scanning beam meeting the requirements of narrow lobe and high gain. The leaky-wave antenna array structure with the narrow beam and high gain characteristics is provided for the requirements of high signal strength and strong anti-interference performance in a long-distance point-to-point communication system, the antenna can provide better directivity and higher communication quality, and meanwhile it is guaranteed that the antenna has the advantages of being compact in structure and small in size; therefore, the method can be applied to wireless energy transmission systems such as a satellite communication system, a radar system and the Internet of Things.
Owner:BEIJING JIAOTONG UNIV

Shore wave parameter extraction method and shore wave height prediction method based on airborne static laser radar

The invention belongs to the technical field of ocean remote sensing, and particularly discloses a shore wave parameter extraction method and a shore wave height prediction method based on an airborne static laser radar. The problem that when a static laser radar scanner is used for scanning dynamic clapping shore waves, the periodic evolution form of the sea waves cannot be obtained is effectively solved. The parameter extraction method comprises the steps that an unmanned aerial vehicle is used for carrying a static laser radar scanner to collect data, the data are exported to be in a txt format, and geographic coordinates of point cloud, a scanning angle between a laser radar scanning beam and the direction perpendicular to the ground and relative time are obtained; sequencing the required data according to relative time, and slitting the sequenced data into a plurality of new txt files according to a self-defined time interval; extracting a wave beam from the txt file; de-noising and visualizing the data; and sea wave parameter extraction and environmental influence factor acquisition. According to the method, the beamwave beam state data of the self-defined time interval can be accurately captured, and the refined beamwave parameters can be effectively extracted.
Owner:SHANDONG UNIV OF SCI & TECH

A laser scanning device and a projection imaging apparatus

The present disclosure provides a laser scanning device and a projection imaging device, which realizes real-time compensation of the outgoing direction of the scanning beam by adding a hardware level distortion correction component and its control module after the reflection of the galvanometer. In the nonlinear distortion area such as the pillow-shaped distortion and the tilt distortion generated by the galvanometer scanning, the distortion correction component can accurately adjust the beam deflection angle according to the pre-calibrated correction parameter sequence, effectively restore the geometric shape of the scanning pattern, significantly improve the linearity of the point cloud distribution and the overall imaging accuracy, and complete the distortion correction of the full field of view without sacrificing the field of view angle or the resolution, thereby ensuring a wider effective imaging area and more delicate image details. By integrating a special distortion correction component in the optical path, the dependence on the upper image processing algorithm is reduced, the demand for high-performance controllers and complex software operations of the entire system is reduced, and better cost effectiveness and engineering implementation are achieved.
Owner:BEIJING OPTIX LTD

Laser scanning method and device, laser communication equipment and laser communication system

The embodiment of the invention provides a laser scanning method and device, laser communication equipment and a laser communication system. The laser scanning method comprises the steps that a pointing center point where a target object is located is determined according to ephemeris information of the target object; the rotation angles of a plurality of array elements in the transceiving array are controlled, so that light beams emitted by the array elements are subjected to incoherent superposition to form scanning light spots, and the light beams emitted by the array elements are obtained through deflection of incident light of the transceiving array; scanning in a preset range pointing to the center point by adopting the scanning light spot, and controlling the rotation angles of a plurality of array elements in the transceiving array to enable light beams emitted by the plurality of array elements to be coherently superposed to form a scanning light beam under the condition that the first position of the target object is scanned; and scanning the first position with the scanning beam to capture the target object. The non-coherently stacked scanning light spots are firstly used for coarse positioning, and then the coherently stacked scanning light beams are used for fine positioning, so that efficient, rapid and accurate capturing of the rapidly moving target is realized.
Owner:SHANGHAI SATELLITE NETWORK RESEARCH INSTITUTE CO LTD

Dynamic target control method and system based on dual-band OCT cooperative imaging

The invention belongs to the technical field of medical equipment. According to the dynamic target control method and system based on dual-band OCT cooperative imaging, a dual-band OCT cooperative scanning strategy is adopted, a patient is assisted in watching through a built-in fixation target during near-infrared preview, and fixation target parameters are recorded; a scanning target spot is generated during visible light preview adjustment, the position of the scanning target spot is adjusted through fixation target parameters, the exposure time of a patient under visible light is shortened, the dazzling feeling is reduced, and the comfort level of the patient is improved; in the formal scanning stage, the scanning light beam generates a dynamic scanning target spot and periodically stays at a fixed position to guide a patient to watch, the problem that visible light shields a built-in target is solved, and eyeball movement artifacts are effectively reduced.
Owner:SHANDONG UNIV

Jamming as a bistatic radar source

In one example, a bistatic radar receiver includes at least one first antenna configured to receive one or more jamming signals, a second antenna configured to point a scanning beam to detect one or more reflections of the one or more jamming signals from a target, and a signal processing subsystem coupled to the at least one first antenna and to the second antenna, the signal processing subsystem configured to process the one or more jamming signals and the one or more reflections to derive a range to the target from the one or more jamming signals and the one or more reflections.
Owner:BAE SYSTEMS INFORMATION ANDELECTRONIC SYSTEMS INTEGRATION INC

Radar angle measurement technical method using phased array

The invention discloses a radar angle measurement technical method using a phased array. The method comprises the following steps: (1) generating a scanning beam by using a phased array; used scanning beams comprise conventional beams, difference beams and other special beams; the difference beam is obtained by applying additional pi phase offset to one of two sub-arrays containing the same number of array elements; (2) performing integral operation on far-field distribution of the phased array to obtain integral far-field data; (3) scanning the target area, receiving a signal reflected by the target, and measuring the intensity of the reflected signal; and (4) calculating the width and the position of the target object according to the integral far-field data and the reflected signal intensity. According to the method, on the basis that the performance of a transmitting end device is not changed, the accuracy of object angle measurement is improved, meanwhile, the width information of the object is provided, and development of a more accurate and more reliable radar angle measurement technology is facilitated.
Owner:NANJING UNIV

Three-element leaky antenna array structure and design method based on dielectric ridge parallel plate waveguide

This invention discloses a three-element leaky wave antenna array structure based on a dielectric ridge parallel plate waveguide, comprising: S1, designing a three-element array structure based on the coupling characteristics of the dielectric ridge parallel plate waveguide, wherein the two-port array antenna is fed by probes in parallel; S2, determining the slot design of the three elements according to the pattern product theorem and the relationship between slot size and leakage, thereby designing a scanning beam that meets the requirements of narrow beamwidth and high gain. This invention is a leaky wave antenna array structure with narrow beamwidth and high gain characteristics proposed to meet the requirements of high signal strength and strong anti-interference in long-distance point-to-point communication systems. This antenna can provide better directivity and higher communication quality, while ensuring that the antenna has the advantages of compact structure and small size, thus it can be applied to wireless power transmission systems such as satellite communication systems, radar systems, and the Internet of Things.
Owner:BEIJING JIAOTONG UNIV

Laser scanning device of UAV-borne LiDAR for water depth measurement, LiDAR, and UAV

A laser scanning device of an UAV-borne LiDAR for water depth measurement, LiDAR, and an UAV are provided. In the laser scanning device, through synchronous driving of two motors, when the incident laser beam completes a 360° light spot scanning process by the rotation of a light-plane reflecting rotating mirror, and a scanning beam is in position ranges of 0°-X° and (360-X)°-360°, a photodetector protection assembly just rotates to an area with a light attenuation value of 0, or an occlusion-free area. Light echoes generated by the scanning beams in the ranges enter a photodetector without attenuation, while the scanning beam in the range of X°-(360-X°) is occluded by a notched circular shield, and stray light generated by the occlusion cannot enter the photodetector due to attenuation of a circular light attenuation sheet or occlusion of an unnotched part of the circular blocking sheet.
Owner:GUILIN UNIVERSITY OF TECHNOLOGY

A radar scanning device and method based on cascaded dual-phase plates

This invention discloses a radar scanning device and method based on cascaded dual-phase plates. The device includes: a laser generator, a first phase plate, and a second phase plate; the light output end of the laser generator is aligned with the first phase plate, and the laser generator is used to generate an initial light signal; the first phase plate has a first phase distribution etched on its side away from the laser generator, and the first phase plate is used to perform a first-level modulation processing on the received initial light signal to obtain a first light signal; the second phase plate has a second phase distribution etched on its side facing the first phase plate, and the second phase plate is used to perform a second-level modulation processing on the received first light signal to obtain a two-dimensional grating scanning beam; wherein, the first phase distribution and the second phase distribution are designed to generate a corresponding two-dimensional grating scanning beam based on the phase difference between them, thereby enhancing the flexibility and stability of the lidar scanning system.
Owner:SUN YAT SEN UNIV

Large field of view scanning method of laser radar based on liquid crystal phased array

The present invention discloses a large-field-of-view scanning method for a laser radar based on a liquid crystal phased array, comprising the following steps: expanding and deflecting a laser light source according to the aperture size of the liquid crystal phased array to obtain a target beam; phase-modulating the target beam using the liquid crystal phased array to achieve beam deflection, continuously changing the applied phase modulation to achieve annular scanning of the beam; reflecting the annular scanning beam using a conical reflector to achieve spatial transformation, thereby converting the circular scan into an arcuate scan and obtaining a preliminary large-field-of-view arcuate scan; reasonably setting the parameters of the conical reflector and the distance between the conical reflector and the liquid crystal phased array to filter out stray light such as grating lobes outside the scanning beam, thereby obtaining a final large-field-of-view arcuate scan. The present invention improves the scanning field of view of a phased array laser radar, filters out stray light such as grating lobes outside the scanning beam, and obtains high-quality large-field-of-view arcuate scans.
Owner:BEIJING INST OF TECH

X-Ray Detection Structure with a Plurality of Scintillator Volumes in a Spatially Periodic Arrangement

An x-ray detection structure includes a plurality of scintillator volumes in a spatially periodic arrangement, the plurality of scintillator volumes spaced from each other and forming a scan axis at which x-rays from a scanning beam of x-rays transmitted through a target can be received. The scintillator volumes produce scintillation photons responsive to receiving the x-rays. The structure also includes a wavelength-shifting fiber (WSF) ribbon optically coupled to the plurality of scintillator volumes along the scan axis. The WSF ribbon receives scintillation photons from the plurality of scintillator volumes as the scanning beam of x-rays scans and causes at least a subset of scintillator volumes to produce the scintillation photons. A multi-layer version of the structure, corresponding x-ray detection systems, and corresponding methods of manufacturing can be used to produce higher-resolution x-ray images in a compact detector with ease of manufacturability.
Owner:VIKEN DETECTION CORP

Near-field feed low-complexity reconfigurable antenna system

The invention provides a near-field feed low-complexity reconfigurable antenna system, which belongs to the technical field of millimeter wave communication antennas and comprises a 1-bit phased array, a waveguide feed horn array and an air gap between the 1-bit phased array and the waveguide feed horn array. The 1-bit unit is composed of two magnetoelectric dipoles, and two diodes are integrated in the receiving unit to achieve 1-bit phase control. According to the 1-bit reconfigurable magnetoelectric dipole phased array disclosed by the invention, one horn mouth surface is used as a near-field feed source of the 2 * 2 magnetoelectric dipole sub-array, so that not only is the uniformity of aperture irradiation ensured through near-field coupling, but also the number of required phase shifters is reduced, and the excitation of the 1-bit reconfigurable magnetoelectric dipole phased array is conveniently realized. The waveguide phase shifter is directly integrated in the horn array antenna, by means of the working phase range wide enough, the phase shifter can effectively achieve phase distribution needed by array near-field feed, and mirror lobes in scanning beams are successfully suppressed. The reconfigurable array antenna is high in aperture efficiency, low in profile and simple in structure, and has the broadband scanning capability.
Owner:BEIJING JIAOTONG UNIV

Sample size detection method and device, computer equipment and storage medium

The invention relates to the technical field of automatic detection, in particular to a sample size detection method and device, computer equipment and a storage medium. The method comprises the following steps: controlling a detection antenna to perform beam scanning on a to-be-detected communication sample, and acquiring a reflection beam of the to-be-detected communication sample for a scanning beam in the beam scanning process; generating a mapping relation between a beam amplitude corresponding to the communication sample to be detected and a candidate scanning angle according to the reflected beam; determining a beam scanning angle corresponding to the to-be-detected communication sample according to the mapping relation; and determining the sample size of the to-be-detected communication sample according to the beam scanning angle and the vertical distance between the to-be-detected communication sample and the detection antenna. According to the invention, on the premise that the detection precision is ensured, low-cost size detection of the to-be-detected communication sample is realized, the detection efficiency of the to-be-detected communication sample is improved, and the investment cost required for size detection of the to-be-detected communication sample is reduced.
Owner:CHINA TELECOM CORP LTD TECHNOLOGY INNOVATION CENTER +1

Electron particle beam imaging device and wafer defect detection method

The present application discloses an electron particle beam imaging device and a wafer defect detection method. The electron particle beam imaging device includes an emitting unit, a first converging unit, a second converging unit and two deflection units. The emitting unit is used to emit a particle beam. The first converging unit is arranged downstream of the emitting unit, and the first converging unit is used to converge the particle beam to form a converged beam. The second converging unit is arranged downstream of the first converging unit, and is used to form the converged beam into a fine beam spot. The two deflection units are sequentially arranged downstream of the first converging unit, and each deflection unit is used to change the direction of particle movement. Each deflection unit includes a first deflector responsive to a first excitation source and a second deflector responsive to a second excitation source. The first excitation source and the second excitation source are turned on in opposite states, so that the converged beam emitted by the first converging unit passes through the action of the two first deflectors or the two second deflectors to obtain a scanning beam inclined relative to the surface of the sample to be tested.
Owner:DONGFANG JINGYUAN ELECTRON LTD

Miniature stress detector and stress detection method

The invention relates to a miniature stress detector, which comprises a light emitting assembly, a detection head and a light receiving assembly, and is characterized in that the light emitting assembly is used for providing a scanning light beam for the detection head; the detection head is used for scanning the surface of the to-be-detected target after receiving the scanning light beam and generating a polar Kerr effect on the surface of the to-be-detected target; and the optical receiving assembly is used for receiving an optical signal fed back by the detection head under the polar Kerr effect and converting the optical signal into stress in the target to be detected. A stress detection method is provided. According to the invention, a light system is constructed by combining the light emitting assembly and the light receiving assembly, so that the detection head can detect the stress in a to-be-detected target by using the polar Kerr effect, the explosion risk is eliminated by using a non-electromagnetic sensing technology, the lift-off effect is overcome by using optical locality measurement, the size of the probe is reduced, and the detection precision is improved. An intrinsically safe and high-precision technical means is provided for rapid stress state scanning in a high-risk environment, and the safety of high-value targets in key industrial fields such as electric power, petrochemical engineering and aerospace is guaranteed.
Owner:WUHAN INST OF TECH

Laser scanning device, terminal equipment and automobile

The present invention relates to the field of laser radar technology, and in particular to a laser scanning device, terminal equipment and automobile, including a laser, a collimating lens, a MEMS galvanometer and an angle-expanding lens group; the angle-expanding lens group includes at least a first lens group and a second lens group, both of which are telecentric field mirrors and are confocal; the MEMS galvanometer is arranged on the light-emitting side of the collimating lens, and is used to deflect and reflect the collimated light beam to form a scanning light beam; the first lens group is used to focus the scanning light beam to form a first focused light beam; the second lens group is used to collimate and expand the first focused light beam, so that the first focused light beam is gathered at the exit end of the laser scanning device into an expanded-angle collimated light spot. The present invention effectively reduces the size of the laser radar and the size of the exit light surface while expanding the scanning angle through processing methods such as angle expansion and collimation, thereby reducing the overall size of the laser radar and improving the compactness and stability of the system.
Owner:PIONEER ORIGINAL (SHANGHAI) NEW TECHNOLOGY RESEARCH CO LTD

Method for producing at least one object in layers, with step-by-step updating of the coordinate transformation of scanners

A method for producing an object in layers by locally solidifying a pulverulent material includes scanning N high-energy beams simultaneously with N scanners, providing exposure data of a machining pattern in a reference coordinate system, converting the exposure data in the reference coordinate system into exposure data in a scanner coordinate system by using a programmed coordinate transformation, sending the exposure data in the scanner coordinate system to the associated scanner so that the associated scanner exposes the machining pattern in the respective layer, repeatedly taking measurements to determine current actual coordinate transformations of at least N−1 scanners, and updating the programmed coordinate transformations for the at least N−1 scanners, taking into account the current actual coordinate transformations. Multiple updates of the programmed coordinate transformations of the at least N−1 scanners are performed between two successive determinations of the current actual coordinate transformations.
Owner:TRUMPF LASER & SYSTEMTECHNIK GMBH

Same-frequency co-polarization full-duplex common-aperture planar multi-beam antenna unit and phased array thereof

The invention relates to a co-frequency co-polarization full-duplex common-aperture planar multi-beam antenna unit and a phased array thereof. The antenna unit is sequentially provided with a first metal layer, a first dielectric substrate, a metal supporting layer, a second metal layer, a second dielectric substrate, a third metal layer, a bonding layer dielectric substrate, a fourth metal layer, a third dielectric substrate, a fifth metal layer and a connector fixing metal layer from top to bottom; the metalized shielding hole, the first feed metal through hole and the second feed metal through hole are respectively connected with the second metal layer, the third metal layer, the fourth metal layer and the fifth metal layer; the antenna units are sequentially arranged along the transverse axis and the longitudinal axis to form subarrays of 5 * 5 antenna units, the four subarrays are sequentially and rotationally arranged to form a phased array of 2 * 2 subarrays, a phased array of a circularly polarized planar antenna unit with the scale of 10 * 10 antenna units is formed, and the phased array has the same-frequency same-polarization full-duplex independent two-dimensional beam scanning capacity.
Owner:SOUTHEAST UNIV

Electron particle beam imaging device and wafer defect detection method

ActiveCN119470526AImplement defect detectionMaterial analysis using wave/particle radiationParticle beamWafer
The invention discloses an electron-carrying particle beam imaging device and a wafer defect detection method, the electron-carrying particle beam imaging device comprises an emission unit, a first convergence unit, a second convergence unit and two deflection units, the emission unit is used for emitting a particle beam; the first convergence unit is arranged at the downstream of the emission unit, and the first convergence unit is used for converging the particle beam to form a converged beam; the second convergence unit is arranged at the downstream of the first convergence unit and is used for forming the concentrated beam into a fine beam spot; the two deflection units are sequentially arranged at the downstream of the first convergence unit, each deflection unit is used for changing the moving direction of particles, and each deflection unit comprises a first deflector responding to the first excitation source and a second deflector responding to the second excitation source; wherein the opening states of the first excitation source and the second excitation source are opposite, so that a concentrated beam emitted by the first convergence unit is subjected to the action of the two first deflectors or the two second deflectors to obtain a scanning beam inclined relative to the to-be-detected surface of the sample.
Owner:DONGFANG JINGYUAN ELECTRON LTD

Scanning compensation method, system and electronic equipment based on vibration relaxation

The present application provides a scanning compensation method, system and electronic device based on vibration relaxation, including: based on a start positioning signal, generating a positioning action instruction; based on the positioning action instruction, controlling the movement of the workpiece stage and judging whether it moves to the vibration compensation range; when the workpiece stage moves to the vibration compensation range, controlling the workpiece stage to move in the form of a vibration of a preset vibration relaxation model to determine the first position deviation during the movement of the workpiece stage; based on the first position deviation, generating a scanning compensation signal; performing electron beam scanning based on the scanning compensation signal, the scanning compensation signal drives the electron beam to move relative to the workpiece stage during the electron beam scanning process. The scanning compensation method based on vibration relaxation of the present application reduces the image quality degradation problem caused by vibration relaxation in electron beam scanning imaging by optimizing the positioning process of the workpiece stage, improves the scanning image resolution, and improves the imaging speed and the overall production capacity of the equipment.
Owner:FUDAN UNIVERSITY +1

All-solid-state two-dimensional light beam scanning system based on assistance of structured light generator

The invention particularly relates to an all-solid-state two-dimensional light beam scanning system based on assistance of a structured light generator. The all-solid-state two-dimensional light beam scanning system comprises an optical phased array, a lens device and the structured light generator. The optical phased array is used for performing phase modulation on an input laser beam and outputting a one-dimensional scanning beam distributed based on a first direction; the lens device is arranged on a transmission path of an output light beam of the optical phased array and is used for shaping the one-dimensional scanning light beam and outputting the shaped one-dimensional scanning light beam; wherein the shaped one-dimensional scanning light beam forms a circular light spot on the structured light generator; and the structured light generator is arranged on a transmission path of the light beam output by the lens device and is used for shaping and collimating the one-dimensional scanning light beam output by the lens device and outputting structured light distributed based on the first direction and the second direction. The system can output a two-dimensional solid-state scanning light beam, and the light beam quality of structured light is effectively ensured.
Owner:NORTHWESTERN POLYTECHNICAL UNIV