The present application belongs to the field of scanning
electron detection imaging, and relates to a deflection detection
system, a deflection detection method and a
scanning electron microscope. A
Wien filter is arranged in the
electron lens
barrel of the present application. The
Wien filter is excited by an alternating
signal to generate a deflection
electric field and a deflection
magnetic field which are perpendicular to each other. The
electric field force and the
magnetic field force generated by the
Wien filter are opposite to the main
electron beam going downward, and the
electric field force and the
magnetic field force generated by the Wien filter are the same as the secondary electron going upward, so as to form an off-axis
resultant force. The alternating
excitation signal of the Wien filter is configured to be synchronous with the
grating scanning
signal of the deflector, and the frequency and the phase are maintained in a specific relationship. When the main electron beam scans to the center of the row / frame, the
excitation signal is enhanced, and when the main electron beam scans to the edge of the row / frame, the
excitation signal is weakened. The present application solves the problem that the
signal electrons near the
optical axis miss the
detector, reduces the coverage requirement of the
detector, solves the contradiction between the sampling frequency and the
field of view, improves the signal-to-
noise ratio of the image, and improves the imaging rate or the
detection rate.