The invention relates to the technical field of
spectral analysis, and discloses a miniaturized spectrum
sensing system and method based on MEMS raster scanning, and the
system comprises an optical input module which is used for receiving to-be-measured light; the collimating optical element is used for collimating the light to be measured to form parallel light beams; the MEMS
grating scanning micromirror is used for carrying out dispersion light splitting on the parallel light beams; the focusing optical element is used for focusing the incident light to form to-be-measured optical signals with different wavelengths; the unit
infrared detector is used for converting an optical
signal to be measured into an
electric signal; and the
signal processing module extracts the intensity of the to-be-measured optical
signal based on the
electric signal, identifies the
wavelength of the to-be-measured optical signal corresponding to the
electric signal, binds the
wavelength and the intensity of the to-be-measured optical signal, and draws a
spectrogram. According to the invention, the micro-nano
optical surface is integrated by using the micro-electro-
mechanical system, and the high-performance unit
infrared detector is combined, so that high-precision and miniaturized measurement of the
infrared spectrum is realized, and the anti-error capability of raster scanning is improved.