The invention relates to the field of
fluorine chemical processes, in particular to a
molybdenum hexafluoride sampling device and method. The device comprises a
molybdenum hexafluoride steel cylinder, an
inert gas
steel cylinder, a buffer
bottle, a first-stage absorption
bottle, a second-stage absorption
bottle and a third-stage absorption bottle, the absorption liquid is filled into the three-stage absorption bottle and is weighed, the pipeline is vacuumized and replaced after the three-stage absorption bottle is connected, the absorption bottle is purged, and the buffer bottle is vacuumized. The method comprises the following steps: heating a
molybdenum hexafluoride steel cylinder, filling the molybdenum hexafluoride steel cylinder into a buffer bottle, filling
inert gas, introducing the
inert gas into an absorption bottle for absorption, purging a pipeline, weighing the absorption bottle, and detecting
metal impurities by using ICP-OES (
Inductively Coupled Plasma-
Optical Emission Spectrometer). According to the method, the problem that
metal impurities in high-purity molybdenum hexafluoride are difficult to safely and accurately sample is solved, and a reliable and practical solution is provided for purity
quality control of the key material molybdenum hexafluoride in the fields of semiconductors,
nuclear industry and the like.