Vertical probes (901, 1001, 1101, 1201, 1301, 1301P, 1401, 1501), formed of at least one layer that longitudinally includes a first and a second end and a central portion, with the central portion including at least three compliant arms wherein each of the two outer arms (931A, 931B, …, 1531A, 1531B) include a first material having a first yield strength and the intermediate arm (921, …, 1521) is formed of a second material having a second yield strength less than the first yield strength.