27 results about "Multi beam" patented technology

We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.

The invention discloses an underwater multi-beam coaxial wire feeding machining head protection device and method, and belongs to the technical field of underwater laser machining. The device comprises a local dry area creating unit, an optical fiber sealing unit, a wire drawing unit and a wire feeding sealing unit. The local dry area creating unit forms a local dry area underwater through an air curtain ejected from the bottom of the drainage cover; the optical fiber sealing unit adopts a glue injection sealing structure to realize reliable cabin-penetrating sealing of multiple paths of optical fibers in a high-pressure water environment; the wire drawing unit is integrated with a heating coil and can conduct on-line preheating and dehumidification on welding wires. The wire feeding sealing unit achieves dynamic sealing of welding wires through a multi-stage pressing sealing structure. The sealing problem of the optical fiber and the wire feeding channel in underwater coaxial wire feeding machining is solved, real coaxial conveying of the welding wire and the laser beam is achieved, and the quality reliability and the environment adaptability in the machining processes of underwater laser cladding, welding and the like are effectively improved.

The invention discloses a square array synchronous spiral light beam generation method. In a traditional method, due to the fact that topological charges of adjacent vortexes in square array vortexes generated by multiple light beams are opposite, the vortexes do not have the same direction and are not completely synchronous. According to the invention, a twelve-beam plane wave interference scheme is adopted, and the twelve-beam plane wave interference scheme comprises outer side quasi-symmetric eight-beam plane waves and inner side symmetric four-beam plane waves. Through accurate control of light beam parameters, a square array single-helix light beam with a synchronization characteristic and a square array double-helix light beam with a synchronization characteristic are generated. The method provides a new technical scheme for the application of the spiral beam array.

The system and method for optimizing collection efficiency of secondary charged particles includes a multi-beam inspection device (104) configured to scan (226) a sample (230) and including a lens (242), a detector (244) configured to receive multiple secondary charged particle beams (236, 238, 240) in response to the scanning of the sample, and a controller (296) including circuitry communicatively coupled to the multi-beam inspection device and the detector, wherein the controller is configured to: focus the lens to adjust a size of a secondary beam spot, where the secondary beam spot is formed on the detector by the multiple secondary charged particle beams; for each secondary charged particle beam of the multiple secondary charged particle beams, prevent stray charged particles of each secondary charged particle beam from being detected by the detector; and refocus the lens to adjust a current of a portion of the multiple secondary charged particle beams detected by the detector, where the stray charged particles do not contribute to the current.

The invention relates to a multi-beam pattern definition device for use in a particle-beam processing or inspection apparatus, said device being adapted to be irradiated with a beam of electrically charged particles and allow passage of the beam through a plurality of apertures thus forming a corresponding number of beamlets, said device comprising an aperture array device in which at least two sets of apertures are realized, an opening array device located downstream of the aperture array device having a plurality of openings configured for the passage of beamlets, said opening array device comprises impact regions, wherein charged impinge upon said impact regions.

PURPOSE: To provide a multi-beam image generating device and a multi-beam image generating method, which generates multiple primary electron beams, irradiates a sample with these while moving the sample, detects the multiple electron beams emitted at this time, and combines them into a single image, thereby quickly acquiring images.CONSTITUTION: A system includes a multiple beam generating device, means for irradiating a sample with multiple primary electron beams, means for detecting electrons emitted or reflected from the sample and outputting multiple electron beam images, a stage for acquiring images by repeatedly moving and stopping the sample, and an interferometer for measuring in real time the position of the stage in the direction of movement and the position perpendicular to the direction, and is configured to combine image information of the multiple output electron beams into a single image on the basis of position information obtained by a laser interferometer of a common image that overlaps between the image information.SELECTED DRAWING: Figure 1

The invention relates to the field of wind power generation, in particular to a wind turbine generator yaw static error correction method and system based on a multi-beam laser radar. The method comprises the following steps: S1, scanning a wind field area in front of an impeller of a generator set through a multi-beam wind measurement laser radar mounted in a cabin of the wind turbine generator set to obtain parameter information of a plurality of spatial points; s2, performing fitting calculation on the parameter information system to obtain a fitting circle representing a horizontal wind vector of the wind field area, and solving the fitting circle to obtain a free flow wind direction; s3, the free flow wind direction is compared with the current cabin orientation, and a real-time static yaw error angle is obtained through calculation; generating a yaw control instruction according to a preset control strategy; s5, solving and calculating the fitting circle to obtain a transverse wind component, and correcting the yaw control instruction; according to the method, the control instruction is generated through the control strategy to drive the yaw system to perform dynamic compensation, so that the wind turbine generator can continuously maintain the optimal windward attitude, and the stability and long-term effectiveness of control are ensured.

This utility model relates to a multi-beam center-feed laser head, which includes a base, a wire feeding gun tube inserted at the center of the base, a wire feeding nozzle connected to the lower end of the wire feeding gun tube, and an air hole on the outer periphery of the bottom of the wire feeding gun tube. A protective gas channel is formed around the wire passing through the inner cavity of the wire feeding gun tube. An air cavity is formed around the lower section of the wire feeding gun tube at the center of the base, and the air cavity communicates with the air hole. The wire feeding gun tube can not only transport wire but also transport protective gas, eliminating the need for an additional protective gas pipeline in the laser head. It has a compact structure and is easy to install and maintain.

The invention relates to the technical field of gas analysis, in particular to a multi-beam and multi-lane laser automobile exhaust detection method and system.The method comprises the following steps that multi-lane multi-beam transmission signals are collected, time alignment is carried out to construct reference transmission intensity, and absorption peak position and peak width characteristics are extracted in combination with temperature conversion; according to the method, the plume state is estimated according to peak width expansion, the weight is adjusted, space mapping and segmented integration are carried out in combination with the vehicle speed and the optical path, and a vehicle exhaust detection result is output through iterative convergence under residual constraint. According to the method, peak position and peak width changes are depicted by combining temperature conversion and absorbance spectral line parameter extraction, weight distribution is formed according to peak width expansion and fluctuation threshold values, space mapping and segmented integration are completed by combining vehicle speed and optical path, iterative convergence is carried out under residual constraint, and diffusion difference and time migration influence is inhibited to improve result consistency.

This invention relates to an interferometric phase demodulation method and system based on a high-reflection-order Fabry-Perot (FP) optical microphone. The system includes a broadband light source, a beam splitting module, an optical path guiding module, an FP optical microphone, an optical path compensation module, an optical intensity adjustment module, a 3x3 fiber coupler, a photoelectric detection module, and a signal demodulation module. This invention suppresses multi-beam interference within the microcavity through cavity length matching; simultaneously, it employs co-source beam splitting and utilizes the optical path compensation module to cancel the physical path difference between the sensing arm and the reference arm. Furthermore, it selectively matches high-order return light using the optical intensity adjustment module, followed by demodulation. This effectively suppresses reflection interference and achieves common-mode noise cancellation, significantly improving the sensitivity, anti-interference capability, and measurement dynamic range of the high-order FP sensor. It is suitable for high-precision monitoring of weak acoustic waves in complex and harsh environments such as transformer oil.

The invention discloses an intelligent compact shelf obstacle judgment device and method, the device comprises a plurality of groups of infrared light bars and a compact shelf, the compact shelf is provided with the plurality of groups of infrared light bars, and each group of infrared light bars at least comprises a group of multi-beam transmitters and a group of multi-beam receivers. The shell of the multi-beam transmitter and the shells at the two ends of the multi-beam receiver are tetragonal prism tubes; the device further comprises a first detection system, a second detection system and a third detection system, a plurality of guide rails are arranged at the bottom of the movable column in the horizontal direction, the fixed column is an immovable frame column, and the movable column is a frame column capable of freely moving along the guide rails. The first detection system comprises a group of infrared columns, a multi-beam transmitter of the first detection system is arranged in a movable column, and a multi-beam receiver of the first detection system is arranged in a fixed column; the second detection system comprises a group of infrared columns; a multi-beam transmitter of the second detection system is arranged in a fixed column, and a multi-beam receiver of the second detection system is arranged in a movable column; and the third detection system comprises a group of infrared light bars.

The present invention relates to a multi-beam particle microscope and related method with fast autofocus near an adjustable working distance. A system is proposed that includes one or more fast autofocus correction lenses for high-frequency adaptation of the focus, position, angle of incidence, and rotation of individual particle beams at incidence on the wafer surface during wafer inspection. Fast autofocus in secondary paths of the particle beam system is also feasible. Accuracy can be further improved by fast aberration correction means in the form of deflectors and / or astigmatism correctors.

The application provides a GLV multi-beam direct writing path planning method and system for holographic anti-counterfeiting, and the method comprises the following steps: acquiring model analysis depth information and discretizing the model analysis depth information into an initial feature matrix; evaluating a thermal diffusion cumulative amount to establish a physical threshold model, performing truncation and energy compensation on a dense area exceeding the threshold to generate a thermal equilibrium distribution matrix; extracting residual energy features of a splicing overlap area, constructing a semi-variance function to generate a spatial variation convolution kernel for smoothing operation to generate a reference exposure control sequence; establishing and solving a compensation model related to power, speed and depth to generate a control sequence snapshot; and collecting an instantaneous mechanical speed matching snapshot in real time to drive direct writing. The application effectively improves the machining precision and restoration degree of the holographic anti-counterfeiting topography.

The application provides a GLV multi-beam direct writing path planning method and system for holographic anti-counterfeiting, and the method comprises the following steps: acquiring model analysis depth information and discretizing the model analysis depth information into an initial feature matrix; evaluating a thermal diffusion cumulative amount to establish a physical threshold model, performing truncation and energy compensation on a dense area exceeding the threshold to generate a thermal equilibrium distribution matrix; extracting residual energy features of a splicing overlap area, constructing a semi-variance function to generate a spatial variation convolution kernel for smoothing operation to generate a reference exposure control sequence; establishing and solving a compensation model related to power, speed and depth to generate a control sequence snapshot; and collecting an instantaneous mechanical speed matching snapshot in real time to drive direct writing. The application effectively improves the machining precision and restoration degree of the holographic anti-counterfeiting topography.

Example implementations include a method and apparatus for operating a smoke detector, comprising a first beam emitter and a second beam emitter. The first beam emitter may be configured to: (i) radiate a first beam in a first direction toward a first reflecting element, and (ii) receive a first reflection of the first beam from the first reflecting element. The second beam emitter may be configured to: (i) radiate a second beam in a second direction toward a second reflecting element, wherein the first direction is different than the second direction, and (ii) receive a second reflection of the second beam from the second reflecting element.

To increase a marking speed by keeping the beam width of a multibeam constant without depending on a beam scanning direction.SOLUTION: A first beam splitter configured to split a laser beam into a main beam and a sub beam, a sub beam scanning unit including a plurality of two mirror pairs configured to scan the sub beam, a second beam splitter configured to transmit the main beam and reflect the sub beam, a main beam scanning unit configured to scan a print target with a multibeam including the main beam and the sub beam having passed through the second beam splitter, and a controller configured to control operations of the sub beam scanning unit and the main beam scanning unit, the sub-beam scanning unit is controlled so that the main beam and the sub-beam are arranged side by side in the scanning direction of the changing multibeam.SELECTED DRAWING: Figure 3

The present invention belongs to the technical field of suspended matter concentration measurement, and in particular to a method for measuring suspended matter concentration with multi-beam compensation adjustment, comprising the following steps: Step 1, equipping a plurality of light sources, wherein the plurality of light sources adopt tunable lasers and are respectively marked as λ1, λ2, ..., λ n , an adjustment mechanism is set up and installed on the shore of the water body to control multiple light sources to irradiate the water body through the optical path system. The suspended solids concentration measurement method with multi-beam compensation adjustment, the multi-beam compensation adjustment method of the present invention effectively solves the measurement error problems caused by ambient light interference, sensor surface contamination and other interference factors in the water body in the traditional measurement method. By introducing multiple light beams and combining them with compensation algorithms, the error problem existing in the traditional single-beam measurement method is effectively solved. The device adopts a multi-beam optical path design, irradiates the water body with light beams of different angles and wavelengths, and comprehensively calculates the transmittance and scattering information of each light beam to accurately calculate the concentration of suspended solids in the water body.

Systems and methods are provided for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus. Embodiments of the present disclosure provide a dispersion device comprising an electrostatic deflector and a magnetic deflector configured to induce a beam dispersion set to cancel the dispersion generated by the beam separator. The combination of the electrostatic deflector and the magnetic deflector can be used to keep the deflection angle due to the dispersion device unchanged when the induced beam dispersion is changed to compensate for a change in the dispersion generated by the beam separator. In some embodiments, the deflection angle due to the dispersion device can be controlled to be zero and there is no change in primary beam axis due to the dispersion device.

The invention discloses a multi-beam mask defect detection system and method based on de-scanning synchronization, and relates to the technical field of mask defect detection. Comprising the following steps: S1, collecting pixel light intensity data of sub-beams in real time, and carrying out data preprocessing; s2, establishing a direct corresponding relation between a mask scanning track and a detector imaging track through a de-scanning synchronous imaging mode, acquiring corresponding axial detection information at the same time, and determining independent imaging blocks of the sub-beams; s3, carrying out consistency evaluation on the imaging state of each sub-beam, and judging and marking the imaging state of the scanning period; and S4, carrying out block-level image splicing on the scanning period which is judged to be in an imaging consistent state, and carrying out comprehensive positioning on the position of the mask defect in combination with axial detection information. The problems of imaging dislocation and unreliable positioning caused by dependence on system clock synchronization in multi-point confocal mask defect detection under a high-speed scanning condition are solved.

The invention discloses a multi-beam dynamic pointing and communication method and system based on a phase-type spatial light modulator, and belongs to the field of communication, and the method comprises the steps: obtaining a low-sidelobe phase base kernel of a central single beam through employing an iterative holographic algorithm at an offline stage; in the on-line stage, a linear phase carrier is calculated according to the target angle and the power weight of each beam, the linear phase carrier and a base kernel are subjected to complex field superposition, the phase is taken, complex plane inter-frame smoothing and gray-phase LUT quantization are combined, the carrier is continuously loaded to an SLM, and therefore independent and smooth dynamic pointing of multiple beams is achieved with low calculation overhead. In order to suppress inter-beam interference fringes, a fixed small random phase is introduced; in order to improve the stability, double-buffer refreshing is adopted, and the method is low in complexity, high in frame rate, easy in engineering deployment and suitable for free space one-to-many laser communication, light beam pointing, scanning imaging and other scenes.

The invention discloses a safety grating real-time monitoring system and method based on multi-beam synchronous scanning, and the system comprises a pedestal, a main housing, a photoelectric emitter, a photoelectric receiver, a controller, and a rotation driving mechanism, the pedestal is provided with a plurality of vertical mounting holes in an up-down penetrating manner, and the top end is provided with a plurality of vertical positioning holes; the left portion and the right portion of the base are each connected with a sliding seat in a left-right sliding mode, and the two sliding seats are each provided with a supporting piece. The main shells can be rotated through the rotary driving mechanism, so that the angle of the two main shells relative to the base is changed, namely, the angle of a light curtain emitted by the photoelectric emitter relative to the base can be changed, and meanwhile, the projection distance of the light distance on the front plane and the projection distance of the light distance on the horizontal plane are changed due to the change of the angle; therefore, the monitoring requirement of an object from the front-back direction or the up-down direction is met.

The invention relates to a device for focusing a photon beam into a material. The device comprises: means for splitting the photon beam into a plurality of component beams; means for focusing the component beams at a predetermined focal depth within the material; and means for adapting the wavefronts of the component beams based at least in part on the focal depth.

A high-precision detection system for ocean optical parameters based on a wedge-shaped cavity. A collimating optical unit focuses and shapes the laser radar echo signal into a parallel beam. An interference narrowband filter removes background light mixed in the signal, and the transmitted signal is separated into horizontally polarized and vertically polarized components by a polarization beam splitter. A point detector detects the echo power of the vertically polarized component. A multi-beam interference discriminator generates multi-beam interference for the horizontally polarized component, forming a light and dark linear spectrum. A beam shaping unit shapes the light and dark linear spectrum, and a high-sensitivity detector array uses linear array channels to detect the spectral shapes of the elastic and inelastic spectra. An integrated control and data processing unit uses the echo power detection results of the point detector to calculate the diffuse attenuation coefficient and uses the spectral shapes of the elastic and inelastic spectra to calculate the 180° backscattering coefficient of the water body. This invention can solve the problem of overlapping elastic and inelastic scattering spectra, improving the inversion accuracy of optical parameters such as the water backscattering coefficient.

The application discloses a micro-displacement measurement system and method based on a reflecting sphere F-P cavity, a low-precision F-P cavity is constructed by using a reflecting sphere, so that a response curve of the F-P cavity to a wavelength is close to a sinusoidal curve, and multi-beam reflection in a ranging light path is eliminated. By using the technical scheme, the problem that high reflectivity of two reflecting surfaces of an F-P cavity in the prior art leads to multi-beam interference and causes measurement error can be solved; meanwhile, measurement precision and sensitivity are improved, and high-precision nanometer-level micro-displacement measurement in a large working range can be met.

PURPOSE: To relate to a multi-beam image generating device and a multi-beam image generating method that rapidly acquire images by generating multiple primary electron beams while maintaining a sample in a horizontal position, irradiating the sample with these beams while moving the sample, separating the multiple secondary electron beams with a beam splitter, detecting information on respective images with an electron detection device to synthesize a single image.CONSTITUTION: A multi-beam image generating device includes a multiple beam generating device, a beam splitter, an objective lens, a deflection system, a projection lens, a stage, and height measuring means, and is configured to make multiple primary electron beams incident on the axis of the objective lens via the beam splitter while the stage is maintained horizontal on the basis of the sample height output from the height measuring means, radiate the finely focused primary electron beam and scan with the deflection system, make secondary electrons emitted from the sample incident on the axis of the projection lens via the beam splitter, and form images to output image information of the multiple electron beams.SELECTED DRAWING: Figure 19