457 results about "Optical intensity" patented technology

The invention discloses a particle size measuring device based on combination of a dynamic light scattering method and a sedimentation method and a measuring method thereof. The particle size measuring device comprises a laser, a light intensity adjusting unit, a sample pool, a thermostatic bath, a PD detector, an optical fiber head, an APD detector, a data acquisition unit, a PC and a control unit. The laser emits incident laser, the incident laser passes through the light intensity adjusting unit, penetrates through the sample cell and a sample and then enters the PD detector, and a transmission light signal is collected through the data acquisition unit and transmitted to software for calculating the particle size and concentration of settled large particles; scattered light is received by an optical fiber head with a fixed angle of 90 degrees or 160-175 degrees and is converted into a digital signal by an APD detector, and the digital signal enters a data acquisition unit and is transmitted to software for calculating the particle size of particles in a non-settling nanometer range. According to the technical scheme provided by the invention, the particle size distribution information of the wide-distribution particle dispersion system in a nano-micron range can be measured in a testing process.

The invention relates to the technical field of new energy power plant construction data processing, in particular to a construction site personnel track recognition system based on a two-dimensional code, which adopts laser etching to dynamically encrypt a two-dimensional code label, and improves the weather resistance of the label in a salt fog environment through a salt-dredging nano coating and antistatic packaging. And a double-fixing structure combining the elastic binding band and the magnetic fastener is suitable for high-strength operation scenes. Industrial-grade scanning base stations are deployed in a construction area in a gridding mode, three-dimensional coordinate data are captured through a multi-base-station cooperative scanning mechanism, high-reflection interference of photovoltaic panels is eliminated through a signal intensity difference algorithm, and a de-noising coordinate set is generated. The closed-loop calibration module corrects scanning angle offset and earth surface reflection weight parameters through a three-level check link, the environment adaptation module triggers an ultrasonic multi-frequency cleaning program to maintain optical performance, and the cooperative control unit adjusts the light supplementing intensity and the data fusion proportion in a linkage mode. Accurate identification of personnel tracks and multi-working-plane dynamic management and control in a complex environment are realized.

The invention discloses a peanut oil impurity detection method based on image recognition analysis, and relates to the technical field of computer vision, and the peanut oil impurity detection method comprises the following steps: carrying out impurity targeted marking on an oil sample; adopting dual-wavelength laser to excite the oil sample subjected to impurity target marking, synchronously acquiring a fluorescence image, and marking the coordinates of a suspicious composite impurity region by utilizing an FRET fluorescence intensity ratio; metal impurities and fiber impurities are distinguished according to the plasma formant position, and nanoscale impurity morphology data are formed; detecting unmarked transparent nanoparticles, triggering surface acoustic wave assisted detection, and outputting impurity motion feature codes; inputting the FRET fluorescence intensity ratio, the nanoscale impurity morphology data and the impurity motion trail features into a graph neural network classifier based on an attention mechanism, and performing joint interpretation on impurity types; and sorting and filling the oil sample according to an impurity classification result. The comprehensive performance of impurity detection is remarkably improved through a multi-mode sensing cooperation mechanism.

The invention provides an intrinsic solid-state ion diffusion coefficient test method and device based on optical imaging, and relates to the technical field of solid-state ion test.The method comprises the steps that a test sample is pretreated; carrying out a photoelectric test on the test sample; placing the electrochemical cell in an optical imaging system, connecting the electrochemical cell with an electrical testing system, applying a constant voltage deviating from a steady state to the monodisperse electrode plate, collecting the real-time change condition of the material under the modulation of the constant voltage in real time through an industrial camera, and outputting relational data of optical intensity and time; analyzing the diffusion path through in-situ characterization equipment, and obtaining an ion diffusion path corresponding to the to-be-detected ion battery electrode material particles in combination with dynamic information provided by an optical imaging system; and determining the characteristic time according to the relational data of the optical intensity and the time, and determining the intrinsic solid ion diffusion coefficient corresponding to the test sample by combining the characteristic time and the ion diffusion path corresponding to the to-be-tested ion battery electrode material particles.

The invention relates to a phase-sensitive optical time domain reflectometer based on multi-frequency reference switching. Continuous laser generated by a continuous laser is divided into a local path and a detection path through an optical coupler; the local path is input to the polarization coherent receiving module, the detection path is incident to a light intensity modulator driven by the signal generation circuit module, and the light intensity modulator is converted into a multi-frequency pulse laser sequence with intensity modulation; the multi-frequency pulse laser sequence enters the sensing optical fiber to be measured through the optical circulator; generated Rayleigh backscattered light and local continuous laser are subjected to beat frequency coherent receiving in a polarization coherent receiving module through a circulator; and the signal acquisition circuit adopts a demodulation algorithm to compensate phase drift and sensitivity difference of detection pulse demodulation signals with different frequencies so as to realize dynamic strain sensing. Compared with the prior art, the phase drift and the sensitivity difference between the frequencies are extracted to realize the compensation of the interleaved signals, and the method does not depend on the fixed reference frequency, so that the robustness and the adaptability of the system in a complex environment are remarkably enhanced.

The invention relates to the technical field of large-scale structure measurement, and discloses a robot laser vision three-dimensional scanning measurement system for a large-scale structural member. The system comprises a robot motion platform, a laser vision sensing module, an ambient light sensing module, a point cloud processing module and a motion control module, wherein the laser vision sensing module is arranged at the tail end of the robot motion platform. The ambient light sensing module collects ambient light intensity distribution data in real time, and the motion control module combines the data with three-dimensional model data of the large-scale structural member to be measured to generate a multi-view dynamic scanning path instruction. The robot motion platform executes an instruction to drive the laser vision sensing module to move, the module projects laser stripes to the surface of a to-be-measured structural member and synchronously collects an image, the point cloud processing module performs adaptive filtering processing on the image and then generates three-dimensional point cloud data, and the requirement for efficient and accurate measurement of a large structural member in a complex industrial environment can be met.

The invention relates to a phase-sensitive optical time domain reflectometer based on a parallel frequency division multiplexing sequence. Continuous laser is divided into a local path and a detection path through an optical coupler; the local path is input to the polarization coherent receiving module, the detection path is converted into a pulse laser sequence with intensity modulation through a light intensity modulator driven by a radio frequency signal provided by the signal generation circuit module, and the radio frequency signal is composed of two frequency division multiplexing sequences with difference; the pulse laser sequence enters the sensing link to be measured to generate Rayleigh backscattered light, and the Rayleigh backscattered light and local continuous laser are subjected to beat frequency coherent receiving through a circulator; and the signal acquisition circuit is used for sampling and analyzing the interference signal, and performing frequency domain comparison on an interleaving result of the two frequency division multiplexing pulse sequences to eliminate a harmonic frequency and retain a real strain signal frequency. Compared with the prior art, the non-harmonic strain signal measurement is realized, the high-frequency response performance and the high-precision strain measurement capability are excellent, and meanwhile, the long-distance coverage capability is also realized.

Disclosed is a detection device for laser spot welding micro-weld spot quality based on laser ultrasound, comprising: a nanosecond pulsed laser configured to emit a laser; a half-wave plate configured to generate a phase difference of the laser; a scanning galvanometer configured to focus the laser as a point source and excite an ultrasonic wave on a surface of a sample; a multi-axis displacement platform configured to place and / or move the sample; a laser Doppler vibrometer configured to emit a probe light; an image sensor configured to acquire image data of the sample in a plurality of attitudes; an optical filter configured to receive the probe light to adjust an intensity of the probe light; and a processor configured to be in communication connection with the image sensor, the optical filter, the nanosecond pulsed laser, the scanning galvanometer, the multi-axis displacement platform, and the laser Doppler vibrometer.

The invention provides a spectrograph based on a fast adjustable filter, the spectrograph comprises the fast adjustable filter, a photoelectric detector, a data acquisition card and a spectrum reconstruction module which are connected in sequence, the fast adjustable filter successively filters spectral components of different wavelengths in the working bandwidth of the spectrograph in sequence, and after each filtering, the spectral components of different wavelengths in the working bandwidth of the spectrograph are obtained. The photoelectric detector detects an optical signal with corresponding light intensity and converts the optical signal into an electric signal, and when the wavelength of the filtered spectral component is within the wavelength range of the to-be-detected light, the light intensity of the optical signal and the current of the electric signal are reduced; the data acquisition card performs current acquisition on each electric signal in sequence to obtain a to-be-measured current vector; the spectrum reconstruction module reconstructs the light spectrum to be measured according to the collected current vector to be measured and a pre-stored spectrum transmission matrix. The spectrograph is high in detection speed, small in size and simple in detection method.

The invention provides an intrinsic solid-state ion mobility testing method and device based on optical imaging, and relates to the technical field of performance testing of solid-state ion electrolyte materials.The method comprises the steps that a test sample pool is assembled; performing a power-on test on the test sample pool; extracting size information of solid electrolyte powder particles to be detected from the optical image; extracting a time-varying curve of the optical intensity of the solid electrolyte powder particles to be detected from the optical image, and determining time information of the optical response of the particles from beginning to balance in the voltage variation process based on the curve; determining the electric field intensity under the test condition according to the magnitude of the applied voltage and the total thickness of the thin-layer insulating substrate; and determining the intrinsic ion mobility of the solid electrolyte powder particles to be detected according to the size information, the time information and the electric field intensity.

The invention discloses a real-time visual processing method and system based on ESN-CV coprocessing, and relates to the technical field of visual processing, and the method comprises the steps: firstly, synchronously collecting a camera image and road surface humidity data of a physical sensor, and extracting an image reflection intensity distribution matrix as a visual feature; then humidity time sequence data and visual features are input into an echo state network, a dynamic weight coefficient matrix is generated through spatio-temporal feature fusion, the dynamic weight coefficient matrix is injected into a predefined convolutional layer of a target detection network, kernel weight parameters are adjusted in an element-by-element superposition mode, and the feature extraction capacity of a high-sensitivity area is enhanced. And after a detection result is output, the system triggers closed-loop feedback through a confidence coefficient deviation value: when the deviation exceeds a limit, the actual offset is calculated by combining a high-precision map, an error correction vector is generated, the state of the ESN reserve pool is updated by utilizing a Hadamard product, and the weight generation logic of the next frame is optimized in real time.

The invention relates to the technical field of aeroengine turbine blade thermodynamic performance testing, in particular to a two-dimensional multi-mode turbine blade heat-flow double-field synchronous testing method and system.The method comprises the steps that phosphorescent particles are evenly scattered in an experimental flow field of a target turbine blade, and after the phosphorescent particles are excited through double lasers, the target turbine blade is subjected to heat-flow double-field synchronous testing; collecting a flow field image; inverting a temperature field by using a phosphorescence intensity ratio method based on the flow field image, and calculating a velocity field through an improved PIV algorithm; and after time-space registration is carried out on the temperature field data and the velocity field data, fusion is carried out to generate a composite heat-flow field, dynamic coupling characteristics are analyzed through a vortex center tracking algorithm, and the heat-flow double-field synchronous test of the target turbine blade is completed. Through ultraviolet / PIV dual-laser excitation, multispectral separation acquisition and high-precision data fusion, time-space synchronous measurement of the temperature field and the velocity field of the boundary layer of the turbine blade is realized.

The invention belongs to the field of greenhouse film aging test methods, and relates to an aging test device considering greenhouse film stress and a test method thereof.The aging test device comprises an upper environment box, a lower environment box, a test observation box and a control panel which are arranged on a main frame, a support plate and an observation platform are arranged in the test observation box, and a greenhouse film fixing frame is arranged above the support plate and the observation platform; an arc-shaped arch frame is arranged in the greenhouse film fixing frame, a flexible film pressing rope is arranged at the top of the greenhouse film fixing frame, and the two ends of the greenhouse film fixing frame are connected with a rotary tensioning device at an end plate of the greenhouse film fixing frame and a force sensor at an end plate of the other opposite end of the greenhouse film fixing frame respectively. Tension needed in the test process can be accurately adjusted and applied before the test is started through the rotary tensioning device and the force sensor, if an electric tensioning actuator is used, greenhouse film stress can be compensated and calibrated in real time in the test process, and other environmental parameters such as temperature, humidity and ultraviolet light intensity can be further adjusted. And a multi-environmental factor interaction test of the greenhouse film in a natural curved surface and stress state is realized.

This application relates to the field of liquid crystal displays, and discloses a method and system for optimizing the dynamic contrast of a liquid crystal display screen, including the following steps: By collecting the ambient light intensity and backlight module temperature parameters in real time, and combining with the analysis of the image content entropy value, a non-uniform backlight partition grid is dynamically generated; Based on hardware parameters such as the refractive index of the light guide plate and the LED spacing, a physical model of brightness diffusion is constructed, and an improved particle swarm algorithm with temperature adaptability is used to solve the optimal brightness of each partition; The driving voltage is generated through piecewise non-linear gamma mapping and inverse function iterative calculation to adapt to the non-linear response characteristics of the backlight module; The diffusion equation and optimization calculation are executed in parallel by a hardware accelerator, and the model parameters are dynamically adjusted in combination with the feedback of the optical sensor to form a closed-loop control link. Through the dynamic partitioning adapted to the environment, the optimization algorithm driven by the physical model, and the real-time processing accelerated by the hardware, the present invention comprehensively improves the contrast performance and dynamic scene adaptability of the display screen.

The invention discloses a scenic area cultural relic and historic site intelligent protection and monitoring system based on edge calculation, and relates to the technical field of cultural relic intelligent monitoring, and the system comprises a multi-mode sensing module which is used for being deployed in the surrounding environment and body of a cultural relic and historic site and comprises a temperature and humidity sensor, a micro-vibration sensor, an optical image sensor and an ultraviolet intensity sensor; the edge computing node terminal is used for receiving the acquired data of the multi-mode sensing module, performing environment monitoring, image processing and vibration spectrum analysis according to the acquired data, and generating a state monitoring signal; the cloud collaboration platform is connected with the edge computing node terminal through a communication link and is used for data storage and analysis; and the safety alarm terminal is used for receiving the state monitoring signal from the edge computing node terminal and triggering a corresponding action. According to the method, the limitation of a traditional cultural relic protection means is broken, real-time and intelligent cultural relic and historic site protection work is realized, and the protection effect is remarkably improved.

The invention provides a broadband linear frequency modulation microwave source based on ultra-short external cavity modulation light feedback, and relates to the field of microwave photonics. Continuous light generated by the main semiconductor laser is injected into the slave laser after being adjusted, so that the slave laser works in a periodic oscillation state; the slave laser, the electro-absorption modulator and the reflector are integrated to form an ultra-short outer cavity, and the intensity of feedback light is regulated and controlled by an external signal source so as to realize linear scanning of cavity mode frequency. After beam splitting of light output from the laser, one path forms a long external cavity feedback stable signal through the adjustable optical fiber delay line, and the other path outputs a target signal after beat frequency of the photoelectric detector and filtering of the band-pass filter. A high-speed modulator and a high-frequency microwave source are not needed, the broadband advantage of a photonics scheme is reserved, the frequency sweeping bandwidth is further improved to 60 GHz or above, the center frequency and the frequency sweeping range are independently adjustable, the structure is simple, cost is low, integration is easy, and the device is suitable for scenes such as photoelectric radars.

An exemplary method of monitoring a bath process includes processing a first wafer by submerging the first wafer within a bath solution; capturing a video of the bath solution containing the first wafer during a first time interval; analyzing the video based on intensity of light captured in a frame of the video; and based on analyzing the video, determining a first metric of the bath solution during the first time interval.

The invention relates to a laser processing system (1) having at least one laser source (3, 4) for generating a plurality of mutually independent laser intensity distributions (5, 6). The laser processing system (1) comprises a control device (7) for controlling the laser power levels (P1, P2, 13, 14) and / or the beam quality levels (K1, K2, 14, 16) of the laser intensity distributions (5, 6) independently of one another. The laser processing system (1) is designed to vary the laser power levels (P1, P2, 13, 15) and / or the beam quality levels (K1, K2, 14, 16) of the laser intensity distributions (5, 6) differently from one another within each laser pulse by means of the control device (7). The invention also relates to a corresponding method for processing material (2) by means of corresponding laser radiation (5, 6).

The invention discloses a visual tactile sensor gradient calibration method and device based on deep learning and a medium, and the method comprises the steps: obtaining sensor image information of a preset ball pressed on a target touch film of a visual tactile sensor to be calibrated, inputting the sensor image information into a pre-trained deep learning segmentation model, obtaining a ball contact area of the target touch film; coordinate values and RGB values of all points in the ball contact area are determined, and gradient information of all the points in the ball contact area is calculated according to the radius of a preset ball; constructing a training data set according to the coordinate values, the RGB values and the gradient information, and training according to the training data set to obtain a gradient recognition model; and calibrating a mapping relationship between the RGB light intensity of each point on the target touch film and the gradient according to the gradient recognition model. The visual tactile sensor gradient calibration efficiency and accuracy are improved, and the method can be widely applied to the technical field of artificial intelligence.

The application belongs to the field of scintillator material preparation, and particularly relates to a manganese-based pixelated scintillator array and a preparation method and application thereof. The (BuTPP)2MnBr4 scintillator material in a molten state is filled into a quartz glass cavity by capillary action, and a glass scintillator matrix is formed by cooling and quenching; then, in-situ crystallization is realized in the glass scintillator by using femtosecond laser direct writing processing, and a pixelated array is precisely constructed. The in-situ crystallization induced by the femtosecond laser significantly improves the photoluminescence intensity and the radiation luminescence intensity of the material, effectively solves the problems of low luminescence efficiency, high pixelation processing difficulty and poor crystallization controllability of the traditional glass scintillator, and the prepared pixelated scintillator array has stable optical performance and clear pixel boundary, is suitable for X-ray imaging, radiation detection and the like, and has simple preparation process and strong controllability of parameters, thereby providing a new implementation method for the preparation of arrayed X-ray scintillators.

The application relates to the technical field of intelligent analysis of power transmission lines, and particularly discloses a multi-objective cooperative video online monitoring and intelligent analysis system for power transmission lines. The system comprises: a buffer construction module for constructing an independent image buffer; a phase alignment module for extracting an optical intensity evolution waveform to obtain a time delay amount, and resampling a video to generate a feature point sequence; a flashover positioning module for extracting a synchronous highlight two-dimensional coordinate and solving a physical space coordinate; a coverage analysis module for constructing an expansion bounding volume, performing spatial analysis on the expansion bounding volume and a cylindrical envelope obtained by geometric dimension reduction of a power transmission line model, and obtaining an erosion coverage area; and a directional cooperation module for driving a pan-tilt camera to perform high-resolution rephotographing based on the solved physical coordinate and the erosion area. The system is beneficial to reducing multi-camera asynchronous and parallax problems, and realizing three-dimensional positioning of arc transient discharge of the power transmission line and quantification of a damaged range of equipment.

The application provides a phase-sensitive optical time domain reflectometer, a measurement method and a readable storage medium, wherein a signal generation circuit of the phase-sensitive optical time domain reflectometer is configured to generate a radio frequency signal to drive an optical intensity modulator to modulate probe light, so that two groups of frequency division multiplexing sequences with differences can be used to synchronously detect a sensing optical fiber to be measured, a differential unfolding algorithm is combined to accurately solve a phase change amount in adjacent sampling intervals, and then demodulation results corresponding to different frequency parts are respectively unfolded to obtain unfolded phase results, so that the problem of large strain phase folding is solved and a large strain range is recovered, and further, the unfolded phase results are rearranged and combined in time sequence through time sequence interleaving processing of the unfolded phase results, so that a high sampling rate and a distortion-free reconstruction result are reconstructed, and therefore, the application can realize accurate measurement of high frequency response and large strain range dynamic strain.

The application relates to an optical fiber gas sensing device, a method and a cable joint partial discharge judgment system, wherein the optical fiber gas sensing device comprises: an oscillation module for performing oscillation frequency selection processing on optical signals of different wavelengths to obtain target bandwidth optical signals; an optical intensity detection module connected with the oscillation module, used for obtaining the light wave intensity change amount of the target bandwidth optical signals after the target bandwidth optical signals in a sensing gas chamber contact with the collected target gas from a cable joint; and a judgment module connected with the detection module, used for judging that the cable joint is in a partial discharge fault state when the light wave intensity change amount is equal to or greater than a preset partial discharge fault change amount. Thus, the optical fiber gas sensing device realizes rapid detection of the partial discharge fault of the cable joint, effectively improves the operation reliability of the cable joint, ensures the normal state of the power equipment, and further guarantees the power supply reliability of the power system.

The utility model provides a kind of optical intensity adjustable optical filter switching device, belong to filter production technical field, including support assembly, including base, the support table of rotation connection in base end part, the support rod of fixed connection in support table end part and the connecting column of fixed connection in support table center;Switching assembly, including fixed mounting in the connecting piece of connecting column end part, hinged in the connecting piece end part link, the extension rod of insertion in link end part, the clamping block of fixed connection in the extension rod end part and the filter frame body of clamping in the clamping block end part.The utility model has the beneficial effects of: realize the flexible control of filter in three-dimensional space, can be adapted to the optical path demand of different light source, different detection equipment, expand applicable scene, shorten filter switching time, can be quickly completed filter loading and unloading, without other auxiliary tools, improve the efficiency of multiple filter alternate test.Auxiliary lamp panel provides standard light source, without external device can be completed filter light transmission performance test.

The present invention discloses an efficient multi-step lithography method using an improved Golomb equal-length coding algorithm, comprising the following steps: Step 1: obtaining a lithography experimental condition m value based on the minimum exposure intensity and the outputtable maximum exposure intensity of the lithography experimental condition; Step 2: performing Golomb division transcoding on the grayscale value of a grayscale image representing the step depth according to the m value to obtain a first segment of equal-length coding; Step 3: calculating the m value and the grayscale value of the grayscale image using the Golomb compression coding rule to obtain a second segment of equal-length coding; Step 4: concatenating the first segment of coding and the second segment of coding to obtain a Golomb code; Step 5: performing a binary horizontal slice of the Golomb code to obtain a bit plane binary image; Step 6: sequentially exposing the binary image containing the first segment of coding at m times the exposure intensity, and exposing the binary image containing the second segment of coding at an exposure intensity twice as high as the adjacent segment of coding. The present invention can reduce the number of exposures to obtain a greater number of steps, thereby improving work efficiency.

An α-Ga2O3 semiconductor film according to the present invention has a measurement point (dark spot) with a maximum emission intensity A of not more than 0.6 times the average value X of top 5% of the maximum emission intensities A at all measurement points in intensity mapping of plane cathodoluminescence, wherein the maximum emission intensity A at each measurement point is determined in the wavelength range of 250 to 365 nm.

The invention discloses a device and a method for testing frequency domain characteristics of a high-speed optoelectronic device. The device comprises a laser, a sawtooth wave generator, a signal source, an acousto-optic modulator, an electro-optic intensity modulator, a low-frequency photoelectric detector, a frequency spectrograph and a computer. An electro-optic intensity modulator is driven through a sawtooth wave modulation technology, and frequency-shifted and non-frequency-shifted optical carriers and frequency-shifted and non-frequency-shifted radio frequency optical sidebands are synchronously generated in an optical path in combination with radio frequency signal modulation. And after the signal is subjected to beat frequency processing by the photoelectric detector, the power of the frequency shift signal in different working states is measured by the frequency spectrograph, so that the frequency domain characteristic parameters of the photoelectric device to be measured are obtained. The method is based on sawtooth wave modulation and an amplitude comparison method, frequency domain response characteristics of a single / dual-drive electro-optic intensity modulator, dual-parallel electro-optic intensity modulation and a photoelectric detector can be accurately represented, the test method is simple, and dependence on a high-frequency test instrument is effectively reduced.

Some embodiments of the present disclosure provide an image sensor, including a substrate, a plurality of first photodiodes, a first color filter unit and a first light intensity distributor. The first photodiodes are in the substrate. The first color filter unit is over the substrate. The first color filter unit includes a top-left region, a top region, a top-right region, a left region, a center region, a right region, a bottom-left region, a bottom region, and a bottom-right region over the first photodiodes, respectively. The first light intensity distributor is over the first color filter unit, in which the first light intensity distributor includes a plurality of first nanopillars configured to converge light to the center region or disperse light from the center region, and the center region has a highest or a lowest optical intensity.

The utility model belongs to the technical field of optical instruments, and particularly relates to an optical tweezer optical path module and a cell optimization system. The optical tweezer optical path module comprises a supporting base, a laser head mounting seat and a multi-stage attenuation module. The laser head mounting seat is arranged on the supporting base and is used for mounting a laser emitting head for emitting laser; and the multi-stage attenuation module is arranged on the supporting base and comprises a plurality of reflection attenuation mirror groups which are arranged on the light path at intervals, and each reflection attenuation mirror group is used for attenuating the laser intensity and changing the laser direction. The optical tweezer optical path module provided by the utility model has a multi-attenuation mechanism, and a relatively large attenuation multiple range is easier to realize, so that laser power adjustment in a relatively large range is realized, the laser power dynamic adjustment capability is favorably improved, the laser intensity is finely controlled, and cells are not damaged when various cells are fixed through an optical trap formed by laser.

To provide an onium salt used for a chemically amplified resist composition excellent in solvent solubility, having high sensitivity and high contrast and excellent in lithography performance such as LWR, CDU, MEF, EL and DOF in photolithography using high energy rays, a chemically amplified resist composition containing the onium salt as a photoacid generator, and a pattern forming method using the chemically amplified resist composition.SOLUTION: An onium salt having the formula (1): SELECTED DRAWING: None