The invention discloses a
semiconductor scheduling method based on dynamic priority and
reinforcement learning decision, relates to the technical field of
semiconductor manufacturing scheduling, and aims to solve the problems of low
utilization rate, delivery
delay and poor dynamic adaptability of traditional scheduling equipment. The method comprises the following steps: fusing equipment space topology and process dependence, and generating a
machine family low-dimensional coding vector; constructing a 13-dimensional
dynamic feature vector, standardizing the 13-dimensional
dynamic feature vector, inputting the standardized 13-dimensional
dynamic feature vector into a strategy network consisting of a multi-head
attention network and a feedforward network, and outputting a real-time priority; a
reinforcement learning framework is constructed based on event driving, and the network is optimized through a three-level
machine distribution rule, a negative penalty reward function and a natural
evolution strategy. According to the invention, equipment load balancing and scheduling intelligent
adaptation are realized, the equipment
utilization rate is effectively improved, the
wafer batch tardiness and
completion time are reduced, and the method is suitable for a complex dynamic
semiconductor manufacturing scene.