The application discloses a
noise reduction circuit, a power supply circuit, a readout circuit and a detection circuit, and relates to the field of MEMS
interface circuits, which is used to reduce the low-
frequency noise of a MEMS sensor interface circuit. The power supply circuit comprises a
charge pump circuit and a
noise reduction circuit, and the
noise reduction circuit comprises a
reference noise suppression circuit and a
charge pump noise suppression circuit. The input end of the
reference noise suppression circuit is used for connecting a
clock signal, a power supply, a reference
voltage and a feedback
voltage, the output end is connected to the ground through a
capacitor C1, and the output end outputs a second
voltage. The
power supply voltage of the
charge pump noise suppression circuit is used for connecting a first voltage to be reduced, the input end is connected to the second voltage, and the output end respectively outputs a third voltage and the feedback voltage. The application reduces the low-
frequency noise transmitted by the high-voltage feedback
driving circuit and the charge pump circuit in the MEMS sensor interface circuit, and improves the measurement accuracy of the MEMS sensor.